JP4860793B2 - 湿度センサの製造方法 - Google Patents
湿度センサの製造方法 Download PDFInfo
- Publication number
- JP4860793B2 JP4860793B2 JP2006102397A JP2006102397A JP4860793B2 JP 4860793 B2 JP4860793 B2 JP 4860793B2 JP 2006102397 A JP2006102397 A JP 2006102397A JP 2006102397 A JP2006102397 A JP 2006102397A JP 4860793 B2 JP4860793 B2 JP 4860793B2
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- JP
- Japan
- Prior art keywords
- heat treatment
- humidity sensor
- humidity
- treatment step
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
- G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
1 (半導体)基板
2 絶縁膜
3 保護膜
4 高分子膜(ポリイミド、感湿膜)
5a,5b 電極
Claims (5)
- 高分子膜からなる感湿膜を有する湿度センサの製造方法であって、
基板上に塗布された高分子膜を、ガラス転移温度以上で熱処理する第1熱処理工程と、
前記第1熱処理後の高分子膜を構成するポリイミドが加水分解するように、90%RH以上の雰囲気湿度の下、ガラス転移温度以下である60℃以上、150℃以下の温度、200時間以上、1000時間以下の時間で熱処理する、第2熱処理工程とを有することを特徴とする湿度センサの製造方法。 - 前記第2熱処理工程における熱処理時間が、500時間以上、1000時間以下であることを特徴とする請求項1に記載の湿度センサの製造方法。
- 前記第2熱処理工程における熱処理温度が、60℃以上、90℃以下であることを特徴とする請求項1又は請求項2に記載の湿度センサの製造方法。
- 前記第2熱処理工程における熱処理温度が、65℃以上、90℃以下であることを特徴とする請求項3に記載の湿度センサの製造方法。
- 前記湿度センサが、車載用の湿度センサであることを特徴とする請求項1乃至4のいずれか一項に記載の湿度センサの製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006102397A JP4860793B2 (ja) | 2005-05-19 | 2006-04-03 | 湿度センサの製造方法 |
DE102006023208.9A DE102006023208B4 (de) | 2005-05-19 | 2006-05-17 | Herstellungsverfahren für einen Feuchtigkeitssensor |
FR0604463A FR2886018B1 (fr) | 2005-05-19 | 2006-05-18 | Procede de fabrication de capteur d'humidite |
US11/435,862 US20060260107A1 (en) | 2005-05-19 | 2006-05-18 | Manufacturing method of humidity sensor |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005147189 | 2005-05-19 | ||
JP2005147189 | 2005-05-19 | ||
JP2006102397A JP4860793B2 (ja) | 2005-05-19 | 2006-04-03 | 湿度センサの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006349667A JP2006349667A (ja) | 2006-12-28 |
JP4860793B2 true JP4860793B2 (ja) | 2012-01-25 |
Family
ID=37387878
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006102397A Expired - Fee Related JP4860793B2 (ja) | 2005-05-19 | 2006-04-03 | 湿度センサの製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20060260107A1 (ja) |
JP (1) | JP4860793B2 (ja) |
DE (1) | DE102006023208B4 (ja) |
FR (1) | FR2886018B1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012046501A1 (ja) * | 2010-10-04 | 2012-04-12 | アルプス電気株式会社 | 湿度検出センサ及びその製造方法 |
EP2573804A1 (en) * | 2011-09-21 | 2013-03-27 | Nxp B.V. | Integrated circuit with sensor and manufacturing method thereof |
US9234859B2 (en) * | 2013-03-28 | 2016-01-12 | Stmicroelectronics S.R.L. | Integrated device of a capacitive type for detecting humidity, in particular manufactured using a CMOS technology |
JP7184806B2 (ja) * | 2017-12-27 | 2022-12-06 | ルビコン株式会社 | 湿度センサ及びその製造方法 |
CN110320093A (zh) * | 2019-07-03 | 2019-10-11 | 北京雪迪龙科技股份有限公司 | 气体湿度测量装置及质子转移反应飞行时间质谱仪 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0395349B2 (en) * | 1989-04-26 | 1998-06-10 | Yamatake-Honeywell Co. Ltd. | Moisture sensitive element |
FI84862C (fi) * | 1989-08-11 | 1992-01-27 | Vaisala Oy | Kapacitiv fuktighetsgivarkonstruktion och foerfarande foer framstaellning daerav. |
JP2959083B2 (ja) * | 1990-09-07 | 1999-10-06 | エヌオーケー株式会社 | 湿度センサの改善方法 |
JPH0599877A (ja) * | 1991-06-25 | 1993-04-23 | Yamatake Honeywell Co Ltd | 感湿装置 |
US5177662A (en) * | 1992-02-05 | 1993-01-05 | Johnson Service Company | Capacitance humidity sensor |
US5408381A (en) * | 1994-04-28 | 1995-04-18 | Johnson Service Company | Capacitance humidity sensor |
US6580600B2 (en) * | 2001-02-20 | 2003-06-17 | Nippon Soken, Inc. | Capacitance type humidity sensor and manufacturing method of the same |
JP2002243690A (ja) * | 2001-02-20 | 2002-08-28 | Denso Corp | 容量式湿度センサおよびその製造方法 |
JP2002277425A (ja) * | 2001-03-19 | 2002-09-25 | Tgk Co Ltd | 吸気ファンモータ付インカーセンサ |
JP2004354083A (ja) * | 2003-05-27 | 2004-12-16 | Tdk Corp | 湿度センサ素子の製造方法 |
JP2005003543A (ja) * | 2003-06-12 | 2005-01-06 | Nippon Soken Inc | 湿度センサ用感湿素子 |
JP2006071647A (ja) * | 2005-09-26 | 2006-03-16 | Nippon Soken Inc | 湿度センサ用感湿素子 |
-
2006
- 2006-04-03 JP JP2006102397A patent/JP4860793B2/ja not_active Expired - Fee Related
- 2006-05-17 DE DE102006023208.9A patent/DE102006023208B4/de not_active Expired - Fee Related
- 2006-05-18 FR FR0604463A patent/FR2886018B1/fr not_active Expired - Fee Related
- 2006-05-18 US US11/435,862 patent/US20060260107A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US20060260107A1 (en) | 2006-11-23 |
JP2006349667A (ja) | 2006-12-28 |
DE102006023208B4 (de) | 2016-07-21 |
FR2886018A1 (fr) | 2006-11-24 |
DE102006023208A1 (de) | 2006-11-30 |
FR2886018B1 (fr) | 2010-07-30 |
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