JP4366666B1 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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Abstract
【解決手段】
半導体素子53は、角錐台状をした空洞73が上下に貫通したベース71の上面にダイアフラム72を設けたものである。プリント配線基板のような基板52の上面にはダイボンド用パッド65が設けられており、半導体素子53はダイボンド樹脂74によって下面をダイボンド用パッド65の上に接着される。ダイボンド用パッド65は、半導体素子53の空洞73の内周面に生じている谷部75の下端に対向する領域を除去して開口部76を形成されており、ダイボンド用パッド65が谷部75の下端に接触しないようになっている。
【選択図】図4
Description
図4は、本発明の実施形態1による半導体装置51の構造を示す断面図であって、基板52の対角方向における断面を表す。図5は半導体装置51に用いられている基板52の平面図であって、併せてその一部を拡大して表す。ここに示す半導体装置51は、基板52の上面に半導体素子53を実装し、基板52と導電性キャップ54からなるパッケージ(ファラデーケージ)内に半導体素子53を納めたものである。
図6は本発明の実施形態2による半導体装置81の構造を示す断面図であって、導電性キャップ54を取り付ける前の状態を表す。図7は、半導体装置81に用いられている基板52の平面図であって、併せてその一部を拡大して表す。この実施態様においては、実施形態1における第3ソルダレジスト領域63を除去して溝部82を設け、溝部82内に基板コア材55を露出させている。このような溝部82を形成すると、ダイボンド用パッド65(あるいは、外周側メッキ領域62)の外周端でダイボンド樹脂74を止める効果が高くなり、ダイボンド樹脂74がダイボンド用パッド65の外側へ流れて接地電極部64に付着しにくくなる。
図8は実施形態2の変形例の構造を示す断面図であって、導電性キャップ54を取り付ける前の状態を表す。この変形例では、開口部76の底面で基板コア材55を削除して堀込部83を設けている。開口部76内に堀込部83を設けているので、開口部76の深さが深くなり、万一開口部76内にダイボンド樹脂74が流れ込んでもダイボンド樹脂74が谷部75の下端に触れにくく、ダイボンド樹脂74が谷部75を伝って這い上がる恐れが小さくなる。
図9は本発明の実施形態3による半導体装置91の構造を示す断面図であって、導電性キャップ54を取り付ける前の状態を表す。図10は、半導体装置91に用いられている基板52の平面図であって、併せてその一部を拡大して表す。この実施形態においては、実施形態2における外周側メッキ領域62を除去して溝部82を拡大し、さらに第2ソルダレジスト領域61の外周端を半導体素子53の下面の外周端にほぼ一致させている。かかる実施形態によれば、溝部82を広くすることができるので、外側へ流れ出たダイボンド樹脂74が接地電極部64に流れにくくなる。
図11は本発明の実施形態4による半導体装置101の構造を示す断面図であって、導電性キャップ54を取り付ける前の状態を表す。図12は、半導体装置101に用いられている基板52の平面図であって、併せてその一部を拡大して表す。この実施態様においては、実施形態2における第1ソルダレジスト領域59を除去して基板コア材55を露出させている。そして、内周側メッキ領域60の内周端を半導体素子53の下面の内周端(空洞73の縁)よりも外周側に位置させることにより、谷部対向領域を含めて内周側メッキ領域60よりも内側の全体に開口部76を形成している。この実施形態では、ダイボンド用パッド65の内側全体を開口部76としており、また第1ソルダレジスト領域59を除去することでダイボンド用パッド65(あるいは、内周側メッキ領域60)の内周端でダイボンド樹脂74を止める効果を高めているので、ダイボンド樹脂74が谷部75を這い上がるのを防止する効果がより高くなっている。
52 基板
53 半導体素子
55 基板コア材
56 導体パターン
57 ソルダレジスト
58 無機材料層
59 第1ソルダレジスト領域
60 内周側メッキ領域
61 第2ソルダレジスト領域
62 外周側メッキ領域
63 第3ソルダレジスト領域
64 接地電極部
65 ダイボンド用パッド
71 ベース
72 ダイアフラム
73 空洞
74 ダイボンド樹脂
75 谷部
76 開口部
Claims (5)
- 水平断面が多角形状をした空洞がベースを上下に貫通し、前記空洞を覆うようにして前記ベースの上にダイアフラムが配設された半導体素子と、表面が導体パターンによって覆われ、かつ、ダイボンド用パッドを形成されたプリント基板とを備え、ダイボンド樹脂によって前記半導体素子の下面を前記ダイボンド用パッドの上に接着することにより、前記空洞の下方開口部分を前記プリント基板で覆った構造の半導体装置であって、
前記半導体素子の空洞内周面において壁面と壁面が交わって形成されている谷部の下端に対向する領域で、前記導体パターンが除去されていることを特徴とする半導体装置。 - 前記谷部の下端に対向する領域と前記空洞の下方開口部に対向する領域で、前記導体パターンが除去されていることを特徴とする、請求項1に記載の半導体装置。
- 前記導体パターンのうち、前記導体パターン除去領域の外周部分の表面の少なくとも一部をCu又はAuによって形成したことを特徴とする、請求項2に記載の半導体装置。
- 前記ダイボンド用パッドの外周縁は、前記半導体素子の下面外周縁よりも外側に位置していることを特徴とする、請求項1に記載の半導体装置。
- 前記半導体素子の下面は、前記谷部の下端とその周囲の領域を除いて全面を前記ダイボンド用パッドに接着されていることを特徴とする、請求項1に記載の半導体装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
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JP2008235736A JP4366666B1 (ja) | 2008-09-12 | 2008-09-12 | 半導体装置 |
EP09812805.1A EP2325875B1 (en) | 2008-09-12 | 2009-02-20 | Semiconductor device |
US13/059,987 US9363617B2 (en) | 2008-09-12 | 2009-02-20 | Semiconductor device having a base, a cavity, a diaphragm, and a substrate |
PCT/JP2009/000728 WO2010029655A1 (ja) | 2008-09-12 | 2009-02-20 | 半導体装置 |
KR1020117001383A KR101166654B1 (ko) | 2008-09-12 | 2009-02-20 | 반도체 장치 |
CN200980132056XA CN102124549B (zh) | 2008-09-12 | 2009-02-20 | 半导体装置 |
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JP2008235736A JP4366666B1 (ja) | 2008-09-12 | 2008-09-12 | 半導体装置 |
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JP4366666B1 true JP4366666B1 (ja) | 2009-11-18 |
JP2010067934A JP2010067934A (ja) | 2010-03-25 |
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US (1) | US9363617B2 (ja) |
EP (1) | EP2325875B1 (ja) |
JP (1) | JP4366666B1 (ja) |
KR (1) | KR101166654B1 (ja) |
CN (1) | CN102124549B (ja) |
WO (1) | WO2010029655A1 (ja) |
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WO2011045990A1 (ja) * | 2009-10-14 | 2011-04-21 | シャープ株式会社 | 表示装置 |
CN102925347B (zh) * | 2012-08-29 | 2016-01-20 | 张楚凡 | 半导体芯片、半导体酶芯片及筛选目标酶的方法 |
JP6146466B2 (ja) * | 2013-03-13 | 2017-06-14 | トヨタ自動車株式会社 | 半導体装置 |
US10322481B2 (en) * | 2014-03-06 | 2019-06-18 | Infineon Technologies Ag | Support structure and method of forming a support structure |
US10879211B2 (en) | 2016-06-30 | 2020-12-29 | R.S.M. Electron Power, Inc. | Method of joining a surface-mount component to a substrate with solder that has been temporarily secured |
CN112404786B (zh) * | 2020-09-28 | 2022-09-20 | 中国电子科技集团公司第二十九研究所 | 一种提升气密性软钎焊效果的结构及其焊接工艺 |
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JPH08193897A (ja) * | 1995-01-19 | 1996-07-30 | Mitsubishi Electric Corp | 半導体圧力センサ |
JPH09222372A (ja) * | 1996-02-19 | 1997-08-26 | Mitsubishi Electric Corp | 半導体式センサ |
JPH1123613A (ja) * | 1997-07-04 | 1999-01-29 | Tokai Rika Co Ltd | ダイアフラム式センサチップを利用したセンサ |
US6255728B1 (en) * | 1999-01-15 | 2001-07-03 | Maxim Integrated Products, Inc. | Rigid encapsulation package for semiconductor devices |
US7166910B2 (en) | 2000-11-28 | 2007-01-23 | Knowles Electronics Llc | Miniature silicon condenser microphone |
US6859542B2 (en) * | 2001-05-31 | 2005-02-22 | Sonion Lyngby A/S | Method of providing a hydrophobic layer and a condenser microphone having such a layer |
JP2004039988A (ja) | 2002-07-05 | 2004-02-05 | Shinko Electric Ind Co Ltd | 素子搭載用回路基板及び電子装置 |
JP2004251742A (ja) | 2003-02-20 | 2004-09-09 | Denso Corp | センサ装置 |
JP2004301740A (ja) * | 2003-03-31 | 2004-10-28 | Denso Corp | 半導体センサ |
JP4539450B2 (ja) * | 2004-11-04 | 2010-09-08 | オムロン株式会社 | 容量型振動センサ及びその製造方法 |
JP2006302943A (ja) | 2005-04-15 | 2006-11-02 | Tokyo Electron Ltd | マイクロ構造体 |
JP4784289B2 (ja) * | 2005-12-06 | 2011-10-05 | ヤマハ株式会社 | 半導体装置の製造方法 |
EP1795496A2 (en) * | 2005-12-08 | 2007-06-13 | Yamaha Corporation | Semiconductor device for detecting pressure variations |
US7436054B2 (en) * | 2006-03-03 | 2008-10-14 | Silicon Matrix, Pte. Ltd. | MEMS microphone with a stacked PCB package and method of producing the same |
US20070284681A1 (en) * | 2006-06-12 | 2007-12-13 | Intermec Ip Corp. | Apparatus and method for protective covering of microelectromechanical system (mems) devices |
US7579678B2 (en) * | 2006-09-04 | 2009-08-25 | Yamaha Corporation | Semiconductor microphone unit |
TWI315295B (en) | 2006-12-29 | 2009-10-01 | Advanced Semiconductor Eng | Mems microphone module and method thereof |
CN101018429A (zh) * | 2007-03-05 | 2007-08-15 | 胡维 | 电容式微型硅麦克风及制备方法 |
US7745281B2 (en) * | 2007-03-07 | 2010-06-29 | Kemet Electronics Corporation | Thin solid electrolytic capacitor embeddable in a substrate |
CN101022685A (zh) * | 2007-03-23 | 2007-08-22 | 胡维 | 电容式微型硅麦克风及其制备方法 |
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- 2009-02-20 CN CN200980132056XA patent/CN102124549B/zh active Active
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JP2010067934A (ja) | 2010-03-25 |
KR101166654B1 (ko) | 2012-07-18 |
EP2325875A4 (en) | 2014-08-06 |
KR20110022685A (ko) | 2011-03-07 |
US20110204457A1 (en) | 2011-08-25 |
EP2325875A1 (en) | 2011-05-25 |
CN102124549B (zh) | 2013-10-23 |
WO2010029655A1 (ja) | 2010-03-18 |
CN102124549A (zh) | 2011-07-13 |
EP2325875B1 (en) | 2018-06-06 |
US9363617B2 (en) | 2016-06-07 |
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