DE602004021168D1 - Piezoelektrischer Cantilever-Drucksensor - Google Patents

Piezoelektrischer Cantilever-Drucksensor

Info

Publication number
DE602004021168D1
DE602004021168D1 DE602004021168T DE602004021168T DE602004021168D1 DE 602004021168 D1 DE602004021168 D1 DE 602004021168D1 DE 602004021168 T DE602004021168 T DE 602004021168T DE 602004021168 T DE602004021168 T DE 602004021168T DE 602004021168 D1 DE602004021168 D1 DE 602004021168D1
Authority
DE
Germany
Prior art keywords
pressure sensor
piezoelectric cantilever
cantilever pressure
piezoelectric
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004021168T
Other languages
English (en)
Inventor
Jun Amano
Mark A Unkrich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Avago Technologies International Sales Pte Ltd
Original Assignee
Avago Technologies General IP Singapore Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Avago Technologies General IP Singapore Pte Ltd filed Critical Avago Technologies General IP Singapore Pte Ltd
Publication of DE602004021168D1 publication Critical patent/DE602004021168D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/02—Microphones
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10—Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12—Fingerprints or palmprints
    • G06V40/13—Sensors therefor
    • G06V40/1306—Sensors therefor non-optical, e.g. ultrasonic or capacitive sensing

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Computer Interaction (AREA)
  • Multimedia (AREA)
  • Theoretical Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Image Input (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
DE602004021168T 2004-03-05 2004-10-04 Piezoelektrischer Cantilever-Drucksensor Active DE602004021168D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/792,777 US7104134B2 (en) 2004-03-05 2004-03-05 Piezoelectric cantilever pressure sensor

Publications (1)

Publication Number Publication Date
DE602004021168D1 true DE602004021168D1 (de) 2009-07-02

Family

ID=34750612

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004021168T Active DE602004021168D1 (de) 2004-03-05 2004-10-04 Piezoelektrischer Cantilever-Drucksensor

Country Status (4)

Country Link
US (1) US7104134B2 (de)
EP (1) EP1571435B1 (de)
JP (1) JP4832772B2 (de)
DE (1) DE602004021168D1 (de)

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WO2009079154A2 (en) * 2007-11-23 2009-06-25 Drexel University Lead-free piezoelectric ceramic films and a method for making thereof
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JP6103074B2 (ja) * 2013-10-28 2017-03-29 株式会社村田製作所 圧電センサ
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EP3100020B1 (de) * 2014-01-31 2019-01-02 Nanotech Analysis S.r.l. Miniaturisiertes gerät zur messung von sehr niedrigem druck und von gaskonzentrationen
JP6292932B2 (ja) * 2014-03-13 2018-03-14 セイコーインスツル株式会社 圧力センサ
JP6209801B2 (ja) * 2014-10-06 2017-10-11 国立大学法人 東京大学 圧力センサ
DE102015224938B4 (de) 2014-12-12 2021-09-23 Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden e.V. (IFW Dresden e.V.) Verfahren und Vorrichtung zur Ermittlung von Kraftfeldern, Kraftfeldgradienten, Materialeigenschaften oder Massen mit einem System aus gekoppelten, schwingungsfähigen, balkenartigen Komponenten
US9972723B2 (en) * 2015-02-12 2018-05-15 United Arab Emirates University Piezoelectric thin-film based flexible sensing device, method for fabrication thereof and method for operating the same
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CN106056033B (zh) 2015-04-14 2019-07-05 李美燕 复合基板感测装置及其制造方法
TWI574028B (zh) * 2015-06-22 2017-03-11 李美燕 集成式振波發射感測元、使用其之感測陣列及電子設備及其製造方法
SG11201607625QA (en) 2015-06-26 2017-01-27 Sabic Global Technologies Bv Integrated piezoelectric cantilever actuator and transistor for touch input and haptic feedback applications
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US9960715B1 (en) 2016-03-22 2018-05-01 The United States Of America, As Represented By The Secretary Of The Navy Light activated piezoelectric converter
US20190036004A1 (en) * 2016-04-01 2019-01-31 Intel Corporation Strain sensitive piezoelectric system with optical indicator
CN105841850B (zh) * 2016-05-12 2018-02-27 京东方科技集团股份有限公司 一种压电传感器及其制作方法
US10840430B2 (en) * 2016-06-30 2020-11-17 Intel Corporation Piezoelectric package-integrated sensing devices
DE102016212717A1 (de) * 2016-07-13 2018-01-18 Robert Bosch Gmbh Detektionseinrichtung für piezoelektrisches Mikrofon
KR20180015482A (ko) 2016-08-03 2018-02-13 삼성전자주식회사 음향 스펙트럼 분석기 및 이에 구비된 공진기들의 배열방법
CN106778691B (zh) * 2017-01-16 2020-04-21 业成科技（成都）有限公司 声波式指纹识别装置及其制作方法以及应用其的电子装置
CN109154986B (zh) * 2017-05-01 2020-11-13 深圳市汇顶科技股份有限公司 超声波指纹感应及传感器制造
US10952642B2 (en) * 2017-11-09 2021-03-23 Amorepacific Corporation Strain sensor unit and skin sensor module comprising the same
JP7027252B2 (ja) 2018-05-25 2022-03-01 株式会社東芝 振動センサ及びセンサモジュール
TWI684367B (zh) * 2018-09-14 2020-02-01 美律實業股份有限公司 揚聲器以及其微機電致動器
CN109734047B (zh) * 2019-02-27 2021-03-23 京东方科技集团股份有限公司 一种mems器件及其制作方法、显示基板
KR20220043126A (ko) 2019-08-06 2022-04-05 니신보 마이크로 디바이즈 인크. 압전 소자
US11527700B2 (en) 2019-12-20 2022-12-13 Vanguard International Semiconductor Singapore Pte. Ltd. Microphone device with single crystal piezoelectric film and method of forming the same
CN110943156B (zh) * 2019-12-24 2021-08-24 中山大学 一种基于压电材料的压力传感器及制备方法
CN112968201B (zh) * 2021-02-05 2022-08-05 东莞市爱康智能技术有限公司 一种自适应热压机构
KR20230024872A (ko) * 2021-08-11 2023-02-21 썬전 샥 컴퍼니 리미티드 마이크로폰

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Also Published As

Publication number Publication date
EP1571435A1 (de) 2005-09-07
JP2005249785A (ja) 2005-09-15
EP1571435B1 (de) 2009-05-20
US20050193822A1 (en) 2005-09-08
US7104134B2 (en) 2006-09-12
JP4832772B2 (ja) 2011-12-07

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