DE69634571D1 - Drehgeschwindigkeitssensor - Google Patents

Drehgeschwindigkeitssensor

Info

Publication number
DE69634571D1
DE69634571D1 DE69634571T DE69634571T DE69634571D1 DE 69634571 D1 DE69634571 D1 DE 69634571D1 DE 69634571 T DE69634571 T DE 69634571T DE 69634571 T DE69634571 T DE 69634571T DE 69634571 D1 DE69634571 D1 DE 69634571D1
Authority
DE
Germany
Prior art keywords
speed sensor
rotary speed
rotary
sensor
speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69634571T
Other languages
English (en)
Inventor
Kazuhiro Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wacoh Corp
Wako KK
Original Assignee
Wacoh Corp
Wako KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacoh Corp, Wako KK filed Critical Wacoh Corp
Application granted granted Critical
Publication of DE69634571D1 publication Critical patent/DE69634571D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/02—Devices characterised by the use of mechanical means
    • G01P3/16—Devices characterised by the use of mechanical means by using centrifugal forces of solid masses
DE69634571T 1996-07-10 1996-07-10 Drehgeschwindigkeitssensor Expired - Lifetime DE69634571D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP1996/001926 WO1998001722A1 (fr) 1996-07-10 1996-07-10 Detecteur de vitesse angulaire

Publications (1)

Publication Number Publication Date
DE69634571D1 true DE69634571D1 (de) 2005-05-12

Family

ID=14153541

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69634571T Expired - Lifetime DE69634571D1 (de) 1996-07-10 1996-07-10 Drehgeschwindigkeitssensor

Country Status (5)

Country Link
US (1) US6076401A (de)
EP (1) EP0851212B1 (de)
JP (1) JP4011626B2 (de)
DE (1) DE69634571D1 (de)
WO (1) WO1998001722A1 (de)

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US6864677B1 (en) * 1993-12-15 2005-03-08 Kazuhiro Okada Method of testing a sensor
DE69019343T2 (de) 1989-12-28 1996-02-15 Wako Kk Beschleunigungssensoren.
US6314823B1 (en) 1991-09-20 2001-11-13 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
US5421213A (en) * 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
US6282956B1 (en) * 1994-12-29 2001-09-04 Kazuhiro Okada Multi-axial angular velocity sensor
JP4295883B2 (ja) 1999-12-13 2009-07-15 株式会社ワコー 力検出装置
US6401536B1 (en) * 2000-02-11 2002-06-11 Motorola, Inc. Acceleration sensor and method of manufacture
US6443008B1 (en) * 2000-02-19 2002-09-03 Robert Bosch Gmbh Decoupled multi-disk gyroscope
KR100541009B1 (ko) * 2000-11-30 2006-01-10 니타 가부시키가이샤 정전용량식 센서
US6809529B2 (en) * 2001-08-10 2004-10-26 Wacoh Corporation Force detector
JP4216525B2 (ja) * 2002-05-13 2009-01-28 株式会社ワコー 加速度センサおよびその製造方法
JP4125931B2 (ja) * 2002-08-26 2008-07-30 株式会社ワコー 回転操作量の入力装置およびこれを利用した操作装置
JP4907050B2 (ja) * 2003-03-31 2012-03-28 株式会社ワコー 力検出装置
JP4271475B2 (ja) * 2003-03-31 2009-06-03 株式会社ワコー 力検出装置
JP4387691B2 (ja) * 2003-04-28 2009-12-16 株式会社ワコー 力検出装置
KR100693347B1 (ko) * 2003-10-13 2007-03-09 삼성전자주식회사 디지털 회전형 각속도 검출장치
EP1624284B1 (de) 2004-07-29 2017-07-19 STMicroelectronics Srl Mikroelektromechanischer hochempfindlicher Inertialsensor und dessen Herstellungsverfahren
FI116544B (fi) * 2004-12-31 2005-12-15 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
EP2899502B1 (de) 2006-01-24 2017-04-05 Panasonic Corporation Trägheitskraftsensor
JP4687577B2 (ja) 2006-06-16 2011-05-25 ソニー株式会社 慣性センサ
US7461552B2 (en) * 2006-10-23 2008-12-09 Custom Sensors & Technologies, Inc. Dual axis rate sensor
JP2008190931A (ja) 2007-02-02 2008-08-21 Wacoh Corp 加速度と角速度との双方を検出するセンサ
CN101855515A (zh) * 2007-11-08 2010-10-06 罗伯特·博世有限公司 具有两个传感轴的转速传感器
DE102008010241A1 (de) * 2008-02-21 2009-08-27 Robert Bosch Gmbh Mikromechanische Vorrichtung mit Drehschwinger
DE102008043256A1 (de) * 2008-10-29 2010-05-06 Robert Bosch Gmbh Verfahren zum Betrieb einer Sensoranordnung und Sensoranordnung
JP5439068B2 (ja) * 2009-07-08 2014-03-12 株式会社ワコー 力検出装置
CN102435181B (zh) * 2011-11-01 2015-05-13 努比亚技术有限公司 一种基于加速度传感器的陀螺仪及定位方法
US20140013845A1 (en) * 2012-07-13 2014-01-16 Robert E. Stewart Class ii coriolis vibratory rocking mode gyroscope with central fixed post
JP5529328B1 (ja) 2013-09-04 2014-06-25 株式会社トライフォース・マネジメント 発電素子
CN104459181B (zh) * 2014-12-31 2017-06-23 东南大学 一种用于流速、加速度和角速度敏感的仿生毛发传感器
US10416030B2 (en) 2015-01-26 2019-09-17 Wacoh-Tech Inc. Force sensor
EP3104151B1 (de) 2015-04-07 2020-01-15 Tri-Force Management Corporation Kraftsensor und darin verwendete struktur
JP5996078B1 (ja) 2015-10-19 2016-09-21 株式会社トライフォース・マネジメント 発電素子
US11725941B2 (en) * 2019-01-08 2023-08-15 Panasonic Intellectual Property Management Co., Ltd. Sensing device
TWI770605B (zh) * 2019-09-10 2022-07-11 昇佳電子股份有限公司 微機電陀螺儀

