JP6876933B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP6876933B2 JP6876933B2 JP2016565864A JP2016565864A JP6876933B2 JP 6876933 B2 JP6876933 B2 JP 6876933B2 JP 2016565864 A JP2016565864 A JP 2016565864A JP 2016565864 A JP2016565864 A JP 2016565864A JP 6876933 B2 JP6876933 B2 JP 6876933B2
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- Japan
- Prior art keywords
- electrode block
- region
- electrode
- bump
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000004065 semiconductor Substances 0.000 title claims description 155
- 229910052751 metal Inorganic materials 0.000 claims description 102
- 239000002184 metal Substances 0.000 claims description 102
- 239000000463 material Substances 0.000 claims description 35
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 13
- 239000010931 gold Substances 0.000 claims description 13
- 229910052737 gold Inorganic materials 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 description 18
- 239000011810 insulating material Substances 0.000 description 8
- 229910000679 solder Inorganic materials 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 239000004642 Polyimide Substances 0.000 description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 5
- 229920001721 polyimide Polymers 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 239000000945 filler Substances 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 238000002788 crimping Methods 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 229910001182 Mo alloy Inorganic materials 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- WUUZKBJEUBFVMV-UHFFFAOYSA-N copper molybdenum Chemical compound [Cu].[Mo] WUUZKBJEUBFVMV-UHFFFAOYSA-N 0.000 description 1
- SBYXRAKIOMOBFF-UHFFFAOYSA-N copper tungsten Chemical compound [Cu].[W] SBYXRAKIOMOBFF-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
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- H01L2924/16235—Connecting to a semiconductor or solid-state bodies, i.e. cap-to-chip
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/162—Disposition
- H01L2924/16251—Connecting to an item not being a semiconductor or solid-state body, e.g. cap-to-substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/0233—Mounting configuration of laser chips
- H01S5/02345—Wire-bonding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/0235—Method for mounting laser chips
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/0235—Method for mounting laser chips
- H01S5/02355—Fixing laser chips on mounts
- H01S5/0237—Fixing laser chips on mounts by soldering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/024—Arrangements for thermal management
- H01S5/02476—Heat spreaders, i.e. improving heat flow between laser chip and heat dissipating elements
- H01S5/02492—CuW heat spreaders
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- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Ceramic Engineering (AREA)
- Semiconductor Lasers (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Description
以下、本開示の実施の形態1について、図1〜図7を用いて説明する。
次に、本開示の実施の形態2について、図8〜図14を用いて説明する。なお、実施の形態1と共通する構成については同じ符号を付し、説明を省略する。図8は、本実施の形態におけるパワー半導体装置2の概略構成を示す断面図である。図9〜図14は、本実施の形態におけるパワー半導体装置2の製造方法を示す斜視図である。
次に、本開示の実施の形態3について、図15および図16を用いて説明する。なお、実施の形態1と共通する構成については同じ符号を付し、説明を省略する。図15は、本実施の形態における半導体レーザ装置3の概略構成を示す断面図である。図16は、本実施の形態における半導体レーザ装置3の概略構成を示す斜視図である。
次に、本開示の実施の形態4について、図14および図17を用いて説明する。なお、実施の形態2と共通する構成については同じ符号を付し、説明を省略する。図17は、本実施の形態におけるパワー半導体装置4の概略構成を示す断面図である。
次に実施の形態1および3の変形例について説明する。実施の形態1および3では、絶縁層31の材料として、ポリイミドやセラミックなどの比較的、圧力による変形の少ない絶縁性材料を用い、絶縁層32の材料として、窒化アルミニウムなどの比較的柔らかい絶縁性材料を用いた。この絶縁性材料の固さの差から、電極ブロック60(260)が傾く恐れがある。すなわち、半導体レーザ素子40が搭載された側(絶縁層31側)が上方に浮きあがり、反対側(絶縁層32側)が下方に沈み込む恐れがある。本変形例では、電極ブロック60(260)の下面であって、半導体レーザ素子40とは反対側にスペーサを設ける。スペーサとしては、比較的固い絶縁性材料でもよく、電極ブロック60(260)の下面を突出させた形状として絶縁性材料で被覆しても構わない。
2,4 パワー半導体装置
10,60,110,160,210,260,310,360 電極ブロック
11,111,261,361 凹部
12,13,61,62 接続孔
14,63 端子孔
20 サブマウント
30,31,32,130 絶縁層
40 半導体レーザ素子
41,141 正電極
42,142 負電極
50 バンプ
70 金属シート
80 金属層
90 絶縁性ネジ
91 導電性ネジ
92 絶縁部材
140 パワー半導体素子
900 半導体レーザ装置
901 ヒートシンク
902 サブマウント
903 LDバー
904 絶縁層
905 バンプ
906 電極
907 充填材
Claims (10)
- 導電性を有する第1の電極ブロックと、
前記第1の電極ブロックの上面の第1の領域に設けられ、前記第1の電極ブロックと電気的に接続され、導電性を有するサブマウントと、
前記第1の電極ブロックの上面であって、前記第1の領域とは異なる第2の領域に設けられた絶縁層と、
前記サブマウントの上に設けられ、前記サブマウントと電気的に接続された第1の電極を有する半導体素子と、
前記半導体素子の前記第1の電極とは反対側の第2の電極の上面に設けられ、前記第2の電極と電気的に接続され、導電性を有するバンプと、
前記バンプおよび前記絶縁層の上に設けられ、導電性を有する第2の電極ブロックとを備え、
前記第2の電極ブロックの下面は、第3の領域において、導電性を有する金属層を介して前記バンプと電気的に接続され、
前記第2の電極ブロックの下面は、第4の領域において、前記絶縁層に搭載され、
前記金属層と前記バンプとの間には、導電性を有する金属シートが設けられている半導体装置。 - 前記金属層は、前記第3の領域に接合されている請求項1に記載の半導体装置。
- 前記金属層は、前記第3の領域にメッキ成長されている請求項1に記載の半導体装置。
- 前記半導体素子は、レーザ光を出力する半導体レーザ素子であり、
前記第1の領域は、前記第1の電極ブロックの上面の端部であり、
前記第2の領域は、前記第1の領域をコの字状に囲んでいる請求項1〜3のいずれかに記載の半導体装置。 - 前記半導体素子は、60V以上の高電圧が入力されるパワー半導体素子であり、
前記第1の領域は、前記第1の電極ブロックの上面の中央部であり、
前記第2の領域は、前記第1の領域の全周囲を囲んでいる請求項1〜3のいずれかに記載の半導体装置。 - 前記第1の領域の前記第1の電極ブロックの上面は、前記第2の領域の前記第1の電極の上面よりも低く、
前記第2の電極ブロックの下面は平面である請求項1〜5のいずれかに記載の半導体装置。 - 前記第1の電極ブロックの上面は平面であり、
前記第3の領域の前記第2の電極ブロックの下面は、前記第4の領域の前記第2の電極の下面よりも高い請求項1〜5のいずれかに記載の半導体装置。 - 前記金属シートの主な材料は金である請求項1〜7のいずれかに記載の半導体装置。
- 前記バンプの主な材料は金である請求項1〜8のいずれかに記載の半導体装置。
- 前記金属層の主な材料は金である請求項1〜9のいずれかに記載の半導体装置。
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CN112154580A (zh) * | 2018-05-21 | 2020-12-29 | 松下知识产权经营株式会社 | 半导体激光装置 |
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JP7228856B2 (ja) * | 2018-10-15 | 2023-02-27 | パナソニックIpマネジメント株式会社 | 高パワーレーザシステムにおける熱インタフェース材料のポンピングの対処のためのシステム及び方法 |
JP2021034654A (ja) * | 2019-08-28 | 2021-03-01 | パナソニックIpマネジメント株式会社 | レーザ装置 |
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EP4084241A4 (en) | 2019-12-23 | 2023-06-21 | Panasonic Intellectual Property Management Co., Ltd. | LASER DEVICE |
CN115039302A (zh) * | 2020-02-21 | 2022-09-09 | 松下控股株式会社 | 半导体激光装置 |
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US20230122836A1 (en) * | 2020-04-16 | 2023-04-20 | Sergey GULAK | Temperature regulating device assembly for a semiconductor laser |
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