JP2006507211A5 - - Google Patents

Download PDF

Info

Publication number
JP2006507211A5
JP2006507211A5 JP2004555582A JP2004555582A JP2006507211A5 JP 2006507211 A5 JP2006507211 A5 JP 2006507211A5 JP 2004555582 A JP2004555582 A JP 2004555582A JP 2004555582 A JP2004555582 A JP 2004555582A JP 2006507211 A5 JP2006507211 A5 JP 2006507211A5
Authority
JP
Japan
Prior art keywords
gas
plasma
carbon nanotubes
source
hydrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004555582A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006507211A (ja
Filing date
Publication date
Priority claimed from US10/302,206 external-priority patent/US6841003B2/en
Application filed filed Critical
Publication of JP2006507211A publication Critical patent/JP2006507211A/ja
Publication of JP2006507211A5 publication Critical patent/JP2006507211A5/ja
Pending legal-status Critical Current

Links

JP2004555582A 2002-11-22 2003-11-21 カーボンナノチューブの形成方法 Pending JP2006507211A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/302,206 US6841003B2 (en) 2002-11-22 2002-11-22 Method for forming carbon nanotubes with intermediate purification steps
PCT/US2003/037352 WO2004048257A2 (en) 2002-11-22 2003-11-21 Method for forming carbon nanotubes

Publications (2)

Publication Number Publication Date
JP2006507211A JP2006507211A (ja) 2006-03-02
JP2006507211A5 true JP2006507211A5 (enExample) 2006-04-13

Family

ID=32324710

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004555582A Pending JP2006507211A (ja) 2002-11-22 2003-11-21 カーボンナノチューブの形成方法

Country Status (8)

Country Link
US (1) US6841003B2 (enExample)
EP (1) EP1563121A4 (enExample)
JP (1) JP2006507211A (enExample)
KR (1) KR20050085074A (enExample)
CN (1) CN1729317A (enExample)
AU (1) AU2003294445A1 (enExample)
TW (1) TW200521079A (enExample)
WO (1) WO2004048257A2 (enExample)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2584508A1 (en) * 2002-05-09 2003-11-09 Institut National De La Recherche Scientifique Method for producing single-wall carbon nanotubes
US20050132949A1 (en) * 2002-11-22 2005-06-23 Kang Sung G. Forming carbon nanotubes by iterating nanotube growth and post-treatment steps
US6841002B2 (en) * 2002-11-22 2005-01-11 Cdream Display Corporation Method for forming carbon nanotubes with post-treatment step
US7094679B1 (en) * 2003-03-11 2006-08-22 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Carbon nanotube interconnect
US7273095B2 (en) * 2003-03-11 2007-09-25 United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Nanoengineered thermal materials based on carbon nanotube array composites
WO2005110624A2 (en) * 2003-12-31 2005-11-24 Eikos Inc. Methods for modifying carbon nanotube structures to enhance coating optical and electronic properties of transparent conductive coatings
US7563426B2 (en) * 2004-07-09 2009-07-21 Clean Technologies International Corporation Method and apparatus for preparing a collection surface for use in producing carbon nanostructures
US7922993B2 (en) * 2004-07-09 2011-04-12 Clean Technology International Corporation Spherical carbon nanostructure and method for producing spherical carbon nanostructures
US7550128B2 (en) * 2004-07-09 2009-06-23 Clean Technologies International Corporation Method and apparatus for producing carbon nanostructures
US20060008403A1 (en) * 2004-07-09 2006-01-12 Clean Technologies International Corporation Reactant liquid system for facilitating the production of carbon nanostructures
US7587985B2 (en) * 2004-08-16 2009-09-15 Clean Technology International Corporation Method and apparatus for producing fine carbon particles
US20060078489A1 (en) * 2004-09-09 2006-04-13 Avetik Harutyunyan Synthesis of small and narrow diameter distributed carbon single walled nanotubes
JP3850427B2 (ja) * 2005-03-22 2006-11-29 株式会社物産ナノテク研究所 炭素繊維結合体およびこれを用いた複合材料
JP4853861B2 (ja) * 2005-04-05 2012-01-11 国立大学法人京都工芸繊維大学 カーボンナノ構造体の形成方法及び装置
WO2008016388A2 (en) * 2006-01-30 2008-02-07 Honda Motor Co., Ltd. Method and apparatus for growth of high quality carbon single-walled nanotubes
JP2009530214A (ja) 2006-01-30 2009-08-27 本田技研工業株式会社 カーボン単層ナノチューブの成長のための触媒
WO2008085541A2 (en) * 2006-06-30 2008-07-17 Cardinal Cg Company Carbon nanotube glazing technology
EP2061643B1 (en) * 2006-09-05 2012-02-22 Airbus Operations Limited Method of manufacturing composite material by growing of layers of reinforcement
GB0617460D0 (en) * 2006-09-05 2006-10-18 Airbus Uk Ltd Method of manufacturing composite material
US8182783B2 (en) * 2006-11-16 2012-05-22 New Jersey Institute Of Technology Rapid microwave process for purification of nanocarbon preparations
KR100923304B1 (ko) * 2007-10-29 2009-10-23 삼성전자주식회사 그라펜 시트 및 그의 제조방법
FR2927619B1 (fr) * 2008-02-20 2011-01-14 Commissariat Energie Atomique Croissance de nanotubes de carbone sur substrats de carbone ou metalliques.
WO2010092786A1 (ja) * 2009-02-10 2010-08-19 日本ゼオン株式会社 カーボンナノチューブ配向集合体生産用基材及びカーボンナノチューブ配向集合体の製造方法
US20110223343A1 (en) * 2010-03-01 2011-09-15 Auburn University, Office Of Technology Transfer Novel nanocomposite for sustainability of infrastructure
US9738526B2 (en) * 2012-09-06 2017-08-22 The Trustees Of The Stevens Institute Of Technology Popcorn-like growth of graphene-carbon nanotube multi-stack hybrid three-dimensional architecture for energy storage devices

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0146613B1 (en) * 1983-06-13 1990-12-05 Ncr Corporation Process for fabricating semiconductor structures
US6630772B1 (en) * 1998-09-21 2003-10-07 Agere Systems Inc. Device comprising carbon nanotube field emitter structure and process for forming device
CN1174916C (zh) * 1999-04-21 2004-11-10 张震 碳毫微管的形成方法
EP1129990A1 (en) * 2000-02-25 2001-09-05 Lucent Technologies Inc. Process for controlled growth of carbon nanotubes
JP2002063864A (ja) * 2000-08-21 2002-02-28 Ise Electronics Corp 蛍光表示管
FR2815954B1 (fr) * 2000-10-27 2003-02-21 Commissariat Energie Atomique Procede et dispositif de depot par plasma a la resonance cyclotron electronique de nanotubes de carbone monoparois et nanotubes ainsi obtenus
US20020160111A1 (en) * 2001-04-25 2002-10-31 Yi Sun Method for fabrication of field emission devices using carbon nanotube film as a cathode
US20040037972A1 (en) * 2002-08-22 2004-02-26 Kang Simon Patterned granulized catalyst layer suitable for electron-emitting device, and associated fabrication method
US6841002B2 (en) * 2002-11-22 2005-01-11 Cdream Display Corporation Method for forming carbon nanotubes with post-treatment step

Similar Documents

Publication Publication Date Title
JP2006507211A5 (enExample)
US6350488B1 (en) Mass synthesis method of high purity carbon nanotubes vertically aligned over large-size substrate using thermal chemical vapor deposition
US6841003B2 (en) Method for forming carbon nanotubes with intermediate purification steps
EP1046613A3 (en) Method of forming carbon nanotubes
CN1545486A (zh) 碳纳米管的制备
DE60122747D1 (de) Feldemissionsvorrichtung mit kohlenstoffhaltigen spitzen
TW201502311A (zh) 包含後續多級淨化步驟之ｍｏｃｖｄ層生長方法
TW200603225A (en) Method of manufacturing carbon nanotube and plasma cvd(chemical vapor deposition) apparatus for implementing thereof
ATE489333T1 (de) Reaktor und verfahren zur herstellung von silizium
CN101270470A (zh) 化学气相沉积合成无金属催化剂自组生长碳纳米管的方法
JP2005510081A5 (enExample)
WO2004048258A8 (en) Method for forming carbon nanotubes
JP2005350342A (ja) カーボンナノチューブの作製方法及びその方法を実施するプラズマｃｖｄ装置
US7585484B2 (en) Apparatus and method for synthesizing carbon nanotubes
CN112919823A (zh) 一种快速均匀制备大面积石墨烯玻璃的方法
WO2006054393A1 (ja) 薄膜製造方法及び薄膜製造装置
JP2021052069A (ja) 成膜方法
CN103205806B (zh) 一种单晶立方形氮化碳薄膜的制备方法
JP2006144084A (ja) 薄膜製造方法
JP4618780B2 (ja) 薄膜製造方法
CN106449907B (zh) 一种p型指数掺杂结构GaN光电阴极材料的生长方法
KR20050110137A (ko) 원자층증착법에 의한 Ａｌｑ3 박막 제조방법
SG144848A1 (en) Cnt devices, low-temperature fabrication of ctn and cnt photo-resists