FR2886018B1 - Procede de fabrication de capteur d'humidite - Google Patents
Procede de fabrication de capteur d'humiditeInfo
- Publication number
- FR2886018B1 FR2886018B1 FR0604463A FR0604463A FR2886018B1 FR 2886018 B1 FR2886018 B1 FR 2886018B1 FR 0604463 A FR0604463 A FR 0604463A FR 0604463 A FR0604463 A FR 0604463A FR 2886018 B1 FR2886018 B1 FR 2886018B1
- Authority
- FR
- France
- Prior art keywords
- moisture sensor
- manufacturing moisture
- manufacturing
- sensor
- moisture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
- G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005147189 | 2005-05-19 | ||
JP2006102397A JP4860793B2 (ja) | 2005-05-19 | 2006-04-03 | 湿度センサの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2886018A1 FR2886018A1 (fr) | 2006-11-24 |
FR2886018B1 true FR2886018B1 (fr) | 2010-07-30 |
Family
ID=37387878
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0604463A Expired - Fee Related FR2886018B1 (fr) | 2005-05-19 | 2006-05-18 | Procede de fabrication de capteur d'humidite |
Country Status (4)
Country | Link |
---|---|
US (1) | US20060260107A1 (fr) |
JP (1) | JP4860793B2 (fr) |
DE (1) | DE102006023208B4 (fr) |
FR (1) | FR2886018B1 (fr) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103154715B (zh) * | 2010-10-04 | 2015-07-22 | 阿尔卑斯电气株式会社 | 湿度检测传感器及其制造方法 |
EP2573804A1 (fr) * | 2011-09-21 | 2013-03-27 | Nxp B.V. | Circuit intégré avec capteur et procédé de sa fabrication |
US9234859B2 (en) * | 2013-03-28 | 2016-01-12 | Stmicroelectronics S.R.L. | Integrated device of a capacitive type for detecting humidity, in particular manufactured using a CMOS technology |
JP7184806B2 (ja) * | 2017-12-27 | 2022-12-06 | ルビコン株式会社 | 湿度センサ及びその製造方法 |
CN110320093A (zh) * | 2019-07-03 | 2019-10-11 | 北京雪迪龙科技股份有限公司 | 气体湿度测量装置及质子转移反应飞行时间质谱仪 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0395349B2 (fr) * | 1989-04-26 | 1998-06-10 | Yamatake-Honeywell Co. Ltd. | Elément sensible à l'humidité |
FI84862C (fi) * | 1989-08-11 | 1992-01-27 | Vaisala Oy | Kapacitiv fuktighetsgivarkonstruktion och foerfarande foer framstaellning daerav. |
JP2959083B2 (ja) * | 1990-09-07 | 1999-10-06 | エヌオーケー株式会社 | 湿度センサの改善方法 |
JPH0599877A (ja) * | 1991-06-25 | 1993-04-23 | Yamatake Honeywell Co Ltd | 感湿装置 |
US5177662A (en) * | 1992-02-05 | 1993-01-05 | Johnson Service Company | Capacitance humidity sensor |
US5408381A (en) * | 1994-04-28 | 1995-04-18 | Johnson Service Company | Capacitance humidity sensor |
US6580600B2 (en) * | 2001-02-20 | 2003-06-17 | Nippon Soken, Inc. | Capacitance type humidity sensor and manufacturing method of the same |
JP2002243690A (ja) * | 2001-02-20 | 2002-08-28 | Denso Corp | 容量式湿度センサおよびその製造方法 |
JP2002277425A (ja) * | 2001-03-19 | 2002-09-25 | Tgk Co Ltd | 吸気ファンモータ付インカーセンサ |
JP2004354083A (ja) * | 2003-05-27 | 2004-12-16 | Tdk Corp | 湿度センサ素子の製造方法 |
JP2005003543A (ja) * | 2003-06-12 | 2005-01-06 | Nippon Soken Inc | 湿度センサ用感湿素子 |
JP2006071647A (ja) * | 2005-09-26 | 2006-03-16 | Nippon Soken Inc | 湿度センサ用感湿素子 |
-
2006
- 2006-04-03 JP JP2006102397A patent/JP4860793B2/ja not_active Expired - Fee Related
- 2006-05-17 DE DE102006023208.9A patent/DE102006023208B4/de not_active Expired - Fee Related
- 2006-05-18 US US11/435,862 patent/US20060260107A1/en not_active Abandoned
- 2006-05-18 FR FR0604463A patent/FR2886018B1/fr not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP4860793B2 (ja) | 2012-01-25 |
US20060260107A1 (en) | 2006-11-23 |
DE102006023208A1 (de) | 2006-11-30 |
JP2006349667A (ja) | 2006-12-28 |
DE102006023208B4 (de) | 2016-07-21 |
FR2886018A1 (fr) | 2006-11-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
BRPI0716334A2 (pt) | "sensor de analito de célula estamada e métodos de fabriação" | |
FR2873492B1 (fr) | Nanocomposite photoactif et son procede de fabrication | |
FR2889872B1 (fr) | Capteur de temperature | |
FR2874780B1 (fr) | Capteur ultrasonore | |
FR2892196B1 (fr) | Procede de fabrication d'un biocapteur a detection integree | |
FR2891056B1 (fr) | Structure de montage d'un capteur a utltrasons | |
FR2871883B1 (fr) | Structure de capteur ayant une partie de sortie de signal moulee et procede de fabrication | |
FR2887629B1 (fr) | Capteur de pression | |
FR2861570B1 (fr) | Feuille de capteur | |
FR2822542B1 (fr) | Capteur de temperature et procede pour sa fabrication | |
FR2884921B1 (fr) | Detecteur capacitif d'humidite et procede de fabrication de celui-ci | |
FR2836549B1 (fr) | Procede pour fabriquer un capteur de temperature et capteur de temperature ainsi fabrique | |
FR2889891B1 (fr) | Traversee de boitier et son procede de fabrication | |
FR2890832B1 (fr) | Element de soutien-gorge monopiece multicouche et son procede de fabrication | |
FR2887026B1 (fr) | Installation de capteur a haute pression et procede de fabrication | |
FR2883206B1 (fr) | Procede de la fabrication d'un raccord de joint et raccord de joint | |
FR2910502B1 (fr) | Procede de fabrication et element de structure | |
FR2896620B1 (fr) | Circuit integre tridimensionnel de type c-mos et procede de fabrication | |
FR2854736B1 (fr) | Capteur hyperfrequence | |
FR2885745B1 (fr) | Boite d'encastrement et procede de fabrication | |
FR2939564B1 (fr) | Capteur et son procede de fabrication | |
FR2868543B1 (fr) | Capteur hyperfrequence | |
FR2874909B1 (fr) | Element de capteur micromecanique | |
FR2859561B1 (fr) | Capteur combine | |
FR2849694B1 (fr) | Capteur de deviation |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20110131 |
|
RN | Application for restoration | ||
FC | Decision of inpi director general to approve request for restoration | ||
PLFP | Fee payment |
Year of fee payment: 10 |
|
PLFP | Fee payment |
Year of fee payment: 11 |
|
PLFP | Fee payment |
Year of fee payment: 12 |