JP2003502449A5 - - Google Patents

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Publication number
JP2003502449A5
JP2003502449A5 JP2001503571A JP2001503571A JP2003502449A5 JP 2003502449 A5 JP2003502449 A5 JP 2003502449A5 JP 2001503571 A JP2001503571 A JP 2001503571A JP 2001503571 A JP2001503571 A JP 2001503571A JP 2003502449 A5 JP2003502449 A5 JP 2003502449A5
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JP
Japan
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group
composition
spin
polymer
organic
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JP2001503571A
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English (en)
Japanese (ja)
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JP2003502449A (ja
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Priority claimed from US09/330,248 external-priority patent/US6268457B1/en
Application filed filed Critical
Priority claimed from PCT/US2000/015772 external-priority patent/WO2000077575A1/en
Publication of JP2003502449A publication Critical patent/JP2003502449A/ja
Publication of JP2003502449A5 publication Critical patent/JP2003502449A5/ja
Pending legal-status Critical Current

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JP2001503571A 1999-06-10 2000-06-08 フォトリソグラフィ用スピンオンガラス反射防止コーティング Pending JP2003502449A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US09/330,248 US6268457B1 (en) 1999-06-10 1999-06-10 Spin-on glass anti-reflective coatings for photolithography
US09/330,248 1999-06-10
US09/491,166 2000-01-26
US09/491,166 US6506497B1 (en) 1999-06-10 2000-01-26 Spin-on-glass anti-reflective coatings for photolithography
PCT/US2000/015772 WO2000077575A1 (en) 1999-06-10 2000-06-08 Spin-on-glass anti-reflective coatings for photolithography

Publications (2)

Publication Number Publication Date
JP2003502449A JP2003502449A (ja) 2003-01-21
JP2003502449A5 true JP2003502449A5 (enExample) 2007-08-02

Family

ID=26987186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001503571A Pending JP2003502449A (ja) 1999-06-10 2000-06-08 フォトリソグラフィ用スピンオンガラス反射防止コーティング

Country Status (7)

Country Link
US (3) US6956097B2 (enExample)
EP (1) EP1190277B1 (enExample)
JP (1) JP2003502449A (enExample)
KR (1) KR100804873B1 (enExample)
AU (1) AU5600200A (enExample)
CA (1) CA2374944A1 (enExample)
WO (1) WO2000077575A1 (enExample)

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