DE69628981D1 - Drehgeschwindigkeitssensor - Google Patents

Drehgeschwindigkeitssensor

Info

Publication number
DE69628981D1
DE69628981D1 DE69628981T DE69628981T DE69628981D1 DE 69628981 D1 DE69628981 D1 DE 69628981D1 DE 69628981 T DE69628981 T DE 69628981T DE 69628981 T DE69628981 T DE 69628981T DE 69628981 D1 DE69628981 D1 DE 69628981D1
Authority
DE
Germany
Prior art keywords
speed sensor
rotary speed
rotary
sensor
speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69628981T
Other languages
English (en)
Other versions
DE69628981T2 (de
Inventor
Masashi Konno
Sumio Sugawara
Nobuhisa Atoji
Jiro Terada
Masami Tamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP07871395A external-priority patent/JP3360478B2/ja
Priority claimed from JP07871495A external-priority patent/JP3360479B2/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE69628981D1 publication Critical patent/DE69628981D1/de
Publication of DE69628981T2 publication Critical patent/DE69628981T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
DE69628981T 1995-04-04 1996-04-04 Drehgeschwindigkeitssensor Expired - Fee Related DE69628981T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP07871395A JP3360478B2 (ja) 1995-04-04 1995-04-04 セラミック圧電複合形角速度センサ
JP7871495 1995-04-04
JP7871395 1995-04-04
JP07871495A JP3360479B2 (ja) 1995-04-04 1995-04-04 角速度センサ
PCT/JP1996/000926 WO1996031754A1 (fr) 1995-04-04 1996-04-04 Capteur de vitesse angulaire

Publications (2)

Publication Number Publication Date
DE69628981D1 true DE69628981D1 (de) 2003-08-14
DE69628981T2 DE69628981T2 (de) 2004-01-08

Family

ID=26419763

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69628981T Expired - Fee Related DE69628981T2 (de) 1995-04-04 1996-04-04 Drehgeschwindigkeitssensor

Country Status (4)

Country Link
US (4) US5824900A (de)
EP (1) EP0764828B1 (de)
DE (1) DE69628981T2 (de)
WO (1) WO1996031754A1 (de)

Families Citing this family (60)

* Cited by examiner, † Cited by third party
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WO1996031754A1 (fr) * 1995-04-04 1996-10-10 Matsushita Electric Industrial Co., Ltd. Capteur de vitesse angulaire
JP3369033B2 (ja) * 1995-08-31 2003-01-20 アルプス電気株式会社 振動型ジャイロスコープ
JP3805837B2 (ja) * 1996-08-12 2006-08-09 トヨタ自動車株式会社 角速度検出装置
US6747393B2 (en) 1996-11-26 2004-06-08 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
US5998911A (en) * 1996-11-26 1999-12-07 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
US6018212A (en) 1996-11-26 2000-01-25 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
US6437483B2 (en) 1996-11-26 2002-08-20 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
US6281619B1 (en) * 1997-05-09 2001-08-28 Citizen Watch Co., Ltd. Vibration gyro
JP3336451B2 (ja) * 1997-08-22 2002-10-21 富士通株式会社 音叉型振動ジャイロ
JPH1194554A (ja) * 1997-09-17 1999-04-09 Fujitsu Ltd 音叉型圧電振動ジャイロ
US6186003B1 (en) * 1997-10-06 2001-02-13 Ngk Insulators, Ltd. Vibratory gyroscope, vibrator used in this gyroscope, method for analyzing vibration of the vibrator, method for supporting the vibrator, and method for manufacturing the vibratory gyroscope
US6651498B1 (en) 1997-10-06 2003-11-25 Ngk Insulators, Ltd. Vibratory gyroscope, vibrator used in this gyroscope, method for analyzing vibration of the vibrator, method for supporting the vibrator, and method for manufacturing the vibratory gyroscope
US6151965A (en) * 1998-01-21 2000-11-28 Denso Corporation Structure of angular rate sensor for minimizing output noise
US6257058B1 (en) * 1998-04-27 2001-07-10 Alps Electric Co., Ltd. Silicon gyroscope and method of driving the same
JP2000009469A (ja) * 1998-06-18 2000-01-14 Fujitsu Ltd 圧電ジャイロおよびその駆動方法
WO2000005812A1 (fr) * 1998-07-24 2000-02-03 Seiko Epson Corporation Oscillateur piezoelectrique et son procede de production
US6644849B1 (en) * 1999-09-20 2003-11-11 Honeywell International, Inc. Low precision temperature sensor for aircraft applications
JP4058223B2 (ja) * 1999-10-01 2008-03-05 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
FR2812386B1 (fr) * 2000-07-28 2002-11-15 Sagem Gyrometre a poutres vibrantes, a excitation piezo-electrique
JP3477618B2 (ja) * 2000-10-31 2003-12-10 有限会社ピエデック技術研究所 屈曲水晶振動子
US6742389B2 (en) * 2001-01-24 2004-06-01 The Regents Of The University Of Michigan Filter-based method and system for measuring angular speed of an object
JP3627665B2 (ja) * 2001-04-11 2005-03-09 株式会社デンソー 角速度センサ
US20030105558A1 (en) * 2001-11-28 2003-06-05 Steele Robert C. Multimedia racing experience system and corresponding experience based displays
US7265663B2 (en) 2001-11-28 2007-09-04 Trivinci Systems, Llc Multimedia racing experience system
JP4008258B2 (ja) * 2002-02-15 2007-11-14 セイコーインスツル株式会社 圧電振動子の製造方法
US6791243B2 (en) * 2002-03-06 2004-09-14 Piedek Technical Laboratory Quartz crystal unit and its manufacturing method
JP4305623B2 (ja) 2002-03-13 2009-07-29 セイコーエプソン株式会社 振動子および振動型ジャイロスコープ
JP2003318699A (ja) * 2002-04-23 2003-11-07 Piedekku Gijutsu Kenkyusho:Kk 水晶ユニットとその製造方法
US6858972B2 (en) * 2002-06-21 2005-02-22 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
JP4049017B2 (ja) * 2003-05-16 2008-02-20 セイコーエプソン株式会社 圧電振動子
US11563406B2 (en) 2003-06-30 2023-01-24 Piedek Technical Laboratory Quartz crystal resonator, quartz crystal unit, and quartz crystal oscillator
US8358053B2 (en) * 2003-06-30 2013-01-22 Piedek Technical Laboratory Unit, oscillator having unit and electronic apparatus having oscillator
US10199556B2 (en) * 2003-06-30 2019-02-05 Piedek Technical Laboratory Unit, oscillator and electronic apparatus
JP2005070030A (ja) * 2003-08-04 2005-03-17 Seiko Epson Corp ジャイロ振動子及び電子機器
JP2005114631A (ja) * 2003-10-09 2005-04-28 Sony Corp 角速度センサ
JP2006030125A (ja) * 2004-07-21 2006-02-02 Fujitsu Media Device Kk 角速度センサ
JP4301200B2 (ja) * 2004-10-20 2009-07-22 セイコーエプソン株式会社 圧電振動片および圧電デバイス
JP2006250769A (ja) * 2005-03-11 2006-09-21 Seiko Epson Corp 振動ジャイロ素子
US20060238078A1 (en) * 2005-04-21 2006-10-26 Honeywell International, Inc. Wireless and passive acoustic wave rotation rate sensor
JP2007285977A (ja) * 2006-04-19 2007-11-01 Fujitsu Media Device Kk 角速度センサ
US7673512B2 (en) * 2006-10-30 2010-03-09 Sony Corporation Angular velocity sensor and electronic device
JP2008157748A (ja) 2006-12-22 2008-07-10 Fujitsu Media Device Kk 角速度センサ
JP2008157810A (ja) * 2006-12-25 2008-07-10 Tdk Corp 角速度センサ素子および角速度センサ装置
JP4395171B2 (ja) * 2007-02-23 2010-01-06 多摩川精機株式会社 角速度センサおよびその製造方法
US8004165B2 (en) * 2007-09-05 2011-08-23 Seiko Epson Corporation Tuning fork oscillating piece, tuning fork oscillator, and acceleration sensor
JP4594412B2 (ja) * 2008-05-22 2010-12-08 日本電波工業株式会社 圧電振動片および圧電デバイス
US8446079B2 (en) * 2008-05-23 2013-05-21 Statek Corporation Piezoelectric resonator with vibration isolation
JP4640459B2 (ja) * 2008-07-04 2011-03-02 ソニー株式会社 角速度センサ
JP5560806B2 (ja) * 2010-03-19 2014-07-30 セイコーエプソン株式会社 ジャイロ素子、ジャイロセンサー、および電子機器
JP5652155B2 (ja) 2010-11-24 2015-01-14 セイコーエプソン株式会社 振動片、センサーユニット、電子機器、振動片の製造方法、および、センサーユニットの製造方法
US8955382B2 (en) * 2011-03-10 2015-02-17 Honeywell International Inc. High performance double-ended tuning fork
US9389413B2 (en) * 2011-07-06 2016-07-12 Cornell University Optomechanical oscillator network, control and synchronization methods, and applications
CN103245339B (zh) 2012-02-14 2017-05-24 精工爱普生株式会社 振动片、传感器单元以及电子设备
JP6007541B2 (ja) * 2012-03-28 2016-10-12 セイコーエプソン株式会社 振動片およびその製造方法並びにジャイロセンサーおよび電子機器および移動体
CN105210295B (zh) 2013-05-13 2017-10-03 株式会社村田制作所 振动装置
SG11201508860QA (en) * 2013-05-13 2015-11-27 Murata Manufacturing Co Vibrating device
WO2016052260A1 (ja) * 2014-09-29 2016-04-07 株式会社村田製作所 共振装置
WO2018021166A1 (ja) * 2016-07-26 2018-02-01 京セラ株式会社 角速度センサ、センサ素子および多軸角速度センサ
US10190928B1 (en) 2016-11-17 2019-01-29 X Development Llc Flexible sensor for measuring flex or torque
US11448661B2 (en) * 2019-01-03 2022-09-20 Viettel Group Coaxial angular velocity sensor system

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02129514A (ja) * 1988-11-10 1990-05-17 Canon Inc 角速度センサー
JPH0760093B2 (ja) * 1989-10-03 1995-06-28 赤井電機株式会社 振動ジャイロ
JPH05231870A (ja) * 1992-02-24 1993-09-07 Nec Home Electron Ltd 半導体振動ジャイロ
JP3120415B2 (ja) 1993-05-21 2000-12-25 株式会社ニッショー 洗浄吸引カテーテル
JPH0894362A (ja) * 1994-09-20 1996-04-12 Yoshiro Tomikawa 振動型ジャイロスコープ
WO1996031754A1 (fr) * 1995-04-04 1996-10-10 Matsushita Electric Industrial Co., Ltd. Capteur de vitesse angulaire
GB2301671B (en) * 1995-05-30 1999-10-13 Allied Signal Inc Angular rate sensor electronic balance

Also Published As

Publication number Publication date
EP0764828A1 (de) 1997-03-26
EP0764828A4 (de) 1999-04-28
US6119519A (en) 2000-09-19
EP0764828B1 (de) 2003-07-09
US5824900A (en) 1998-10-20
WO1996031754A1 (fr) 1996-10-10
US6298723B1 (en) 2001-10-09
US6237415B1 (en) 2001-05-29
DE69628981T2 (de) 2004-01-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee