US20020102483A1 - Antireflective coating compositions - Google Patents

Antireflective coating compositions Download PDF

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Publication number
US20020102483A1
US20020102483A1 US09/153,575 US15357598D US2002102483A1 US 20020102483 A1 US20020102483 A1 US 20020102483A1 US 15357598 D US15357598 D US 15357598D US 2002102483 A1 US2002102483 A1 US 2002102483A1
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US
United States
Prior art keywords
optionally substituted
photoresist
resin
layer
antireflective composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
US09/153,575
Other versions
US6410209B1 (en
Inventor
Timothy Adams
Edward Pavelchek
Roger Sinta
Manuel DoCanto
Robert Blacksmith
Peter Trefonas, III
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm and Haas Electronic Materials LLC
Original Assignee
Shipley Co LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
Application filed by Shipley Co LLC filed Critical Shipley Co LLC
Priority to US09/153,575 priority Critical patent/US6410209B1/en
Assigned to SHIPLEY COMPANY, L.L.C. reassignment SHIPLEY COMPANY, L.L.C. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: TREFONAS, PETER III, BLACKSMITH, ROBERT F., DOCANTO, MANUEL, PAVELCHEK, EDWARD K., ADAMS, TIMOTHY G., SINTA, ROGER F.
Publication of US20020102483A1 publication Critical patent/US20020102483A1/en
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=22547781&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=US20020102483(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Granted legal-status Critical Current

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