DE69405651D1 - Beschleunigungsmessaufnehmer - Google Patents

Beschleunigungsmessaufnehmer

Info

Publication number
DE69405651D1
DE69405651D1 DE69405651T DE69405651T DE69405651D1 DE 69405651 D1 DE69405651 D1 DE 69405651D1 DE 69405651 T DE69405651 T DE 69405651T DE 69405651 T DE69405651 T DE 69405651T DE 69405651 D1 DE69405651 D1 DE 69405651D1
Authority
DE
Germany
Prior art keywords
accelerometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69405651T
Other languages
English (en)
Other versions
DE69405651T2 (de
Inventor
Kazuya Nohara
Naohiro Taniguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Publication of DE69405651D1 publication Critical patent/DE69405651D1/de
Application granted granted Critical
Publication of DE69405651T2 publication Critical patent/DE69405651T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape
DE69405651T 1993-05-26 1994-05-17 Beschleunigungsmessaufnehmer Expired - Fee Related DE69405651T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12436193A JP3391841B2 (ja) 1993-05-26 1993-05-26 半導体加速度センサ

Publications (2)

Publication Number Publication Date
DE69405651D1 true DE69405651D1 (de) 1997-10-23
DE69405651T2 DE69405651T2 (de) 1998-04-30

Family

ID=14883501

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69405651T Expired - Fee Related DE69405651T2 (de) 1993-05-26 1994-05-17 Beschleunigungsmessaufnehmer

Country Status (6)

Country Link
US (1) US5485749A (de)
EP (1) EP0631142B1 (de)
JP (1) JP3391841B2 (de)
KR (1) KR960010849B1 (de)
CA (1) CA2123925C (de)
DE (1) DE69405651T2 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5587601A (en) * 1995-06-05 1996-12-24 Kulite Semiconductor Products, Inc. Support structure for a semiconductor pressure transducer
JPH0933558A (ja) * 1995-07-17 1997-02-07 Murata Mfg Co Ltd 衝撃センサ
JPH0945935A (ja) * 1995-07-26 1997-02-14 Akebono Brake Ind Co Ltd 加速度センサー及びその製造方法
US6293149B1 (en) 1997-02-21 2001-09-25 Matsushita Electric Works, Ltd. Acceleration sensor element and method of its manufacture
US6247371B1 (en) * 1997-04-04 2001-06-19 Ngk Insulators, Ltd. Three-axis sensor
EP1617197B8 (de) * 2001-07-10 2009-04-15 Commissariat A L'energie Atomique Eine Kraftmesseinrichtung beinhaltender Reifen
JP2003232803A (ja) * 2002-02-12 2003-08-22 Hitachi Metals Ltd 半導体型加速度センサ
US6810738B2 (en) * 2002-07-10 2004-11-02 Hitachi Metals, Ltd. Acceleration measuring apparatus with calibration function
US20040016981A1 (en) * 2002-07-26 2004-01-29 Matsushita Electric Works, Ltd. Semiconductor acceleration sensor using doped semiconductor layer as wiring
US6892578B2 (en) 2002-11-29 2005-05-17 Hitachi Metals Ltd. Acceleration sensor
JP2004198280A (ja) * 2002-12-19 2004-07-15 Hitachi Metals Ltd 加速度センサ
US7305714B2 (en) 2003-07-22 2007-12-04 Matsushita Electric Works, Ltd. Anti-theft device for computer apparatus and a method for protecting computer apparatus thereby
JP4578087B2 (ja) * 2003-11-10 2010-11-10 Ｏｋｉセミコンダクタ株式会社 加速度センサ
US7367232B2 (en) * 2004-01-24 2008-05-06 Vladimir Vaganov System and method for a three-axis MEMS accelerometer
JP2006081637A (ja) * 2004-09-15 2006-03-30 Star Micronics Co Ltd 洗濯機
WO2006074290A2 (en) 2005-01-07 2006-07-13 Gesturetek, Inc. Optical flow based tilt sensor
JP2006250581A (ja) * 2005-03-08 2006-09-21 Mitsumi Electric Co Ltd ３軸加速度センサモジュールおよびその製造方法
JP2006275896A (ja) * 2005-03-30 2006-10-12 Yokohama Rubber Co Ltd:The 半導体加速度センサ
EP1866871A4 (de) * 2005-03-30 2012-01-04 Worcester Polytech Inst Dreidimensionale freihand-ultraschalldiagnosebildgebung mit sensoren zur bestimmung der position und des winkels
US7389591B2 (en) 2005-05-17 2008-06-24 Gesturetek, Inc. Orientation-sensitive signal output
US7337671B2 (en) 2005-06-03 2008-03-04 Georgia Tech Research Corp. Capacitive microaccelerometers and fabrication methods
US7578189B1 (en) 2006-05-10 2009-08-25 Qualtre, Inc. Three-axis accelerometers
CN101858928B (zh) * 2009-04-10 2012-09-05 利顺精密科技股份有限公司 微电机系统电容式三轴加速度器
DE102009002986B4 (de) 2009-05-11 2022-07-14 Robert Bosch Gmbh Piezoelektrischer Energiewandler mit Anschlag und Verfahren zur Herstellung
CN102089638A (zh) * 2009-09-02 2011-06-08 康达尔芯片设计有限公司 用于微机电系统传感器的微机电系统应力集中结构
CN101865933A (zh) * 2010-06-07 2010-10-20 瑞声声学科技(深圳)有限公司 差分电容式加速度传感器
US8991253B2 (en) 2010-09-28 2015-03-31 Infineon Technologies Ag Microelectromechanical system
US9075078B2 (en) * 2010-09-28 2015-07-07 Infineon Technologies Ag Microelectromechanical accelerometer with wireless transmission capabilities
US8984942B2 (en) * 2012-02-10 2015-03-24 Hewlett-Packard Development Company, L.P. Suspended masses in micro-mechanical devices
US11825750B2 (en) 2020-10-29 2023-11-21 Vanguard International Semiconductor Corporation Micro-electromechanical system device and method of forming the same

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1300118A (en) * 1970-03-11 1972-12-20 Ferranti Ltd Improvements relating to semiconductor strain transducers
US4967605A (en) 1987-04-24 1990-11-06 Wacoh Corporation Detector for force and acceleration using resistance element
US5060504A (en) * 1988-09-23 1991-10-29 Automotive Systems Laboratory, Inc. Self-calibrating accelerometer
US5081867A (en) * 1988-09-30 1992-01-21 Nec Corporation Semiconductor sensor
EP0461265B1 (de) * 1989-12-28 1995-05-10 Wacoh Corporation Beschleunigungssensoren
JPH03214064A (ja) * 1990-01-18 1991-09-19 Ricoh Co Ltd 加速度センサ
US5233213A (en) * 1990-07-14 1993-08-03 Robert Bosch Gmbh Silicon-mass angular acceleration sensor
US5121180A (en) * 1991-06-21 1992-06-09 Texas Instruments Incorporated Accelerometer with central mass in support

Also Published As

Publication number Publication date
EP0631142A1 (de) 1994-12-28
JPH06331646A (ja) 1994-12-02
JP3391841B2 (ja) 2003-03-31
KR960010849B1 (ko) 1996-08-09
DE69405651T2 (de) 1998-04-30
CA2123925A1 (en) 1994-11-27
CA2123925C (en) 1999-08-24
US5485749A (en) 1996-01-23
EP0631142B1 (de) 1997-09-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee