MY164500A - A piezoresistive accelerometer - Google Patents

A piezoresistive accelerometer

Info

Publication number
MY164500A
MY164500A MYPI2011003449A MYPI2011003449A MY164500A MY 164500 A MY164500 A MY 164500A MY PI2011003449 A MYPI2011003449 A MY PI2011003449A MY PI2011003449 A MYPI2011003449 A MY PI2011003449A MY 164500 A MY164500 A MY 164500A
Authority
MY
Malaysia
Prior art keywords
meanders
accelerometer
proof mass
anchor pads
multilayer construct
Prior art date
Application number
MYPI2011003449A
Inventor
Sulaiman Azhar
Ismahadi Syono Mohd
Original Assignee
Mimos Berhad
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mimos Berhad filed Critical Mimos Berhad
Priority to MYPI2011003449A priority Critical patent/MY164500A/en
Priority to PCT/MY2012/000140 priority patent/WO2013015671A1/en
Publication of MY164500A publication Critical patent/MY164500A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)

Abstract

DISCLOSED IS A FORCE-BALANCED PIEZORESISTIVE 3-AXIS ACCELEROMETER. AN EXEMPLARY ACCELEROMETER (100) COMPRISES A PROOF MASS (104) WHICH IS COUPLED TO A PLURALITY OF MEANDERS (103), WHICH FURTHER COUPLE TO A PLURALITY OF ANCHOR PADS (102) THAT EXTENDS OUT FROM EACH MEANDER (103). THE PROOF MASS (104), MEANDERS (103) AND ANCHOR PADS (102) ARE INTEGRALLY FABRICATED MULTILAYER CONSTRUCT WHICH COMPRISES A BASE SILICON LAYER (201), INSULATOR 1 (202), INSULATOR 2 (204), METAL 1 (203) AND METAL 2 (205) ARRANGED IN AN INTERMITTENT FASHION AND FABRICATED THROUGH CMOS COMPATIBLE FABRICATION PROCESS. PIEZORESISTIVE SENSING MEANS IS USED IN DETECTING ACCELERATION IN THREE DEGREE OF FREEDOMS OR DIRECTIONS IN WHICH PIEZORESISTORS (206) EMBEDDED WITHIN THE MULTILAYER CONSTRUCT ARE USED TO SENSE THE MOVEMENT OF PROOF MASS (104) AND MEANDERS (103) UPON EXTERNAL FORCE WHICH EXERTED ON THE PROOF MASS (104). ELECTRICAL SIGNALS UPON THE SENSING ARE THEN GENERATED AND PROCESSED BY ELECTRICAL CIRCUITRY TO PROVIDE DC BIASING ON RESPECTIVE ANCHOR PADS (102) TO PRODUCE X-, Y- AND Z-DIRECTION ACCELERATION DATA IN TERMS OF MAGNITUDE AND DIRECTION. THE ACCELEROMETER IS ALSO DESIGNED WITH SELF-TEST CAPABILITY IN WHICH THE MEANDERS (103) PERFORM SELF-TEST BY BENDING AT LEAST ONE MEANDER WHILE KEEPING OTHER MEANDERS STATIONARY AND MEASURING Z-DISPLACEMENT. THE RESULTING ACCELEROMETER HAS THE POTENTIAL FOR LOW POWER CONSUMPTION DUE TO DC BIASING, LOW COST AND HIGH-ACCURACY OPERATION OVER WIDE TEMPERATURE RANGE DUE TO ADDITIONAL WHEATSTONE BRIDGE CIRCUIT EMBEDDED WITHIN THE MULTILAYER CONSTRUCT. (MOST ILLUSTRATED BY
MYPI2011003449A 2011-07-25 2011-07-25 A piezoresistive accelerometer MY164500A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
MYPI2011003449A MY164500A (en) 2011-07-25 2011-07-25 A piezoresistive accelerometer
PCT/MY2012/000140 WO2013015671A1 (en) 2011-07-25 2012-06-21 A piezoresistive accelerometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI2011003449A MY164500A (en) 2011-07-25 2011-07-25 A piezoresistive accelerometer

Publications (1)

Publication Number Publication Date
MY164500A true MY164500A (en) 2017-12-29

Family

ID=46750397

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2011003449A MY164500A (en) 2011-07-25 2011-07-25 A piezoresistive accelerometer

Country Status (2)

Country Link
MY (1) MY164500A (en)
WO (1) WO2013015671A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107351088B (en) * 2017-08-31 2020-02-14 南京埃斯顿机器人工程有限公司 Robot external motion path control method
CN108936942B (en) * 2018-06-11 2020-09-11 广州博鳌健康产业研究院（有限合伙） Pressure sensing method and device for intelligent shoe
CN109026553B (en) * 2018-07-20 2020-04-14 许继集团有限公司 Vibration sensing device, data screening and direction judging method and fan monitoring system
CN112610790A (en) * 2020-12-21 2021-04-06 东北大学 Vibration damper of high-pressure hydraulic hose
US11924983B2 (en) 2022-03-18 2024-03-05 Honeywell Federal Manufacturing & Technologies, Llc Electronics module with raceway and submodules

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4779423B2 (en) * 2005-04-26 2011-09-28 パナソニック株式会社 Vibration type piezoelectric acceleration sensor element and vibration type piezoelectric acceleration sensor using the same
US7578189B1 (en) 2006-05-10 2009-08-25 Qualtre, Inc. Three-axis accelerometers
JP2009053180A (en) * 2007-07-27 2009-03-12 Hitachi Metals Ltd Acceleration sensor
JP2010071793A (en) * 2008-09-18 2010-04-02 Toshiba Corp Multiaxial acceleration sensor and angular velocity sensor
ES2342872B1 (en) * 2009-05-20 2011-05-30 Baolab Microsystems S.L. CHIP THAT INCLUDES A MEMS PROVIDED IN AN INTEGRATED CIRCUIT AND CORRESPONDING MANUFACTURING PROCEDURE.

Also Published As

Publication number Publication date
WO2013015671A1 (en) 2013-01-31

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