FR2887026B1 - Installation de capteur a haute pression et procede de fabrication - Google Patents

Installation de capteur a haute pression et procede de fabrication

Info

Publication number
FR2887026B1
FR2887026B1 FR0652508A FR0652508A FR2887026B1 FR 2887026 B1 FR2887026 B1 FR 2887026B1 FR 0652508 A FR0652508 A FR 0652508A FR 0652508 A FR0652508 A FR 0652508A FR 2887026 B1 FR2887026 B1 FR 2887026B1
Authority
FR
France
Prior art keywords
manufacture
high pressure
pressure sensor
sensor installation
installation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0652508A
Other languages
English (en)
Other versions
FR2887026A1 (fr
Inventor
Ralf Henn
Axel Jasenek
Arno Stoetzler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR2887026A1 publication Critical patent/FR2887026A1/fr
Application granted granted Critical
Publication of FR2887026B1 publication Critical patent/FR2887026B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0069—Electrical connection means from the sensor to its support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
FR0652508A 2005-06-14 2006-06-12 Installation de capteur a haute pression et procede de fabrication Expired - Fee Related FR2887026B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005027365A DE102005027365A1 (de) 2005-06-14 2005-06-14 Hochdrucksensoreinrichtung und Verfahren zu ihrer Herstellung

Publications (2)

Publication Number Publication Date
FR2887026A1 FR2887026A1 (fr) 2006-12-15
FR2887026B1 true FR2887026B1 (fr) 2017-06-23

Family

ID=37465038

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0652508A Expired - Fee Related FR2887026B1 (fr) 2005-06-14 2006-06-12 Installation de capteur a haute pression et procede de fabrication

Country Status (4)

Country Link
US (1) US7802481B2 (fr)
JP (1) JP2006349682A (fr)
DE (1) DE102005027365A1 (fr)
FR (1) FR2887026B1 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7373827B2 (en) * 2006-08-07 2008-05-20 Kistler Holding Ag High-pressure sensor with sealing system
US7878069B2 (en) * 2009-05-04 2011-02-01 Kulite Semiconductor Products, Inc. Torque insensitive header assembly
US7930944B2 (en) * 2008-05-14 2011-04-26 Honeywell International Inc. ASIC compensated pressure sensor with soldered sense die attach
US8485042B2 (en) * 2008-08-05 2013-07-16 Endress + Hauser Gmbh + Co. Kg Method for manufacturing an elastic body of Al2O3 ceramic, measuring membrane for a pressure sensor and pressure sensor with such a membrane
DE102008041943A1 (de) 2008-09-10 2010-03-11 Robert Bosch Gmbh Sensoranordnung und Verfahren zur Herstellung einer Sensoranordnung
DE102009044980A1 (de) * 2009-09-24 2011-03-31 Robert Bosch Gmbh Verfahren zur Herstellung eines Sensorbauelementes ohne Passivierung sowie Sensorbauelement
DE102012100942A1 (de) * 2012-01-05 2013-07-11 Trafag Ag Messzelle, Hochdrucksensor und Herstellverfahren
JP6212000B2 (ja) * 2014-07-02 2017-10-11 株式会社東芝 圧力センサ、並びに圧力センサを用いたマイクロフォン、血圧センサ、及びタッチパネル
JP6342866B2 (ja) 2015-09-25 2018-06-13 長野計器株式会社 圧力センサ
DE102015226642A1 (de) * 2015-12-23 2017-06-29 Robert Bosch Gmbh Sensor zur Erfassung eines Drucks eines fluiden Mediums
FR3086058B1 (fr) * 2018-09-18 2021-10-22 Arianegroup Sas Capteur de pression miniaturise

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4236137A (en) * 1979-03-19 1980-11-25 Kulite Semiconductor Products, Inc. Semiconductor transducers employing flexure frames
JPS58180927A (ja) * 1982-04-16 1983-10-22 Toshiba Corp 半導体感圧素子の保護装置
JPS63165725A (ja) * 1986-12-26 1988-07-09 Aisin Seiki Co Ltd 圧力センサ−用歪ゲ−ジ
GB2207804B (en) * 1987-08-06 1990-08-15 Stc Plc Pressure sensor and manufacturing process therefor
JPH073311Y2 (ja) * 1988-10-27 1995-01-30 横河電機株式会社 半導体差圧測定装置
US5050034A (en) * 1990-01-22 1991-09-17 Endress U. Hauser Gmbh U. Co. Pressure sensor and method of manufacturing same
JPH0534550U (ja) * 1991-10-15 1993-05-07 エヌオーケー株式会社 圧力センサ
JP3229460B2 (ja) * 1993-10-28 2001-11-19 エヌオーケー株式会社 歪みゲージ
US5581038A (en) * 1994-04-04 1996-12-03 Sentir, Inc. Pressure measurement apparatus having a reverse mounted transducer and overpressure guard
FR2738340B1 (fr) * 1995-08-28 1997-11-21 Europ Propulsion Architecture d'integration d'un element sensible dans un capteur de pression
US6140144A (en) * 1996-08-08 2000-10-31 Integrated Sensing Systems, Inc. Method for packaging microsensors
JP3702062B2 (ja) * 1997-02-18 2005-10-05 株式会社フジクラ 圧力センサ装置
DE19928917A1 (de) * 1999-06-24 2000-12-28 Bosch Gmbh Robert Drucksensorvorrichtung
US6236095B1 (en) * 2000-02-15 2001-05-22 Dresser Equipment Goup, Inc. Carrier structure for semiconductor transducers
JP2002082009A (ja) * 2000-06-30 2002-03-22 Denso Corp 圧力センサ
DE10114862B9 (de) * 2001-03-26 2007-04-26 First Sensor Technology Gmbh Drucksensoreinrichtung
JP3863171B2 (ja) * 2003-01-30 2006-12-27 株式会社フジクラ 半導体圧力センサ及びその製造方法
TWI224190B (en) * 2003-05-28 2004-11-21 Au Optronics Corp Semiconductor pressure sensor
DE102004006201B4 (de) * 2004-02-09 2011-12-08 Robert Bosch Gmbh Drucksensor mit Siliziumchip auf einer Stahlmembran
DE102004010295A1 (de) * 2004-03-03 2005-09-22 Robert Bosch Gmbh Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren

Also Published As

Publication number Publication date
US7802481B2 (en) 2010-09-28
FR2887026A1 (fr) 2006-12-15
US20060278002A1 (en) 2006-12-14
JP2006349682A (ja) 2006-12-28
DE102005027365A1 (de) 2006-12-21

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