DE19519488B4 - Drehratensensor mit zwei Beschleunigungssensoren - Google Patents

Drehratensensor mit zwei Beschleunigungssensoren Download PDF

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Publication number
DE19519488B4
DE19519488B4 DE19519488A DE19519488A DE19519488B4 DE 19519488 B4 DE19519488 B4 DE 19519488B4 DE 19519488 A DE19519488 A DE 19519488A DE 19519488 A DE19519488 A DE 19519488A DE 19519488 B4 DE19519488 B4 DE 19519488B4
Authority
DE
Germany
Prior art keywords
rate
rotation sensor
acceleration sensors
acceleration
sensors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE19519488A
Other languages
English (en)
Other versions
DE19519488A1 (de
Inventor
Erich Zabler
Joerg Wolf
Markus Lutz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE19519488A priority Critical patent/DE19519488B4/de
Priority to US08/645,375 priority patent/US5703293A/en
Priority to JP12609596A priority patent/JP4456674B2/ja
Publication of DE19519488A1 publication Critical patent/DE19519488A1/de
Application granted granted Critical
Publication of DE19519488B4 publication Critical patent/DE19519488B4/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
DE19519488A 1995-05-27 1995-05-27 Drehratensensor mit zwei Beschleunigungssensoren Expired - Lifetime DE19519488B4 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE19519488A DE19519488B4 (de) 1995-05-27 1995-05-27 Drehratensensor mit zwei Beschleunigungssensoren
US08/645,375 US5703293A (en) 1995-05-27 1996-05-13 Rotational rate sensor with two acceleration sensors
JP12609596A JP4456674B2 (ja) 1995-05-27 1996-05-21 回転率センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19519488A DE19519488B4 (de) 1995-05-27 1995-05-27 Drehratensensor mit zwei Beschleunigungssensoren

Publications (2)

Publication Number Publication Date
DE19519488A1 DE19519488A1 (de) 1996-11-28
DE19519488B4 true DE19519488B4 (de) 2005-03-10

Family

ID=7763023

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19519488A Expired - Lifetime DE19519488B4 (de) 1995-05-27 1995-05-27 Drehratensensor mit zwei Beschleunigungssensoren

Country Status (3)

Country Link
US (1) US5703293A (de)
JP (1) JP4456674B2 (de)
DE (1) DE19519488B4 (de)

Families Citing this family (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3090024B2 (ja) * 1996-01-22 2000-09-18 株式会社村田製作所 角速度センサ
DE19703832A1 (de) * 1997-02-01 1998-08-06 Fag Automobiltechnik Ag Wälzlager, insbesondere Radlager für Kraftfahrzeuge
JP3931405B2 (ja) * 1997-04-10 2007-06-13 日産自動車株式会社 角速度センサ
DE19741537B4 (de) * 1997-09-20 2005-06-02 Volkswagen Ag Zweiachsiger mechanischer Beschleunigungssensor
US5905201A (en) * 1997-10-28 1999-05-18 Alliedsignal Inc. Micromachined rate and acceleration sensor and method
IL129654A (en) * 1999-04-28 2003-10-31 Rafael Armament Dev Authority Method and apparatus for determining the geographical heading of a body
US20040215387A1 (en) 2002-02-14 2004-10-28 Matsushita Electric Industrial Co., Ltd. Method for transmitting location information on a digital map, apparatus for implementing the method, and traffic information provision/reception system
JP3481168B2 (ja) 1999-08-27 2003-12-22 松下電器産業株式会社 デジタル地図の位置情報伝達方法
US6257059B1 (en) * 1999-09-24 2001-07-10 The Charles Stark Draper Laboratory, Inc. Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation
JP5041638B2 (ja) 2000-12-08 2012-10-03 パナソニック株式会社 デジタル地図の位置情報伝達方法とそれに使用する装置
JP4663136B2 (ja) 2001-01-29 2011-03-30 パナソニック株式会社 デジタル地図の位置情報伝達方法と装置
DE10108197A1 (de) * 2001-02-21 2002-09-12 Bosch Gmbh Robert Drehratensensor
DE10108196A1 (de) 2001-02-21 2002-10-24 Bosch Gmbh Robert Drehratensensor
DE10108198A1 (de) 2001-02-21 2002-09-12 Bosch Gmbh Robert Drehratensensor
JP2002296039A (ja) 2001-03-30 2002-10-09 Murata Mfg Co Ltd ジャイロ装置およびそれを用いた電子装置
JP4230132B2 (ja) 2001-05-01 2009-02-25 パナソニック株式会社 デジタル地図の形状ベクトルの符号化方法と位置情報伝達方法とそれを実施する装置
US7514283B2 (en) 2003-03-20 2009-04-07 Robert Bosch Gmbh Method of fabricating electromechanical device having a controlled atmosphere
US6936491B2 (en) 2003-06-04 2005-08-30 Robert Bosch Gmbh Method of fabricating microelectromechanical systems and devices having trench isolated contacts
US7075160B2 (en) 2003-06-04 2006-07-11 Robert Bosch Gmbh Microelectromechanical systems and devices having thin film encapsulated mechanical structures
US6952041B2 (en) 2003-07-25 2005-10-04 Robert Bosch Gmbh Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same
US7458263B2 (en) * 2003-10-20 2008-12-02 Invensense Inc. Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
US7068125B2 (en) 2004-03-04 2006-06-27 Robert Bosch Gmbh Temperature controlled MEMS resonator and method for controlling resonator frequency
US7464590B1 (en) * 2004-03-12 2008-12-16 Thomson Licensing Digitally programmable bandwidth for vibratory rate gyroscope
US7102467B2 (en) 2004-04-28 2006-09-05 Robert Bosch Gmbh Method for adjusting the frequency of a MEMS resonator
DE102004064066B4 (de) * 2004-06-09 2011-06-09 Fendt, Günter Verfahren zur Auswertung eines Drehratensignals eines Multifunktionsdrehratensensors
US7442570B2 (en) 2005-03-18 2008-10-28 Invensence Inc. Method of fabrication of a AL/GE bonding in a wafer packaging environment and a product produced therefrom
US7621183B2 (en) * 2005-11-18 2009-11-24 Invensense Inc. X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
US20070170528A1 (en) 2006-01-20 2007-07-26 Aaron Partridge Wafer encapsulated microelectromechanical structure and method of manufacturing same
US8020441B2 (en) * 2008-02-05 2011-09-20 Invensense, Inc. Dual mode sensing for vibratory gyroscope
US20100071467A1 (en) * 2008-09-24 2010-03-25 Invensense Integrated multiaxis motion sensor
US7796872B2 (en) * 2007-01-05 2010-09-14 Invensense, Inc. Method and apparatus for producing a sharp image from a handheld device containing a gyroscope
US8250921B2 (en) 2007-07-06 2012-08-28 Invensense, Inc. Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
US8141424B2 (en) * 2008-09-12 2012-03-27 Invensense, Inc. Low inertia frame for detecting coriolis acceleration
US20090265671A1 (en) * 2008-04-21 2009-10-22 Invensense Mobile devices with motion gesture recognition
US7934423B2 (en) * 2007-12-10 2011-05-03 Invensense, Inc. Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
US8047075B2 (en) 2007-06-21 2011-11-01 Invensense, Inc. Vertically integrated 3-axis MEMS accelerometer with electronics
US8462109B2 (en) * 2007-01-05 2013-06-11 Invensense, Inc. Controlling and accessing content using motion processing on mobile devices
US8508039B1 (en) 2008-05-08 2013-08-13 Invensense, Inc. Wafer scale chip scale packaging of vertically integrated MEMS sensors with electronics
US8952832B2 (en) 2008-01-18 2015-02-10 Invensense, Inc. Interfacing application programs and motion sensors of a device
DE102007060942A1 (de) 2007-12-18 2009-06-25 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
JP4968298B2 (ja) * 2009-09-04 2012-07-04 株式会社デンソー 振動型角速度センサ
US9097524B2 (en) 2009-09-11 2015-08-04 Invensense, Inc. MEMS device with improved spring system
US8534127B2 (en) 2009-09-11 2013-09-17 Invensense, Inc. Extension-mode angular velocity sensor
DE102010029565A1 (de) 2010-06-01 2011-12-01 Robert Bosch Gmbh Verfahren zum Betrieb einer Sensoranordnung und Sensoranordnung
DE102010029590B4 (de) 2010-06-01 2014-07-10 Robert Bosch Gmbh Drehratensensor, Sensoranordnung, Verfahren zum Betrieb eines Drehratensensors und Verfahren zum Betrieb einer Sensoranordnung
US8567246B2 (en) 2010-10-12 2013-10-29 Invensense, Inc. Integrated MEMS device and method of use
IL209261A0 (en) 2010-11-11 2011-01-31 Israel Aerospace Ind Ltd A system and method for north finding
DE102010062581A1 (de) 2010-12-08 2012-06-14 Robert Bosch Gmbh Drehratensensor, Sensorsystem, Verfahren zum Betrieb eines Drehratensensors und Verfahren zum Betrieb eines Sensorsystems
US8947081B2 (en) 2011-01-11 2015-02-03 Invensense, Inc. Micromachined resonant magnetic field sensors
US9664750B2 (en) 2011-01-11 2017-05-30 Invensense, Inc. In-plane sensing Lorentz force magnetometer
US8860409B2 (en) 2011-01-11 2014-10-14 Invensense, Inc. Micromachined resonant magnetic field sensors
EP3257074A1 (de) 2015-02-11 2017-12-20 InvenSense, Inc. 3d-integration mit eutektischer al-ge-gebundener verbindung
US10192850B1 (en) 2016-09-19 2019-01-29 Sitime Corporation Bonding process with inhibited oxide formation

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4032559A1 (de) * 1990-10-13 1992-04-16 Bosch Gmbh Robert Drehratensensor
DE4335219A1 (de) * 1993-10-15 1995-04-20 Bosch Gmbh Robert Drehratensensor und Verfahren zur Herstellung eines Drehratensensor
DE4442033A1 (de) * 1994-11-25 1996-05-30 Bosch Gmbh Robert Drehratensensor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4512192A (en) * 1983-09-02 1985-04-23 Sundstrand Data Control, Inc. Two axis angular rate and specific force sensor utilizing vibrating accelerometers
GB9111316D0 (en) * 1991-05-24 1991-07-17 Burdess James S Improvements in or relating to gyroscopic devices
IL103644A (en) * 1992-11-05 1995-03-30 Israel State Apparatus for measuring the rate of rotation and linear acceleration of a moving body in two perpendicular axes
FR2700012B1 (fr) * 1992-12-28 1995-03-03 Commissariat Energie Atomique Accéléromètre intégré à axe sensible parallèle au substrat.
DE69420481T2 (de) * 1993-01-29 2000-05-18 Murata Manufacturing Co Winkelgeschwindigkeitsmessaufnehmer
DE4400127C2 (de) * 1994-01-05 2003-08-14 Bosch Gmbh Robert Kapazitiver Beschleunigungssensor und Verfahren zu seiner Herstellung

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4032559A1 (de) * 1990-10-13 1992-04-16 Bosch Gmbh Robert Drehratensensor
DE4335219A1 (de) * 1993-10-15 1995-04-20 Bosch Gmbh Robert Drehratensensor und Verfahren zur Herstellung eines Drehratensensor
DE4442033A1 (de) * 1994-11-25 1996-05-30 Bosch Gmbh Robert Drehratensensor

Also Published As

Publication number Publication date
DE19519488A1 (de) 1996-11-28
US5703293A (en) 1997-12-30
JPH08327650A (ja) 1996-12-13
JP4456674B2 (ja) 2010-04-28

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