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US3842681A (en) * 1973-07-19 1974-10-22 Sperry Rand Corp Angular rate sensor
JPS52109963A (en) * 1976-03-12 1977-09-14 Nec Corp Rotational angle detector for rotating body
JPS58221109A (ja) * 1982-06-17 1983-12-22 Tokyo Keiki Co Ltd ジヤイロ装置
US4848158A (en) * 1983-03-31 1989-07-18 Honeywell Inc. Single-axis centrifugal rate sensor
JPS6117910A (ja) * 1984-07-05 1986-01-25 Matsushita Electric Ind Co Ltd 角速度センサ
JPS6193018A (ja) * 1984-10-01 1986-05-12 シグノ−ド株式会社 円形ストラツプシユ−トゲ−トによる極小穴の結束装置
JPS61193018A (ja) * 1985-02-21 1986-08-27 Hitachi Ltd 角速度センサ
JPS6397859A (ja) * 1986-10-13 1988-04-28 Toyota Motor Corp 二重天井式ピストン及びその製造方法
JPS6397859U (de) * 1986-12-16 1988-06-24
JP2504017B2 (ja) * 1987-01-23 1996-06-05 日本油脂株式会社 化粧料
US5182515A (en) * 1987-04-24 1993-01-26 Wacoh Corporation Detector for magnetism using a resistance element
US4905523A (en) * 1987-04-24 1990-03-06 Wacoh Corporation Force detector and moment detector using resistance element
US4967605A (en) * 1987-04-24 1990-11-06 Wacoh Corporation Detector for force and acceleration using resistance element
JPS63183508U (de) * 1987-05-19 1988-11-25
US5092645A (en) * 1987-09-18 1992-03-03 Wacoh Corporation Robotic gripper having strain sensors formed on a semiconductor substrate
US5263375A (en) * 1987-09-18 1993-11-23 Wacoh Corporation Contact detector using resistance elements and its application
US5035148A (en) * 1989-02-01 1991-07-30 Wacoh Corporation Force detector using resistance elements
JP2681215B2 (ja) * 1989-05-29 1997-11-26 株式会社ワコー 積層基板を用いたセンサの製造方法
US5531092A (en) * 1989-12-28 1996-07-02 Okada; Kazuhiro Device for moving a suspended weight body
DE69019343T2 (de) * 1989-12-28 1996-02-15 Wako Kk Beschleunigungssensoren.
US5421213A (en) * 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
JPH04178517A (ja) * 1990-11-13 1992-06-25 Japan Aviation Electron Ind Ltd 二軸角速度計
JP3040816B2 (ja) * 1991-03-30 2000-05-15 和廣 岡田 電極間距離の変化を利用して物理量を検出する装置における動作試験方法、およびこの方法を実施する機能を備えた物理量の検出装置
JP3141954B2 (ja) * 1991-07-17 2001-03-07 株式会社ワコー 圧電素子を用いた力・加速度・磁気のセンサ
EP0601120B1 (de) * 1991-08-29 1998-12-16 Bei Electronics, Inc. Drehmessfühler
JP3027457B2 (ja) * 1991-10-25 2000-04-04 和廣 岡田 多次元方向に関する力・加速度・磁気の検出装置
US5377544A (en) * 1991-12-19 1995-01-03 Motorola, Inc. Rotational vibration gyroscope
JPH05215627A (ja) * 1992-02-04 1993-08-24 Kazuhiro Okada 多次元方向に関する力・加速度・磁気の検出装置
US5646346A (en) * 1994-11-10 1997-07-08 Okada; Kazuhiro Multi-axial angular velocity sensor
JP3256346B2 (ja) * 1993-07-29 2002-02-12 和廣 岡田 圧電素子を用いた力・加速度・磁気のセンサ
JPH0791958A (ja) * 1993-09-27 1995-04-07 Canon Inc 角速度センサ
JP3585980B2 (ja) * 1995-02-21 2004-11-10 株式会社ワコー 角速度センサ
US5635640A (en) * 1995-06-06 1997-06-03 Analog Devices, Inc. Micromachined device with rotationally vibrated masses

Also Published As

Publication number Publication date
EP0851212A4 (de) 1999-12-01
JP4011626B2 (ja) 2007-11-21
US6076401A (en) 2000-06-20
EP0851212B1 (de) 2005-04-06
WO1998001722A1 (fr) 1998-01-15
EP0851212A1 (de) 1998-07-01

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Legal Events

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8332 No legal effect for de