DE69515242D1 - Beschleunigungsmessaufnehmer - Google Patents

Beschleunigungsmessaufnehmer

Info

Publication number
DE69515242D1
DE69515242D1 DE69515242T DE69515242T DE69515242D1 DE 69515242 D1 DE69515242 D1 DE 69515242D1 DE 69515242 T DE69515242 T DE 69515242T DE 69515242 T DE69515242 T DE 69515242T DE 69515242 D1 DE69515242 D1 DE 69515242D1
Authority
DE
Germany
Prior art keywords
accelerometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69515242T
Other languages
English (en)
Other versions
DE69515242T2 (de
Inventor
Takeshi Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Application granted granted Critical
Publication of DE69515242D1 publication Critical patent/DE69515242D1/de
Publication of DE69515242T2 publication Critical patent/DE69515242T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/006—Details of instruments used for thermal compensation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Gyroscopes (AREA)
DE69515242T 1994-10-04 1995-09-29 Beschleunigungsmessaufnehmer Expired - Fee Related DE69515242T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP06266366A JP3129120B2 (ja) 1994-10-04 1994-10-04 加速度センサ

Publications (2)

Publication Number Publication Date
DE69515242D1 true DE69515242D1 (de) 2000-04-06
DE69515242T2 DE69515242T2 (de) 2000-09-07

Family

ID=17429951

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69515242T Expired - Fee Related DE69515242T2 (de) 1994-10-04 1995-09-29 Beschleunigungsmessaufnehmer

Country Status (4)

Country Link
US (1) US5677485A (de)
EP (1) EP0706053B1 (de)
JP (1) JP3129120B2 (de)
DE (1) DE69515242T2 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08317946A (ja) * 1995-05-26 1996-12-03 Kazuhiro Tsuda 脊柱矯正機
JP3536497B2 (ja) * 1995-12-21 2004-06-07 株式会社デンソー 振動型角速度検出装置
US6557419B1 (en) * 1996-12-31 2003-05-06 Honeywell International Inc. Zero TCF thin film resonator
US6236143B1 (en) * 1997-02-28 2001-05-22 The Penn State Research Foundation Transfer having a coupling coefficient higher than its active material
JP2000097707A (ja) * 1998-09-18 2000-04-07 Fujitsu Ltd 加速度センサ
US6400062B1 (en) 2000-03-21 2002-06-04 Caterpillar Inc. Method and apparatus for temperature compensating a piezoelectric device
JP3514240B2 (ja) 2001-02-19 2004-03-31 株式会社村田製作所 加速度センサ
JP4066786B2 (ja) * 2001-12-28 2008-03-26 株式会社村田製作所 力学量センサ
JP4779423B2 (ja) * 2005-04-26 2011-09-28 パナソニック株式会社 振動型圧電加速度センサ素子とこれを用いた振動型圧電加速度センサ
US7997133B2 (en) * 2005-10-18 2011-08-16 Kistler Holding Ag Temperature compensating sensor
US7802475B2 (en) * 2006-10-13 2010-09-28 Seiko Epson Corporation Acceleration sensor
US8689426B2 (en) 2008-12-17 2014-04-08 Sand 9, Inc. Method of manufacturing a resonating structure
US8661899B2 (en) 2010-03-01 2014-03-04 Sand9, Inc. Microelectromechanical gyroscopes and related apparatus and methods
WO2011133682A1 (en) 2010-04-20 2011-10-27 Guiti Zolfagharkhani Microelectromechanical gyroscopes and related apparatus and methods
WO2012040043A1 (en) * 2010-09-20 2012-03-29 Sand9, Inc. Resonant sensing using extensional modes of a plate
CN102353814B (zh) * 2011-06-30 2012-10-17 江苏省无线电科学研究所有限公司 风向传感器输出信号故障的检测方法
US9383208B2 (en) 2011-10-13 2016-07-05 Analog Devices, Inc. Electromechanical magnetometer and applications thereof
CN102520211B (zh) * 2011-12-31 2013-08-07 山东省科学院海洋仪器仪表研究所 用于格雷码盘风向传感器的故障检测装置
CN114280328B (zh) * 2021-12-24 2022-09-13 西安交通大学 一种基于对称式同模态温度补偿的mems谐振式加速度传感器

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8714886U1 (de) * 1987-11-09 1987-12-17 Dietrich Gruenau Gmbh & Co Kg, 7778 Markdorf, De
JP3129022B2 (ja) 1993-03-19 2001-01-29 株式会社村田製作所 加速度センサ
EP0614087B1 (de) * 1993-03-01 2000-03-29 Murata Manufacturing Co., Ltd. Piezoelektrischer Vibrator und diesen verwendenden Beschleunigungssensor

Also Published As

Publication number Publication date
JP3129120B2 (ja) 2001-01-29
EP0706053A1 (de) 1996-04-10
JPH08105912A (ja) 1996-04-23
DE69515242T2 (de) 2000-09-07
EP0706053B1 (de) 2000-03-01
US5677485A (en) 1997-10-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee