FR2871232B1 - Capteur de pression - Google Patents

Capteur de pression

Info

Publication number
FR2871232B1
FR2871232B1 FR0505574A FR0505574A FR2871232B1 FR 2871232 B1 FR2871232 B1 FR 2871232B1 FR 0505574 A FR0505574 A FR 0505574A FR 0505574 A FR0505574 A FR 0505574A FR 2871232 B1 FR2871232 B1 FR 2871232B1
Authority
FR
France
Prior art keywords
pressure sensor
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0505574A
Other languages
English (en)
Other versions
FR2871232A1 (fr
Inventor
Hiroaki Tanaka
Inao Toyoda
Ichiharu Kondo
Makoto Totani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2004166112A external-priority patent/JP4207846B2/ja
Priority claimed from JP2004166113A external-priority patent/JP4207847B2/ja
Priority claimed from JP2004166114A external-priority patent/JP4207848B2/ja
Application filed by Denso Corp filed Critical Denso Corp
Publication of FR2871232A1 publication Critical patent/FR2871232A1/fr
Application granted granted Critical
Publication of FR2871232B1 publication Critical patent/FR2871232B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
FR0505574A 2004-06-03 2005-06-01 Capteur de pression Expired - Fee Related FR2871232B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004166112A JP4207846B2 (ja) 2004-06-03 2004-06-03 圧力センサ
JP2004166113A JP4207847B2 (ja) 2004-06-03 2004-06-03 圧力センサ
JP2004166114A JP4207848B2 (ja) 2004-06-03 2004-06-03 圧力センサ

Publications (2)

Publication Number Publication Date
FR2871232A1 FR2871232A1 (fr) 2005-12-09
FR2871232B1 true FR2871232B1 (fr) 2007-06-15

Family

ID=35415008

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0505574A Expired - Fee Related FR2871232B1 (fr) 2004-06-03 2005-06-01 Capteur de pression

Country Status (3)

Country Link
US (1) US7176541B2 (fr)
DE (1) DE102005024215A1 (fr)
FR (1) FR2871232B1 (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006023115A (ja) * 2004-07-06 2006-01-26 Surpass Kogyo Kk 絶対圧形圧力センサの製造方法および製造装置
JP2007192773A (ja) * 2006-01-23 2007-08-02 Denso Corp 圧力センサ素子の取付構造
US7781852B1 (en) * 2006-12-05 2010-08-24 Amkor Technology, Inc. Membrane die attach circuit element package and method therefor
US7458274B2 (en) * 2007-02-20 2008-12-02 Honeywell International Inc. Pressure sensor incorporating a compliant pin
US8069730B2 (en) 2008-11-14 2011-12-06 Kulite Semiconductor Products, Inc. Pressure transducer structures suitable for curved surfaces
US8371160B2 (en) * 2009-12-16 2013-02-12 Meggitt (San Juan Capistrano), Inc. Weatherized direct-mount absolute pressure sensor
US9656434B2 (en) 2010-11-30 2017-05-23 The Good Year Tire & Rubber Company Measuring tire pressure in a tire mold
JP6018903B2 (ja) * 2012-12-17 2016-11-02 日立オートモティブシステムズ株式会社 物理量センサ
US9470593B2 (en) * 2013-09-12 2016-10-18 Honeywell International Inc. Media isolated pressure sensor
DE102014214753A1 (de) * 2014-07-28 2016-01-28 Robert Bosch Gmbh Drucksensor und Verfahren zum Herstellen eines Drucksensors
EP3211394B1 (fr) * 2016-02-29 2021-03-31 Melexis Technologies NV Capteur de pression à semi-conducteurs pour application de milieux hostiles
EP3260833B1 (fr) * 2016-06-21 2021-10-27 Melexis Technologies NV Ensemble de capteur à semi-conducteur pour application de milieux hostiles
US10163660B2 (en) * 2017-05-08 2018-12-25 Tt Electronics Plc Sensor device with media channel between substrates
CN115942642B (zh) * 2022-12-30 2024-03-12 中山市中力衡传感科技有限公司 一种电阻箔式传感器加工方法及电阻箔式传感器

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4732042A (en) * 1986-04-22 1988-03-22 Motorola Inc. Cast membrane protected pressure sensor
US5116331A (en) 1991-04-23 1992-05-26 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Pressure transducer and system for cryogenic environments
JPH10153508A (ja) 1996-11-26 1998-06-09 Fuji Electric Co Ltd 半導体圧力センサ
DE19703206C2 (de) 1997-01-29 2002-01-24 Infineon Technologies Ag Drucksensor-Bauteil mit Schlauchanschluß
US6346742B1 (en) 1998-11-12 2002-02-12 Maxim Integrated Products, Inc. Chip-scale packaged pressure sensor
JP4362949B2 (ja) 2000-06-05 2009-11-11 株式会社デンソー 半導体圧力センサ装置

Also Published As

Publication number Publication date
US7176541B2 (en) 2007-02-13
FR2871232A1 (fr) 2005-12-09
DE102005024215A1 (de) 2005-12-22
US20050269654A1 (en) 2005-12-08

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Legal Events

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