JP4779423B2 - 振動型圧電加速度センサ素子とこれを用いた振動型圧電加速度センサ - Google Patents
振動型圧電加速度センサ素子とこれを用いた振動型圧電加速度センサ Download PDFInfo
- Publication number
- JP4779423B2 JP4779423B2 JP2005127417A JP2005127417A JP4779423B2 JP 4779423 B2 JP4779423 B2 JP 4779423B2 JP 2005127417 A JP2005127417 A JP 2005127417A JP 2005127417 A JP2005127417 A JP 2005127417A JP 4779423 B2 JP4779423 B2 JP 4779423B2
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- acceleration sensor
- type piezoelectric
- vibration
- sensor element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000001133 acceleration Effects 0.000 title claims description 87
- 238000001514 detection method Methods 0.000 claims description 22
- 239000010409 thin film Substances 0.000 claims description 17
- 230000003068 static effect Effects 0.000 claims description 5
- 238000000605 extraction Methods 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 claims 1
- 238000005530 etching Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000008602 contraction Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0235—Accelerometers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Pressure Sensors (AREA)
Description
2 ダイヤフラム
3 感歪抵抗
4 薄膜抵抗
5 保護膜
6 おもり
11 圧電体素子
12 変換部
13 フィルタ部
14 増幅部
15 制御部
16 交流信号出力部
17 コンデンサ
18 測定・演算部
21 基板
22 二酸化ケイ素層(エッチングストッパー)
23 シリコン層
23A 振動板
23B アーム
23C 平行部
23D 接続部
24 下部電極層
25 圧電薄膜層
26A 検出電極層
26B 駆動電極層
27A,27B レジスト
28 側溝
29 ホール
30 側孔
31 フレーム
32 保持部
33 支持体
33A おもり
34A,34B 基部
35 振動型圧電加速度センサ素子
36A 検出信号ライン
36B 駆動信号ライン
38 増幅回路
39 F/V変換器
40 AGC回路
41 振動型圧電加速度センサ
42 車体
43A,43B 前輪
44 ブレーキ装置
45 ハンドル
46 ブレーキ制御回路(制御部)
47 進行方向
48A,48B 後輪
51A,51B 取り出し電極
52 中心軸
Claims (10)
- フレームと、このフレームに一端が支持された振動板と、この振動板の他端を支持する支持体と、この支持体を前記振動板の長手方向に往復運動するように保持してなる第1、第2の保持部と、前記振動板上に形成した下部電極と、この下部電極上に形成した圧電薄膜と、この圧電薄膜上に形成した上部電極とからなり、前記支持体は前記振動板の前記一端と前記他端とを結ぶ軸線方向に往復運動し得るように前記一端が前記第1の保持部を介して上面視右側で前記フレームに保持され、前記他端が前記第2の保持部を介して上面視左側で前記フレームに保持されており、前記第1、第2の保持部は梁状の交互に反対方向に折れ曲がったバネ構成であり、外部より加速度が加わると、前記第1、第2の保持部を介して支持体に伝搬して前記振動板が前記軸線方向に伸縮し、前記振動板の固有振動数の変化に基づいて前記加速度を検出する構成とした振動型圧電加速度センサ素子。
- 振動板、支持体、第1、第2の保持部をシリコンとした請求項1に記載の振動型圧電加速度センサ素子。
- 圧電薄膜をチタン酸鉛・ジルコン酸鉛(PZT)とした請求項1に記載の振動型圧電加速度センサ素子。
- 梁状の振動板の一端をフレーム、もう一端を支持体に釣られるように保持した請求項1に記載の振動型圧電加速度センサ素子。
- 振動板上に形成する上部電極を第1、第2の保持部の梁状の中央部に沿わせて取り出した請求項1に記載の振動型圧電加速度センサ素子。
- 振動板を支持する支持体に質量を付加するおもりを設けた請求項1に記載の振動型圧電加速度センサ素子。
- 梁状からなる振動板上に形成する上部電極をこの振動板と直交し二等分する中心軸と対称に検出用と駆動用とした請求項1に記載の振動型圧電加速度センサ素子。
- 駆動用および検出用の電極の取り出し電極をフレーム上に設けた請求項8に記載の振動型圧電加速度センサ素子。
- 振動板として、幅方向をほぼ3等分するように、長手方向にスリットを設け、前記振動体の側部の中央部を解放し、振動板の共振先鋭度を高めたことを特徴とする請求項1に記載の振動型圧電加速度センサ素子。
- 請求項1に記載の振動型圧電加速度センサ素子のフレームを保持して取り付けて静および動の加速度を検出するようにした振動型圧電加速度センサ。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005127417A JP4779423B2 (ja) | 2005-04-26 | 2005-04-26 | 振動型圧電加速度センサ素子とこれを用いた振動型圧電加速度センサ |
EP20050106351 EP1717589A3 (en) | 2005-04-26 | 2005-07-12 | Vibration-type piezoelectric acceleration sensor |
US11/182,098 US7168321B2 (en) | 2005-04-26 | 2005-07-15 | Vibration-type piezoelectric acceleration sensor element and vibration-type piezoelectric acceleration sensor therewith |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005127417A JP4779423B2 (ja) | 2005-04-26 | 2005-04-26 | 振動型圧電加速度センサ素子とこれを用いた振動型圧電加速度センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006308291A JP2006308291A (ja) | 2006-11-09 |
JP4779423B2 true JP4779423B2 (ja) | 2011-09-28 |
Family
ID=36817892
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005127417A Expired - Fee Related JP4779423B2 (ja) | 2005-04-26 | 2005-04-26 | 振動型圧電加速度センサ素子とこれを用いた振動型圧電加速度センサ |
Country Status (3)
Country | Link |
---|---|
US (1) | US7168321B2 (ja) |
EP (1) | EP1717589A3 (ja) |
JP (1) | JP4779423B2 (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005029142A (ja) * | 2003-06-17 | 2005-02-03 | Yokohama Rubber Co Ltd:The | アンチロック・ブレーキ・システム及びそのセンサユニット |
WO2007132588A1 (ja) * | 2006-05-15 | 2007-11-22 | Murata Manufacturing Co., Ltd. | 加速度センサ |
FR2919067B1 (fr) * | 2007-07-19 | 2009-08-28 | Sagem Defense Securite | Procede de mesure d'une acceleration au moyen d'un accelerometre vibrant piezo-electrique et dispositif de mesure correspondant |
JP5321812B2 (ja) * | 2009-03-04 | 2013-10-23 | セイコーエプソン株式会社 | 物理量センサーおよび物理量測定装置 |
JP5282715B2 (ja) * | 2009-10-13 | 2013-09-04 | セイコーエプソン株式会社 | 力検出ユニット及び力検出装置 |
KR101477194B1 (ko) | 2010-05-27 | 2014-12-29 | 심천 사루브리스 퍼머수티칼스 컴퍼니 리미티드 | 이중기능 복합체의 화학합성 및 항 종양과 항 종양 전이 작용 |
MY164500A (en) * | 2011-07-25 | 2017-12-29 | Mimos Berhad | A piezoresistive accelerometer |
WO2013161597A1 (ja) * | 2012-04-27 | 2013-10-31 | 株式会社村田製作所 | 加速度センサ |
JP5967194B2 (ja) * | 2012-04-27 | 2016-08-10 | 株式会社村田製作所 | 加速度センサ |
US9750124B2 (en) * | 2015-04-03 | 2017-08-29 | The Board Of Trustees Of The Leland Stanford Junior University | Piezoelectric particle accelerator |
JP7159548B2 (ja) * | 2017-11-28 | 2022-10-25 | セイコーエプソン株式会社 | 物理量センサー、物理量センサーデバイス、複合センサーデバイス、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器および移動体 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4656383A (en) * | 1986-02-14 | 1987-04-07 | The Singer Company-Kearfott Division | Vibrating beam force transducer with single isolator spring |
IL80550A0 (en) * | 1986-11-07 | 1987-02-27 | Israel Aircraft Ind Ltd | Resonant element force transducer for acceleration sensing |
FR2627592B1 (fr) * | 1988-02-22 | 1990-07-27 | Sagem | Accelerometre pendulaire non asservi a poutre resonante |
US5113698A (en) * | 1990-02-26 | 1992-05-19 | Sundstrand Data Control, Inc. | Vibrating beam transducer drive system |
JP2900658B2 (ja) | 1991-09-24 | 1999-06-02 | 株式会社村田製作所 | 加速度センサ |
EP0534366B1 (en) | 1991-09-24 | 1996-06-05 | Murata Manufacturing Co., Ltd. | Acceleration sensor |
JPH05288771A (ja) | 1992-04-09 | 1993-11-02 | Fujikura Ltd | ダイヤフラム式加速度センサ及びその製造方法 |
US5501103B1 (en) * | 1994-02-15 | 1998-08-04 | Allied Signal Inc | Two-port electromagnetic drive for a double-ended tuning fork |
JP3129120B2 (ja) * | 1994-10-04 | 2001-01-29 | 株式会社村田製作所 | 加速度センサ |
JP3119135B2 (ja) * | 1995-09-11 | 2000-12-18 | 株式会社村田製作所 | 加速度センサ |
JPH09211020A (ja) * | 1996-02-06 | 1997-08-15 | Matsushita Electric Ind Co Ltd | 加速度センサー |
US5948982A (en) * | 1998-02-23 | 1999-09-07 | Alliedsignal Inc. | Vibrating beam accelerometers and methods of forming vibrating beam accelerometers |
KR100316774B1 (ko) * | 1999-01-15 | 2001-12-12 | 이형도 | 마이크로 관성 센서의 제작 방법 |
JP2000206141A (ja) * | 1999-01-20 | 2000-07-28 | Miyota Kk | 運動量センサ |
JP2003042768A (ja) * | 2001-07-26 | 2003-02-13 | Microstone Corp | 運動センサ |
JP2004251702A (ja) * | 2003-02-19 | 2004-09-09 | Matsushita Electric Ind Co Ltd | 振動型圧電加速度センサ素子とこれを用いた振動型圧電加速度センサおよび振動型圧電加速度センサ装置 |
JP2005140516A (ja) * | 2003-11-04 | 2005-06-02 | Matsushita Electric Ind Co Ltd | 振動型圧電加速度センサ素子とこれを用いた振動型圧電加速度センサ |
JP2005249446A (ja) * | 2004-03-02 | 2005-09-15 | Matsushita Electric Ind Co Ltd | 振動型圧電加速度センサ |
-
2005
- 2005-04-26 JP JP2005127417A patent/JP4779423B2/ja not_active Expired - Fee Related
- 2005-07-12 EP EP20050106351 patent/EP1717589A3/en not_active Withdrawn
- 2005-07-15 US US11/182,098 patent/US7168321B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2006308291A (ja) | 2006-11-09 |
EP1717589A3 (en) | 2010-03-10 |
US7168321B2 (en) | 2007-01-30 |
EP1717589A2 (en) | 2006-11-02 |
US20060236763A1 (en) | 2006-10-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4779423B2 (ja) | 振動型圧電加速度センサ素子とこれを用いた振動型圧電加速度センサ | |
US8616059B2 (en) | Force sensor with reduced noise | |
US9835641B2 (en) | Angular velocity detection device and angular velocity sensor including the same | |
JP5117665B2 (ja) | Mems構造内でプルーフマスの運動を減速させる方法およびシステム | |
JP5301767B2 (ja) | 慣性センサ | |
US8011247B2 (en) | Multistage proof-mass movement deceleration within MEMS structures | |
US20080276706A1 (en) | Rotation Speed Sensor | |
EP0900385B1 (en) | Electrostatic drive for accelerometer | |
KR100269730B1 (ko) | 회전센서와 회전센서의 연장부 구조체 및 그의 관성측정장치(ratation sensor, structure connected to sensor and its inerdia measmement device) | |
WO2005085876A1 (ja) | 振動型圧電加速度センサ | |
EP2943799B1 (en) | Chip level sensor with multiple degrees of freedom | |
JP2007256235A (ja) | 慣性力センサ | |
US6453744B2 (en) | Low radiation capture cross-section electrode material for prompt radiation environments | |
US7104128B2 (en) | Multiaxial micromachined differential accelerometer | |
US8026714B2 (en) | Accelerometer with enhanced DC stability | |
JP2008076265A (ja) | 慣性力センサ | |
JP2005140516A (ja) | 振動型圧電加速度センサ素子とこれを用いた振動型圧電加速度センサ | |
EP0412106A1 (en) | Accelerometer | |
JP2006029992A (ja) | 振動型圧電加速度センサ | |
JP4983107B2 (ja) | 慣性センサおよび慣性センサの製造方法 | |
JP2007256234A (ja) | 慣性力センサ | |
JP2007198778A (ja) | 慣性力センサ | |
JP2007198779A (ja) | 慣性力センサ | |
JPH06268237A (ja) | 半導体加速度センサ | |
JPH10339739A (ja) | 慣性センサ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080208 |
|
RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20080312 |
|
RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20091126 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20100721 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100727 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100924 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20101221 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110218 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110607 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110620 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140715 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140715 Year of fee payment: 3 |
|
LAPS | Cancellation because of no payment of annual fees |