EP2507317A1 - Procédé de production de polygermane hydrogéné et polygermane hydrogéné ainsi obtenu - Google Patents

Procédé de production de polygermane hydrogéné et polygermane hydrogéné ainsi obtenu

Info

Publication number
EP2507317A1
EP2507317A1 EP10787123A EP10787123A EP2507317A1 EP 2507317 A1 EP2507317 A1 EP 2507317A1 EP 10787123 A EP10787123 A EP 10787123A EP 10787123 A EP10787123 A EP 10787123A EP 2507317 A1 EP2507317 A1 EP 2507317A1
Authority
EP
European Patent Office
Prior art keywords
hydrogenated
polygerman
polygermane
halogenated
mixture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP10787123A
Other languages
German (de)
English (en)
Inventor
Norbert Auner
Christian Bauch
Sven Holl
Rumen Deltschew
Javad MOHSSENI
Gerd Lippold
Thoralf Gebel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nagarjuna Fertilizers and Chemicals Ltd
Original Assignee
Spawnt Private SARL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=43499339&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP2507317(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Spawnt Private SARL filed Critical Spawnt Private SARL
Publication of EP2507317A1 publication Critical patent/EP2507317A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/60—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which all the silicon atoms are connected by linkages other than oxygen atoms
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G17/00—Compounds of germanium
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G79/00—Macromolecular compounds obtained by reactions forming a linkage containing atoms other than silicon, sulfur, nitrogen, oxygen, and carbon with or without the latter elements in the main chain of the macromolecule
    • C08G79/14—Macromolecular compounds obtained by reactions forming a linkage containing atoms other than silicon, sulfur, nitrogen, oxygen, and carbon with or without the latter elements in the main chain of the macromolecule a linkage containing two or more elements other than carbon, oxygen, nitrogen, sulfur and silicon
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/50—Improvements relating to the production of bulk chemicals
    • Y02P20/582—Recycling of unreacted starting or intermediate materials

Definitions

  • Polygerman and hydrogenated polygerman as pure compound or mixture of compounds.
  • Polygermane are for example from the
  • Source material avoids, as well as the provision of
  • Polygerman as pure compound or mixture of compounds, wherein halogenated polygerman is hydrogenated.
  • hydrogenated polygerman for example, a pure compound or a mixture of compounds can be understood, each having at least one direct bond between two germanium atoms.
  • the hydrogenated polygerman may have substituents Z which comprise hydrogen, a ratio Z: germanium which is at least 1: 1, an averaged formula GeZ x , where x is selected from 1 -S x -S 3, preferably 1.5 -S x -S 3, in particular 2 ⁇ x ⁇ 3, and have an average chain length n with 2 ⁇ n ⁇ 100.
  • the hydrogenated polygerman has compounds which have no differences in their chain length, if any, their branches and / or the number and type of their cycles. In other words, there is only one fraction of hydrogenated polygerman in a pure compound.
  • "pure" is to be understood according to customary fine-chemical standards, meaning that pure compounds can also contain small amounts of impurities, for example traces of
  • mixture of compounds is understood below to mean that the hydrogenated polygerman has at least two fractions whose hydrogenated polygermanes differ in their chain length, if any, in their branches and / or their type and number of cycles. Accordingly, either all molecules of the pure compound or all molecules of at least two fractions of the
  • At least 50% means at least 50%
  • the hydrogenated polygermans produced by the process may, depending on which halogenated polygerman they are
  • Hydrogenated polygermans as well as hydrogenated oligogermans can be prepared by this method.
  • Oligogermans have a chain length n, from the Range 2 ⁇ n ⁇ 8 is selected. Their molecular formula is
  • Hydrogenated polygermanes have chain length n of n> 8 and a molecular formula Ge n Z2 n +2 or the mean molecular formula of the mixture Ge n Z2 n .
  • chain lengths of 2 ⁇ n ⁇ 6 are called short-chain and chain lengths of n> 6 are long-chain.
  • Chain length is understood to mean the number of germanium atoms bonded directly to one another
  • the halogenated polygerman may be selected from
  • Thermally produced halogenated polygerman may have a higher proportion of branching than plasma-chemically produced halogenated polygerman which may be substantially free of branching.
  • the halogenated ones may have a higher proportion of branching than plasma-chemically produced halogenated polygerman which may be substantially free of branching.
  • Polygermans can be pure compounds or mixtures of
  • the halogenated, especially highly halogenated, polygermanes may have substituents selected from a group comprising F, Cl, Br and I and mixtures thereof. These halogens can be largely completely replaced by H as a substituent during hydrogenation.
  • the halogen content of the hydrogenated polygerman prepared by this process may be less than 2 atomic%, In particular, be less than 1 atomic%.
  • a hydrogenated polygerman can only hydrogen or
  • Determination of the H content is carried out by integration of 1 H-NMR spectra using an internal standard and comparison of the integrals obtained in known
  • the molecular weights of the halogenated and hydrogenated polygermanes according to the invention and the average molar mass of the halogenated and hydrogenated polygender mixtures are determined by means of freezing point depression. From the parameters mentioned, the halogen or hydrogen: germanium ratio can be determined.
  • the halogenated polygerman can with hydridic
  • Hydrogenating agents are reacted, which are selected from metal hydrides and / or metalloid hydrides.
  • the hydrogenation may, according to one embodiment, be carried out at a temperature which is in one range
  • the temperature range may be -30 ° C to 40 ° C, especially -10 ° C to 25 ° C.
  • the hydrogenation may be carried out at a pressure selected from a range including 1 Pa to 2,000 hPa, preferably 1 hPa to 1,500 hPa, particularly 20 hPa to 1,200 hPa. This gentle hydrogenation conditions are set at lower compared to the prior art temperatures and pressures. This also allows the less stable halogenated
  • Polygermane be hydrogenated with good yield and high turnover.
  • the halogenated polygerman may be diluted in a solvent prior to hydrogenation.
  • the solvent is chosen so that it is inert to the halogenated Polygerman, so no chemical reaction with him.
  • inert solvents alkanes or aromatics
  • benzene, toluene or hexane can be selected.
  • mixtures of solvents are conceivable.
  • the hydrogenation can also be carried out with undissolved halogenated polygerman.
  • Hydrogenated polygerman can thus be produced in good yield, of any chain length and with less dangerous precursors using this process.
  • the structure of the hydrogenated polygerman can be largely predetermined by suitable selection of the precursors.
  • a largely complete hydrogenation of the halogenated polygerman can be achieved with this method.
  • the hydrogenated polygerman has substituents Z which comprise hydrogen, a ratio Z: germanium which is at least 1: 1, an averaged formula GeZ x , where x is selected from 1 -S x -S 3, preferably 1.5 -S x -S 3, more preferably 2 ⁇ x -S 3, and an average chain length n with 2 ⁇ n ⁇ 100 on.
  • substituents Z which comprise hydrogen, a ratio Z: germanium which is at least 1: 1, an averaged formula GeZ x , where x is selected from 1 -S x -S 3, preferably 1.5 -S x -S 3, more preferably 2 ⁇ x -S 3, and an average chain length n with 2 ⁇ n ⁇ 100 on.
  • Impurities for example, traces of carbon or halogens. Small proportions are less than 0.5 mol%, preferably less than 10 ppm.
  • the chain length of the hydrogenated polygerman may in particular be selected from 4 ⁇ n ⁇ 50, in particular from 6 -S n ⁇ 20.
  • the averaged formula GeZ x is to be understood as meaning that a germanium atom in the hydrogenated polygermanine in the
  • the hydrogenated polygerman may be prepared according to a method as described above. It is thus produced by hydrogenation of halogenated polygermanes. Thus, by the method of preparation, the structure of the hydrogenated polygerman can be derivable from, or consistent with, the structure of the halogenated polymer.
  • Polygermanen be obtained.
  • the hydrogenation can be carried out substantially completely, so that the substituents Z in the polygerman largely comprise hydrogen.
  • largely is again meant a proportion of hydrogen on the substituents of at least 50%
  • the hydrogenated polygerman may according to one embodiment have a proportion of polygerman molecules with more than three directly connected germanium atoms, wherein at least 8%, in particular more than 11%, of these germanium atoms
  • the proportion of polygerman molecules with more than three directly connected germanium atoms can be a pure compound, or a fraction of the hydrogenated polygerman in the case of a mixture of Represent connections. In any case, such
  • Branching points are understood to mean those germanium atoms which are connected to more than two further germanium atoms, ie have only one or no substituent Z at all. Branching points can be determined, for example, by means of 1 H-NMR spectra.
  • the hydrogenated polygerman which is a mixture of compounds, in the form of the mixture may have a higher solubility than at least one single compound contained in the mixture.
  • Polygerman have a proportion of Polygermanmolekülen with more than three directly connected germanium atoms, said polygerman molecules have an average formula GeZ x with 2.2 ⁇ x ⁇ 2.5.
  • x can be selected from 2.25 ⁇ x ⁇ 2.4.
  • the hydrogenated polygerman may have a substituent Z which additionally comprises a halogen.
  • the hydrogenated polygerman may also have halogens, for example F, Br, I or Cl or mixtures thereof as substituents.
  • the proportion of halogen in the hydrogenated polygerman be less than 2 atomic%, in particular less than 1 atomic%.
  • hydrogen which is greater than 50 atomic%, preferably greater than 60 atomic%, in particular greater than 66 atomic%.
  • the hydrogenated polygerman has a very high proportion of hydrogen, whereby the ratio substituent:
  • Germanium of at least 1: 1 is produced at a high hydrogen content at the same time.
  • the hydrogenated polygerman may exhibit significant product signals in the chemical shift range between 6.5 and 2.0, in particular between 4.0 and 2.1, ppm in 1 H-NMR spectra.
  • “Significant” in this context means a
  • Integral is greater than 1% of the total integral. Furthermore, the hydrogenated polygerman in 1 H-NMR spectra at least 80% of the signal intensity of the total integral of its
  • the hydrogenated polygerman in Raman spectra can have significant product bands in the range of 2250 to 2000
  • Wavelengths and below 330 wave numbers have.
  • the hydrogenated polygerman may be colorless to light yellow or ivory white. It can be present as an amorphous or crystalline solid. Preferably, it is not viscous. Furthermore, the hydrogenated polygerman may be at least 20% soluble in inert solvents at concentrations of up to 10%. This means that at least one
  • inert solvents solvents which do not react with the hydrogenated polygerman.
  • solvents selected from the group consisting of benzene, toluene,
  • the readily soluble hydrogenated polygerman of the above mixture of compounds may be more than 20%, preferably more than 80%, non-degraded, volatile and / or distillable under reduced pressure.
  • the reduced pressure preferably comprises 1 to 100 Pa. This is the hydrogenated
  • germanium layer made of a hydrogenated polygerman as described above.
  • the hydrogenated polygerman is a readily available on a technical scale starting compound for the preparation of
  • Germanium layers Due to the low pyrolysis temperature of less than 500 ° C, preferably less than 450 ° C, the hydrogenated polygerman is a precursor with which germanium layers can be deposited on substrates at low temperature.
  • the low pyrolysis temperature allows for a greater choice of materials for the support layers or substrates on which germanium layers are applied, for example support layers of glass.
  • a process for producing a germanium layer on a substrate comprising
  • This process leads to high yields and high conversion rates to germanium layers produced from hydrogenated polygermanes.
  • the hydrogenated polygermans can be processed into germanium layers with higher yield and higher conversion rate than conventional germanium precursors.
  • dissolved or even solid hydrogenated polygermanes can be applied to the substrate in a simple manner.
  • a CVD Chemical Vapor Deposition
  • PVD Physical Vapor Deposition
  • Germanium chemistry are also conceivable, for example the
  • PCG Polychlorogelerman
  • Sediment reacts in the course of about 1 h to a light yellow powder.
  • the reaction mixture is stirred for 16 h while warming to room temperature.
  • the solid is filtered off and washed twice with 25 ml abs. hexane

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Silicon Polymers (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Chemical Vapour Deposition (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Catalysts (AREA)

Abstract

Procédé de production de polygermane hydrogéné sous forme de composé pur ou de mélange de composés, selon lequel du polygermane halogéné est hydrogéné. La présent invention concerne en outre un polygermane hydrogéné ainsi qu'une couche de germanium produite à partir dudit polygermane hydrogéné, et un procédé de production de ladite couche.
EP10787123A 2009-12-04 2010-12-06 Procédé de production de polygermane hydrogéné et polygermane hydrogéné ainsi obtenu Withdrawn EP2507317A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009056731A DE102009056731A1 (de) 2009-12-04 2009-12-04 Halogenierte Polysilane und Polygermane
PCT/EP2010/068979 WO2011067411A1 (fr) 2009-12-04 2010-12-06 Procédé de production de polygermane hydrogéné et polygermane hydrogéné ainsi obtenu

Publications (1)

Publication Number Publication Date
EP2507317A1 true EP2507317A1 (fr) 2012-10-10

Family

ID=43499339

Family Applications (7)

Application Number Title Priority Date Filing Date
EP10787448A Withdrawn EP2507169A1 (fr) 2009-12-04 2010-12-06 Procédé d'extraction d'impuretés contenues dans du silicium
EP10793199.0A Revoked EP2507174B1 (fr) 2009-12-04 2010-12-06 Procédé de préparation de polysilanes halogénés
EP10787123A Withdrawn EP2507317A1 (fr) 2009-12-04 2010-12-06 Procédé de production de polygermane hydrogéné et polygermane hydrogéné ainsi obtenu
EP10787124.6A Revoked EP2507296B1 (fr) 2009-12-04 2010-12-06 Polysilanes chlorés cinétiquement stables et leur production et utilisation
EP10787451A Withdrawn EP2507299A2 (fr) 2009-12-04 2010-12-06 Oligogermanes chlorés et procédé de production associé
EP10788316A Withdrawn EP2507171A1 (fr) 2009-12-04 2010-12-06 Procédé de préparation de polygermasilane hydrogéné et polygermasilane hydrogéné
EP10792879.8A Not-in-force EP2507172B1 (fr) 2009-12-04 2010-12-06 Procede de preparation d'un polygermasilane hydrogene et polygermasilane hydrogene

Family Applications Before (2)

Application Number Title Priority Date Filing Date
EP10787448A Withdrawn EP2507169A1 (fr) 2009-12-04 2010-12-06 Procédé d'extraction d'impuretés contenues dans du silicium
EP10793199.0A Revoked EP2507174B1 (fr) 2009-12-04 2010-12-06 Procédé de préparation de polysilanes halogénés

Family Applications After (4)

Application Number Title Priority Date Filing Date
EP10787124.6A Revoked EP2507296B1 (fr) 2009-12-04 2010-12-06 Polysilanes chlorés cinétiquement stables et leur production et utilisation
EP10787451A Withdrawn EP2507299A2 (fr) 2009-12-04 2010-12-06 Oligogermanes chlorés et procédé de production associé
EP10788316A Withdrawn EP2507171A1 (fr) 2009-12-04 2010-12-06 Procédé de préparation de polygermasilane hydrogéné et polygermasilane hydrogéné
EP10792879.8A Not-in-force EP2507172B1 (fr) 2009-12-04 2010-12-06 Procede de preparation d'un polygermasilane hydrogene et polygermasilane hydrogene

Country Status (9)

Country Link
US (7) US9139702B2 (fr)
EP (7) EP2507169A1 (fr)
JP (6) JP2013512844A (fr)
CN (3) CN102639644A (fr)
BR (2) BR112012014106A2 (fr)
CA (2) CA2782226A1 (fr)
DE (1) DE102009056731A1 (fr)
TW (7) TW201139283A (fr)
WO (7) WO2011067417A1 (fr)

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DE102014007685B4 (de) 2014-05-21 2022-04-07 Sven Holl Verfahren zur Herstellung von Hexachlordisilan
DE102014007767A1 (de) * 2014-05-21 2015-11-26 Psc Polysilane Chemicals Gmbh Verfahren und Vorrichtung zur Herstellung halogenierter Oligosilane aus Silicium und Tetrachlorsilan
DE102014007768A1 (de) 2014-05-21 2015-11-26 Psc Polysilane Chemicals Gmbh Verfahren zur Herstellung von Mischungen chlorierter Silane mit erhöhten Anteilen von Si4Cl10 und/oder Si5Cl12
DE102015009129B4 (de) * 2014-07-22 2016-12-15 Norbert Auner Verfahren zur Spaltung von Silicium-Silicium-Bindungen und/oder von Silicium-Chlor-Bindungen in Mono-, Poly- und/oder Oligosilanen
DE102014013250B4 (de) * 2014-09-08 2021-11-25 Christian Bauch Verfahren zur Aufreinigung halogenierter Oligosilane
WO2016095953A1 (fr) * 2014-12-15 2016-06-23 Spawnt Private S.À.R.L. Procédé de production d'oligosilanes chlorés
DE102016014900A1 (de) * 2016-12-15 2018-06-21 Psc Polysilane Chemicals Gmbh Verfahren zur Erhöhung der Reinheit von Oligosilanen und Oligosilanverbindungen
DE102016225872A1 (de) * 2016-12-21 2018-06-21 Evonik Degussa Gmbh Verfahren zur Trennung von Gemischen höherer Silane
EP3596117A4 (fr) 2017-03-17 2021-01-13 The Johns Hopkins University Thérapie épigénétique ciblée contre l'élément de régulation distale d'expression du tgfb2
BR112020022309A2 (pt) * 2018-05-02 2021-02-23 Hysilabs, Sas compostos carreadores de hidrogênio
JP7125062B2 (ja) * 2019-01-25 2022-08-24 株式会社東芝 判定方法及び処理方法

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US20130039830A1 (en) 2013-02-14
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