DE69525935D1 - Beschleunigungssensor - Google Patents

Beschleunigungssensor

Info

Publication number
DE69525935D1
DE69525935D1 DE69525935T DE69525935T DE69525935D1 DE 69525935 D1 DE69525935 D1 DE 69525935D1 DE 69525935 T DE69525935 T DE 69525935T DE 69525935 T DE69525935 T DE 69525935T DE 69525935 D1 DE69525935 D1 DE 69525935D1
Authority
DE
Germany
Prior art keywords
acceleration sensor
acceleration
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69525935T
Other languages
English (en)
Other versions
DE69525935T2 (de
Inventor
Norihiro Asada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Signal Co Ltd
Original Assignee
Nippon Signal Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Signal Co Ltd filed Critical Nippon Signal Co Ltd
Priority claimed from PCT/JP1995/002556 external-priority patent/WO1996019733A1/ja
Publication of DE69525935D1 publication Critical patent/DE69525935D1/de
Application granted granted Critical
Publication of DE69525935T2 publication Critical patent/DE69525935T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/11—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by inductive pick-up

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
DE69525935T 1994-12-20 1995-12-13 Beschleunigungssensor Expired - Fee Related DE69525935T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9402158 1994-12-20
PCT/JP1995/002556 WO1996019733A1 (fr) 1994-12-20 1995-12-13 Capteur d'acceleration

Publications (2)

Publication Number Publication Date
DE69525935D1 true DE69525935D1 (de) 2002-04-25
DE69525935T2 DE69525935T2 (de) 2002-11-28

Family

ID=56289673

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69525935T Expired - Fee Related DE69525935T2 (de) 1994-12-20 1995-12-13 Beschleunigungssensor

Country Status (3)

Country Link
US (1) US5763783A (de)
EP (1) EP0745858B1 (de)
DE (1) DE69525935T2 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2761772B1 (fr) 1997-04-07 1999-05-21 Suisse Electronique Microtech Capteur inductif micro-usine, notamment pour la mesure de la position et/ou du mouvement d'un objet
US6332359B1 (en) * 1997-04-24 2001-12-25 Fuji Electric Co., Ltd. Semiconductor sensor chip and method for producing the chip, and semiconductor sensor and package for assembling the sensor
TW425478B (en) * 1997-09-26 2001-03-11 Hokuriku Elect Ind Acceleration sensor and 3-axis acceleration sensor
JP4487710B2 (ja) * 2004-09-28 2010-06-23 ヤマハ株式会社 センサ及び同センサを用いた物理量の測定方法
US7698941B2 (en) * 2007-06-20 2010-04-20 Headway Technologies, Inc. Sensing unit and method of making same
US7628071B2 (en) * 2007-06-20 2009-12-08 Headway Techologies, Inc. Sensing unit and method of making same
US7784344B2 (en) * 2007-11-29 2010-08-31 Honeywell International Inc. Integrated MEMS 3D multi-sensor
US20100305427A1 (en) * 2009-06-01 2010-12-02 General Electric Company Long-range planar sensor array for use in a surgical navigation system
JP5223003B2 (ja) * 2009-06-03 2013-06-26 アルプス電気株式会社 物理量センサ
US9291636B1 (en) * 2010-03-23 2016-03-22 University Of Washington Through Its Center For Commercialization Methods and systems for detecting acceleration using bondwires
US8925384B2 (en) * 2012-05-29 2015-01-06 Freescale Semiconductor, Inc. MEMS sensor with stress isolation and method of fabrication
US9297824B2 (en) * 2012-09-14 2016-03-29 Intel Corporation Techniques, systems and devices related to acceleration measurement
US9429427B2 (en) * 2012-12-19 2016-08-30 Intel Corporation Inductive inertial sensor architecture and fabrication in packaging build-up layers
US9250261B2 (en) * 2012-12-28 2016-02-02 Intel Corporation Method, apparatus and system for providing metering of acceleration
US9791470B2 (en) * 2013-12-27 2017-10-17 Intel Corporation Magnet placement for integrated sensor packages
CN105182003B (zh) * 2015-07-14 2018-02-13 重庆大学 具有缓冲结构的扭摆式差分电容加速度计及制备方法
CN105137117B (zh) * 2015-09-10 2017-12-26 重庆大学 一种mems电涡流加速度计及制备方法
EP3384590B1 (de) * 2015-12-03 2020-04-15 Koninklijke Philips N.V. Energieerzeugungssystem und -verfahren

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4342227A (en) * 1980-12-24 1982-08-03 International Business Machines Corporation Planar semiconductor three direction acceleration detecting device and method of fabrication
US4553436A (en) * 1982-11-09 1985-11-19 Texas Instruments Incorporated Silicon accelerometer
US4503922A (en) * 1983-05-26 1985-03-12 Bitronics, Inc. Electronic bathroom scale apparatus using planar coil sensors
JPH0228563A (ja) * 1988-07-19 1990-01-30 Ricoh Co Ltd 振動センサ
JP2700929B2 (ja) * 1989-08-28 1998-01-21 株式会社ゼクセル 加速度センサ
JPH0526902A (ja) * 1991-07-22 1993-02-05 Hitachi Ltd 加速度センサ及びこれを用いたアンチロツクブレーキシステム、アクテイブサスペンシヨンシステム、エアバツグシステム
JPH05142246A (ja) * 1991-11-18 1993-06-08 Omron Corp 加速度センサ
US5524490A (en) * 1994-05-25 1996-06-11 Delco Electronics Corporation Inductive proximity sensor

Also Published As

Publication number Publication date
DE69525935T2 (de) 2002-11-28
EP0745858B1 (de) 2002-03-20
EP0745858A4 (de) 1998-12-30
US5763783A (en) 1998-06-09
EP0745858A1 (de) 1996-12-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: GROSSE, BOCKHORNI, SCHUMACHER, 81476 MUENCHEN

8339 Ceased/non-payment of the annual fee