FR2650892B1 - Capteur d'humidite capacitif et procede de fabrication d'un tel capteur - Google Patents

Capteur d'humidite capacitif et procede de fabrication d'un tel capteur

Info

Publication number
FR2650892B1
FR2650892B1 FR909010121A FR9010121A FR2650892B1 FR 2650892 B1 FR2650892 B1 FR 2650892B1 FR 909010121 A FR909010121 A FR 909010121A FR 9010121 A FR9010121 A FR 9010121A FR 2650892 B1 FR2650892 B1 FR 2650892B1
Authority
FR
France
Prior art keywords
sensor
manufacturing
capacitive moisture
moisture sensor
capacitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR909010121A
Other languages
English (en)
Other versions
FR2650892A1 (fr
Inventor
Lars Stormbom
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vaisala Oy
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Publication of FR2650892A1 publication Critical patent/FR2650892A1/fr
Application granted granted Critical
Publication of FR2650892B1 publication Critical patent/FR2650892B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
FR909010121A 1989-08-11 1990-08-08 Capteur d'humidite capacitif et procede de fabrication d'un tel capteur Expired - Lifetime FR2650892B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI893797A FI84862C (fi) 1989-08-11 1989-08-11 Kapacitiv fuktighetsgivarkonstruktion och foerfarande foer framstaellning daerav.

Publications (2)

Publication Number Publication Date
FR2650892A1 FR2650892A1 (fr) 1991-02-15
FR2650892B1 true FR2650892B1 (fr) 1992-12-11

Family

ID=8528837

Family Applications (1)

Application Number Title Priority Date Filing Date
FR909010121A Expired - Lifetime FR2650892B1 (fr) 1989-08-11 1990-08-08 Capteur d'humidite capacitif et procede de fabrication d'un tel capteur

Country Status (6)

Country Link
US (1) US5075816A (fr)
JP (1) JP2938531B2 (fr)
DE (1) DE4023778C2 (fr)
FI (1) FI84862C (fr)
FR (1) FR2650892B1 (fr)
GB (1) GB2234820B (fr)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI98567C (fi) * 1993-09-29 1997-07-10 Vaisala Oy Impedanssianturi, etenkin radiosondikäyttöön, sekä menetelmä anturin valmistamiseksi
FI92439C (fi) * 1993-09-29 1994-11-10 Vaisala Oy Sähköisesti ilmaistu impedanssianturi fysikaalisten suureiden, etenkin lämpötilan tai kosteuden, mittaamiseksi sekä menetelmä kyseisten anturien valmistamiseksi
US6452776B1 (en) * 2000-04-06 2002-09-17 Intel Corporation Capacitor with defect isolation and bypass
JP4501320B2 (ja) * 2001-07-16 2010-07-14 株式会社デンソー 容量式湿度センサ
US6724612B2 (en) 2002-07-09 2004-04-20 Honeywell International Inc. Relative humidity sensor with integrated signal conditioning
WO2004063806A1 (fr) * 2003-01-09 2004-07-29 Polyic Gmbh & Co. Kg Platine ou substrat pour un appareil electronique organique et utilisation de ladite platine
DE10338277A1 (de) * 2003-08-20 2005-03-17 Siemens Ag Organischer Kondensator mit spannungsgesteuerter Kapazität
DE10339036A1 (de) 2003-08-25 2005-03-31 Siemens Ag Organisches elektronisches Bauteil mit hochaufgelöster Strukturierung und Herstellungsverfahren dazu
DE10340643B4 (de) * 2003-09-03 2009-04-16 Polyic Gmbh & Co. Kg Druckverfahren zur Herstellung einer Doppelschicht für Polymerelektronik-Schaltungen, sowie dadurch hergestelltes elektronisches Bauelement mit Doppelschicht
DE10340644B4 (de) * 2003-09-03 2010-10-07 Polyic Gmbh & Co. Kg Mechanische Steuerelemente für organische Polymerelektronik
DE102004002024A1 (de) * 2004-01-14 2005-08-11 Siemens Ag Organischer Transistor mit selbstjustierender Gate-Elektrode und Verfahren zu dessen Herstellung
DE102004040831A1 (de) 2004-08-23 2006-03-09 Polyic Gmbh & Co. Kg Funketikettfähige Umverpackung
DE102004059465A1 (de) 2004-12-10 2006-06-14 Polyic Gmbh & Co. Kg Erkennungssystem
DE102004063435A1 (de) 2004-12-23 2006-07-27 Polyic Gmbh & Co. Kg Organischer Gleichrichter
KR20060084160A (ko) * 2005-01-19 2006-07-24 레시너코리아 주식회사 정전용량형 누수 감지센서
DE102005009819A1 (de) 2005-03-01 2006-09-07 Polyic Gmbh & Co. Kg Elektronikbaugruppe
DE102005009820A1 (de) 2005-03-01 2006-09-07 Polyic Gmbh & Co. Kg Elektronikbaugruppe mit organischen Logik-Schaltelementen
DE102005017655B4 (de) 2005-04-15 2008-12-11 Polyic Gmbh & Co. Kg Mehrschichtiger Verbundkörper mit elektronischer Funktion
JP4860793B2 (ja) * 2005-05-19 2012-01-25 株式会社日本自動車部品総合研究所 湿度センサの製造方法
DE102005031448A1 (de) 2005-07-04 2007-01-11 Polyic Gmbh & Co. Kg Aktivierbare optische Schicht
DE102005035589A1 (de) 2005-07-29 2007-02-01 Polyic Gmbh & Co. Kg Verfahren zur Herstellung eines elektronischen Bauelements
DE102005044306A1 (de) 2005-09-16 2007-03-22 Polyic Gmbh & Co. Kg Elektronische Schaltung und Verfahren zur Herstellung einer solchen
US20120228109A1 (en) * 2011-03-08 2012-09-13 Ibiden Co., Ltd. Sensor, keyboard and method for manufacturing sensor
DE102011086479A1 (de) * 2011-11-16 2013-05-16 Robert Bosch Gmbh Integrierter Feuchtesensor und Verfahren zu dessen Herstellung
AU2013204540A1 (en) * 2013-03-12 2014-10-02 Warner, Shane Charles MR Detecting moisture and/or termites.
CN105502282B (zh) * 2015-11-30 2017-05-31 上海集成电路研发中心有限公司 一种mems湿度传感器的制造方法
CN109690302B (zh) * 2016-09-30 2022-07-19 美蓓亚三美株式会社 湿度传感器
JP6770238B2 (ja) * 2017-03-31 2020-10-14 ミツミ電機株式会社 湿度センサ
JP2020047776A (ja) * 2018-09-19 2020-03-26 国立研究開発法人産業技術総合研究所 気体透過型コンデンサ素子、センサ素子、及び、それらを用いた計測方法。

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1264142A (fr) * 1959-06-23 1961-06-19 élément sensible à l'humidité, utilisable dans un hygromètre
US3574681A (en) * 1966-03-31 1971-04-13 Texas Instruments Inc Aluminum oxide humidity sensor
DE1764548C3 (de) * 1968-06-25 1978-12-14 Siemens Ag, 1000 Berlin U. 8000 Muenchen Verfahren zur Herstellung eines elektrischen Schichtkondensators
FR2142573B1 (fr) * 1971-06-21 1973-05-25 Commissariat Energie Atomique
US4164868A (en) * 1972-10-12 1979-08-21 Vaisala Oy Capacitive humidity transducer
US4156268A (en) * 1977-08-29 1979-05-22 Longwood Machine Works, Inc. Humidity sensing element and method of manufacture thereof
DE2848034A1 (de) * 1978-11-06 1980-05-14 Siemens Ag Kapazitiver feuchtefuehler
FR2486656A1 (fr) * 1980-07-09 1982-01-15 Commissariat Energie Atomique Hygrometre capacitif
FR2498329A1 (fr) * 1981-01-19 1982-07-23 Commissariat Energie Atomique Hygrometre capacitif a dielectrique mince et son procede de fabrication
FI65674C (fi) * 1982-12-21 1984-06-11 Vaisala Oy Kapacitiv fuktighetsgivare och foerfarande foer framstaellningdaerav
US4761710A (en) * 1987-06-23 1988-08-02 Industrial Technology Research Institute Polyimide capacitive humidity sensing element
NL8803223A (nl) * 1988-12-30 1990-07-16 Flucon Bv Capacitieve vochtsensor.

Also Published As

Publication number Publication date
JPH0387642A (ja) 1991-04-12
GB2234820B (en) 1994-06-22
DE4023778C2 (de) 2003-08-21
US5075816A (en) 1991-12-24
FR2650892A1 (fr) 1991-02-15
GB9017034D0 (en) 1990-09-19
FI893797A0 (fi) 1989-08-11
FI84862B (fi) 1991-10-15
DE4023778A1 (de) 1991-02-14
FI84862C (fi) 1992-01-27
JP2938531B2 (ja) 1999-08-23
GB2234820A (en) 1991-02-13
FI893797A (fi) 1991-02-12

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