JP2003508932A5 - - Google Patents

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JP2003508932A5
JP2003508932A5 JP2001521471A JP2001521471A JP2003508932A5 JP 2003508932 A5 JP2003508932 A5 JP 2003508932A5 JP 2001521471 A JP2001521471 A JP 2001521471A JP 2001521471 A JP2001521471 A JP 2001521471A JP 2003508932 A5 JP2003508932 A5 JP 2003508932A5
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reactant
carrier gas
reaction chamber
excited species
pulse
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JP2001521471A
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JP2003508932A (ja
JP4994551B2 (ja
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JP2001521471A 1999-09-08 2000-09-08 薄膜を成長させる、改良された装置および方法 Expired - Lifetime JP4994551B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/392,371 US6511539B1 (en) 1999-09-08 1999-09-08 Apparatus and method for growth of a thin film
US09/392,371 1999-09-08
PCT/US2000/024586 WO2001017692A1 (en) 1999-09-08 2000-09-08 Improved apparatus and method for growth of a thin film

Publications (3)

Publication Number Publication Date
JP2003508932A JP2003508932A (ja) 2003-03-04
JP2003508932A5 true JP2003508932A5 (enExample) 2007-08-30
JP4994551B2 JP4994551B2 (ja) 2012-08-08

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JP2001521471A Expired - Lifetime JP4994551B2 (ja) 1999-09-08 2000-09-08 薄膜を成長させる、改良された装置および方法

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US (4) US6511539B1 (enExample)
EP (1) EP1216106B1 (enExample)
JP (1) JP4994551B2 (enExample)
KR (1) KR100853702B1 (enExample)
TW (1) TW527224B (enExample)
WO (1) WO2001017692A1 (enExample)

Families Citing this family (750)

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