DE602006009384D1 - Piezoelektrisches dünnschichtfilter - Google Patents

Piezoelektrisches dünnschichtfilter

Info

Publication number
DE602006009384D1
DE602006009384D1 DE200660009384 DE602006009384T DE602006009384D1 DE 602006009384 D1 DE602006009384 D1 DE 602006009384D1 DE 200660009384 DE200660009384 DE 200660009384 DE 602006009384 T DE602006009384 T DE 602006009384T DE 602006009384 D1 DE602006009384 D1 DE 602006009384D1
Authority
DE
Germany
Prior art keywords
filter
piezoelectric thin
piezoelectric
thin
filter filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE200660009384
Other languages
English (en)
Inventor
Hideki Kawamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of DE602006009384D1 publication Critical patent/DE602006009384D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/564—Monolithic crystal filters implemented with thin-film techniques
DE200660009384 2005-04-13 2006-04-04 Piezoelektrisches dünnschichtfilter Active DE602006009384D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005116319 2005-04-13
JP2005122709 2005-04-20
PCT/JP2006/307147 WO2006112260A1 (ja) 2005-04-13 2006-04-04 圧電薄膜フィルタ

Publications (1)

Publication Number Publication Date
DE602006009384D1 true DE602006009384D1 (de) 2009-11-05

Family

ID=37114987

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200660009384 Active DE602006009384D1 (de) 2005-04-13 2006-04-04 Piezoelektrisches dünnschichtfilter

Country Status (5)

Country Link
US (1) US7843285B2 (de)
EP (1) EP1871007B1 (de)
JP (1) JP4513860B2 (de)
DE (1) DE602006009384D1 (de)
WO (1) WO2006112260A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010096020A1 (en) * 2009-02-17 2010-08-26 Agency For Science, Technology And Research Miniaturized piezoelectric accelerometers
FI123640B (fi) 2010-04-23 2013-08-30 Teknologian Tutkimuskeskus Vtt Laajakaistainen akustisesti kytketty ohutkalvo-BAW-suodin
US8542074B2 (en) 2010-05-26 2013-09-24 Panasonic Corporation MEMS resonator
JP5187597B2 (ja) * 2010-07-05 2013-04-24 株式会社村田製作所 弾性波素子
US9083300B2 (en) * 2010-09-01 2015-07-14 Qualcomm Mems Technologies, Inc. Electromechanical systems piezoelectric contour mode differential resonators and filters
US9093979B2 (en) * 2012-06-05 2015-07-28 Avago Technologies General Ip (Singapore) Pte. Ltd. Laterally-coupled acoustic resonators
US9379686B2 (en) * 2014-03-04 2016-06-28 Qualcomm Incorporated Resonator with a staggered electrode configuration
JP6347446B2 (ja) * 2014-12-11 2018-06-27 太陽誘電株式会社 横結合型多重モードモノリシックフィルタ
US10952642B2 (en) 2017-11-09 2021-03-23 Amorepacific Corporation Strain sensor unit and skin sensor module comprising the same
US11121696B2 (en) * 2018-07-17 2021-09-14 Ii-Vi Delaware, Inc. Electrode defined resonator

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2271870A (en) * 1939-11-10 1942-02-03 Bell Telephone Labor Inc Wave transmission network
JP3068140B2 (ja) * 1989-09-07 2000-07-24 株式会社東芝 圧電薄膜共振子
JP2983252B2 (ja) * 1990-05-14 1999-11-29 株式会社東芝 圧電薄膜デバイス
EP0952618A4 (de) * 1997-04-24 2002-01-30 Mitsubishi Electric Corp Piezoelektrische dünnschichtanordnung, verfahren zur herstellung derselben, und schaltungselement
DE19914468C1 (de) 1999-03-30 2000-09-07 Siemens Ag Bauelement
US6349454B1 (en) * 1999-07-29 2002-02-26 Agere Systems Guardian Corp. Method of making thin film resonator apparatus
US6342753B1 (en) * 2000-09-25 2002-01-29 Rockwell Technologies, Llc Piezoelectric transformer and operating method
JP2002368576A (ja) * 2001-06-05 2002-12-20 Fujitsu Media Device Kk 弾性波素子
JP4147817B2 (ja) * 2002-05-23 2008-09-10 株式会社村田製作所 圧電フィルタ、およびそれを有する電子部品
US7098758B2 (en) * 2004-11-03 2006-08-29 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustically coupled thin-film resonators having an electrode with a tapered edge
JPWO2006134959A1 (ja) * 2005-06-17 2009-01-08 松下電器産業株式会社 多重モード薄膜弾性波共振器フィルタ

Also Published As

Publication number Publication date
WO2006112260A1 (ja) 2006-10-26
US20080007139A1 (en) 2008-01-10
EP1871007A4 (de) 2008-07-09
EP1871007A1 (de) 2007-12-26
JPWO2006112260A1 (ja) 2008-12-11
US7843285B2 (en) 2010-11-30
EP1871007B1 (de) 2009-09-23
JP4513860B2 (ja) 2010-07-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition