CN101651913A - 麦克风 - Google Patents

麦克风 Download PDF

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CN101651913A
CN101651913A CN200910108215A CN200910108215A CN101651913A CN 101651913 A CN101651913 A CN 101651913A CN 200910108215 A CN200910108215 A CN 200910108215A CN 200910108215 A CN200910108215 A CN 200910108215A CN 101651913 A CN101651913 A CN 101651913A
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wiring board
cover plate
radome
microphone
chip
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吴志江
陈兴福
苏永泽
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AAC Technologies Holdings Shenzhen Co Ltd
AAC Technologies Holdings Changzhou Co Ltd
AAC Technologies Holdings Inc
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AAC Acoustic Technologies Shenzhen Co Ltd
AAC Acoustic Technologies Changzhou Co Ltd
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Priority to CN200910108215A priority Critical patent/CN101651913A/zh
Priority to US12/694,285 priority patent/US8670579B2/en
Publication of CN101651913A publication Critical patent/CN101651913A/zh
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032Packages or encapsulation
    • B81B7/0061Packages or encapsulation suitable for fluid transfer from the MEMS out of the package or vice versa, e.g. transfer of liquid, gas, sound
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00Details of transducers, loudspeakers or microphones
    • H04R1/06Arranging circuit leads; Relieving strain on circuit leads
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/02Sensors
    • B81B2201/0257Microphones or microspeakers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48135Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/48137Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/1515Shape
    • H01L2924/15151Shape the die mounting substrate comprising an aperture, e.g. for underfilling, outgassing, window type wire connections
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161Cap
    • H01L2924/1615Shape
    • H01L2924/16152Cap comprising a cavity for hosting the device, e.g. U-shaped cap
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00Details of transducers, loudspeakers or microphones
    • H04R1/02Casings; Cabinets ; Supports therefor; Mountings therein
    • H04R1/04Structural association of microphone with electric circuitry therefor
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003Mems transducers or their use

Abstract

本发明提供了一种麦克风,包括设有声孔的线路板、与线路板相连的盖板,该麦克风还包括设有背腔的微机电芯片以及分别与微机电芯片和线路板电连接的控制电路芯片,线路板和盖板形成一空腔,微机电芯片和控制电路芯片位于该空腔内且分别设在所述线路板上,盖板包括底板和自底板延伸的且与线路板相连的侧板,该麦克风还包括屏蔽罩,所述屏蔽罩包括本体和与本体相连的卷边,屏蔽罩本体覆盖侧板和线路板且屏蔽罩的卷边位于盖板的底板,通过卷边将盖板及线路板固定,屏蔽罩与声孔相对应的位置设有开口,微机电芯片的背腔与声孔相对。

Description

麦克风
技术领域
本发明涉及一种麦克风,尤其涉及一种电容麦克风。
背景技术
随着无线通讯的发展,全球移动电话用户越来越多,用户对移动电话的要求已不仅满足于通话,而且要能够提供高质量的通话效果,尤其是目前移动多媒体技术的发展,移动电话的通话质量更显重要,移动电话的麦克风作为移动电话的语音拾取装置,其设计好坏直接影响通话质量。
而目前应用较多且性能较好的麦克风是微电机系统麦克风(Micro-Electro-Mechanical-System Microphone,简称MEMS),相关技术中,参见图1,微电机系统麦克风1’包括线路板11’和与该线路板11’相连的框架12’和与框架12’相连的上板13’,其中,线路板11’、框架12’和上板13’构成了保护结构,MEMS芯片17’和控制电路16’位于该保护结构中。进声孔14’设置于上板13’。此种结构的麦克风由于声压从正面作用在MEME芯片17’上,背面的声腔171’不够大,使得信噪比(SNR)低。因此有必要提供一种新型的麦克风。
发明内容
本发明要解决的技术问题在于提供一种可以提高信噪比且屏蔽效果好的麦克风。
为解决上述技术问题,本发明提供的技术方案为:
一种麦克风,包括设有声孔的线路板、与线路板相连的盖板,该麦克风还包括设有背腔的微机电芯片以及分别与微机电芯片和线路板电连接的控制电路芯片,线路板和盖板形成一空腔,微机电芯片和控制电路芯片位于该空腔内且分别设在所述线路板上,盖板包括底板和自底板延伸的且与线路板相连的侧板,该麦克风还包括屏蔽罩,所述屏蔽罩包括本体和与本体相连的卷边,屏蔽罩本体覆盖侧板和线路板且屏蔽罩的卷边位于盖板的底板,通过卷边将盖板及线路板固定,屏蔽罩与声孔相对应的位置设有开口,微机电芯片的背腔与声孔相对。
优选的,在所述线路板上设有若干用于与埋设于陶瓷内部的电路电连接的第一组输出端子和用于与控制电路电连接的第二组输出端子,控制电路芯片的电信号通过第二组输出端子、线路板、第一组输出端子、盖板传递。
优选的,所述盖板与第一组输出端子连接处设有凸台,所述线路板相应位置设有凹槽。
优选的,所述盖板与第一组输出端子连接处设有凹槽,所述线路板相应位置设有凸台。
本发明的有益效果在于:由于微机电芯片的背腔与声孔相对,声音从微机电芯片的膜片背面作用到微机电芯片上,增大了背腔的空间,可以提高麦克风的信噪比;同时由于设有屏蔽罩,使得屏蔽效果好。
在发明的一个优选实施例中,由于盖板采用陶瓷材料,实现了空间上的弯曲走线,简化了工艺。
在发明的一个优选实施例中,由于盖板与第一组输出端子连接处设有凸台/凹槽,所述线路板相应位置设有凹槽/凸台,使得连接更加紧固,提高了麦克风的稳定性。
附图说明
图1是与本发明相关的麦克风的剖面图;
图2是本发明一个实施例的剖面图;
图3是本发明一个实施例中线路板的示意图;
图4是本发明一个实施例中盖板与第一组输出端子连接方式示意图。
具体实施方式
下面结合附图和实施方式对本发明作进一步说明。
本发明提供的麦克风,主要用于手机上,接受声音并将声音转化为电信号。
参见图2,本发明提供的麦克风1,包括线路板11、盖板12、由盖板12和线路板11形成的空腔17,微机电芯片14和控制电路芯片15设于空腔17中,且微机电芯片14和控制电路芯片15分别设于线路板11上。微机电芯片14设有背腔141。
盖板12包括底板122和自底板122向线路板11方向延伸的侧板121,侧板121与线路板相连。线路板上设有声孔111。声孔111与背腔141相对。
客户端设于盖板12上。
该麦克风1还包括屏蔽罩13。屏蔽罩13包括本体132以及与本体132相连的卷边133。本体132覆盖于盖板12的侧板121和线路板11,卷边设于盖板12的底板122的外侧,起固定的作用,即将线路板11和盖板12固定。此处,屏蔽罩13与侧板121和线路板11的连接方式采取铆接的方式。在屏蔽罩13与声孔111对应处开设有开口131,以便声音传入。
此种结构的麦克风1,由于微机电芯片14的背腔141与声孔111相对,声音从微机电芯片14的膜片背面作用到微机电芯片14上,增大了背腔141的空间,可以提高麦克风的信噪比。同时由于屏蔽罩13,使得屏蔽效果好。
在本发明提供的一个实施例中,盖板12为陶瓷材料制成,盖板12内部埋设有用于与线路板11电导通的电路。由于采用陶瓷材料制成盖板12,实现了空间走线,简化了工艺,也提高了麦克风1的性能。
参见图3,在线路板11上设有用于与埋设于陶瓷盖板12内部的电路电连接的第一组输出端子和用于与控制电路芯片15电连接的第二组输出端子,第一组输出端子包括a、b、c、d、e五个输出端子,第二组输出端子包括A、B、C、D、E五个输出端子。当然,第一组输出端子及第二组输出端子的个数不限于五个,可以是一个、两个或者其他,主要根据实际的需要设定。
控制电路芯片15的电信号通过第二组输出端子、线路板11、第一组输出端子、盖板13传递给位于盖板13的客户端。
为了使得第一组输出端子与陶瓷盖板12的连接更加紧固,在盖板12与第一组输出端子连接处设有凸台,线路板11相应位置设有凹槽,反之亦然,即在盖板处设有凹槽,在线路板处设有凸台,这样,通过凸台与凹槽的结合,提高了连接的稳定性。此处的连接和第二组输出端子与控制电路芯片15的连接都可以采用点银胶的方式实现。
本发明还提供了一种麦克风的制作方法,该方法包括如下步骤:
提供设有声孔111的线路板11、设有背腔141的微机电芯片14、控制电路芯片15、内部埋设有电路的陶瓷盖板12和设有开口131的屏蔽罩13,其中盖板12包括底板122和自底板122延伸的侧板121,屏蔽罩13包括本体132和与本体132相连的卷边133。
将线路板11和盖板12组装在一起形成一空腔17,将控制电路芯片15和微机电芯片14设置在该空腔17内且位于线路板11上,将屏蔽罩13本体132覆盖侧板121和线路板11且屏蔽罩13的卷边133位于盖板12的底板122,用来将盖板12及线路板11固定,微机电芯片14的背腔141与设在线路板11上的声孔111相对,屏蔽罩13的开口131与声孔111相对。
以上所述的仅是本发明的一种实施方式,在此应当指出,对于本领域的普通技术人员来说,在不脱离本发明创造构思的前提下,还可以做出改进,但这些均属于本发明的保护范围。

Claims (6)

1、一种麦克风,包括设有声孔的线路板、与线路板相连的盖板,其特征在于:该麦克风还包括设有背腔的微机电芯片以及分别与微机电芯片和线路板电连接的控制电路芯片,线路板和盖板形成一空腔,微机电芯片和控制电路芯片位于该空腔内且分别设在所述线路板上,盖板包括底板和自底板延伸的且与线路板相连的侧板,该麦克风还包括屏蔽罩,所述屏蔽罩包括本体和与本体相连的卷边,屏蔽罩本体覆盖侧板和线路板且屏蔽罩的卷边位于盖板的底板,通过卷边将盖板及线路板固定,屏蔽罩与声孔相对应的位置设有开口,微机电芯片的背腔与声孔相对。
2、根据权利要求1所述的麦克风,其特征在于:所述盖板为陶瓷材料制成,盖板内部埋设有用于与线路板电导通的电路。
3、根据权利要求2所述的麦克风,其特征在于:在所述线路板上设有若干用于与埋设于陶瓷内部的电路电连接的第一组输出端子和用于与控制电路电连接的第二组输出端子,控制电路芯片的电信号通过第二组输出端子、线路板、第一组输出端子、盖板传递。
4、根据权利要求3所述的麦克风,其特征在于:所述盖板与第一组输出端子连接处设有凸台,所述线路板相应位置设有凹槽。
5、根据权利要求3所述的麦克风,其特征在于:所述盖板与第一组输出端子连接处设有凹槽,所述线路板相应位置设有凸台。
6、一种麦克风的制作方法,其特征在于:该方法包括如下步骤:
提供设有声孔的线路板、设有背腔的微机电芯片、控制电路芯片、内部埋设有电路的陶瓷盖板和设有开口的屏蔽罩,其中盖板包括底板和自底板延伸的侧板,屏蔽罩包括本体和与本体相连的卷边;
将线路板和盖板组装在一起形成一空腔,将控制电路芯片和微机电芯片设置在该空腔内且位于线路板上,将屏蔽罩本体覆盖侧板和线路板且屏蔽罩的卷边位于盖板的底板,用来将盖板及线路板固定,微机电芯片的背腔与设在线路板上的声孔相对,屏蔽罩的开口与声孔相对。
CN200910108215A 2009-06-19 2009-06-19 麦克风 Pending CN101651913A (zh)

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US12/694,285 US8670579B2 (en) 2009-06-19 2010-01-27 MEMS microphone

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104506983A (zh) * 2014-12-31 2015-04-08 苏州恒听电子有限公司 一种具有新型屏蔽壳的受话器
CN107324274A (zh) * 2017-07-13 2017-11-07 中国工程物理研究院电子工程研究所 用于sip三维集成的封装载体

Families Citing this family (95)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2432249A1 (en) 2010-07-02 2012-03-21 Knowles Electronics Asia PTE. Ltd. Microphone
KR20140059242A (ko) 2011-08-18 2014-05-15 노우레스 일렉트로닉스, 엘엘시 엠이엠에스 기기들을 위한 민감도 조절 장치 및 방법
US8824706B2 (en) 2011-08-30 2014-09-02 Qualcomm Mems Technologies, Inc. Piezoelectric microphone fabricated on glass
US8724832B2 (en) 2011-08-30 2014-05-13 Qualcomm Mems Technologies, Inc. Piezoelectric microphone fabricated on glass
US9239386B2 (en) * 2011-10-05 2016-01-19 Infineon Technologies Ag Sonic sensors and packages
US9485560B2 (en) 2012-02-01 2016-11-01 Knowles Electronics, Llc Embedded circuit in a MEMS device
US9238579B2 (en) 2012-03-29 2016-01-19 Robert Bosch Gmbh Cavity package design
WO2013156539A1 (en) * 2012-04-17 2013-10-24 Stmicroelectronics S.R.L. Assembly of a semiconductor integrated device including a mems acoustic transducer
US9402118B2 (en) 2012-07-27 2016-07-26 Knowles Electronics, Llc Housing and method to control solder creep on housing
US9491539B2 (en) 2012-08-01 2016-11-08 Knowles Electronics, Llc MEMS apparatus disposed on assembly lid
US9078063B2 (en) 2012-08-10 2015-07-07 Knowles Electronics, Llc Microphone assembly with barrier to prevent contaminant infiltration
JP5951454B2 (ja) 2012-11-20 2016-07-13 株式会社東芝 マイクロフォンパッケージ
US9226052B2 (en) * 2013-01-22 2015-12-29 Invensense, Inc. Microphone system with non-orthogonally mounted microphone die
US9467785B2 (en) 2013-03-28 2016-10-11 Knowles Electronics, Llc MEMS apparatus with increased back volume
US9503814B2 (en) 2013-04-10 2016-11-22 Knowles Electronics, Llc Differential outputs in multiple motor MEMS devices
US9301075B2 (en) 2013-04-24 2016-03-29 Knowles Electronics, Llc MEMS microphone with out-gassing openings and method of manufacturing the same
US10028054B2 (en) 2013-10-21 2018-07-17 Knowles Electronics, Llc Apparatus and method for frequency detection
CN105379308B (zh) 2013-05-23 2019-06-25 美商楼氏电子有限公司 麦克风、麦克风系统及操作麦克风的方法
US9711166B2 (en) 2013-05-23 2017-07-18 Knowles Electronics, Llc Decimation synchronization in a microphone
US20180317019A1 (en) 2013-05-23 2018-11-01 Knowles Electronics, Llc Acoustic activity detecting microphone
US10020008B2 (en) 2013-05-23 2018-07-10 Knowles Electronics, Llc Microphone and corresponding digital interface
US9212052B2 (en) * 2013-08-07 2015-12-15 Invensense, Inc. Packaged microphone with multiple mounting orientations
US9386370B2 (en) 2013-09-04 2016-07-05 Knowles Electronics, Llc Slew rate control apparatus for digital microphones
US9502028B2 (en) 2013-10-18 2016-11-22 Knowles Electronics, Llc Acoustic activity detection apparatus and method
US9147397B2 (en) 2013-10-29 2015-09-29 Knowles Electronics, Llc VAD detection apparatus and method of operating the same
US9955246B2 (en) * 2014-07-03 2018-04-24 Harman International Industries, Incorporated Gradient micro-electro-mechanical systems (MEMS) microphone with varying height assemblies
US9831844B2 (en) 2014-09-19 2017-11-28 Knowles Electronics, Llc Digital microphone with adjustable gain control
US9554214B2 (en) 2014-10-02 2017-01-24 Knowles Electronics, Llc Signal processing platform in an acoustic capture device
US9743191B2 (en) 2014-10-13 2017-08-22 Knowles Electronics, Llc Acoustic apparatus with diaphragm supported at a discrete number of locations
US9743167B2 (en) 2014-12-17 2017-08-22 Knowles Electronics, Llc Microphone with soft clipping circuit
WO2016112113A1 (en) 2015-01-07 2016-07-14 Knowles Electronics, Llc Utilizing digital microphones for low power keyword detection and noise suppression
WO2016118480A1 (en) 2015-01-21 2016-07-28 Knowles Electronics, Llc Low power voice trigger for acoustic apparatus and method
US10121472B2 (en) 2015-02-13 2018-11-06 Knowles Electronics, Llc Audio buffer catch-up apparatus and method with two microphones
US9866938B2 (en) 2015-02-19 2018-01-09 Knowles Electronics, Llc Interface for microphone-to-microphone communications
US9800971B2 (en) 2015-03-17 2017-10-24 Knowles Electronics, Llc Acoustic apparatus with side port
US10291973B2 (en) 2015-05-14 2019-05-14 Knowles Electronics, Llc Sensor device with ingress protection
US9883270B2 (en) * 2015-05-14 2018-01-30 Knowles Electronics, Llc Microphone with coined area
US9478234B1 (en) 2015-07-13 2016-10-25 Knowles Electronics, Llc Microphone apparatus and method with catch-up buffer
US9794661B2 (en) 2015-08-07 2017-10-17 Knowles Electronics, Llc Ingress protection for reducing particle infiltration into acoustic chamber of a MEMS microphone package
CN108432265A (zh) 2015-11-19 2018-08-21 美商楼氏电子有限公司 差分式mems麦克风
US9516421B1 (en) 2015-12-18 2016-12-06 Knowles Electronics, Llc Acoustic sensing apparatus and method of manufacturing the same
CN108370477B (zh) 2015-12-18 2020-10-13 美商楼氏电子有限公司 麦克风
WO2017136364A1 (en) 2016-02-01 2017-08-10 Knowles Electronics, Llc Apparatus to bias mems motors
WO2017136763A1 (en) 2016-02-04 2017-08-10 Knowles Electronics, Llc Differential mems microphone
WO2017136744A1 (en) 2016-02-04 2017-08-10 Knowles Electronics, Llc Microphone and pressure sensor
US20170240418A1 (en) * 2016-02-18 2017-08-24 Knowles Electronics, Llc Low-cost miniature mems vibration sensor
WO2017205533A1 (en) 2016-05-26 2017-11-30 Knowles Electronics, Llc Microphone device with integrated pressure sensor
WO2017222832A1 (en) 2016-06-24 2017-12-28 Knowles Electronics, Llc Microphone with integrated gas sensor
US10499150B2 (en) 2016-07-05 2019-12-03 Knowles Electronics, Llc Microphone assembly with digital feedback loop
US10206023B2 (en) 2016-07-06 2019-02-12 Knowles Electronics, Llc Transducer package with through-vias
US10153740B2 (en) 2016-07-11 2018-12-11 Knowles Electronics, Llc Split signal differential MEMS microphone
US9860623B1 (en) 2016-07-13 2018-01-02 Knowles Electronics, Llc Stacked chip microphone
US10257616B2 (en) 2016-07-22 2019-04-09 Knowles Electronics, Llc Digital microphone assembly with improved frequency response and noise characteristics
CN109641739B (zh) 2016-07-27 2023-03-31 美商楼氏电子有限公司 微机电系统(mems)装置封装
DE112017005458T5 (de) 2016-10-28 2019-07-25 Knowles Electronics, Llc Wandleranordnungen und verfahren
DE112017006148T5 (de) 2016-12-05 2019-08-22 Knowles Electronics, Llc Rampenbildung der sensorleistung in einer mikroelektromechanischen systemvorrichtung
US10315912B2 (en) 2016-12-28 2019-06-11 Knowles Electronics, Llc Microelectromechanical system microphone
DE112018000811T5 (de) 2017-02-14 2019-10-24 Knowles Electronics, Llc System und Verfahren zum Kalibrieren einer Mikrofon-Grenzfrequenz
EP3379204B1 (en) 2017-03-22 2021-02-17 Knowles Electronics, LLC Arrangement to calibrate a capacitive sensor interface
WO2018218073A1 (en) 2017-05-25 2018-11-29 Knowles Electronics, Llc Microphone package for fully encapsulated asic and wires
DE112018003280T8 (de) 2017-06-27 2020-04-02 Knowles Electronics, Llc Nachlinearisierungssystem und -verfahren unter verwendung eines trackingsignals
DE112018003794T5 (de) 2017-07-26 2020-05-07 Knowles Electronics, Llc Akustische entlastung in mems
WO2019051211A1 (en) 2017-09-08 2019-03-14 Knowles Electronics, Llc NOISE MITIGATION FOR A DIGITAL MICROPHONE
CN111095949B (zh) 2017-09-18 2021-06-18 美商楼氏电子有限公司 减少声换能器中噪声的方法和麦克风组件
US10654712B2 (en) 2017-09-21 2020-05-19 Knowles Electronics, Llc Elevated MEMS device in a microphone with ingress protection
WO2019099414A1 (en) 2017-11-14 2019-05-23 Knowles Electronics, Llc Sensor package with ingress protection
CN112088539B (zh) 2018-03-21 2022-06-03 美商楼氏电子有限公司 麦克风及用于该麦克风的控制电路
CN112020865B (zh) 2018-04-26 2022-06-17 美商楼氏电子有限公司 具有透声隔膜的声学组件
DE112019002536T5 (de) 2018-05-18 2021-02-11 Knowles Electronics, Llc Systeme und verfahren zur rauschunterdrückung in mikrofonen
WO2019246151A1 (en) 2018-06-19 2019-12-26 Knowles Electronics, Llc Transconductance amplifier
US11095990B2 (en) 2018-06-19 2021-08-17 Knowles Electronics, Llc Microphone assembly with reduced noise
CN112840676B (zh) 2018-10-05 2022-05-03 美商楼氏电子有限公司 响应于声学信号来生成电信号的声学换能器和麦克风组件
DE112019004979T5 (de) 2018-10-05 2021-06-17 Knowles Electronics, Llc Verfahren zur Herstellung von MEMS-Membranen, die Wellungen umfassen
WO2020072920A1 (en) 2018-10-05 2020-04-09 Knowles Electronics, Llc Microphone device with ingress protection
CN112806026B (zh) 2018-10-09 2022-05-31 美商楼氏电子有限公司 集成电路、麦克风组件、多麦克风系统、处理音频流的方法
US11743647B2 (en) 2018-12-11 2023-08-29 Knowles Electronics, Llc. Multi-rate integrated circuit connectable to a sensor
WO2020154066A1 (en) 2019-01-22 2020-07-30 Knowles Electronics, Llc Leakage current detection from bias voltage supply of mems microphone assembly
US11197104B2 (en) 2019-01-25 2021-12-07 Knowles Electronics, Llc MEMS transducer including free plate diaphragm with spring members
US11122360B2 (en) 2019-02-01 2021-09-14 Knowles Electronics, Llc Microphone assembly with back volume vent
EP3694222A1 (en) 2019-02-06 2020-08-12 Knowles Electronics, LLC Sensor arrangement and method
US11778390B2 (en) 2019-11-07 2023-10-03 Knowles Electronics, Llc. Microphone assembly having a direct current bias circuit
DE102020133179A1 (de) 2019-12-23 2021-06-24 Knowles Electronics, Llc Mikrofonanordnung, die eine gleichstromvorspannungsschaltung mit tiefer grabenisolation aufweist
US11787690B1 (en) 2020-04-03 2023-10-17 Knowles Electronics, Llc. MEMS assembly substrates including a bond layer
US11240600B1 (en) 2020-11-12 2022-02-01 Knowles Electronics, Llc Sensor assembly and electrical circuit therefor
US11671775B2 (en) 2020-12-30 2023-06-06 Knowles Electronics, Llc Microphone assembly with transducer sensitivity drift compensation and electrical circuit therefor
US11743666B2 (en) 2020-12-30 2023-08-29 Knowles Electronics, Llc. Microphone assembly with transducer sensitivity drift compensation and electrical circuit therefor
US11916575B2 (en) 2020-12-31 2024-02-27 Knowleselectronics, Llc. Digital microphone assembly with improved mismatch shaping
US11909387B2 (en) 2021-03-17 2024-02-20 Knowles Electronics, Llc. Microphone with slew rate controlled buffer
US11897762B2 (en) 2021-03-27 2024-02-13 Knowles Electronics, Llc. Digital microphone with over-voltage protection
US11528546B2 (en) 2021-04-05 2022-12-13 Knowles Electronics, Llc Sealed vacuum MEMS die
US11540048B2 (en) 2021-04-16 2022-12-27 Knowles Electronics, Llc Reduced noise MEMS device with force feedback
CN215453270U (zh) * 2021-07-07 2022-01-07 瑞声声学科技(深圳)有限公司 麦克风
US11649161B2 (en) 2021-07-26 2023-05-16 Knowles Electronics, Llc Diaphragm assembly with non-uniform pillar distribution
US11772961B2 (en) 2021-08-26 2023-10-03 Knowles Electronics, Llc MEMS device with perimeter barometric relief pierce
US11780726B2 (en) 2021-11-03 2023-10-10 Knowles Electronics, Llc Dual-diaphragm assembly having center constraint

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7166910B2 (en) * 2000-11-28 2007-01-23 Knowles Electronics Llc Miniature silicon condenser microphone
US7023066B2 (en) * 2001-11-20 2006-04-04 Knowles Electronics, Llc. Silicon microphone
JP4205420B2 (ja) * 2002-12-24 2009-01-07 スター精密株式会社 マイクロホン装置およびホルダ
KR100549189B1 (ko) * 2003-07-29 2006-02-10 주식회사 비에스이 Smd가능한 일렉트렛 콘덴서 마이크로폰
TW200514458A (en) * 2003-09-08 2005-04-16 Sambu Communics Co Ltd Condenser microphone using space efficiently and having no characteristic variations
JP2005130437A (ja) * 2003-10-24 2005-05-19 Knowles Electronics Llc 高性能コンデンサマイクロホン及びその製造方法
JP3103711U (ja) * 2003-10-24 2004-08-19 台湾楼氏電子工業股▼ふん▲有限公司 高効率コンデンサマイクロホン
EP1722596A4 (en) * 2004-03-09 2009-11-11 Panasonic Corp ELECTRET CONDENSER MICROPHONE
KR200428000Y1 (ko) * 2006-07-03 2006-10-04 조인셋 주식회사 솔더링 가능한 탄성 전기 접촉단자
WO2009016587A1 (en) * 2007-08-02 2009-02-05 Nxp B.V. Electro-acoustic transducer comprising a mems sensor
US8199939B2 (en) * 2009-01-21 2012-06-12 Nokia Corporation Microphone package

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104506983A (zh) * 2014-12-31 2015-04-08 苏州恒听电子有限公司 一种具有新型屏蔽壳的受话器
CN107324274A (zh) * 2017-07-13 2017-11-07 中国工程物理研究院电子工程研究所 用于sip三维集成的封装载体
CN107324274B (zh) * 2017-07-13 2024-04-05 中国工程物理研究院电子工程研究所 用于sip三维集成的封装载体

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