DE69625404D1 - Mikromechanischer Drucksensor mit erweitertem Messbereich - Google Patents

Mikromechanischer Drucksensor mit erweitertem Messbereich

Info

Publication number
DE69625404D1
DE69625404D1 DE1996625404 DE69625404A DE69625404D1 DE 69625404 D1 DE69625404 D1 DE 69625404D1 DE 1996625404 DE1996625404 DE 1996625404 DE 69625404 A DE69625404 A DE 69625404A DE 69625404 D1 DE69625404 D1 DE 69625404D1
Authority
DE
Germany
Prior art keywords
pressure sensor
measuring range
micromechanical pressure
extended measuring
extended
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1996625404
Other languages
English (en)
Other versions
DE69625404T2 (de
Inventor
Jacob H Martin
William P Kelley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Inc
Original Assignee
Varian Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US08/407,840 priority Critical patent/US5528939A/en
Application filed by Varian Inc filed Critical Varian Inc
Application granted granted Critical
Publication of DE69625404D1 publication Critical patent/DE69625404D1/de
Anticipated expiration legal-status Critical
Application status is Expired - Fee Related legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00Vacuum gauges
    • G01L21/16Vacuum gauges by measuring variation of frictional resistance of gases
    • G01L21/22Vacuum gauges by measuring variation of frictional resistance of gases using resonance effects of a vibrating body; Vacuum gauges of the Klumb type
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
DE1996625404 1995-03-21 1996-03-15 Mikromechanischer Drucksensor mit erweitertem Messbereich Expired - Fee Related DE69625404D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US08/407,840 US5528939A (en) 1995-03-21 1995-03-21 Micromechanical pressure gauge having extended sensor range

Publications (1)

Publication Number Publication Date
DE69625404D1 true DE69625404D1 (de) 2003-01-30

Family

ID=23613743

Family Applications (2)

Application Number Title Priority Date Filing Date
DE1996625404 Expired - Fee Related DE69625404D1 (de) 1995-03-21 1996-03-15 Mikromechanischer Drucksensor mit erweitertem Messbereich
DE69625404T Expired - Lifetime DE69625404T2 (de) 1995-03-21 1996-03-15 Mikromechanischer Drucksensor mit erweitertem Messbereich

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69625404T Expired - Lifetime DE69625404T2 (de) 1995-03-21 1996-03-15 Mikromechanischer Drucksensor mit erweitertem Messbereich

Country Status (4)

Country Link
US (1) US5528939A (de)
EP (1) EP0735354B1 (de)
JP (1) JPH08338776A (de)
DE (2) DE69625404D1 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1287123B1 (it) * 1996-10-31 1998-08-04 Abb Kent Taylor Spa Dispositivo per la misura di una pressione
US5939635A (en) * 1997-12-02 1999-08-17 Varian Inc. Micromechanical pressure sensor-with improved range
US6301973B1 (en) 1999-04-30 2001-10-16 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Non-intrusive pressure/multipurpose sensor and method
US6301965B1 (en) 1999-12-14 2001-10-16 Sandia Corporation Microelectromechanical accelerometer with resonance-cancelling control circuit including an idle state
US6393913B1 (en) 2000-02-08 2002-05-28 Sandia Corporation Microelectromechanical dual-mass resonator structure
DE10033182A1 (de) * 2000-07-07 2002-01-17 Mu Sen Mikrosystemtechnik Gmbh Vorrichtung und Verfahren zur Druckmessung
US6753664B2 (en) * 2001-03-22 2004-06-22 Creo Products Inc. Method for linearization of an actuator via force gradient modification
GB0116393D0 (en) * 2001-07-05 2001-08-29 Druck Ltd Improved sensor
JP2003266391A (ja) * 2002-03-19 2003-09-24 Japan Aviation Electronics Industry Ltd 静電駆動デバイス
JP2003266390A (ja) * 2002-03-19 2003-09-24 Japan Aviation Electronics Industry Ltd 静電駆動デバイス
US6575026B1 (en) 2002-06-28 2003-06-10 Eastman Kodak Company Measuring absolute static pressure at one or more positions along a microfluidic device
FI116097B (fi) * 2002-08-21 2005-09-15 Heikki Ruotoistenmaeki Voima- tai paineanturi ja menetelmä sen soveltamiseksi
US7047810B2 (en) * 2003-01-15 2006-05-23 Ahura Corporation Micro-electro-mechanical pressure sensor
US6843121B1 (en) 2003-08-25 2005-01-18 Eastman Kodak Company Measuring absolute static pressure at one or more positions along a microfluidic device
EP1530036B1 (de) * 2003-11-07 2007-04-18 VARIAN S.p.A. Druckaufnehmer
ITTO20050316A1 (it) 2005-05-10 2006-11-11 Varian Spa Sensore di pressione
DE102006024381B3 (de) * 2006-05-24 2007-12-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. MEMS Vakuumsensor nach dem Reibungsprinzip
KR100934217B1 (ko) * 2007-12-10 2009-12-29 한국전자통신연구원 진동 측정을 위한 미소센서
GB0809530D0 (en) * 2008-05-27 2008-07-02 Univ Durham Improved physical vapour deposition processes
JP5151934B2 (ja) * 2008-11-28 2013-02-27 富士電機株式会社 真空計
JP5151935B2 (ja) * 2008-11-28 2013-02-27 富士電機株式会社 真空計
CN102630298B (zh) * 2009-09-15 2014-08-13 佳能安内华股份有限公司 平均自由程测量装置、真空计和平均自由程测量方法
EP2309241B1 (de) 2009-10-07 2016-11-30 ams international AG MEMS-Drucksensor
JP5387467B2 (ja) * 2010-03-19 2014-01-15 富士電機株式会社 真空計
JP5387468B2 (ja) * 2010-03-19 2014-01-15 富士電機株式会社 真空計
JP5556363B2 (ja) * 2010-05-20 2014-07-23 富士電機株式会社 真空計
ITRM20110630A1 (it) * 2011-11-28 2013-05-29 Hypotheses S R L Trasduttore di pressione denominato lpcb
US8833171B2 (en) * 2012-08-23 2014-09-16 Nxp, B.V. Pressure sensor
US9290067B2 (en) * 2012-08-30 2016-03-22 Freescale Semiconductor, Inc. Pressure sensor with differential capacitive output
CN104880275A (zh) * 2015-06-08 2015-09-02 苏州谱道光电科技有限公司 一种样气压力测量装置
EP3211393A1 (de) * 2016-02-29 2017-08-30 ETH Zürich Mems-vorrichtung mit einer freigesetzten vorrichtungsschicht als membran

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS561327A (en) * 1979-06-19 1981-01-09 Nissan Motor Co Ltd Pressure detector
US4479070A (en) * 1983-06-10 1984-10-23 Sperry Corporation Vibrating quartz diaphragm pressure sensor
US4644804A (en) * 1984-07-17 1987-02-24 Franz Rittmeyer Ag Quartz resonating force and pressure transducer
JP2518814B2 (ja) * 1985-04-08 1996-07-31 株式会社日立製作所 真空計
JPS62218834A (en) * 1986-03-20 1987-09-26 Seiko Instr & Electronics Ltd Gas manometer
GB8610253D0 (en) * 1986-04-26 1986-05-29 Stc Plc Resonator device
CH687276A5 (de) * 1989-01-23 1996-10-31 Balzers Hochvakuum Stimmgabelquarz-Manometer.
EP0379841B2 (de) * 1989-01-23 1998-11-04 Balzers Aktiengesellschaft Gasdruck-Messgerät
US5060526A (en) * 1989-05-30 1991-10-29 Schlumberger Industries, Inc. Laminated semiconductor sensor with vibrating element
US5142912A (en) * 1990-06-15 1992-09-01 Honeywell Inc. Semiconductor pressure sensor
JPH0797060B2 (ja) * 1990-08-10 1995-10-18 バキュームプロダクツ株式会社 音叉型水晶振動子を用いた圧力の測定方法
US5136885A (en) * 1991-04-05 1992-08-11 Tif Instruments, Inc. Quartz crystal pressure sensor
DE4300893A1 (de) * 1993-01-15 1994-07-21 Bosch Gmbh Robert Drucksensor

Also Published As

Publication number Publication date
DE69625404T2 (de) 2004-06-09
EP0735354B1 (de) 2002-12-18
US5528939A (en) 1996-06-25
JPH08338776A (ja) 1996-12-24
EP0735354A1 (de) 1996-10-02

Similar Documents

Publication Publication Date Title
DE69733138D1 (de) Selbstprüfender temperatursensor
DE69739325D1 (de) Glukosesensor
DE69426774T2 (de) Kapazitiver Druckwandler mit justierbarer Durchführung
DK0795233T3 (da) Kapacitiv berøringssensor
DE69935301D1 (de) Steuerung des dynamischen Bereichs eines Anzeigegeräts
DE69920687D1 (de) Bildsensor mit erweitertem dynamikbereich
DE69620887D1 (de) Hochgenauer elektronischer füllstandsensor
DE69610574T2 (de) Sensorbefestigungsfuss
DE69617253D1 (de) Druckwandlereinheit mit nicht-kontaminierendem körper
DE69708214T2 (de) Sensorsystem zum prüfen der Eigenschaften von Papier
GB2304906B (en) Determining fluid properties
DE69809391D1 (de) Kleinvolumiger sensor zur in-vitro bestimmung
GB2250816B (en) Pressure sensor
DE69933040D1 (de) Durch massenrückfluss montierter bildsensor
DE69606173D1 (de) Indikator-tinte
DK1036345T3 (da) Sensor til måling af spænding
DE69523649D1 (de) Austauschbarer auf mehrere Messgrössen empfindlicher Wirbelsensor
DE69727756D1 (de) Drehgeschwindigkeitssensor
DE69806477D1 (de) Mikrotechnologischer strömungs-optischer gassensor
DK0732590T3 (da) Instrument til udlevering af sensorer til analyse af væsker
EP0430676A3 (en) Capacitive pressure sensor
AT211815T (de) Koordinatenmessgerät mit biegeelastischer tasterverlängerung und optischem sensor
DE69633682D1 (de) Mikromechanischer Kondensator
AU6145796A (en) Range gated strip proximity sensor
DE69527339D1 (de) Sensor und Verfahren zum Messen von Abständen zu einem Medium und/oder dessen physischen Eigenschaften

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee