DE69618042T2 - Drehgeschwindigkeitssensor - Google Patents

Drehgeschwindigkeitssensor

Info

Publication number
DE69618042T2
DE69618042T2 DE69618042T DE69618042T DE69618042T2 DE 69618042 T2 DE69618042 T2 DE 69618042T2 DE 69618042 T DE69618042 T DE 69618042T DE 69618042 T DE69618042 T DE 69618042T DE 69618042 T2 DE69618042 T2 DE 69618042T2
Authority
DE
Germany
Prior art keywords
angular velocity
velocity sensor
sensor
angular
velocity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69618042T
Other languages
English (en)
Other versions
DE69618042D1 (de
Inventor
Kazuhiro Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wacoh Corp
Wako KK
Original Assignee
Wacoh Corp
Wako KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacoh Corp, Wako KK filed Critical Wacoh Corp
Application granted granted Critical
Publication of DE69618042D1 publication Critical patent/DE69618042D1/de
Publication of DE69618042T2 publication Critical patent/DE69618042T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
DE69618042T 1995-02-21 1996-02-20 Drehgeschwindigkeitssensor Expired - Lifetime DE69618042T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP05669095A JP3585980B2 (ja) 1995-02-21 1995-02-21 角速度センサ

Publications (2)

Publication Number Publication Date
DE69618042D1 DE69618042D1 (de) 2002-01-31
DE69618042T2 true DE69618042T2 (de) 2002-08-14

Family

ID=13034453

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69634863T Expired - Lifetime DE69634863T2 (de) 1995-02-21 1996-02-20 Winkelgeschwindigkeitssensor
DE69618042T Expired - Lifetime DE69618042T2 (de) 1995-02-21 1996-02-20 Drehgeschwindigkeitssensor

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69634863T Expired - Lifetime DE69634863T2 (de) 1995-02-21 1996-02-20 Winkelgeschwindigkeitssensor

Country Status (4)

Country Link
US (1) US5668318A (de)
EP (2) EP1136790B1 (de)
JP (1) JP3585980B2 (de)
DE (2) DE69634863T2 (de)

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WO1991010118A1 (en) 1989-12-28 1991-07-11 Wacoh Corporation Apparatus for detecting physical quantity that acts as external force and method of testing and producing this apparatus
US6864677B1 (en) * 1993-12-15 2005-03-08 Kazuhiro Okada Method of testing a sensor
US6314823B1 (en) 1991-09-20 2001-11-13 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
US5421213A (en) * 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
US6282956B1 (en) 1994-12-29 2001-09-04 Kazuhiro Okada Multi-axial angular velocity sensor
US5646346A (en) * 1994-11-10 1997-07-08 Okada; Kazuhiro Multi-axial angular velocity sensor
JP3549590B2 (ja) * 1994-09-28 2004-08-04 和廣 岡田 加速度・角速度センサ
US6003371A (en) 1995-02-21 1999-12-21 Wacoh Corporation Angular velocity sensor
US6076401A (en) * 1996-07-10 2000-06-20 Wacoh Corporation Angular velocity sensor
JP4176849B2 (ja) * 1997-05-08 2008-11-05 株式会社ワコー センサの製造方法
DE19746127C1 (de) * 1997-10-18 1999-05-12 Bodenseewerk Geraetetech Sensor zur Messung von Drehraten und Verfahren zu seiner Herstellung
TW418318B (en) * 1998-07-27 2001-01-11 Hokuriku Electric Co Ltd Acceleration detecting apparatus
JP4295883B2 (ja) 1999-12-13 2009-07-15 株式会社ワコー 力検出装置
AU2001242885A1 (en) * 2000-06-23 2002-01-08 Meditron As Two-way mechano-electrical transducer
US6809529B2 (en) * 2001-08-10 2004-10-26 Wacoh Corporation Force detector
US7017410B2 (en) * 2001-08-10 2006-03-28 The Boeing Company Isolated resonator gyroscope with a drive and sense plate
US6853315B2 (en) * 2002-01-23 2005-02-08 Triad Sensors, Inc. Piezoelectric rate sensor system and method
JP2003329444A (ja) * 2002-03-07 2003-11-19 Alps Electric Co Ltd 静電容量式センサ
JP4216525B2 (ja) * 2002-05-13 2009-01-28 株式会社ワコー 加速度センサおよびその製造方法
US20040027033A1 (en) * 2002-08-08 2004-02-12 Schiller Peter J. Solid-state acceleration sensor device and method
JP4125931B2 (ja) * 2002-08-26 2008-07-30 株式会社ワコー 回転操作量の入力装置およびこれを利用した操作装置
US20040159166A1 (en) * 2003-02-13 2004-08-19 Schiller Peter J. Solid-state piezoelectric motion transducer
JP4907050B2 (ja) * 2003-03-31 2012-03-28 株式会社ワコー 力検出装置
JP4271475B2 (ja) * 2003-03-31 2009-06-03 株式会社ワコー 力検出装置
JP4387691B2 (ja) 2003-04-28 2009-12-16 株式会社ワコー 力検出装置
WO2005116580A1 (en) * 2003-05-08 2005-12-08 Triad Sensors, Inc. Force balanced piezoelectric rate sensor
JP4514509B2 (ja) * 2004-05-14 2010-07-28 アップサイド株式会社 力センサー、力検出システム及び力検出プログラム
GB0417683D0 (en) * 2004-08-09 2004-09-08 C13 Ltd Sensor
US20060049001A1 (en) * 2004-09-09 2006-03-09 Mark Streitman Driven pendulum apparatus and method of operation thereof
TW200630632A (en) * 2004-10-11 2006-09-01 Koninkl Philips Electronics Nv Non-linear magnetic field sensors and current sensors
DE102006062714B4 (de) * 2006-03-09 2013-02-21 Eppendorf Ag Vorrichtung zum Mischen von Laborgefäß-Inhalten
DE102006011370A1 (de) * 2006-03-09 2007-09-20 Eppendorf Ag Vorrichtung zum Mischen insbesondere von Laborgefäß-Inhalten mit einem Sensor
JP4333883B2 (ja) 2007-01-24 2009-09-16 ヤマハ株式会社 モーションセンサ及びその製造方法
JP2008190931A (ja) * 2007-02-02 2008-08-21 Wacoh Corp 加速度と角速度との双方を検出するセンサ
JP2009145301A (ja) * 2007-12-18 2009-07-02 Wacoh Corp 角速度センサ
US8091437B2 (en) * 2008-05-05 2012-01-10 John Stumpf Transducer matrix film
US8381601B2 (en) * 2008-05-05 2013-02-26 John F. Stumpf Transducer matrix film
JP2010169665A (ja) * 2008-12-24 2010-08-05 Canon Anelva Corp 静電容量型隔膜真空計、真空装置
JP4767327B2 (ja) * 2009-01-09 2011-09-07 株式会社ワコー 角速度センサ
JP5439068B2 (ja) * 2009-07-08 2014-03-12 株式会社ワコー 力検出装置
JP2011191318A (ja) * 2011-05-30 2011-09-29 Wacoh Corp 角速度センサ
US9383277B2 (en) 2013-07-17 2016-07-05 Wacoh Corporation Force sensor
JP5529328B1 (ja) 2013-09-04 2014-06-25 株式会社トライフォース・マネジメント 発電素子
CN103913158B (zh) * 2014-03-14 2017-04-12 上海交通大学 磁电式科里奥利力检测传感器
US10416030B2 (en) 2015-01-26 2019-09-17 Wacoh-Tech Inc. Force sensor
US9267824B1 (en) * 2015-02-02 2016-02-23 Goodrich Corporation Sensor systems
US10378934B2 (en) * 2015-02-02 2019-08-13 Goodrich Corporation Sensor systems
WO2016163033A1 (ja) 2015-04-07 2016-10-13 株式会社トライフォース・マネジメント 力覚センサおよびこれに用いる構造体
JP5996078B1 (ja) 2015-10-19 2016-09-21 株式会社トライフォース・マネジメント 発電素子

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US3323377A (en) * 1963-10-04 1967-06-06 Ling Temco Vought Inc Fixed axis rate gyroscope
US3486383A (en) * 1965-01-04 1969-12-30 Singer General Precision Vibrating beam transducer
US3375722A (en) * 1965-01-04 1968-04-02 Gen Precision Inc Linear and angular velocity and acceleration measuring instrument
US4431935A (en) * 1981-09-15 1984-02-14 Rockwell International Corporation Sensor structure incorporating multiple piezoelectric generators
US4445376A (en) * 1982-03-12 1984-05-01 Technion Research And Development Foundation Ltd. Apparatus and method for measuring specific force and angular rate
US4590801A (en) * 1983-09-02 1986-05-27 Sundstrand Data Control, Inc. Apparatus for measuring inertial specific force and angular rate of a moving body
US4870588A (en) * 1985-10-21 1989-09-26 Sundstrand Data Control, Inc. Signal processor for inertial measurement using coriolis force sensing accelerometer arrangements
EP0625701A1 (de) * 1987-04-24 1994-11-23 Enplas Laboratories, Inc. Kraftwandler mit piezoresistiven Elementen
US5182515A (en) * 1987-04-24 1993-01-26 Wacoh Corporation Detector for magnetism using a resistance element
US4905523A (en) * 1987-04-24 1990-03-06 Wacoh Corporation Force detector and moment detector using resistance element
WO1989002587A1 (en) * 1987-09-18 1989-03-23 Kazuhiro Okada Force detection apparatus using resistance element and its application
US5263375A (en) * 1987-09-18 1993-11-23 Wacoh Corporation Contact detector using resistance elements and its application
US5035148A (en) * 1989-02-01 1991-07-30 Wacoh Corporation Force detector using resistance elements
JP2681215B2 (ja) * 1989-05-29 1997-11-26 株式会社ワコー 積層基板を用いたセンサの製造方法
WO1991010118A1 (en) * 1989-12-28 1991-07-11 Wacoh Corporation Apparatus for detecting physical quantity that acts as external force and method of testing and producing this apparatus
US5421213A (en) * 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
JP2637630B2 (ja) * 1991-01-30 1997-08-06 三菱電機株式会社 制御情報の検出方法及び装置
JP3141954B2 (ja) * 1991-07-17 2001-03-07 株式会社ワコー 圧電素子を用いた力・加速度・磁気のセンサ
JP3027457B2 (ja) * 1991-10-25 2000-04-04 和廣 岡田 多次元方向に関する力・加速度・磁気の検出装置
JPH05215627A (ja) * 1992-02-04 1993-08-24 Kazuhiro Okada 多次元方向に関する力・加速度・磁気の検出装置
EP0662601B1 (de) * 1993-03-30 1998-12-30 OKADA, Kazuhiro Mehrachsen-winkelgeschwindigkeits-messaufnehmer

Also Published As

Publication number Publication date
EP1136790B1 (de) 2005-06-15
DE69634863D1 (de) 2005-07-21
EP1136790A3 (de) 2001-10-17
EP0729009B1 (de) 2001-12-19
JPH08226931A (ja) 1996-09-03
EP1136790A2 (de) 2001-09-26
US5668318A (en) 1997-09-16
DE69634863T2 (de) 2006-05-11
JP3585980B2 (ja) 2004-11-10
EP0729009A2 (de) 1996-08-28
EP0729009A3 (de) 1998-03-11
DE69618042D1 (de) 2002-01-31

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Legal Events

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8364 No opposition during term of opposition