EP2507299A2 - Oligogermanes chlorés et procédé de production associé - Google Patents

Oligogermanes chlorés et procédé de production associé

Info

Publication number
EP2507299A2
EP2507299A2 EP10787451A EP10787451A EP2507299A2 EP 2507299 A2 EP2507299 A2 EP 2507299A2 EP 10787451 A EP10787451 A EP 10787451A EP 10787451 A EP10787451 A EP 10787451A EP 2507299 A2 EP2507299 A2 EP 2507299A2
Authority
EP
European Patent Office
Prior art keywords
chlorinated
mixture
oligogermanes
oligogerman
chlorine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP10787451A
Other languages
German (de)
English (en)
Inventor
Norbert Auner
Christian Bauch
Sven Holl
Rumen Deltschew
Javad MOHSSENI
Gerd Lippold
Thoralf Gebel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Spawnt Private SARL
Original Assignee
Spawnt Private SARL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by Spawnt Private SARL filed Critical Spawnt Private SARL
Publication of EP2507299A2 publication Critical patent/EP2507299A2/fr
Withdrawn legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/60—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which all the silicon atoms are connected by linkages other than oxygen atoms
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G17/00—Compounds of germanium
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G79/00—Macromolecular compounds obtained by reactions forming a linkage containing atoms other than silicon, sulfur, nitrogen, oxygen, and carbon with or without the latter elements in the main chain of the macromolecule
    • C08G79/14—Macromolecular compounds obtained by reactions forming a linkage containing atoms other than silicon, sulfur, nitrogen, oxygen, and carbon with or without the latter elements in the main chain of the macromolecule a linkage containing two or more elements other than carbon, oxygen, nitrogen, sulfur and silicon
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/50—Improvements relating to the production of bulk chemicals
    • Y02P20/582—Recycling of unreacted starting or intermediate materials

Definitions

  • the invention relates to chlorinated oligogermans and mixtures of chlorinated Oligogermanen having a molar ratio germanium: chlorine of 1: 2 to 1: 3 and a method for producing such chlorinated oligogermans and
  • Germanium dichloride can be particularly thermally
  • WO 08/110386 A1 discloses a process and an apparatus for the production of halogenated polygermanes from halogen germanes by plasma chemical means.
  • Chlorpolygermanen with chlorine gas is described; Chloropolygermanes are degraded to pure GeCl 4 .
  • chlorinated oligogermans according to the invention (as pure compound) or the mixture according to the invention of such chlorinated oligogermans have at least one direct bond germanium-germanium whose substituents comprise either chlorine or chlorine and hydrogen
  • Chlorinated oligogermans as pure compound have a germanium: chlorine ratio of 1: 2 to 1: 2.67.
  • Ratio of germanium chlorine 1: 1 to 1: 3, in particular from 1: 2 to 1: 3, and also an average number of
  • Germanium atoms per molecule from 2 to less than or equal to 8.
  • the inventive mixture of chlorinated oligogermans is to be understood in particular that only a portion of the compounds contained therein must have at least one direct bond germanium-germanium with the abovementioned substituents. As a rule, at least two such compounds with direct binding Germanium-germanium in the mixture will be included, but often three or more. in the
  • chlorinated oligogermanes in particular compounds of the formula Ge n 2n + 2 with n less than or equal to 8 or mixtures
  • chlorinated Oligogermane with an average n is less than or equal to 8, where X is in particular chlorine or chlorine and hydrogen. In individual cases can
  • the chlorine content of the pure compounds or the average chlorine content of a mixture is determined in the context of this application by complete digestion of the sample and subsequent titration of the chlorides to Mohr.
  • the determination of the hydrogen content is carried out by
  • Oligogermans or the average molar masses of the mixtures thereof are determined by means of freezing point depression.
  • chlorine content, molecular weight and optionally hydrogen content can be the same
  • Chlorine Directly determine germanium ratio as well as the mean number of germanium atoms per molecule.
  • the chlorinated oligogermans according to the invention may, according to one embodiment, be chlorinated by chlorination
  • Polygermanen be prepared. Thus produced
  • Chlorinated oligogermans then generally have an increased kinetic stability, in particular what the other
  • the chlorinated oligogermans are particularly suitable for applications where the chlorinated
  • German be further processed under oxidizing conditions.
  • oxidizing atmospheres such as chlorine gas-containing atmospheres
  • the invention provides a plurality of the invention. According to one embodiment, the invention
  • Oligogermans can be obtained by cleaving chlorinated polygermans (PCG) using an oxidizing agent.
  • Oxidizing agent can be used in particular chlorine and / or HCl, wherein the cleavage can also be carried out so that either an excess of the
  • Oxidizing agent is present or that the oxidizing agent is always present only in low concentration.
  • the chlorinated polygermans used as starting material can in particular thermally according to Holleman Wiberg, Textbook of Inorganic Chemistry, Walter De Gruyter Verlag, 102.
  • HECls Trichlorogerman distilled at about 75 ° C and decomposes in GeCl2 and HCl.
  • plasma-chemically obtained chlorinated polygermanes can also be used as starting material, in particular chlorinated polygermanes as described in WO 2008/110386 A1, with regard to the content of the preparation process described therein
  • chlorinated polygermanes can also be produced in a plasma-chemical manner analogous to the chlorinated polysilanes, the
  • this is a power density to be mentioned, which corresponds to about 50 to 67% of the power density (in watts per cm 3 ), which is described in the aforementioned two publications.
  • Solubility in inert solvents as at least one, usually more of the respective individual components of the mixture, if these individual components more than 3
  • the individual components are in particular all the components which are contained in the mixture at least to a proportion of 1% by weight. Further are in particular, the perchlorinated compounds n-tetragerman, isotetragerman, n-pentagerman, isopentagerman and / or neopentagerman should be mentioned here as individual components. Usually, the solubility of the mixture of oligogermanes is at least one of these compounds, usually three or more than three of them
  • Solvents include toluene, benzene and cyclohexane.
  • the above-mentioned mixture of oligogermanes according to the invention preferably has a higher one in at least one or more of said preferred solvents
  • Solvents is mentioned, this means that in the specific solvent at room temperature, a larger amount of the chemical compound or the mixture of chemical compounds can be solved until saturation is reached, with a maximum of 5 wt .-% of the amount used may remain as a solid ,
  • the relevant amount here is not the molar amount, but the mass used (in g) of just barely soluble Oligogermans
  • Solubilizers act.
  • the mixture according to the invention of oligo -ermanes is also superior to the pure individual compounds, since not only the higher kinetic stability is advantageous, but - if working in solution - as a rule even more solvent has to be used for a specific further use.
  • chlorinated Oligogermangemische invention higher solubility in inert solvents than the thermally prepared chlorinated polygermane according to the prior art according to Holleman Wiberg, textbook of inorganic
  • Solvent but usually in several or all of the solvents mentioned have a better solubility.
  • a particularly interesting fraction of the chlorinated oligomer mixtures according to the invention is the fraction which essentially contains no germanium tetrachloride, no Ge 2 Cl 6 and no GesCIs.
  • This fraction can be fractionated by Distillation can be isolated from an obtained crude mixture of chlorinated oligogermans according to the invention and is hereinafter referred to as "fraction of compounds having more than three germanium atoms".
  • germanium tetrachloride, Ge2Cl6 and GesCls may be replaced by a
  • Distillation at 0.01 to 0.1 hPa ie, for example, in an oil pump vacuum
  • room temperature are removed in order to separate the fraction of compounds having more than three germanium atoms can.
  • germanium atoms can be obtained by distillation or else by crystallization and thus substantially no longer has germanium tetrachloride, hexachlorodigerman and octachlorotrigerman. Essentially, this means that a maximum of 10 wt .-% of said compounds are contained, usually the proportion of these three
  • Germanium atoms usually has an elevated
  • Branching degree (as can be demonstrated by IR or Raman spectroscopy) and possesses
  • germanium atoms which have bonds to three further germanium atoms (ie tertiary germanium atoms) and with
  • Germanium atoms the bonds to four others
  • germanium atoms that is, are quaternary germanium atoms. Further, for certain applications (e.g. the deposition of germanium layers) such branched chlorinated Oligogermane with respect to GeCl 4 , Ge 2 Cl6 and GesCls reduced chlorine content or higher
  • Germanium content is preferred because they have an increased reactivity over these.
  • the fraction comprises
  • Compounds having more than three germanium atoms have a proportion of branching points of more than 8 atomic%, in particular more than 11 atomic%. In other words, at least 8% and in particular more than 11% of the germanium atoms contained in the mixture are tertiary or quaternary germanium atoms.
  • the degree of branching points can hereby be determined by means of the Raman spectra on the basis of the significant bands for vibrations of germanium-germanium bonds in which tertiary or quaternary germanium atoms are involved.
  • the perchlorinated neopentagerman has a fraction of at least 10 atomic%, in particular more than 18 atomic%, in particular more than 25 atomic%. Due to the highly symmetric structure of the neopentagermane and the associated relatively low half - width of the signals obtained, the proportion of this compound can be measured quantitatively by means of the signal for the quaternary germanium atom can be determined by Ge-NMR. The content can be compared with an internal reference substance known amount (for example, an ampoule with
  • Tetramethylgermanium can be determined by integration.
  • the fraction of the chlorinated oligogermin mixtures has more than 3
  • Germanium atoms have a germanium: chlorine ratio of 1: 2.2 to 1: 2.5, in particular from 1: 2.25 to 1: 2.4.
  • Ge 2 Cl6 is particularly high.
  • the proportion of Ge 2 Cl 6 can then be at least 70% by weight, in particular more than 85% by weight and preferably more than 95% by weight. If HCl is used as the chlorinating agent, then in particular a significant proportion of Ge 2 ClsH may also be present. According to a further embodiment, the
  • chlorinated oligogermans have an average number of germanium atoms per molecule of 3 to 8. According to a further embodiment, the chlorinated oligogerman or the mixture thereof one
  • Hydrogen content which is less than 2 atomic%, in particular less than 1 atomic%.
  • the hydrogen substituents in the chlorinated oligogerman may originate in particular from the oxidation by means of HCl or already from the starting material as well as the chlorinated polygermanes
  • production-dependent hydrogen substituents may have.
  • all compounds mentioned in the context of the present application are subject to the usual purity levels. This means that the purity of a compound which consists of certain types of atom or a mixture of several such individual compounds (which may include GeCl 4 ) is at least 99.5%, often at least 99, 95% and that the proportion of In particular, impurities are less than 10 ppm (always meaning% by weight).
  • impurities are less than 10 ppm (always meaning% by weight).
  • chlorine atoms may be replaced in part by bromine substituents. These then do not apply as contamination in the above sense.
  • chloro-oligogerman according to the invention as a single compound more than 2 atomic%, in particular more than 2.8 atomic%
  • S1 2 Cl 5 H can also be produced by reaction with HCl and obtained by distillation as a pure substance.
  • the hydrogen contents mentioned in the context of this application can be determined as described above by means of 1 H-NMR spectroscopy. The observed
  • the chlorinated oligogermans or the mixtures thereof have significant bands in the Raman spectrum at less than 600 wavenumbers, in particular between 500 and 370, furthermore especially at ⁇ 320 wavenumbers.
  • a significant band here and hereinafter is generally to be understood as a band whose intensity is greater than 10% of the intensity-strongest band of the Raman spectrum.
  • the mixture of the chlorinated oligogermans may in particular be colorless to pale yellow or ivory white in color. It is particularly noticeable as a liquid or at least partially crystalline substance.
  • the viscosity of the liquid fraction at room temperature is less than 1000 mPas, preferably less than 400 mPas.
  • the crystallinity can be determined by means of X-ray powder diffractometry, since crystalline signals give rise to significant signals which naturally can not occur with liquid or viscous compounds.
  • this is chlorinated
  • Solvent easily soluble. Easily soluble means that concentrations of at least 10% by weight can be brought into solution.
  • the concentrations of at least 10% by weight can be brought into solution.
  • chlorinated oligogermanes or oligogerman mixtures according to the invention in at least one of the solvents benzene, toluene and cyclohexane, often even in all three solvents, the solubility properties according to this embodiment.
  • the solubility properties according to this embodiment As slightly soluble in the sense of
  • This application also applies chlorinated Oligogermangemische in which a non-soluble residue of not more than 5 wt .-% of the amount used remains (in a solution with 10 wt .-% dissolved chlorinated oligosilane means that a maximum of 0.5 wt .-% may remain as undissolved solid) , Frequently, however, a complete dissolution of the chlorinated Oligogermangemisches done.
  • At least 20% by weight of the above soluble fraction is distillable under reduced pressure, in particular at a pressure of from 0.01 to 1 hPa, without decomposition. This requirement is fulfilled in particular
  • the invention further relates to a process for the preparation of the chlorinated Oligogermane or
  • Oligogermangemische according to one of the aforementioned embodiments.
  • the process comprises the following steps: A) providing a chlorinated polygerman;
  • Chlorination of the chlorinated polygerman with chlorine, a chlorine-releasing compound and / or a chlorine-containing gas is considered to be the chlorine-containing gas.
  • Chlorine is in particular present as Cl 2 and chlorine-releasing compounds are in particular
  • the following temperature conditions and / or pressure conditions prevail in process step B), wherein in most cases both the following pressure conditions and the following temperature conditions are present.
  • the temperature in process step B) is -60 ° C to 200 ° C, especially -30 to 40 ° C, for example -10 to 25 ° C.
  • the pressure is in particular 200 to 2000 hPa, for example 800 to 1500 hPa.
  • the chlorination according to process step B) is followed by fractional distillation, with which
  • germanium atoms are separated in the molecule.
  • GeCl 4 , Ge2Cl6 and GesCls are thus used
  • Chlorination in step B) take place.
  • the diluents may subsequently be distilled off again and optionally also the distilled-off diluents (recycled as it were) again serve as a diluent.
  • the diluents may subsequently be distilled off again and optionally also the distilled-off diluents (recycled as it were) again serve as a diluent.
  • Processes according to the invention are carried out in such a way that an excess of the chlorinating agent, in particular an excess of HCl, is present during step B).
  • an excess may be present according to the invention if free HCl is continuously present in the reaction mixture, for example in such a way that the solution is saturated with HCl.
  • step B) continuously further
  • Chlorinating agent is frequently Cl 2 in such molar
  • the chlorination can be carried out so that a particularly long reaction time with the - as stated above - steadily in the molar deficit
  • present Cl 2 is selected. If a significant proportion of Ge 2 ClsH is to be formed, then HCl instead of Cl 2 (or another non-hydrogen-containing chlorinating agent) should be used as the chlorinating agent. If a particularly low proportion of Ge 2 Cl6 is desired, then the
  • Reaction can be carried out at low temperatures and a be careful to add the Cl 2 .
  • the total supplied molar amount of chlorine should be adjusted accordingly, for example so that the supplied amount of chlorine at known chlorine: germanium ratio of Chlorpoylgermans used is chosen so that automatically a certain chlorine: germanium ratio of the obtained Chloroligogermangemisch must result.

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Silicon Polymers (AREA)
  • Chemical Vapour Deposition (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Catalysts (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)

Abstract

La présente invention concerne des oligogermanes chlorés sous forme de composé pur ou de mélange de composés, ainsi qu'un procédé de production desdits oligogermanes. Ces oligogermanes chlorés sous forme de composés purs ou de mélange de composés comportent chacun au moins une liaison directe Ge-Ge dont les substituants comprennent le chlore ou le chlore et l'hydrogène, et dans leur composition, le rapport atomique substituant/germanium est d'au moins 1/1, le mélange présentant en moyenne un rapport Ge/Cl de 1/2 à 1/3 ou le composé pur présentant un rapport Ge/Cl de 1/2 à 1/2,67, de préférence de 1/2 à 1/2,5, et les mélanges présentant un nombre moyen d'atomes de germanium de 2 à 10.
EP10787451A 2009-12-04 2010-12-06 Oligogermanes chlorés et procédé de production associé Withdrawn EP2507299A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009056731A DE102009056731A1 (de) 2009-12-04 2009-12-04 Halogenierte Polysilane und Polygermane
PCT/EP2010/068986 WO2011067413A2 (fr) 2009-12-04 2010-12-06 Oligogermanes chlorés et procédé de production associé

Publications (1)

Publication Number Publication Date
EP2507299A2 true EP2507299A2 (fr) 2012-10-10

Family

ID=43499339

Family Applications (7)

Application Number Title Priority Date Filing Date
EP10787448A Withdrawn EP2507169A1 (fr) 2009-12-04 2010-12-06 Procédé d'extraction d'impuretés contenues dans du silicium
EP10792879.8A Not-in-force EP2507172B1 (fr) 2009-12-04 2010-12-06 Procede de preparation d'un polygermasilane hydrogene et polygermasilane hydrogene
EP10787123A Withdrawn EP2507317A1 (fr) 2009-12-04 2010-12-06 Procédé de production de polygermane hydrogéné et polygermane hydrogéné ainsi obtenu
EP10787451A Withdrawn EP2507299A2 (fr) 2009-12-04 2010-12-06 Oligogermanes chlorés et procédé de production associé
EP10787124.6A Revoked EP2507296B1 (fr) 2009-12-04 2010-12-06 Polysilanes chlorés cinétiquement stables et leur production et utilisation
EP10793199.0A Revoked EP2507174B1 (fr) 2009-12-04 2010-12-06 Procédé de préparation de polysilanes halogénés
EP10788316A Withdrawn EP2507171A1 (fr) 2009-12-04 2010-12-06 Procédé de préparation de polygermasilane hydrogéné et polygermasilane hydrogéné

Family Applications Before (3)

Application Number Title Priority Date Filing Date
EP10787448A Withdrawn EP2507169A1 (fr) 2009-12-04 2010-12-06 Procédé d'extraction d'impuretés contenues dans du silicium
EP10792879.8A Not-in-force EP2507172B1 (fr) 2009-12-04 2010-12-06 Procede de preparation d'un polygermasilane hydrogene et polygermasilane hydrogene
EP10787123A Withdrawn EP2507317A1 (fr) 2009-12-04 2010-12-06 Procédé de production de polygermane hydrogéné et polygermane hydrogéné ainsi obtenu

Family Applications After (3)

Application Number Title Priority Date Filing Date
EP10787124.6A Revoked EP2507296B1 (fr) 2009-12-04 2010-12-06 Polysilanes chlorés cinétiquement stables et leur production et utilisation
EP10793199.0A Revoked EP2507174B1 (fr) 2009-12-04 2010-12-06 Procédé de préparation de polysilanes halogénés
EP10788316A Withdrawn EP2507171A1 (fr) 2009-12-04 2010-12-06 Procédé de préparation de polygermasilane hydrogéné et polygermasilane hydrogéné

Country Status (9)

Country Link
US (7) US20130043429A1 (fr)
EP (7) EP2507169A1 (fr)
JP (6) JP6297778B2 (fr)
CN (3) CN102639609B (fr)
BR (2) BR112012014106A2 (fr)
CA (2) CA2782247A1 (fr)
DE (1) DE102009056731A1 (fr)
TW (7) TW201139283A (fr)
WO (7) WO2011067416A1 (fr)

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DE102009056731A1 (de) 2009-12-04 2011-06-09 Rev Renewable Energy Ventures, Inc. Halogenierte Polysilane und Polygermane
JP5856609B2 (ja) 2010-05-28 2016-02-10 ビーエーエスエフ ソシエタス・ヨーロピアＢａｓｆ Ｓｅ リチウム硫黄電流生成セルの正極に使用される固体複合材料及びその製造方法並びにリチウム硫黄電流生成セル
KR101250172B1 (ko) * 2012-08-20 2013-04-05 오씨아이머티리얼즈 주식회사 고수율로 모노 게르만 가스를 제조하는 방법
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DE102013207447A1 (de) * 2013-04-24 2014-10-30 Evonik Degussa Gmbh Verfahren und Vorrichtung zur Herstellung von Octachlortrisilan
DE102013207444A1 (de) * 2013-04-24 2014-10-30 Evonik Degussa Gmbh Verfahren und Vorrichtung zur Herstellung von Polychlorsilanen
US9174853B2 (en) 2013-12-06 2015-11-03 Gelest Technologies, Inc. Method for producing high purity germane by a continuous or semi-continuous process
DE102014007685B4 (de) 2014-05-21 2022-04-07 Sven Holl Verfahren zur Herstellung von Hexachlordisilan
DE102014007766A1 (de) * 2014-05-21 2015-11-26 Psc Polysilane Chemicals Gmbh Verfahren zur plasmachemischen Herstellung halogenierter Oligosilane aus Tetrachlorsilan
DE102014007767A1 (de) * 2014-05-21 2015-11-26 Psc Polysilane Chemicals Gmbh Verfahren und Vorrichtung zur Herstellung halogenierter Oligosilane aus Silicium und Tetrachlorsilan
DE102014007768A1 (de) 2014-05-21 2015-11-26 Psc Polysilane Chemicals Gmbh Verfahren zur Herstellung von Mischungen chlorierter Silane mit erhöhten Anteilen von Si4Cl10 und/oder Si5Cl12
KR20170035981A (ko) * 2014-07-22 2017-03-31 모멘티브 퍼포먼스 머티리얼즈 게엠베하 모노실란, 폴리실란, 및/또는 올리고실란에서 규소-규소 결합 및/또는 규소-염소 결합의 분해 방법
DE102014013250B4 (de) * 2014-09-08 2021-11-25 Christian Bauch Verfahren zur Aufreinigung halogenierter Oligosilane
EP3233728A1 (fr) * 2014-12-15 2017-10-25 Nagarjuna Fertilizers and Chemicals Limited Procédé de production d'oligosilanes chlorés
DE102016014900A1 (de) * 2016-12-15 2018-06-21 Psc Polysilane Chemicals Gmbh Verfahren zur Erhöhung der Reinheit von Oligosilanen und Oligosilanverbindungen
DE102016225872A1 (de) * 2016-12-21 2018-06-21 Evonik Degussa Gmbh Verfahren zur Trennung von Gemischen höherer Silane
EP3596117A4 (fr) 2017-03-17 2021-01-13 The Johns Hopkins University Thérapie épigénétique ciblée contre l'élément de régulation distale d'expression du tgfb2
BR112020022271A2 (pt) * 2018-05-02 2021-02-23 Hysilabs, Sas processo para produzir e regenerar compostos carreadores de hidrogênio
JP7125062B2 (ja) * 2019-01-25 2022-08-24 株式会社東芝 判定方法及び処理方法

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BR112012013500A2 (pt) 2018-02-06
EP2507296A1 (fr) 2012-10-10
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