JP6448388B2 - 電力用半導体装置 - Google Patents
電力用半導体装置 Download PDFInfo
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- JP6448388B2 JP6448388B2 JP2015012022A JP2015012022A JP6448388B2 JP 6448388 B2 JP6448388 B2 JP 6448388B2 JP 2015012022 A JP2015012022 A JP 2015012022A JP 2015012022 A JP2015012022 A JP 2015012022A JP 6448388 B2 JP6448388 B2 JP 6448388B2
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- 239000004065 semiconductor Substances 0.000 title claims description 107
- 239000000463 material Substances 0.000 claims description 31
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 238000003466 welding Methods 0.000 claims description 8
- 238000005219 brazing Methods 0.000 claims description 3
- 238000010273 cold forging Methods 0.000 claims description 3
- 238000005097 cold rolling Methods 0.000 claims description 3
- 229910002601 GaN Inorganic materials 0.000 claims description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 2
- 239000010432 diamond Substances 0.000 claims description 2
- 229910003460 diamond Inorganic materials 0.000 claims description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical group [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 2
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 22
- 238000004519 manufacturing process Methods 0.000 description 12
- 229920005989 resin Polymers 0.000 description 12
- 239000011347 resin Substances 0.000 description 12
- 239000000919 ceramic Substances 0.000 description 10
- 230000000694 effects Effects 0.000 description 10
- 238000000034 method Methods 0.000 description 10
- 238000007789 sealing Methods 0.000 description 9
- 229910000679 solder Inorganic materials 0.000 description 8
- 238000005304 joining Methods 0.000 description 5
- 238000003825 pressing Methods 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 239000004734 Polyphenylene sulfide Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000007772 electrode material Substances 0.000 description 3
- 238000001465 metallisation Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 229920000069 polyphenylene sulfide Polymers 0.000 description 3
- 238000004382 potting Methods 0.000 description 3
- 230000001737 promoting effect Effects 0.000 description 3
- 229910017944 Ag—Cu Inorganic materials 0.000 description 2
- 229920000106 Liquid crystal polymer Polymers 0.000 description 2
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007373 indentation Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910000789 Aluminium-silicon alloy Inorganic materials 0.000 description 1
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/0601—Structure
- H01L2224/0603—Bonding areas having different sizes, e.g. different heights or widths
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/36—Structure, shape, material or disposition of the strap connectors prior to the connecting process
- H01L2224/37—Structure, shape, material or disposition of the strap connectors prior to the connecting process of an individual strap connector
- H01L2224/37001—Core members of the connector
- H01L2224/37025—Plural core members
- H01L2224/3703—Stacked arrangements
- H01L2224/37032—Two-layer arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
- H01L2224/401—Disposition
- H01L2224/40135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/40137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
- H01L2224/40139—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate with an intermediate bond, e.g. continuous strap daisy chain
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/4847—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
- H01L2224/48472—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond the other connecting portion not on the bonding area also being a wedge bond, i.e. wedge-to-wedge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73221—Strap and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/84—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a strap connector
- H01L2224/8434—Bonding interfaces of the connector
- H01L2224/84345—Shape, e.g. interlocking features
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- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Description
。
本発明の実施の形態1による電力用半導体装置の概略構成を図1〜図3に示す。図1は断面図、図2は後述の封止樹脂を取り去って示す上面図、図3は同じく封止樹脂を取り去って示す斜視図である。これらの図に示すように、電力用半導体素子であるIGBT31(Insulated Gate Bipolar Transistor、例えば15mm×15mm×厚さ0.25mm)およびダイオード32(例えば13mm×15mm×厚さ0.25mm)には、表面電極312および322(AlSi合金製)が形成されており、セラミック基材23(例えば25mm×50mm×厚さ0.635mmのアルミナ)上に形成された基板電極21(Cu製厚さ0.4mm)上に、はんだ43(Sn−Ag−Cu、融点219℃)を用いてダイボンドされている。以降、基板電極21が形成されたセラミック基材23をセラミック基板と称する。IGBT31の表面電極312は例えばエミッタ電極であり、エミッタと外部を接続するために表面に形成されている。また、電力用半導体素子31や32の表面電極312、322と反対側は、別の主電極(以後裏面電極と称する)が形成されており、基板電極21に接合されている。IGBT31の裏面電極は、例えばコレクタ電極でありコレクタと外部を接続するためのものである。ダイオード32の表面電極322は例えばアノード電極であり、裏面電極はカソード電極である。ここでは、電力用半導体素子としてIGBTとダイオードで構成された電力用半導体装置を例にして説明するが、電力用半導体素子は、MOSFETなど他の電力用半導体素子であってもよい。本発明は、種々の電力用半導体素子の、基板電極と接続される側と反対側に形成されている表面電極と、この表面電極から電力用半導体装置の外部への配線のための配線板の接合についての発明である。
て信号回路を形成しており、外部端子612はケース上面に露出している。図1に示すように、ケースの内部はダイレクトポッティング封止樹脂7によって充填され、加熱硬化されて絶縁封止されている。
おり、特性不良は200μmとなっても発生しなかった。これは、表面電極配線板に形成した突起があることで、傾きが生じても接触状態に変化が少なく、突起がつぶれきるまで塑性変形が生じやすいことで接合面積の維持が可能であったためと考えられる。
図11は本発明の実施の形態2による電力用半導体装置の概略構成を示す側面断面図である。電力用半導体素子であるIGBT31(Insulated Gate Bipolar Transistor、15mm×15mm×厚さ0.25mm)およびダイオード32(13mm×15mm×厚さ0.25mm)には、表面電極312および322(Alシリコン合金製)が形成されており、ヒートスプレッダ24(Cu製40mm×25mm×厚さ2mm)上に、はんだ43(Sn−Ag−Cu、融点219℃)を用いてダイボンドされている。電力用半導体素子31であるIGBTの表面電極312、および電力用半導体素子32であるダイオード32の表面電極322に対向配置された表面電極配線板62が、超音波接合により表面電極312、322に接合されている。IGBT31のゲート電極などが、信号端子61のワイヤボンド端子611に対して、例えばAl製のボンディングワイヤ41によって接続されて信号回路を形成しており、外部端子614は外部に露出している。全体はトランスファモールド樹脂71によって絶縁封止されている。
Claims (6)
- 電力用半導体素子と、この電力用半導体素子の表面電極に対向して配置され、超音波接合により前記電力用半導体素子の表面電極と接合された表面電極配線板を備えた電力用半導体装置において、
前記表面電極配線板は、前記表面電極の材料の硬度と同じ硬度または前記表面電極の材料の硬度より小さい硬度の金属からなる緩衝層と、導電金属からなる導電層とのクラッド材であり、前記緩衝層側が前記表面電極と接合されており、前記表面電極との接合領域に、前記導電層の側が凹となり前記緩衝層の側が凸となる突起が前記接合領域の少なくとも周辺部に複数分散配置され、前記突起の部分で前記導電層が前記緩衝層に喰い込んでおり、かつ前記表面電極の側に前記導電層が露出していないことを特徴とする電力用半導体装置。 - 前記クラッド材は、冷間鍛造または圧延により形成、もしくは前記緩衝層と前記導電層の界面をろう付け、溶接、または圧接によって形成、されている部材であることを特徴とする請求項1に記載の電力用半導体装置。
- 前記突起の先端が球面であることを特徴とする請求項1または2に記載の電力用半導体装置。
- 前記突起の外形形状は、円錐または円柱であることを特徴とする請求項1または2に記載の電力用半導体装置。
- 前記電力用半導体素子はワイドバンドギャップ半導体により形成されていることを特徴とする請求項1から4のいずれか1項に記載の電力用半導体装置。
- 前記ワイドバンドギャップ半導体は、炭化珪素、窒化ガリウム系材料またはダイアモンドの半導体であることを特徴とする請求項5に記載の電力用半導体装置。
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JP6760127B2 (ja) * | 2017-02-24 | 2020-09-23 | 三菱電機株式会社 | 半導体装置、半導体装置の製造方法 |
JP6945418B2 (ja) * | 2017-10-24 | 2021-10-06 | 三菱電機株式会社 | 半導体装置および半導体装置の製造方法 |
JP7322054B2 (ja) * | 2018-10-09 | 2023-08-07 | ローム株式会社 | 半導体装置および半導体装置の製造方法 |
JP7387232B2 (ja) * | 2020-03-04 | 2023-11-28 | 三菱電機株式会社 | 半導体装置、電力変換装置、および半導体装置の製造方法 |
DE112022002788T5 (de) * | 2021-05-26 | 2024-04-11 | Mitsubishi Electric Corporation | Leistungshalbleiter-Vorrichtung und Stromrichter-Vorrichtung |
WO2023203688A1 (ja) * | 2022-04-20 | 2023-10-26 | 三菱電機株式会社 | 半導体装置および半導体装置の製造方法 |
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