JP2013512841A - 水素化ポリゲルマンの製造方法及び水素化ポリゲルマン - Google Patents
水素化ポリゲルマンの製造方法及び水素化ポリゲルマン Download PDFInfo
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- JP2013512841A JP2013512841A JP2012541533A JP2012541533A JP2013512841A JP 2013512841 A JP2013512841 A JP 2013512841A JP 2012541533 A JP2012541533 A JP 2012541533A JP 2012541533 A JP2012541533 A JP 2012541533A JP 2013512841 A JP2013512841 A JP 2013512841A
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- polygermane
- hydrogenated
- hydrogenated polygermane
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/60—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which all the silicon atoms are connected by linkages other than oxygen atoms
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G17/00—Compounds of germanium
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G79/00—Macromolecular compounds obtained by reactions forming a linkage containing atoms other than silicon, sulfur, nitrogen, oxygen, and carbon with or without the latter elements in the main chain of the macromolecule
- C08G79/14—Macromolecular compounds obtained by reactions forming a linkage containing atoms other than silicon, sulfur, nitrogen, oxygen, and carbon with or without the latter elements in the main chain of the macromolecule a linkage containing two or more elements other than carbon, oxygen, nitrogen, sulfur and silicon
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/50—Improvements relating to the production of bulk chemicals
- Y02P20/582—Recycling of unreacted starting or intermediate materials
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- Polymers & Plastics (AREA)
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- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
- Silicon Polymers (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
- Chemical Vapour Deposition (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
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Abstract
【選択図】 なし
Description
Claims (24)
- ハロゲン化ポリゲルマンを水素化することを特徴とする純粋化合物または複数の化合物の混合物としての水素化ポリゲルマンを製造する方法。
- 前記ハロゲン化ポリゲルマンは、熱的に生成されたハロゲン化ポリゲルマン及びプラズマ化学的に生成されたハロゲン化ポリゲルマンから選択されることを特徴とする請求項1に記載の方法。
- 前記ハロゲン化ポリゲルマンは、金属水素化物及び/又は半金属水素化物から選択される水素化合物の水素化剤と反応することを特徴とする請求項1または2に記載の方法。
- 前記水素化剤は、MH、MBH4、MBH4-xRx、MAlH4、AlHxR3-x、及びこれらの混合物を含むグループから選択されることを特徴とする請求項3に記載の方法。
- 前記水素化は−60〜200℃の範囲から選択される温度で行われることを特徴とする請求項1乃至4のいずれかに記載の方法。
- 前記水素化は1Pa〜200hPaの範囲から選択される圧力で行われることを特徴とする請求項1乃至5のいずれかに記載の方法。
- 前記ハロゲン化ポリゲルマンは、水素化される前に溶媒で希釈されることを特徴とする請求項1乃至6のいずれかに記載の方法。
- 水素を含む置換基Zを有し、
前記置換基Z対ゲルマニウムの比が少なくとも1:1であり、
一般化学式GeZxでにおいて、xが1≦x≦3から選択され、
2≦n≦100の平均鎖長nを有している
ことを特徴とする純粋化合物または複数の化合物の混合物としての水素化ポリゲルマン。 - 請求項1乃至7に記載の方法によって製造されることを特徴とする請求項8に記載の水素化ポリゲルマン。
- 3つより多い直接結合されたゲルマニウム原子を有するポリゲルマン分子の部分(Anteil)を有し、前記ゲルマン原子の少なくとも8%が分岐部位となることを特徴とする請求項8または9に記載の水素化ポリゲルマン。
- 複数の化合物の混合物としての水素化ポリゲルマンであって、
前記混合物は前記混合物内に存在する少なくとも1つの個別化合物より高い溶解度を有することを特徴とする請求項8乃至10のいずれかに記載の水素化ポリゲルマン。 - 3つより多い直接結合されたゲルマニウム原子を有するポリゲルマン分子の部分を有し、
前記ポリゲルマン分子は、一般化学式GeZxにおいて、xが2.2≦x≦2.5であることを特徴とする請求項8乃至11のいずれかに記載の水素化ポリゲルマン。 - 前記置換基Zは、さらにハロゲンを含むことを特徴とする請求項8乃至12のいずれかに記載の水素化ポリゲルマン。
- 前記ハロゲンの部分は2atom%未満であることを特徴とする請求項13に記載の水素化ポリゲルマン。
- 前記水素の部分は、50atom%より大きいことを特徴とする請求項8乃至14のいずれかに記載の水素化ポリゲルマン。
- 1H NMRスペクトルでは、6.5〜2.0ppm間の化学シフトの範囲に有意な生成物のシグナルを有していることを特徴とする請求項8乃至15のいずれかに記載の水素化ポリゲルマン。
- 1H NMR スペクトルでは、3.6〜2.9ppm間の化学シフトの範囲に有意な生成物のシグナルの総積分のうち、少なくとも80%の信号強度を有することを特徴とする請求項8乃至16のいずれかに記載の水素化ポリゲルマン。
- ラマンスペクトルでは、波数2250〜2000の領域、及び波数330以下の領域に有意な生成物帯域を有することを特徴とする請求項8乃至17のいずれかに記載の水素化ポリゲルマン。
- 無色から淡黄色、または無色から象牙色であることを特徴とする請求項8乃至18のいずれかに記載の水素化ポリゲルマン。
- 非晶質固体または結晶質固体として存在することを特徴とする請求項8乃至19のいずれかに記載の水素化ポリゲルマン。
- 少なくとも20%の量を、濃度が10%になるまで不活性溶媒に溶解可能であることを特徴とする請求項8乃至20のいずれかに記載の水素化ポリゲルマン。
- 前記溶解可能な水素化ポリゲルマンは、減圧下で20%より多くの量を、分解することなく蒸留可能及び/又は揮発することを特徴とする請求項21に記載の水素化ポリゲルマン。
- 請求項8乃至22のいずれかに記載の水素化ポリゲルマンより製造されるゲルマニウム層。
- A)請求項8乃至22のいずれかに記載の固体又は溶解した水素化ポリゲルマンを基板に塗布するステップと、
B)前記水素化ポリゲルマンを熱分解するステップと、
を含むことを特徴とする基板にゲルマニウム層を製造する方法。
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DE102009056731.3 | 2009-12-04 | ||
DE102009056731A DE102009056731A1 (de) | 2009-12-04 | 2009-12-04 | Halogenierte Polysilane und Polygermane |
PCT/EP2010/068979 WO2011067411A1 (de) | 2009-12-04 | 2010-12-06 | Verfahren zur herstellung von hydriertem polygerman und hydriertes polygerman |
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JP2012541538A Ceased JP2013512844A (ja) | 2009-12-04 | 2010-12-06 | ハロゲン化ポリシランを生成する方法 |
JP2012541535A Pending JP2013512842A (ja) | 2009-12-04 | 2010-12-06 | 塩素化オリゴゲルマンとその製造方法 |
JP2012541539A Pending JP2013512845A (ja) | 2009-12-04 | 2010-12-06 | 水素化ポリゲルマシランを製造するための方法および水素化ポリゲルマシラン |
JP2012541533A Expired - Fee Related JP6297778B2 (ja) | 2009-12-04 | 2010-12-06 | 水素化ポリゲルマンの製造方法及び水素化ポリゲルマン |
JP2012541537A Expired - Fee Related JP5731531B2 (ja) | 2009-12-04 | 2010-12-06 | 反応速度論的に安定した塩素化ポリシラン、この製造及び使用 |
JP2016090381A Pending JP2016179935A (ja) | 2009-12-04 | 2016-04-28 | 水素化ポリゲルマンの製造方法及び水素化ポリゲルマン |
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JP2012541535A Pending JP2013512842A (ja) | 2009-12-04 | 2010-12-06 | 塩素化オリゴゲルマンとその製造方法 |
JP2012541539A Pending JP2013512845A (ja) | 2009-12-04 | 2010-12-06 | 水素化ポリゲルマシランを製造するための方法および水素化ポリゲルマシラン |
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EP (7) | EP2507169A1 (ja) |
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CN (3) | CN102639644A (ja) |
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KR101780199B1 (ko) | 2013-12-06 | 2017-09-21 | 젤리스트 테크놀로지스, 인코퍼레이티드 | 연속 또는 반-연속 공정에 의한 고순도 게르만 제조방법 |
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