FR2866428B1 - Capteur micromecanique de haute pression - Google Patents

Capteur micromecanique de haute pression

Info

Publication number
FR2866428B1
FR2866428B1 FR0550437A FR0550437A FR2866428B1 FR 2866428 B1 FR2866428 B1 FR 2866428B1 FR 0550437 A FR0550437 A FR 0550437A FR 0550437 A FR0550437 A FR 0550437A FR 2866428 B1 FR2866428 B1 FR 2866428B1
Authority
FR
France
Prior art keywords
high pressure
micromechanical sensor
micromechanical
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0550437A
Other languages
English (en)
Other versions
FR2866428A1 (fr
Inventor
Thomas Moelkner
Ralf Henn
Werner Steiner
Hans Peter Didra
Philip Cutuli
Frank Klopf
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE102004050983A external-priority patent/DE102004050983A1/de
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR2866428A1 publication Critical patent/FR2866428A1/fr
Application granted granted Critical
Publication of FR2866428B1 publication Critical patent/FR2866428B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
FR0550437A 2004-02-17 2005-02-16 Capteur micromecanique de haute pression Expired - Fee Related FR2866428B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004007518 2004-02-17
DE102004050983A DE102004050983A1 (de) 2004-02-17 2004-10-20 Mikromechanischer Hochdrucksensor

Publications (2)

Publication Number Publication Date
FR2866428A1 FR2866428A1 (fr) 2005-08-19
FR2866428B1 true FR2866428B1 (fr) 2007-05-25

Family

ID=34828341

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0550437A Expired - Fee Related FR2866428B1 (fr) 2004-02-17 2005-02-16 Capteur micromecanique de haute pression

Country Status (3)

Country Link
US (1) US7040172B2 (fr)
JP (1) JP2005233953A (fr)
FR (1) FR2866428B1 (fr)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005022665A1 (de) * 2005-05-17 2006-11-23 Robert Bosch Gmbh Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren
DE112006003699B4 (de) * 2006-02-03 2012-07-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Auslenkbares mikromechanisches System sowie dessen Verwendung
DE102008041943A1 (de) * 2008-09-10 2010-03-11 Robert Bosch Gmbh Sensoranordnung und Verfahren zur Herstellung einer Sensoranordnung
JP2011002393A (ja) * 2009-06-22 2011-01-06 Toyota Motor Corp 圧力センサおよびその製造方法
JP2019066454A (ja) * 2017-09-29 2019-04-25 ミネベアミツミ株式会社 ひずみゲージ、センサモジュール
WO2019065752A1 (fr) * 2017-09-29 2019-04-04 ミネベアミツミ株式会社 Jauge de contrainte et module de capteur
JP2019066453A (ja) 2017-09-29 2019-04-25 ミネベアミツミ株式会社 ひずみゲージ
JP2019066313A (ja) * 2017-09-29 2019-04-25 ミネベアミツミ株式会社 ひずみゲージ
JP6793103B2 (ja) 2017-09-29 2020-12-02 ミネベアミツミ株式会社 ひずみゲージ
JP2019066312A (ja) * 2017-09-29 2019-04-25 ミネベアミツミ株式会社 ひずみゲージ
CN111406196B (zh) * 2017-09-29 2022-03-29 美蓓亚三美株式会社 应变片
JP2019078726A (ja) * 2017-10-27 2019-05-23 ミネベアミツミ株式会社 ひずみゲージ、センサモジュール
JP2019082424A (ja) 2017-10-31 2019-05-30 ミネベアミツミ株式会社 ひずみゲージ
JP2019082426A (ja) * 2017-10-31 2019-05-30 ミネベアミツミ株式会社 ひずみゲージ
JP2019082425A (ja) * 2017-10-31 2019-05-30 ミネベアミツミ株式会社 ひずみゲージ
JP2019090721A (ja) * 2017-11-15 2019-06-13 ミネベアミツミ株式会社 ひずみゲージ
JP2019090723A (ja) * 2017-11-15 2019-06-13 ミネベアミツミ株式会社 ひずみゲージ
JP2019090722A (ja) 2017-11-15 2019-06-13 ミネベアミツミ株式会社 ひずみゲージ
JP2019090724A (ja) * 2017-11-15 2019-06-13 ミネベアミツミ株式会社 ひずみゲージ
JP2019113411A (ja) * 2017-12-22 2019-07-11 ミネベアミツミ株式会社 ひずみゲージ、センサモジュール
JP2019120555A (ja) 2017-12-28 2019-07-22 ミネベアミツミ株式会社 ひずみゲージ、センサモジュール
JP2019128183A (ja) 2018-01-22 2019-08-01 ミネベアミツミ株式会社 センサモジュール
JP2019174387A (ja) 2018-03-29 2019-10-10 ミネベアミツミ株式会社 ひずみゲージ
JP2019184284A (ja) 2018-04-03 2019-10-24 ミネベアミツミ株式会社 ひずみゲージ
JP2019184344A (ja) * 2018-04-05 2019-10-24 ミネベアミツミ株式会社 ひずみゲージ及びその製造方法
JPWO2020085247A1 (ja) 2018-10-23 2021-09-16 ミネベアミツミ株式会社 アクセルペダル、ステアリング、ドア、ドア開閉システム

