DE69414739T2 - Beschleunigungsmessaufnehmer - Google Patents

Beschleunigungsmessaufnehmer

Info

Publication number
DE69414739T2
DE69414739T2 DE69414739T DE69414739T DE69414739T2 DE 69414739 T2 DE69414739 T2 DE 69414739T2 DE 69414739 T DE69414739 T DE 69414739T DE 69414739 T DE69414739 T DE 69414739T DE 69414739 T2 DE69414739 T2 DE 69414739T2
Authority
DE
Germany
Prior art keywords
accelerometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69414739T
Other languages
English (en)
Other versions
DE69414739D1 (de
Inventor
Jun Tabota
Jiro Inoue
Toshihiko Unami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP6014493A external-priority patent/JP2780594B2/ja
Priority claimed from JP16457793A external-priority patent/JP3144159B2/ja
Priority claimed from JP05173018A external-priority patent/JP3136847B2/ja
Priority claimed from JP06022454A external-priority patent/JP3114480B2/ja
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of DE69414739D1 publication Critical patent/DE69414739D1/de
Application granted granted Critical
Publication of DE69414739T2 publication Critical patent/DE69414739T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
DE69414739T 1993-03-19 1994-03-17 Beschleunigungsmessaufnehmer Expired - Lifetime DE69414739T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP6014593 1993-03-19
JP6014493A JP2780594B2 (ja) 1993-03-19 1993-03-19 加速度センサ
JP16457793A JP3144159B2 (ja) 1993-07-02 1993-07-02 加速度センサとその製造方法
JP05173018A JP3136847B2 (ja) 1993-07-13 1993-07-13 加速度センサの製造方法
JP06022454A JP3114480B2 (ja) 1993-03-19 1994-02-21 加速度センサ

Publications (2)

Publication Number Publication Date
DE69414739D1 DE69414739D1 (de) 1999-01-07
DE69414739T2 true DE69414739T2 (de) 1999-07-01

Family

ID=27520463

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69403252T Expired - Lifetime DE69403252T2 (de) 1993-03-19 1994-03-17 Beschleunigungsmessaufnehmer
DE69414739T Expired - Lifetime DE69414739T2 (de) 1993-03-19 1994-03-17 Beschleunigungsmessaufnehmer

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69403252T Expired - Lifetime DE69403252T2 (de) 1993-03-19 1994-03-17 Beschleunigungsmessaufnehmer

Country Status (4)

Country Link
US (2) US5515725A (de)
EP (2) EP0616222B1 (de)
DE (2) DE69403252T2 (de)
SG (1) SG52374A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10147911B4 (de) * 2000-09-29 2004-11-04 Murata Manufacturing Co., Ltd., Nagaokakyo Beschleunigungssensor

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US5789827A (en) 1993-05-10 1998-08-04 Sensitron, Inc. Two-wire interface to automobile horn relay circuit
JP3373032B2 (ja) * 1994-03-15 2003-02-04 富士通株式会社 加速度センサ
US5914556A (en) * 1994-09-09 1999-06-22 Murata Manufacturing Co., Ltd. Piezoelectric element and method of manufacturing the same
DE4440078A1 (de) * 1994-11-10 1996-05-15 Telefunken Microelectron Piezoelektrischer Beschleunigungsaufnehmer
GB9426363D0 (en) * 1994-12-29 1995-03-01 Lynxvale Ltd A micromechanical accelerometer
US6043588A (en) * 1995-07-18 2000-03-28 Murata Manufacturing Co., Ltd. Piezoelectric sensor and acceleration sensor
US6098460A (en) * 1995-10-09 2000-08-08 Matsushita Electric Industrial Co., Ltd. Acceleration sensor and shock detecting device using the same
US5856722A (en) * 1996-01-02 1999-01-05 Cornell Research Foundation, Inc. Microelectromechanics-based frequency signature sensor
JP3183158B2 (ja) * 1996-03-29 2001-07-03 株式会社村田製作所 加速度センサ及びその製造方法
JP3183177B2 (ja) * 1996-08-13 2001-07-03 株式会社村田製作所 加速度センサ
JP3147786B2 (ja) * 1996-09-02 2001-03-19 株式会社村田製作所 加速度センサ
US6236301B1 (en) * 1996-09-04 2001-05-22 Sensitron, Inc. Cantilevered deflection sensing system
US6392527B1 (en) 1996-09-04 2002-05-21 Sensitron, Inc. Impact detection system
US6015163A (en) * 1996-10-09 2000-01-18 Langford; Gordon B. System for measuring parameters related to automobile seat
US6050144A (en) 1997-06-04 2000-04-18 Matsushita Electric Industrial Co., Ltd. Acceleration sensor
US6550116B2 (en) * 1997-07-11 2003-04-22 Matsushita Electric Industrial Co., Ltd. Method for manufacturing a bimorph piezoelectric device for acceleration sensor
US6188160B1 (en) 1997-09-12 2001-02-13 University Of Kentucky Research Foundation Smart material control system and related method
US6031317A (en) * 1997-09-17 2000-02-29 Aeptec Microsystems, Inc. Piezoelecric shock sensor
US5983722A (en) * 1997-11-12 1999-11-16 K.K. Holding Ag Piezobloc accelerometer
JP3339425B2 (ja) * 1998-10-19 2002-10-28 株式会社村田製作所 加速度センサ及び加速度検出装置
US6145385A (en) * 1998-12-29 2000-11-14 Lucent Technologies Inc. Measurement of mechanical fastener clamping force
JP2001345212A (ja) * 2000-05-31 2001-12-14 Tdk Corp 積層電子部品
JP4020578B2 (ja) * 2000-09-29 2007-12-12 株式会社村田製作所 加速度センサ
JP2002156386A (ja) 2000-11-17 2002-05-31 Fujitsu Ltd 加速度センサ
US7005777B2 (en) * 2001-01-10 2006-02-28 Seagate Technology Llc Tapered piezoelectric in-plane bimorph and method of fabricating
JP3574898B2 (ja) * 2001-01-12 2004-10-06 株式会社村田製作所 加速度センサおよびその製造方法
JP3642026B2 (ja) * 2001-01-12 2005-04-27 株式会社村田製作所 加速度センサおよびその製造方法
JP3966025B2 (ja) 2002-03-05 2007-08-29 株式会社村田製作所 加速度センサ
JPWO2005012923A1 (ja) * 2003-08-04 2006-09-21 株式会社村田製作所 加速度センサ
JP4757026B2 (ja) * 2003-08-04 2011-08-24 株式会社村田製作所 加速度センサの特性調整方法
EP1664705B1 (de) * 2003-09-17 2013-04-17 Kistler Holding AG Mehrschichtiges piezoelektrisches messelement und ein druck- oder kraftsensor umfassend ein solches messelement
US20080015442A1 (en) * 2004-06-16 2008-01-17 Watson Malcolm J Ultrasound Waveguide
US7239064B1 (en) 2004-10-15 2007-07-03 Morgan Research Corporation Resettable latching MEMS temperature sensor apparatus and method
FR2902871B1 (fr) * 2006-06-23 2008-08-29 Thales Sa Unite de mesure inertielle a tenue renforcee aux accelerations
WO2008146624A1 (ja) * 2007-05-30 2008-12-04 Rohm Co., Ltd. 加速度センサおよびその製造方法
US8593036B2 (en) * 2010-02-26 2013-11-26 Mcb Clean Room Solutions, Llc High-efficiency MEMS micro-vibrational energy harvester and process for manufacturing same
US9900703B2 (en) * 2012-08-23 2018-02-20 Em-Tech. Co., Ltd. Suspension for high power micro speaker and high power micro speaker having the same
WO2016143183A1 (ja) * 2015-03-12 2016-09-15 株式会社村田製作所 加速度検出装置及びその製造方法
US11493652B2 (en) 2018-09-05 2022-11-08 Pgs Geophysical As Two-axis sensing element
US10578384B1 (en) 2019-05-24 2020-03-03 Reese C. Gwillim, JR. Ammunition count signaling in retrofit apparatus for handgun

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US2614416A (en) * 1950-02-16 1952-10-21 Hans E Hollmann Force measuring system employing piezocapacitors
US3304787A (en) * 1962-12-29 1967-02-21 Toyoda Chuo Kenkyusho Kk Three-dimensional accelerometer device
US3233466A (en) * 1963-06-24 1966-02-08 Bendix Corp Piezoelectric accelerometer
DE2316130C3 (de) * 1973-03-30 1979-04-26 Siemens Ag, 1000 Berlin Und 8000 Muenchen Gerät zum Erfassen von Bewegungen am menschlichen oder tierischen Körper
CA1165860A (en) * 1979-12-12 1984-04-17 Susumu Nishigaki Piezoelectric electro-mechanical bimorph transducer
US4431935A (en) * 1981-09-15 1984-02-14 Rockwell International Corporation Sensor structure incorporating multiple piezoelectric generators
US4435737A (en) * 1981-12-16 1984-03-06 Rockwell International Corporation Low cost capacitive accelerometer
GB8408659D0 (en) * 1984-04-04 1984-05-16 Syrinx Precision Instr Ltd Rotation rate sensor
JPH0715485B2 (ja) * 1987-05-21 1995-02-22 日産自動車株式会社 圧電型力学量センサ
US5128581A (en) * 1989-05-02 1992-07-07 Fujikura Ltd. Piezoelectric acceleration sensor and piezoelectric acceleration sensor device
KR930001165Y1 (ko) * 1989-05-24 1993-03-13 미쓰비시덴키 가부시키가이샤 가속도 센서
US5003824A (en) * 1989-12-26 1991-04-02 Matsushita Electric Industrial Co., Ltd. Vibration/acceleration sensor
JPH04216409A (ja) * 1990-12-18 1992-08-06 Matsushita Electric Ind Co Ltd 角速度センサ
JP3185226B2 (ja) * 1991-01-30 2001-07-09 株式会社村田製作所 圧電バイモルフ素子の駆動方法及び圧電バイモルフ素子
AU3421593A (en) * 1991-12-23 1993-07-28 Elf Atochem North America, Inc. Multi-mode accelerometer
EP0550037B1 (de) * 1991-12-27 1996-03-06 Murata Manufacturing Co., Ltd. Piezoelektrischer Beschleunigungsmesser

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10147911B4 (de) * 2000-09-29 2004-11-04 Murata Manufacturing Co., Ltd., Nagaokakyo Beschleunigungssensor

Also Published As

Publication number Publication date
DE69403252T2 (de) 1997-09-25
EP0616222A1 (de) 1994-09-21
EP0616221B1 (de) 1998-11-25
US5515725A (en) 1996-05-14
EP0616221A1 (de) 1994-09-21
DE69414739D1 (de) 1999-01-07
EP0616222B1 (de) 1997-05-21
SG52374A1 (en) 1998-09-28
US5490422A (en) 1996-02-13
DE69403252D1 (de) 1997-06-26

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