FR2886018B1 - Procede de fabrication de capteur d'humidite - Google Patents

Procede de fabrication de capteur d'humidite

Info

Publication number
FR2886018B1
FR2886018B1 FR0604463A FR0604463A FR2886018B1 FR 2886018 B1 FR2886018 B1 FR 2886018B1 FR 0604463 A FR0604463 A FR 0604463A FR 0604463 A FR0604463 A FR 0604463A FR 2886018 B1 FR2886018 B1 FR 2886018B1
Authority
FR
France
Prior art keywords
moisture sensor
manufacturing moisture
manufacturing
sensor
moisture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0604463A
Other languages
English (en)
Other versions
FR2886018A1 (fr
Inventor
Toshikazu Itakura
Toshiki Isogai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Soken Inc
Original Assignee
Denso Corp
Nippon Soken Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp, Nippon Soken Inc filed Critical Denso Corp
Publication of FR2886018A1 publication Critical patent/FR2886018A1/fr
Application granted granted Critical
Publication of FR2886018B1 publication Critical patent/FR2886018B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
FR0604463A 2005-05-19 2006-05-18 Procede de fabrication de capteur d'humidite Expired - Fee Related FR2886018B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005147189 2005-05-19
JP2006102397A JP4860793B2 (ja) 2005-05-19 2006-04-03 湿度センサの製造方法

Publications (2)

Publication Number Publication Date
FR2886018A1 FR2886018A1 (fr) 2006-11-24
FR2886018B1 true FR2886018B1 (fr) 2010-07-30

Family

ID=37387878

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0604463A Expired - Fee Related FR2886018B1 (fr) 2005-05-19 2006-05-18 Procede de fabrication de capteur d'humidite

Country Status (4)

Country Link
US (1) US20060260107A1 (fr)
JP (1) JP4860793B2 (fr)
DE (1) DE102006023208B4 (fr)
FR (1) FR2886018B1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103154715B (zh) * 2010-10-04 2015-07-22 阿尔卑斯电气株式会社 湿度检测传感器及其制造方法
EP2573804A1 (fr) * 2011-09-21 2013-03-27 Nxp B.V. Circuit intégré avec capteur et procédé de sa fabrication
US9234859B2 (en) * 2013-03-28 2016-01-12 Stmicroelectronics S.R.L. Integrated device of a capacitive type for detecting humidity, in particular manufactured using a CMOS technology
JP7184806B2 (ja) * 2017-12-27 2022-12-06 ルビコン株式会社 湿度センサ及びその製造方法
CN110320093A (zh) * 2019-07-03 2019-10-11 北京雪迪龙科技股份有限公司 气体湿度测量装置及质子转移反应飞行时间质谱仪

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0395349B2 (fr) * 1989-04-26 1998-06-10 Yamatake-Honeywell Co. Ltd. Elément sensible à l'humidité
FI84862C (fi) * 1989-08-11 1992-01-27 Vaisala Oy Kapacitiv fuktighetsgivarkonstruktion och foerfarande foer framstaellning daerav.
JP2959083B2 (ja) * 1990-09-07 1999-10-06 エヌオーケー株式会社 湿度センサの改善方法
JPH0599877A (ja) * 1991-06-25 1993-04-23 Yamatake Honeywell Co Ltd 感湿装置
US5177662A (en) * 1992-02-05 1993-01-05 Johnson Service Company Capacitance humidity sensor
US5408381A (en) * 1994-04-28 1995-04-18 Johnson Service Company Capacitance humidity sensor
US6580600B2 (en) * 2001-02-20 2003-06-17 Nippon Soken, Inc. Capacitance type humidity sensor and manufacturing method of the same
JP2002243690A (ja) * 2001-02-20 2002-08-28 Denso Corp 容量式湿度センサおよびその製造方法
JP2002277425A (ja) * 2001-03-19 2002-09-25 Tgk Co Ltd 吸気ファンモータ付インカーセンサ
JP2004354083A (ja) * 2003-05-27 2004-12-16 Tdk Corp 湿度センサ素子の製造方法
JP2005003543A (ja) * 2003-06-12 2005-01-06 Nippon Soken Inc 湿度センサ用感湿素子
JP2006071647A (ja) * 2005-09-26 2006-03-16 Nippon Soken Inc 湿度センサ用感湿素子

Also Published As

Publication number Publication date
JP4860793B2 (ja) 2012-01-25
US20060260107A1 (en) 2006-11-23
DE102006023208A1 (de) 2006-11-30
JP2006349667A (ja) 2006-12-28
DE102006023208B4 (de) 2016-07-21
FR2886018A1 (fr) 2006-11-24

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20110131

RN Application for restoration
FC Decision of inpi director general to approve request for restoration
PLFP Fee payment

Year of fee payment: 10

PLFP Fee payment

Year of fee payment: 11

PLFP Fee payment

Year of fee payment: 12