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59230131A (ja) * 1983-06-13 1984-12-24 Tokyo Electric Co Ltd ロ−ドセル
JPS60213837A (ja) * 1984-04-09 1985-10-26 Tokyo Electric Co Ltd ロ−ドセル
JPS63165725A (ja) * 1986-12-26 1988-07-09 Aisin Seiki Co Ltd 圧力センサ−用歪ゲ−ジ
US5144843A (en) * 1988-07-26 1992-09-08 Hitachi Construction Machinery Co., Ltd. Pressure sensor
FR2693795B1 (fr) * 1992-07-15 1994-08-19 Commissariat Energie Atomique Jauge de contrainte sur support souple et capteur muni de ladite jauge.
JP3229460B2 (ja) * 1993-10-28 2001-11-19 エヌオーケー株式会社 歪みゲージ
JP3154267B2 (ja) * 1994-05-19 2001-04-09 日立建機株式会社 差圧センサ
JPH11160170A (ja) * 1997-11-27 1999-06-18 Toshiba Tec Corp 応力センサの製造方法
DE10014984A1 (de) * 2000-03-25 2001-10-18 Bosch Gmbh Robert Herstellungsverfahren für ein Dünnschicht-Bauelement, insbesondere einen Dünnschicht-Hochdrucksensor
DE10337571A1 (de) 2003-03-31 2004-10-14 Robert Bosch Gmbh Drucksensor mit Dehnungsstreifen

Also Published As

Publication number Publication date
JP2005233953A (ja) 2005-09-02
US7040172B2 (en) 2006-05-09
FR2866428A1 (fr) 2005-08-19
US20050188769A1 (en) 2005-09-01

Similar Documents

Publication Publication Date Title
FR2866428B1 (fr) Capteur micromecanique de haute pression
FR2872281B1 (fr) Capteur de pression
FR2887629B1 (fr) Capteur de pression
FR2874088B1 (fr) Capteur de pression
FR2871232B1 (fr) Capteur de pression
DE602005021253D1 (de) Kalibrierter drucksensor
DK1794561T3 (da) Optoakustisk tryksensor
FR2868162B1 (fr) Capteur de pression ayant un capteur de temperature integre
DE602006001098D1 (de) Kapazitiver Drucksensor
DE602004021168D1 (de) Piezoelektrischer Cantilever-Drucksensor
FR2836220B1 (fr) Capteur de pression
FR2874780B1 (fr) Capteur ultrasonore
DE602006016034D1 (de) Druckmessvorrichtung
DE102005022087A8 (de) Druckerfassungsvorrichtung
SE0500752L (sv) Förskjutningssensor
BRPI0721074A2 (pt) dispositivo sensor de pressão
DE102007042439B8 (de) Drucksensor
FR2869600B1 (fr) Capteur combine de pressions relative et absolue
FI20050739A0 (fi) Mikromekaaninen sensori, sensoriryhmä ja menetelmä
GB0410135D0 (en) Cylinder pressure sensor
ATE392221T1 (de) Druckdetektionskammer
DE502007005051D1 (de) Beschleunigungssensor
FR2889872B1 (fr) Capteur de temperature
DE602007012995D1 (de) Mikromechanischer Drucksensor
FR2865803B1 (fr) Capteur de pression comportant un diaphragme

Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20141031