JP2007526820A5 - - Google Patents

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JP2007526820A5
JP2007526820A5 JP2006545541A JP2006545541A JP2007526820A5 JP 2007526820 A5 JP2007526820 A5 JP 2007526820A5 JP 2006545541 A JP2006545541 A JP 2006545541A JP 2006545541 A JP2006545541 A JP 2006545541A JP 2007526820 A5 JP2007526820 A5 JP 2007526820A5
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nano
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JP2007526820A (ja
JP6067954B2 (ja
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Priority claimed from PCT/US2004/042706 external-priority patent/WO2005101466A2/en
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JP2006545541A 2003-12-19 2004-12-20 ナノサイズ物品、及びソフトリソグラフィー又はインプリントリソグラフィーを用いる分離構造の作製方法によって製造されたナノサイズ物品 Expired - Lifetime JP6067954B2 (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US53153103P 2003-12-19 2003-12-19
US60/531,531 2003-12-19
US58317004P 2004-06-25 2004-06-25
US60/583,170 2004-06-25
US60497004P 2004-08-27 2004-08-27
US60/604,970 2004-08-27
PCT/US2004/042706 WO2005101466A2 (en) 2003-12-19 2004-12-20 Methods for fabricating isolated micro- and nano- structures using soft or imprint lithography

Related Child Applications (2)

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JP2011104856A Division JP5956116B2 (ja) 2003-12-19 2011-05-10 ソフトリソグラフィー又はインプリントリソグラフィーを用いる分離微小構造及び分離ナノ構造の作製方法
JP2014054051A Division JP6232320B6 (ja) 2003-12-19 2014-03-17 ソフトリソグラフィー又はインプリントリソグラフィーを用いる分離微小構造及び分離ナノ構造の作製方法

Publications (3)

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JP2007526820A JP2007526820A (ja) 2007-09-20
JP2007526820A5 true JP2007526820A5 (enExample) 2008-02-14
JP6067954B2 JP6067954B2 (ja) 2017-01-25

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JP2006545541A Expired - Lifetime JP6067954B2 (ja) 2003-12-19 2004-12-20 ナノサイズ物品、及びソフトリソグラフィー又はインプリントリソグラフィーを用いる分離構造の作製方法によって製造されたナノサイズ物品
JP2011104856A Expired - Lifetime JP5956116B2 (ja) 2003-12-19 2011-05-10 ソフトリソグラフィー又はインプリントリソグラフィーを用いる分離微小構造及び分離ナノ構造の作製方法

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JP2011104856A Expired - Lifetime JP5956116B2 (ja) 2003-12-19 2011-05-10 ソフトリソグラフィー又はインプリントリソグラフィーを用いる分離微小構造及び分離ナノ構造の作製方法

Country Status (14)

Country Link
US (8) US8263129B2 (enExample)
EP (2) EP3242318A1 (enExample)
JP (2) JP6067954B2 (enExample)
KR (4) KR101376715B1 (enExample)
AU (1) AU2004318602B2 (enExample)
BR (1) BRPI0417848B1 (enExample)
CA (2) CA2549341C (enExample)
DK (1) DK1704585T3 (enExample)
ES (1) ES2625345T3 (enExample)
IL (2) IL176254A (enExample)
MX (1) MXPA06006738A (enExample)
PT (1) PT1704585T (enExample)
WO (1) WO2005101466A2 (enExample)
ZA (1) ZA200604885B (enExample)

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* Cited by examiner, † Cited by third party
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