DE602005021253D1 - Kalibrierter drucksensor - Google Patents

Kalibrierter drucksensor

Info

Publication number
DE602005021253D1
DE602005021253D1 DE602005021253T DE602005021253T DE602005021253D1 DE 602005021253 D1 DE602005021253 D1 DE 602005021253D1 DE 602005021253 T DE602005021253 T DE 602005021253T DE 602005021253 T DE602005021253 T DE 602005021253T DE 602005021253 D1 DE602005021253 D1 DE 602005021253D1
Authority
DE
Germany
Prior art keywords
pressure sensor
calibrated pressure
calibrated
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005021253T
Other languages
English (en)
Inventor
Tzu-Yu Wang
David J Zook
Stephen R Shiffer
Eugen I Cabuz
Cleopatra Cabuz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of DE602005021253D1 publication Critical patent/DE602005021253D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE602005021253T 2004-12-30 2005-12-16 Kalibrierter drucksensor Active DE602005021253D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/027,289 US7216048B2 (en) 2004-12-30 2004-12-30 Calibrated pressure sensor
PCT/US2005/045848 WO2006073770A1 (en) 2004-12-30 2005-12-16 Calibrated pressure sensor

Publications (1)

Publication Number Publication Date
DE602005021253D1 true DE602005021253D1 (de) 2010-06-24

Family

ID=36117676

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005021253T Active DE602005021253D1 (de) 2004-12-30 2005-12-16 Kalibrierter drucksensor

Country Status (6)

Country Link
US (1) US7216048B2 (de)
EP (1) EP1839026B1 (de)
JP (1) JP5073502B2 (de)
CN (1) CN101133309A (de)
DE (1) DE602005021253D1 (de)
WO (1) WO2006073770A1 (de)

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US7628054B2 (en) * 2006-11-09 2009-12-08 Abbott Medical Optics Inc. Calibration utility for non-linear measurement system
DE102006058269B4 (de) * 2006-12-08 2010-09-02 Endress & Hauser Meßtechnik GmbH & Co. KG Verfahren zur Kalibrierung mindestens eines Drucksensors und entsprechender Drucksensor
FR2919486B1 (fr) * 2007-07-31 2009-10-02 Captomed Entpr Unipersonnelle Capteur de pression auto-etalonnable.
US7788056B2 (en) * 2008-09-19 2010-08-31 Honeywell International Inc. Method of auto-calibrating aircraft cabin pressure sensors
EP2520917A1 (de) * 2011-05-04 2012-11-07 Nxp B.V. Kapazitativer MEMS-Drucksensor, Betriebsverfahren und Herstellungsverfahren
US8817483B2 (en) 2011-08-01 2014-08-26 Honeywell International Inc. Connector assembly for a sensor
US8934263B2 (en) 2011-08-01 2015-01-13 Honeywell International Inc. Protective cover for pressure sensor assemblies
US8671753B2 (en) 2011-08-01 2014-03-18 Honeywell International Inc. Cable harness for a sensor
US8656786B2 (en) 2011-08-01 2014-02-25 Honeywell International Inc. Interchangeable pressure sensor assembly and methods of assembly
US8534130B2 (en) 2011-08-01 2013-09-17 Honeywell International Inc. Joint between a pressure sensor and a pressure port of a sensor assembly
US8459125B2 (en) 2011-08-01 2013-06-11 Honeywell International Inc. Pressure sensor assembly
US8919211B1 (en) * 2012-04-17 2014-12-30 Alarm.Com Incorporated Force-sensitive occupancy sensing technology
US8984952B2 (en) 2012-09-07 2015-03-24 Dynisco Instruments Llc Capacitive pressure sensor
US8943895B2 (en) 2012-09-07 2015-02-03 Dynisco Instruments Llc Capacitive pressure sensor
US9103738B2 (en) 2012-09-07 2015-08-11 Dynisco Instruments Llc Capacitive pressure sensor with intrinsic temperature compensation
WO2014076620A2 (en) * 2012-11-14 2014-05-22 Vectorious Medical Technologies Ltd. Drift compensation for implanted capacitance-based pressure transducer
EP2755005A3 (de) * 2013-01-09 2017-01-25 Auto Industrial Co., Ltd. Ausgangsspezifizierungskalibrierungsvorrichtung für kapazitiven Drucksensor
US8997548B2 (en) * 2013-01-29 2015-04-07 Reno Technologies, Inc. Apparatus and method for automatic detection of diaphragm coating or surface contamination for capacitance diaphragm gauges
EP2986252B1 (de) 2013-04-18 2018-07-25 Vectorious Medical Technologies Ltd. Ferngesteuertes sensorisches implantat
US10205488B2 (en) 2013-04-18 2019-02-12 Vectorious Medical Technologies Ltd. Low-power high-accuracy clock harvesting in inductive coupling systems
WO2015027048A1 (en) * 2013-08-21 2015-02-26 Advanced Sensor Design Technologies, LLC Calibrating a device
US9990087B2 (en) * 2013-09-28 2018-06-05 Apple Inc. Compensation for nonlinear variation of gap capacitance with displacement
US9285289B2 (en) 2013-12-06 2016-03-15 Freescale Semiconductor, Inc. Pressure sensor with built-in calibration capability
US9689770B2 (en) * 2014-07-17 2017-06-27 Infineon Technologies Ag Selfcalibration of capacitive pressure sensors with electrostatic forces
JP6158846B2 (ja) * 2015-02-17 2017-07-05 トヨタ自動車株式会社 圧力センサ
WO2016178197A1 (en) 2015-05-07 2016-11-10 Vectorious Medical Technologies Ltd Deploying and fixating an implant across an organ wall
EP3398237B1 (de) 2015-12-30 2020-12-02 Vectorious Medical Technologies Ltd. Leistungseffizientes drucksensorimplantat
CN110088586B (zh) * 2016-08-05 2021-11-05 斯蒂芬.A.马什 微压力传感器
US10386256B2 (en) 2016-11-30 2019-08-20 Texas Instruments Incorporated Methods and apparatus to calibrate micro-electromechanical systems
US10444104B2 (en) * 2016-11-30 2019-10-15 Texas Instruments Incorporated Methods and apparatus to calibrate micro-electromechanical systems
US10197466B2 (en) * 2016-11-30 2019-02-05 Texas Instruments Incorporated Methods and apparatus to calibrate micro-electromechanical systems
DE102017131066A1 (de) * 2017-12-22 2019-06-27 Endress+Hauser SE+Co. KG Verfahren zum Bereitstellen von kalibrierten Druckmessumformern
US10921943B2 (en) 2019-04-30 2021-02-16 Apple Inc. Compliant material for protecting capacitive force sensors and increasing capacitive sensitivity
DE102020205998A1 (de) * 2020-05-13 2021-11-18 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren und System zum Bewerten der Funktionsfähigkeit eines Sensors
TWI753713B (zh) 2020-12-21 2022-01-21 財團法人工業技術研究院 具校正功能之壓力感測器及其校正方法
CN113049650B (zh) * 2021-03-25 2023-08-18 河北工业大学 一种土壤湿度传感器智能校准系统及其校准方法
JP7424561B2 (ja) 2021-03-26 2024-01-30 国立大学法人東北大学 静電容量式圧力センサ及びそれを使用する圧力検出方法
US11592946B1 (en) 2021-09-21 2023-02-28 Apple Inc. Capacitive gap force sensor with multi-layer fill
CN114136537B (zh) * 2021-11-04 2024-06-11 歌尔微电子股份有限公司 压力传感器
JP7373883B1 (ja) 2023-09-24 2023-11-06 正見 佐々木 位置決め具及び位置決め具付きコンベックスルール

