GB2207804B - Pressure sensor and manufacturing process therefor - Google Patents

Pressure sensor and manufacturing process therefor

Info

Publication number
GB2207804B
GB2207804B GB8718624A GB8718624A GB2207804B GB 2207804 B GB2207804 B GB 2207804B GB 8718624 A GB8718624 A GB 8718624A GB 8718624 A GB8718624 A GB 8718624A GB 2207804 B GB2207804 B GB 2207804B
Authority
GB
United Kingdom
Prior art keywords
pressure sensor
manufacturing process
process therefor
therefor
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB8718624A
Other versions
GB8718624D0 (en
GB2207804A (en
Inventor
David William Satchell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STC PLC
Original Assignee
STC PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STC PLC filed Critical STC PLC
Priority to GB8718624A priority Critical patent/GB2207804B/en
Publication of GB8718624D0 publication Critical patent/GB8718624D0/en
Publication of GB2207804A publication Critical patent/GB2207804A/en
Application granted granted Critical
Publication of GB2207804B publication Critical patent/GB2207804B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
    • G01L23/18—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by resistance strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Measuring Fluid Pressure (AREA)
GB8718624A 1987-08-06 1987-08-06 Pressure sensor and manufacturing process therefor Expired - Fee Related GB2207804B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8718624A GB2207804B (en) 1987-08-06 1987-08-06 Pressure sensor and manufacturing process therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8718624A GB2207804B (en) 1987-08-06 1987-08-06 Pressure sensor and manufacturing process therefor

Publications (3)

Publication Number Publication Date
GB8718624D0 GB8718624D0 (en) 1987-09-09
GB2207804A GB2207804A (en) 1989-02-08
GB2207804B true GB2207804B (en) 1990-08-15

Family

ID=10621903

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8718624A Expired - Fee Related GB2207804B (en) 1987-08-06 1987-08-06 Pressure sensor and manufacturing process therefor

Country Status (1)

Country Link
GB (1) GB2207804B (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5310610A (en) * 1988-05-07 1994-05-10 Sharp Kabushiki Kaisha Silicon micro sensor and manufacturing method therefor
FR2643148B1 (en) * 1989-02-15 1991-12-06 Schlumberger Ind Sa SEMICONDUCTOR-ON-INSULATION PRESSURE SENSOR
DE4106102A1 (en) * 1991-02-27 1992-09-03 Bosch Gmbh Robert PRESSURE SENSOR FOR DETECTING PRINTERS IN THE COMBUSTION CHAMBER OF COMBUSTION ENGINES
EP0522567B1 (en) * 1991-07-12 1996-10-02 Terumo Kabushiki Kaisha Pressure converter
DE4137624A1 (en) * 1991-11-15 1993-05-19 Bosch Gmbh Robert SILICON CHIP FOR USE IN A FORCE SENSOR
JP2769661B2 (en) * 1992-09-29 1998-06-25 三菱電機株式会社 Semiconductor device and manufacturing method thereof
US5437189A (en) * 1994-05-03 1995-08-01 Motorola, Inc. Dual absolute pressure sensor and method thereof
JP3317084B2 (en) * 1995-03-31 2002-08-19 株式会社豊田中央研究所 Force sensing element and method of manufacturing the same
FR2827041B1 (en) * 2001-07-03 2003-12-12 Commissariat Energie Atomique PIEZORESISTIVE DEVICE AND METHODS OF MAKING THE DEVICE
DE102005027365A1 (en) * 2005-06-14 2006-12-21 Robert Bosch Gmbh High pressure sensor device and method for its production
DE102011112935B4 (en) * 2011-09-13 2015-02-12 Micronas Gmbh force sensor
CN112775619A (en) * 2019-11-11 2021-05-11 太原市精微测控技术有限公司 Method for processing elastic diaphragm of sputtering film pressure sensor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4510671A (en) * 1981-08-31 1985-04-16 Kulite Semiconductor Products, Inc. Dielectrically isolated transducer employing single crystal strain gages
GB2151398A (en) * 1983-12-14 1985-07-17 Hitachi Ltd A semiconductor pressure sensor and a method of manufacture thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4510671A (en) * 1981-08-31 1985-04-16 Kulite Semiconductor Products, Inc. Dielectrically isolated transducer employing single crystal strain gages
GB2151398A (en) * 1983-12-14 1985-07-17 Hitachi Ltd A semiconductor pressure sensor and a method of manufacture thereof

Also Published As

Publication number Publication date
GB8718624D0 (en) 1987-09-09
GB2207804A (en) 1989-02-08

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee