EP3233728A1 - Procédé de production d'oligosilanes chlorés - Google Patents

Procédé de production d'oligosilanes chlorés

Info

Publication number
EP3233728A1
EP3233728A1 EP14815659.9A EP14815659A EP3233728A1 EP 3233728 A1 EP3233728 A1 EP 3233728A1 EP 14815659 A EP14815659 A EP 14815659A EP 3233728 A1 EP3233728 A1 EP 3233728A1
Authority
EP
European Patent Office
Prior art keywords
chlorinated
chlorine
mixture
chlorination reaction
polysilane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP14815659.9A
Other languages
German (de)
English (en)
Inventor
Christian Bauch
Sven Holl
Norbert Auner
Javad MOHSSENI
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nagarjuna Fertilizers and Chemicals Ltd
Original Assignee
Nagarjuna Fertilizers and Chemicals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nagarjuna Fertilizers and Chemicals Ltd filed Critical Nagarjuna Fertilizers and Chemicals Ltd
Publication of EP3233728A1 publication Critical patent/EP3233728A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/009—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping in combination with chemical reactions
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • C01B33/10715—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by reacting chlorine with silicon or a silicon-containing material
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/10773—Halogenated silanes obtained by disproportionation and molecular rearrangement of halogenated silanes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/10778—Purification
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/60—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which all the silicon atoms are connected by linkages other than oxygen atoms
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D1/00—Coating compositions, e.g. paints, varnishes or lacquers, based on inorganic substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon

Definitions

  • Compounds can be outside the reaction vessel with
  • the chlorination reaction will be at least two different in at least two steps
  • Reaction mixture advantageous, for example by vigorous stirring.
  • gas uptake can take place solely through the liquid surface, in particular if the liquid is vigorously stirred. It is preferable that Chlorine gas in the form of bubbles to flow through the liquid. A large bubble surface and thus fine bubbles improve the contact between gas and liquid and thus the chlorine gas uptake by the reaction solution.
  • the chlorosilane mixture is added dropwise within 13.5 h in the upper packed column.
  • the upper half of this column slowly heats up to less than 50 ° C.
  • the viscosity of the mixture decreases markedly on the way through the upper column and the color intensity of the orange-yellow mixture is also lower. From the top

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Wood Science & Technology (AREA)
  • Silicon Compounds (AREA)

Abstract

La présente invention concerne un procédé de production d'oligosilanes chlorés. Un polysilane chloré ayant pour formule empirique SiCl]1,0-2,8 et/ou un mélange contenant le polysilane chloré est converti avec du chlore élémentaire ou un mélange contenant du chlore. L'invention concerne en outre les oligosilanes chlorés produits par le procédé et leur utilisation pour la fabrication de semiconducteurs et/ou de revêtements durs.
EP14815659.9A 2014-12-15 2014-12-15 Procédé de production d'oligosilanes chlorés Withdrawn EP3233728A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2014/077814 WO2016095953A1 (fr) 2014-12-15 2014-12-15 Procédé de production d'oligosilanes chlorés

Publications (1)

Publication Number Publication Date
EP3233728A1 true EP3233728A1 (fr) 2017-10-25

Family

ID=56125971

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14815659.9A Withdrawn EP3233728A1 (fr) 2014-12-15 2014-12-15 Procédé de production d'oligosilanes chlorés

Country Status (4)

Country Link
US (1) US20170334730A1 (fr)
EP (1) EP3233728A1 (fr)
JP (1) JP2018502817A (fr)
WO (1) WO2016095953A1 (fr)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1245109A (fr) * 1983-10-31 1988-11-22 Hsien-Kun Chu Obtention de pellicules d'halogenosilanes polymeriques amorphes; produits qui en sont derives
DE102006034061A1 (de) * 2006-07-20 2008-01-24 REV Renewable Energy Ventures, Inc., Aloha Polysilanverarbeitung und Verwendung
DE102006043929B4 (de) * 2006-09-14 2016-10-06 Spawnt Private S.À.R.L. Verfahren zur Herstellung von festen Polysilanmischungen
DE102009056438B4 (de) * 2009-12-02 2013-05-16 Spawnt Private S.À.R.L. Verfahren zur Herstellung von Hexachlordisilan
DE102009056731A1 (de) * 2009-12-04 2011-06-09 Rev Renewable Energy Ventures, Inc. Halogenierte Polysilane und Polygermane
DE102011110040A1 (de) * 2011-04-14 2012-10-18 Evonik Degussa Gmbh Verfahren zur Herstellung von Chlorsilanen mittels hoch-siedender Chlorsilane oder chlorsilanhaltiger Gemische
KR20170035981A (ko) * 2014-07-22 2017-03-31 모멘티브 퍼포먼스 머티리얼즈 게엠베하 모노실란, 폴리실란, 및/또는 올리고실란에서 규소-규소 결합 및/또는 규소-염소 결합의 분해 방법

Also Published As

Publication number Publication date
JP2018502817A (ja) 2018-02-01
US20170334730A1 (en) 2017-11-23
WO2016095953A1 (fr) 2016-06-23

Similar Documents

Publication Publication Date Title
EP2296804B1 (fr) Polysilane halogéné et son procédé thermique de production
EP3003971B1 (fr) Procédé de production couplée de trisilylamine et de polysilazanes de masse molaire allant jusqu'à 500 g/mol
EP2507296B1 (fr) Polysilanes chlorés cinétiquement stables et leur production et utilisation
DE2061189A1 (de) Verfahren zur kontinuierlichen Herstellung von Alkoxysilanen bzw.Alkoxypolysiloxanen
DE2919086A1 (de) Verfahren zur herstellung von polykristallinem silizium
EP3116637B1 (fr) Procédé de fabrication de trisylamine pure
EP2882797A1 (fr) Procédé de production couplée de polysilazanes et de trisilylamine
EP2507173B1 (fr) Procede de la preparation du hexachloruredsilane
DE19652642A1 (de) Kontinuierliches Verfahren zur Herstellung von gamma-Aminopropyltrialkoxysilanen
WO2018219753A1 (fr) Triphénylgermylsilane et trichlorosilyl-trichlorogermane pour la production de couches de germanium-silicium, et procédé de production de ces dernières à partir de trichlorosilyl-triphénylgermane
WO2012001180A1 (fr) Polysilanes à longueur de chaîne moyenne et procédé pour leur préparation
DE19828390A1 (de) Verfahren zur Herstellung von Hydrogenmethylpolysiloxanen mit Trimethylsilyl-Endgruppen
DE893198C (de) Verfahren zur Herstellung von Organohalogensilanen
DE4126670A1 (de) Verfahren zur abwasserfreien aufarbeitung von rueckstaenden einer chlorsilandestillation mit salzsaeure
WO2016095953A1 (fr) Procédé de production d'oligosilanes chlorés
DE3500318A1 (de) Disproportionierungskatalysator fuer silanverbindungen und verfahren zur kontinuierlichen herstellung von silanverbindungen
DE102013111124A1 (de) Verfahren zur Herstellung von chlorierten Oligosilanen
DE102014007685B4 (de) Verfahren zur Herstellung von Hexachlordisilan
WO2018138150A1 (fr) Procédé de réduction d'halogénures métalliques
DE1948911C3 (de) Verfahren zur Entfernung von Hydrogensilanen aus Chlorsilanen
DE1132901B (de) Verfahren zur Herstellung von pyrophorem Silicium und Polysiliciumhalogeniden
DE2542425A1 (de) Siloxane und verfahren zu ihrer herstellung
DE3436381A1 (de) Verfahren zur herstellung von dimethyldichlorsilan
EP0443355B1 (fr) Procédé pour la fabrication de dicarboxylates dihalogénérés anhydres d'étain
DE862449C (de) Verfahren zur Herstellung von Alkoxy- und/oder Aryloxysilanen

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20170713

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

DAX Request for extension of the european patent (deleted)
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20180222