DE69510569D1 - Beschleunigungsmessaufnehmer - Google Patents

Beschleunigungsmessaufnehmer

Info

Publication number
DE69510569D1
DE69510569D1 DE69510569T DE69510569T DE69510569D1 DE 69510569 D1 DE69510569 D1 DE 69510569D1 DE 69510569 T DE69510569 T DE 69510569T DE 69510569 T DE69510569 T DE 69510569T DE 69510569 D1 DE69510569 D1 DE 69510569D1
Authority
DE
Germany
Prior art keywords
accelerometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69510569T
Other languages
English (en)
Other versions
DE69510569T2 (de
Inventor
Takashi Hosoi
Satoshi Hiyama
Sukeyuki Shinotuka
Mizuho Doi
Hiroshi Yamakawa
Nariaki Kuriyama
Tomoyuki Nishio
Atsushi Inaba
Nobuhiro Fueki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honda Motor Co Ltd
Original Assignee
Honda Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP00444494A external-priority patent/JP3363983B2/ja
Priority claimed from JP00581194A external-priority patent/JP3332280B2/ja
Priority claimed from JP06432294A external-priority patent/JP3345695B2/ja
Priority claimed from JP05412194A external-priority patent/JP3332283B2/ja
Application filed by Honda Motor Co Ltd filed Critical Honda Motor Co Ltd
Publication of DE69510569D1 publication Critical patent/DE69510569D1/de
Application granted granted Critical
Publication of DE69510569T2 publication Critical patent/DE69510569T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/006—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of fluid seismic masses
    • G01P15/008—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of fluid seismic masses by using thermal pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
DE69510569T 1994-01-20 1995-01-20 Beschleunigungsmessaufnehmer Expired - Lifetime DE69510569T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP00444494A JP3363983B2 (ja) 1994-01-20 1994-01-20 ヒートワイヤ型加速度検出器
JP00581194A JP3332280B2 (ja) 1994-01-24 1994-01-24 ヒートワイヤ型加速度検出器
JP06432294A JP3345695B2 (ja) 1994-02-23 1994-02-23 加速度センサ
JP05412194A JP3332283B2 (ja) 1994-03-24 1994-03-24 多軸加速度センサ

Publications (2)

Publication Number Publication Date
DE69510569D1 true DE69510569D1 (de) 1999-08-12
DE69510569T2 DE69510569T2 (de) 1999-10-28

Family

ID=27454083

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69510569T Expired - Lifetime DE69510569T2 (de) 1994-01-20 1995-01-20 Beschleunigungsmessaufnehmer

Country Status (3)

Country Link
US (2) US5719333A (de)
EP (1) EP0664456B1 (de)
DE (1) DE69510569T2 (de)

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US5835077A (en) * 1995-01-13 1998-11-10 Remec, Inc., Computer control device
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US6589433B2 (en) 1996-06-26 2003-07-08 Simon Fraser University Accelerometer without proof mass
US6182509B1 (en) 1996-06-26 2001-02-06 Simon Fraser University Accelerometer without proof mass
US6744346B1 (en) * 1998-02-27 2004-06-01 Micron Technology, Inc. Electronic device workpieces, methods of semiconductor processing and methods of sensing temperature of an electronic device workpiece
DE19810286A1 (de) * 1998-03-10 1999-09-23 Siemens Ag Mikrosensor, Verfahren zu seiner Herstellung und Verfahren zum Betreiben eines Mikrosensors
WO1999046559A1 (en) * 1998-03-12 1999-09-16 Honeywell Inc. Orientation/attitude sensor
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US6229322B1 (en) * 1998-08-21 2001-05-08 Micron Technology, Inc. Electronic device workpiece processing apparatus and method of communicating signals within an electronic device workpiece processing apparatus
US6967497B1 (en) * 1998-08-21 2005-11-22 Micron Technology, Inc. Wafer processing apparatuses and electronic device workpiece processing apparatuses
CA2254535C (en) 1998-11-26 2003-10-28 Canpolar East Inc. Sensor for detection of acceleration and attitude within a vehicle
CA2254538C (en) 1998-11-26 2006-02-07 Canpolar East Inc. Collision deformation sensor for use in the crush zone of a vehicle
US6171880B1 (en) 1999-06-14 2001-01-09 The United States Of America As Represented By The Secretary Of Commerce Method of manufacture of convective accelerometers
WO2001046701A1 (de) 1999-12-20 2001-06-28 Ploechinger Heinz Sensor zur erfassung einer drehbewegung oder einer drehbeschleunigung
US6795752B1 (en) 2000-11-03 2004-09-21 Memsic, Inc. Thermal convection accelerometer with closed-loop heater control
FR2817351B1 (fr) * 2000-11-27 2003-02-14 Sagem Procede et dispositif de mesure thermique d'une acceleration
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FR2832802B1 (fr) * 2001-11-27 2004-04-23 Sagem Accelerometre thermique
DE10160353B4 (de) * 2001-12-08 2005-07-28 Robert Bosch Gmbh Anordnung und Verfahren zur Ermittlung von Kenngrößen
FR2838522B1 (fr) * 2002-04-12 2004-06-25 Sagem Capteur inertiel a sonde de temperature integree
DE10230198A1 (de) * 2002-07-05 2004-01-22 Robert Bosch Gmbh Sensor mit einer Heizeinrichtung und Verfahren
TW574128B (en) * 2002-11-29 2004-02-01 Lightuning Tech Inc Thermal bubble type micro-machined inertial sensor
US6884458B2 (en) * 2002-12-04 2005-04-26 The Board Of Trustees Of The University Of Illinois Sensor for monitoring material deposition and method of monitoring material deposition
FR2864247B1 (fr) * 2003-12-22 2006-02-03 Sagem Accelerometre thermique a sensibilite reduite a un champ magnetique externe
WO2005078458A1 (en) 2004-02-05 2005-08-25 Analog Devices, Inc. Capped sensor
JP4045549B2 (ja) * 2004-02-12 2008-02-13 株式会社デンソー 水素濃度検出装置及び水素濃度検出方法
NL1025834C2 (nl) * 2004-03-26 2005-09-27 Esquisse Schoonhoven Transportmiddel voorzien van een beladingsmeter.
US20050236080A1 (en) * 2004-04-26 2005-10-27 Allen Potter Golf bag cover
US7516660B2 (en) 2004-05-21 2009-04-14 Met Tech, Inc. Convective accelerometer
US7305881B2 (en) * 2004-06-09 2007-12-11 Memsic, Inc. Method and circuitry for thermal accelerometer signal conditioning
US7392703B2 (en) * 2004-06-09 2008-07-01 Memsic, Inc. Z-axis thermal accelerometer
KR100552480B1 (ko) * 2004-07-08 2006-02-15 삼성전자주식회사 마이크로 가속도계
US8746812B2 (en) 2004-10-08 2014-06-10 Marcia Albright Brake control unit
US8789896B2 (en) 2004-10-08 2014-07-29 Cequent Electrical Products Brake control unit
US20060179940A1 (en) * 2005-02-11 2006-08-17 Finemems Inc. Ultra-small Profile, Low Cost Chip Scale Accelerometers of Two and Three Axes Based on Wafer Level Packaging
JP2006258678A (ja) * 2005-03-18 2006-09-28 Hitachi Ltd 熱式流量計測装置
FR2885700B1 (fr) * 2005-05-13 2007-08-17 Sagem Defense Securite Accelerometre thermique a detection et contre-reaction multiplexees
FR2886021B1 (fr) * 2005-05-17 2007-08-17 Sagem Defense Securite Systeme de mesure d'acceleration a cellules thermiques
US7424826B2 (en) * 2005-11-10 2008-09-16 Memsic, Inc. Single chip tri-axis accelerometer
JP4955334B2 (ja) * 2006-08-03 2012-06-20 ローム株式会社 加速度センサ
DE102007021172B4 (de) * 2007-05-05 2010-11-18 Refractory Intellectual Property Gmbh & Co. Kg Verwendung eines Sensors
US20090306924A1 (en) * 2008-06-10 2009-12-10 Datalogic Scanning, Inc. Automatic calibration system for scanner-scale or other scale system
US8011226B2 (en) * 2008-08-26 2011-09-06 Memsic, Inc. Leakage detection method using micromachined-thermal-convection accelerometer
TWI408372B (zh) * 2009-08-14 2013-09-11 Univ Chung Hua 應用無線射頻識別標籤技術之熱氣泡式加速儀及其製備方法
CN102012437B (zh) * 2009-09-08 2013-07-10 中华大学 应用无线射频识别标签技术的热气泡式加速仪及制备方法
WO2012172528A1 (en) * 2011-06-17 2012-12-20 Universidade Do Minho 3 axis polymeric accelerometer and method of production
US20130138393A1 (en) * 2011-11-30 2013-05-30 Karl S. Weibezahn Inclinometer
JP5902305B2 (ja) 2012-09-12 2016-04-13 ルネサスエレクトロニクス株式会社 半導体装置
TWI477779B (zh) * 2013-06-11 2015-03-21 Univ Chung Hua 熱對流式線性加速儀
US10345329B2 (en) * 2015-07-07 2019-07-09 Panasonic Intellectual Property Management Co., Ltd. Inertial force sensor
WO2018053409A1 (en) 2016-09-16 2018-03-22 Horizon Global Americas Inc. Driver and diagnostic system for a brake controller
AU2017370920A1 (en) 2016-12-07 2019-07-25 Horizon Global Americas Inc. Automated gain and boost for a brake controller

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JP3247533B2 (ja) * 1994-02-04 2002-01-15 本田技研工業株式会社 半導体ガスレートセンサの製造方法
US5581034A (en) * 1995-01-13 1996-12-03 Remec, Inc. Convective accelerometer and inclinometer

Also Published As

Publication number Publication date
US5719333A (en) 1998-02-17
EP0664456B1 (de) 1999-07-07
EP0664456A1 (de) 1995-07-26
DE69510569T2 (de) 1999-10-28
US5945601A (en) 1999-08-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition