DE69737375T2 - Verfahren zur Befestigung eines elektronischen Bauteils auf einer Leiterplatte und System zum Ausführen des Verfahrens - Google Patents
Verfahren zur Befestigung eines elektronischen Bauteils auf einer Leiterplatte und System zum Ausführen des Verfahrens Download PDFInfo
- Publication number
- DE69737375T2 DE69737375T2 DE69737375T DE69737375T DE69737375T2 DE 69737375 T2 DE69737375 T2 DE 69737375T2 DE 69737375 T DE69737375 T DE 69737375T DE 69737375 T DE69737375 T DE 69737375T DE 69737375 T2 DE69737375 T2 DE 69737375T2
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- Prior art keywords
- circuit board
- electrodes
- printed circuit
- electronic component
- thermosetting resin
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- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
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- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
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- H01L21/563—Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3011—Impedance
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
- H01L2924/3511—Warping
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/321—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
- Y10T29/49144—Assembling to base an electrical component, e.g., capacitor, etc. by metal fusion
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Wire Bonding (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Manufacturing Of Printed Wiring (AREA)
Description
- Gebiet der Technik
- Die vorliegende Erfindung betrifft ein Verfahren und ein System gemäß Anspruch 1 und 3 zum Bestücken einer Leiterplatte mit einem elektronischen Bauelement. Insbesondere betrifft die vorliegende Erfindung ein Verfahren und ein System zum Bestücken einer Leiterplatte für eine elektronische Schaltung mit einem einzelnen elektronischen Bauelement, beispielsweise einem IC-Chip oder einem Oberflächenwellen-Bauelement (SAW-Bauelement) (im Falle des IC-Chip in Form eines gehäuselosen IC).
- Stand der Technik
- Heutzutage werden Leiterplatten mit elektronischen Schaltungen in einer Vielzahl von Produkten verwendet, und ihre Leistungsfähigkeit wird von Tag zu Tag gesteigert. Auch werden auf den Leiterplatten immer höhere Frequenzen verwendet, und somit ist die Flip-Chip-Montage, die niedrige Impedanz gewährleistet, das geeignete Bestückungsverfahren für elektronische Bauelemente, die mit hohen Frequenzen arbeiten. In Anbetracht von immer mehr tragbaren Geräten wird die Flip-Chip-Montage zum Montieren von IC-Chips ohne Gehäuse auf Leiterplatten benötigt. Aus diesem Grund ergibt sich unter den IC-Chips, die einzeln auf einer Leiterplatte montiert werden, und IC-Chips, die auf elektronischen Bauelementen und Flachbildschirmelementen montiert werden, eine gewisse Anzahl von fehlerhaften Chips. Neben den vorgenannten Flip-Chip-Bauelementen werden auch immer mehr CSP-Bauelemente (Chip-Size-Package-Elemente), BGA-Bauelemente (Ball-Grid-Array-Bauelemente) und dergleichen verwendet.
- Ein herkömmliches Verfahren (erstes Beispiel nach dem Stand der Technik) zum Bonden eines IC-Chips auf der Leiterplatte eines elektronischen Geräts ist das in der geprüften japanischen Patentveröffentlichung Nr. 06-66355 usw. offenbarte Verfahren. Es ist in
1 dargestellt. Wie in1 gezeigt, wird nach dem allgemein bekannten Verfahren Ag-Paste74 auf Löthöcker73 auf einem IC-Chip71 aufgebracht, die Ag-Paste74 mit Elektroden75 auf einer Leiterplatte76 verbun den, die Ag-Paste74 dann gehärtet und anschließend Verkapselungsmaterial78 in den Raum zwischen dem IC-Chip71 und der Leiterplatte76 gegossen. - Als Verfahren (zweites Beispiel nach dem Stand der Technik) zum Bonden eines IC-Chips auf einer Flüssigkristallanzeige ist allgemein die Halbleiter-Chip-Verbindungskonstruktion bekannt, die eine anisotrope leitfähige Schicht
80 verwendet, wie sie in der geprüften japanischen Patentveröffentlichung Nr. 62-6652 offenbart und in2 gezeigt ist. Bei dieser Konstruktion wird eine anisotrope leitfähige Klebeschicht81 , die durch Einbringen leitfähiger Teilchen82 in ein isolierendes Harz83 gebildet wird, von einer Trennschicht85 abgezogen und auf das Substrat oder die Glasplatte einer Flüssigkristallanzeige84 aufgebracht. Durch Befestigen des IC-Chips86 mittels Thermokompression wird die anisotrope leitfähige Klebeschicht81 zwischen die Unterseite des IC-Chips86 und das Substrat84 eingebracht, wobei die Abschnitte unter den Au-Löthöckern87 ausgespart werden. - Als drittes Beispiel für den Stand der Technik ist ein Verfahren bekannt, nach dem ein Substrat mit einem unter UV-Licht aushärtenden Harz beschichtet wird, ein IC-Chip auf dem Substrat montiert wird und das Harz unter Druck mit UV-Licht bestrahlt wird, wodurch das Harz zwischen dem IC-Chip und dem Substrat aushärtet und der Kontakt zwischen den beiden durch die Schrumpfungskraft des Harzes erhalten bleibt.
- Wie vorstehend beschrieben, wurde die Montage eines IC-Chips ausgeführt, indem ein IC-Chip, beispielsweise mit flachem Gehäuse, durch Druckbonden in eine Schaltung eingebaut, die Elektroden des IC-Chips durch Kontaktieren mit der Schaltung verbunden, ein Gehäuse durch Harzguß gebildet, anschließend Lötpaste auf eine Leiterplatte gedruckt, der IC mit dem flachen Gehäuse auf der Leiterplatte montiert und die Paste aufgeschmolzen wurden. Bei dem vorstehenden sogenannten SMT-Verfahren (Surface Mount Technology) konnte die Leiterplatte wegen des langen Verfahrens und der langen Fertigungsdauer nur schwer verkleinert werden. Beispielsweise benötigt ein in einem flachen Gehäuse verkapselter IC-Chip etwa die vierfache Fläche des IC-Chips, eine Tatsache, die der Verkleinerung entgegenstand.
- Demgegenüber wird seit kurzem öfter das Flip-Chip-Verfahren verwendet, nach dem ein IC-Chip ohne Gehäuse direkt montiert wird, um eine Abkürzung des Verfahrens und eine kleine, leichte Konstruktion zu erhalten. Dieses Flip-Chip-Verfahren wurde in vielen Ausgestaltungen entwickelt, beispielsweise als stud bump bonding (SBB) mit Höckerbildung an einem IC-Chip, Höckereinebnung, Aufbringen von AgPd-Paste, Montage, Prüfung, Verkapselung mit Verkapselungsharz und Prüfung und UV-Harzbonden zum gleichzeitigen Höckerbilden an einem IC-Chip und UV-Aushärten des Harzes, mit dem die Leiterplatte beschichtet ist, und anschließend Montage, UV-Aushärten des Harzes und Prüfung.
- Allerdings hatte jedes der Verfahren den Nachteil, dass für das Aushärten der Paste zum Verbinden der Löthöcker des IC-Chips mit den Elektroden der Leiterplatte und für das Beschichten mit dem Verkapselungsharz und seine Aushärtung viel Zeit erforderlich ist, was die Produktivität verringert. Außerdem muss für die Leiterplatte Keramik oder Glas verwendet werden, was den Nachteil hoher Kosten mit sich bringt. Nach dem Verfahren, bei dem wie beim ersten Beispiel für den Stand der Technik leitfähige Paste als Bondiermaterial verwendet wird, müssen die Höcker des IC-Chips eingeebnet und vor Verwendung abgeflacht werden, um die Transfermontage zu stabilisieren.
- Für die Verbindungskonstruktion, bei der wie im zweiten Beispiel für den Stand der Technik der anisotrope leitfähige Kleber verwendet wird, wurde eine Konstruktion entwickelt, bei der Glas als Basismaterial der Leiterplatte verwendet wird. Jedoch ist es schwierig, die leitfähigen Partikel gleichmäßig im leitfähigen Kleber zu verteilen, so dass es durch die ungleichmäßige Verteilung der Teilchen zu Kurzschlüssen kommt und der leitfähige Kleber teuer wird.
- Bei dem Verbindungsverfahren, bei dem das Harz durch UV-Licht ausgehärtet wird wie beim dritten Beispiel für den Stand der Technik, gibt es das Problem, dass Höhenunterschiede der Höcker nur ± 1 μm betragen dürfen und Verbindungen auf einer nicht einwandfrei ebenen Leiterplatte, beispielsweise einer Kunstharzleiterplatte (Glasepoxid-Leiterplatte), nicht hergestellt werden können. Bei dem Verfahren mit Lötmittel musste Verkapselungsharz vergossen und ausgehärtet werden, um Unterschiede in der Wärmeausdehnung und der Kontraktion der Leiterplatte und des IC-Chip nach dem Bonden abzumildern. Diese Harzver kapselung dauert zwei bis vier Stunden, was zu dem Problem einer deutlich geringen Produktivität geführt hat.
- Die deutsche Offenlegungsschrift 195 35 282 offenbart ein Verfahren zum Bestücken von Leiterplatten mit elektronischen Bauelementen, bei dem Wärme und Druck zur Montage der Bauelemente eingesetzt werden. Bei dem Bestückungsverfahren wird ein elektrisch nicht leitender Kleber zwischen dem elektronischen Bauelement und der Leiterplatte verwendet. Dieser elektrisch nicht leitende Kleber kann Füllstoffe enthalten, die festgelegte mechanische, elektrische, thermische und/oder chemische Eigenschaften aufweisen, um ein definiertes Aushärten des Klebers zu bewirken.
- Außerdem offenbart die europäische Patentanmeldung 0 475 022 ein Verfahren zum direkten Anbringen von Halbleiterchips auf einem Substrat oder Modul mit einer Polymerzwischenschicht.
- In Anbetracht der genannten Probleme beim Stand der Technik hat die vorliegende Erfindung die Aufgabe, ein Verfahren und ein System zum Bestücken einer Leiterplatte mit elektronischen Bauelementen zur Verfügung zu stellen, wobei das direkte Bonden des elektronischen Bauelements auf der Leiterplatte bei hoher Produktivität vorgesehen ist.
- Offenbarung der Erfindung
- Um die genannten Probleme zu lösen, ist die vorliegende Erfindung wie folgt gestaltet:
Gemäß dem ersten Aspekt der Erfindung wird ein Bestückungsverfahren nach Anspruch 1 zur Verfügung gestellt. - Gemäß dem zweiten Aspekt der Erfindung wird ein Bestückungsverfahren gemäß dem ersten Aspekt zur Verfügung gestellt, wobei der warmaushärtende Harzbogen eine Dicke hat, die größer ist als der Abstand zwischen der aktiven Oberfläche des elektronischen Bauelements und der zur Leiterplatte gehörenden Oberfläche, auf der die Elektroden nach dem Bonden gebildet werden.
- Gemäß dem dritten Aspekt der Erfindung wird ein Bestückungssystem nach Anspruch 3 zur Verfügung gestellt.
- Außerdem wird nach dem vierten Aspekt der Erfindung ein Bestückungssystem nach dem dritten Aspekt zur Verfügung gestellt, bei dem der warmaushärtende Harzbogen dicker ist als der Abstand zwischen der aktiven Oberfläche des elektronischen Bauelements und der zur Leiterplatte gehörenden Oberfläche, auf der die Elektroden nach dem Bonden gebildet werden.
- Kurzbeschreibung der Zeichnungen
- Die genannten und weitere Aspekte und Merkmale der vorliegenden Erfindung werden aus nachstehender Beschreibung anhand der bevorzugten Ausführungsbeispiele und unter Bezugnahme auf die beigefügten Zeichnungen deutlich, die folgendes zeigen:
-
1 : ein Schnittbild, das ein Verfahren zum Befestigen eines IC-Chips an einer Leiterplatte nach dem Stand der Technik zeigt; -
2A und2B : Ansichten zur Erläuterung eines bekannten Verfahrens zum Befestigen eines IC-Chips an einer Leiterplatte; -
3A ,3B ,3C ,3D ,3E ,3F und3G : Ansichten zur Erläuterung des Vorgangs der Befestigung eines IC-Chips an einer Leiterplatte nach einem Ausführungsbeispiel des erfindungsgemäßen Bestückungsverfahrens. - Beste Art der Ausführung der Erfindung
- Vorab sei darauf hingewiesen, dass gleiche Teile in den Zeichnungen durchweg mit demselben Bezugszeichen bezeichnet sind.
- Es werden ein Bestückungsverfahren und eine Bestückungsvorrichtung gemäß einem Ausführungsbeispiel der Erfindung unter Bezugnahme auf
3A bis3G beschrieben. Bei dem Ausführungsbeispiel handelt es sich um ein Bestückungs verfahren und eine Bestückungsvorrichtung, bei denen unabhängig von Gleichzeitigkeit keine Nivellierung vorgenommen wird. - Wie in
3E und3F gezeigt, werden an den Elektroden2 des IC-Chips1 mittels eines Drahtkontaktierers (nicht abgebildet) vorab überstehende Elektroden (Höcker)3 gebildet, wenn der IC-Chip1 auf der Leiterplatte4 montiert wird. Wie in3A und3B gezeigt, werden durch den warmaushärtenden Harzbogen6 hindurch in eine Richtung (Dickenrichtung des Harzbogens6 ) Durchgangsbohrungen15 hergestellt, in denen die Höcker3 und die Elektroden5 der Leiterplatte4 an der Position der Höcker3 und der Elektroden5 der Leiterplatte4 miteinander in Kontakt gebracht werden und eine leitende Verbindung zwischen ihnen hergestellt wird. Dann werden, wie in3C und3D gezeigt, leitfähige Partikel14 , bestehend beispielsweise aus Harzkügelchen mit goldplattierter Oberfläche, oder Nickelpartikeln, oder leitfähigen Partikeln aus Silber, Silber-Palladium oder Gold, oder einer leitfähigen Paste, oder Partikeln aus Goldkügelchen in Pastenform, durch Drucken, Hineindrücken mittels einer Rakel oder dergleichen in die Durchgangsbohrungen15 eingebracht, wodurch ein elektrisch leitfähiger warmaushärtender Harzbogen66 geschaffen wird. Der so gebildete Harzbogen66 wird nach Positionsausrichtung, wie in3E und3F gezeigt, auf die Elektroden5 der Leiterplatte4 gesteckt. Wenn leitfähige Partikel14 in Pastenform verwendet werden und die Viskosität der Paste höher eingestellt wird als die Viskosität beim Bonden des warmaushärtenden Klebers des warmaushärtenden Harzbogens66 , lässt sich die Paste durch das Harz des warmaushärtenden Harzbogens66 schlecht schieben und zum Fließen bringen, wenn der IC-Chip1 angedrückt wird, was ein weiterer Vorteil ist. Anschließend werden die Höcker3 des IC-Chips1 nach den Elektroden5 der Leiterplatte4 ausgerichtet, wie in11E und11F gezeigt, und der IC-Chip1 wird vom aufgeheizten Kontaktierkopf8 gegen die Leiterplatte4 gedrückt, um das warmaushärtende Harz im warmaushärtenden Harzbogen66 , der zwischen den IC-Chip1 und die Leiterplatte4 geschoben ist, zu härten, während gleichzeitig die Nivellierung der Höcker3 und die Verzugskorrektur an der Leiterplatte4 vorgenommen werden, so dass der IC-Chip1 durch das gehärtete Harz66s an der Leiterplatte4 befestigt wird, wie in3G gezeigt. Wenn die Leiterplattenseite erwärmt wird, kann die Temperatur des Kontaktierkopfs8 weiter gesenkt werden. - Die durch den warmaushärtenden Harzbogen
66 hindurch gebildeten Löcher15 werden vorzugsweise entweder an der Position der Elektroden2 des IC-Chips1 oder der Höcker3 oder an der Position der Elektroden5 der Leiterplatte4 gebildet. Wenn die Anzahl der Elektroden5 der Leiterplatte4 größer ist als die Anzahl der Elektroden2 des IC-Chips1 , ist es beispielsweise zweckmäßig, die Löcher15 entsprechend der zum Kontaktieren der Elektroden2 des IC-Chips1 nötigen Anzahl, d.h. der Position und der Anzahl der Elektroden2 des IC-Chips1 zu bilden.
Claims (4)
- Bestückungsverfahren, umfassend: Ausrichten der Position von Elektroden (
5 ) einer Leiterplatte (4 ) nach Höckern (3 ), die durch Drahtkontaktierung von Elektroden (2 ) eines elektronischen Bauelements (1 ) gebildet wurden, mit Einlage eines warmaushärtenden Harzbogens (6 ), dadurch gekennzeichnet, dass der warmaushärtende Harzbogen (6 ) ein fester warmaushärtender Harzbogen (6 ) ist, bei dem in Durchgangsbohrungen (15 ), die an Positionen ausgebildet sind, die den Höckern (3 ) der Elektroden (2 ) des elektronischen Bauelements (1 ) an den Elektroden (5 ) der Leiterplatte (4 ) entsprechen, Teilchen (14 ) folgender Art eingebettet sind: Harzkügelchen, die an der Oberfläche mit Gold plattiert sind, oder Nickelpartikel, oder leitfähige Teilchen aus Silber, Silber-Palladium oder Gold, oder eine leitfähige Paste, oder Goldkügelchen, und Härten des zwischen das elektronische Bauelement (1 ) und die Leiterplatte (4 ) gelegten warmaushärtenden Harzes (6 ) durch Wärme, während eine Wellung der Leiterplatte (4 ) korrigiert wird, indem das elektronische Bauelement (1 ) mit einer Kraft von wenigstens 0,196133 N (20 gf) pro Höcker (3 ) gegen die Leiterplatte (4 ) gedrückt wird, wodurch das elektronische Bauelement (1 ) und die Leiterplatte (4 ) unter Herstellung einer elektrischen Verbindung zwischen ihren beiden Elektroden (2 ,5 ) miteinander verbunden werden, wobei das Ausrichten der Position der Höcker (3 ) des elektronischen Bauelements (1 ) nach den Elektroden (5 ) der Leiterplatte (4 ) ausgeführt wird, nachdem der warmaushärtende Harzbogen (6 ) an den Elektroden (5 ) der Leiterplatte (4 ) haftet. - Bestückungsverfahren nach Anspruch 1, bei dem der warmaushärtende Harzbogen (
6 ) eine Dicke hat, die größer ist als der Abstand zwischen der aktiven Oberfläche des elektronischen Bauelements (1 ) und der zur Leiterplatte (4 ) gehörenden Oberfläche, auf der die Elektroden (5 ) nach dem Bonden gebildet werden. - Bestückungssystem zum Ausführen des Verfahrens nach Anspruch 1 oder 2, aufweisend: eine Bestückungsvorrichtung, einen festen, warmaushärtenden Harzbogen (
6 ), eine Leiterplatte (4 ) mit darauf ausgebildeten Elek-troden (5 ), ein elektronisches Bauelement (1 ) mit durch Drahtkontaktierung daran ausgebildeten Höckern, wobei der feste, warmaushärtende Harzbogen (6 ) Teilchen (14 ) folgender Art enthält: Harzkügelchen, die an der Oberfläche mit Gold plattiert sind, oder Nickelpartikel, oder leitfähige Partikel aus Silber, Silber-Palladium oder Gold, oder eine leitfähige Paste, oder Goldkügelchen, die in Durchgangsbohrungen (15 ) eingebettet sind, die an Positionen ausgebildet sind, die den Höckern (3 ) der Elektroden (2 ) des elek-tronischen Bauelements (1 ) an den Elektroden (5 ) der Leiterplatte (4 ) entsprechen, wobei die Bestückungsvorrichtung aufweist: eine Positionsausrichtungseinrichtung zum Ausrichten der Elektroden (5 ) der Leiterplatte (4 ) nach den Höckern (3 ) des elektronischen Bauelements (1 ) mit Einlegen des warmaushärtenden Harzes (6 ), eine Heizeinrichtung (8a ) zum Erwärmen des warmaushärtenden Harzes (6 ) und eine Bondiereinrichtung zum Härten des warmaushärtenden Harzes (6 ), das zwischen das elektronische Bauelement (1 ) und die Leiterplatte (4 ) gelegt wurde, durch Wärme, während die Wellung der Leiterplatte (4 ) korrigiert wird, indem das elektronische Bauelement (1 ) mit einem Druck von wenigstens 0,196133 N (20 gf) pro Höcker (3 ) gegen die Leiterplatte (4 ) gedrückt wird, wobei Wärme von der Heizeinrichtung (8a ) auf das warmaushärtende Harz (6 ) einwirkt, wodurch das elektronische Bauelement (1 ) und die Leiterplatte (4 ) unter Herstellung einer elektrischen Verbindung zwischen beider Elektroden (2 ,5 ) miteinander verbunden werden, wobei die Positionsausrichtungseinrichtung dazu eingerichtet ist, den festen, warmaushärtenden Harzbogen (6 ) mit den Elektroden (5 ) der Leiterplatte (4 ) zu verkleben, und danach die Ausrichtung der Position der Höcker (3 ) des elektronischen Bauelements (1 ) nach den Elektroden (5 ) der Leiterplatte (4 ) vorzunehmen. - Bestückungssystem nach Anspruch 3, wobei der warmaushärtende Harzbogen (
6 ) eine Dicke hat, die größer ist als der Abstand zwischen der aktiven Oberfläche des elektronischen Bauelements (1 ) und der zu der Leiterplatte (4 ) gehörenden Oberfläche, auf der die Elektroden (5 ) nach dem Bonden gebildet werden.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35073896 | 1996-12-27 | ||
| JP35073896 | 1996-12-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69737375D1 DE69737375D1 (de) | 2007-03-29 |
| DE69737375T2 true DE69737375T2 (de) | 2007-11-29 |
Family
ID=18412526
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69737375T Expired - Lifetime DE69737375T2 (de) | 1996-12-27 | 1997-12-26 | Verfahren zur Befestigung eines elektronischen Bauteils auf einer Leiterplatte und System zum Ausführen des Verfahrens |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6981317B1 (de) |
| EP (4) | EP0954208A4 (de) |
| JP (3) | JP3150347B2 (de) |
| KR (1) | KR100384314B1 (de) |
| DE (1) | DE69737375T2 (de) |
| WO (1) | WO1998030073A1 (de) |
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| JP4097378B2 (ja) * | 1999-01-29 | 2008-06-11 | 松下電器産業株式会社 | 電子部品の実装方法及びその装置 |
| JP4097379B2 (ja) * | 1999-01-29 | 2008-06-11 | 松下電器産業株式会社 | 電子部品の実装方法及びその装置 |
| KR100502222B1 (ko) * | 1999-01-29 | 2005-07-18 | 마츠시타 덴끼 산교 가부시키가이샤 | 전자부품의 실장방법 및 그 장치 |
| JP4977194B2 (ja) * | 1999-01-29 | 2012-07-18 | パナソニック株式会社 | 電子部品の実装方法 |
| DE60042787D1 (de) | 1999-07-16 | 2009-10-01 | Panasonic Corp | Verfahren zur Herstellung einer verpackten Halbleiteranordnung |
| EP2053908B1 (de) * | 1999-08-12 | 2011-12-21 | Ibiden Co., Ltd. | Mehrschichtdruckleiterplatte mit Lötstoppresistzusammensetzung |
| EP1087435A1 (de) * | 1999-09-23 | 2001-03-28 | Ming-Tung Shen | Elektrooptikapparat und seine Herstellung |
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| US6555414B1 (en) * | 2000-02-09 | 2003-04-29 | Interuniversitair Microelektronica Centrum, Vzw | Flip-chip assembly of semiconductor devices using adhesives |
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| CN1434980A (zh) * | 2000-06-14 | 2003-08-06 | 积水化学工业株式会社 | 微粒子配置薄膜、导电连接薄膜、导电连接构造体以及微粒子的配置方法 |
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1997
- 1997-12-26 EP EP97950421A patent/EP0954208A4/de not_active Ceased
- 1997-12-26 EP EP04011178A patent/EP1448033A1/de not_active Ceased
- 1997-12-26 US US09/331,763 patent/US6981317B1/en not_active Expired - Fee Related
- 1997-12-26 JP JP52985998A patent/JP3150347B2/ja not_active Expired - Lifetime
- 1997-12-26 EP EP04011180A patent/EP1448034A1/de not_active Ceased
- 1997-12-26 DE DE69737375T patent/DE69737375T2/de not_active Expired - Lifetime
- 1997-12-26 WO PCT/JP1997/004873 patent/WO1998030073A1/ja not_active Ceased
- 1997-12-26 KR KR10-1999-7005885A patent/KR100384314B1/ko not_active Expired - Fee Related
- 1997-12-26 EP EP04011179A patent/EP1445995B1/de not_active Expired - Lifetime
-
2000
- 2000-05-26 JP JP2000156287A patent/JP3927759B2/ja not_active Expired - Fee Related
- 2000-05-26 JP JP2000156304A patent/JP3880775B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2001007159A (ja) | 2001-01-12 |
| EP0954208A4 (de) | 2002-09-11 |
| JP2001024034A (ja) | 2001-01-26 |
| EP1448034A1 (de) | 2004-08-18 |
| EP1448033A1 (de) | 2004-08-18 |
| JP3880775B2 (ja) | 2007-02-14 |
| JP3927759B2 (ja) | 2007-06-13 |
| EP1445995A1 (de) | 2004-08-11 |
| KR20000062375A (ko) | 2000-10-25 |
| US6981317B1 (en) | 2006-01-03 |
| EP0954208A1 (de) | 1999-11-03 |
| WO1998030073A1 (en) | 1998-07-09 |
| DE69737375D1 (de) | 2007-03-29 |
| KR100384314B1 (ko) | 2003-05-16 |
| JP3150347B2 (ja) | 2001-03-26 |
| EP1445995B1 (de) | 2007-02-14 |
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Owner name: PANASONIC CORP., KADOMA, OSAKA, JP |