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US5836750A (en) 1997-10-09 1998-11-17 Honeywell Inc. Electrostatically actuated mesopump having a plurality of elementary cells
JP2882788B1 (ja) * 1998-04-20 1999-04-12 長野計器株式会社 自己校正型センサ
US6184607B1 (en) 1998-12-29 2001-02-06 Honeywell International Inc. Driving strategy for non-parallel arrays of electrostatic actuators sharing a common electrode
US6179586B1 (en) 1999-09-15 2001-01-30 Honeywell International Inc. Dual diaphragm, single chamber mesopump
DE19964218C2 (de) 1999-10-08 2003-04-10 Hahn Schickard Ges Elektromechanisches Bauelement mit einem Polymerkörper und Verfahren zur Herstellung desselben
US6432721B1 (en) 1999-10-29 2002-08-13 Honeywell International Inc. Meso sniffer: a device and method for active gas sampling using alternating flow
US6649416B1 (en) 2000-02-18 2003-11-18 Trustees Of Tufts College Intelligent electro-optical sensor array and method for analyte detection
JP3498034B2 (ja) * 2000-03-01 2004-02-16 九州日本電気株式会社 ロ−ドロック室
US6568286B1 (en) 2000-06-02 2003-05-27 Honeywell International Inc. 3D array of integrated cells for the sampling and detection of air bound chemical and biological species
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Also Published As

Publication number Publication date
WO2006073770A1 (en) 2006-07-13
EP1839026A1 (de) 2007-10-03
US20060161364A1 (en) 2006-07-20
CN101133309A (zh) 2008-02-27
US7216048B2 (en) 2007-05-08
EP1839026B1 (de) 2010-05-12
JP2008527329A (ja) 2008-07-24
JP5073502B2 (ja) 2012-11-14

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