WO2014059032A1 - Embedding thin chips in polymer - Google Patents

Embedding thin chips in polymer Download PDF

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Publication number
WO2014059032A1
WO2014059032A1 PCT/US2013/064152 US2013064152W WO2014059032A1 WO 2014059032 A1 WO2014059032 A1 WO 2014059032A1 US 2013064152 W US2013064152 W US 2013064152W WO 2014059032 A1 WO2014059032 A1 WO 2014059032A1
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WO
WIPO (PCT)
Prior art keywords
μιη
polymer
chip
conductive material
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2013/064152
Other languages
English (en)
French (fr)
Inventor
Conor Rafferty
Mitul Dalal
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MC10 Inc
Original Assignee
MC10 Inc
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Filing date
Publication date
Application filed by MC10 Inc filed Critical MC10 Inc
Priority to EP13845644.7A priority Critical patent/EP2907159A4/en
Priority to JP2015536868A priority patent/JP2016504751A/ja
Priority to CN201380052896.1A priority patent/CN104798196A/zh
Priority to KR1020157011793A priority patent/KR20150067302A/ko
Publication of WO2014059032A1 publication Critical patent/WO2014059032A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/688—Flexible insulating substrates
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/18—Printed circuits structurally associated with non-printed electric components
    • H05K1/189—Printed circuits structurally associated with non-printed electric components characterised by the use of flexible or folded printed circuits
    • H—ELECTRICITY
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    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
    • H10P72/7402—Wafer tapes, e.g. grinding or dicing support tapes
    • H—ELECTRICITY
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    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/611—Insulating or insulated package substrates; Interposers; Redistribution layers for connecting multiple chips together
    • H10W70/614—Insulating or insulated package substrates; Interposers; Redistribution layers for connecting multiple chips together the multiple chips being integrally enclosed
    • H—ELECTRICITY
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    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/63—Vias, e.g. via plugs
    • H10W70/635—Through-vias
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    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68—Shapes or dispositions thereof
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    • H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
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    • H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
    • H10W74/114—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations
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    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0277—Bendability or stretchability details
    • H05K1/0283—Stretchable printed circuits
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    • H05K1/00—Printed circuits
    • H05K1/18—Printed circuits structurally associated with non-printed electric components
    • H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in printed circuit boards [PCB], e.g. insert-mounted components [IMC]
    • H05K1/185—Printed circuits structurally associated with non-printed electric components associated with components mounted in printed circuit boards [PCB], e.g. insert-mounted components [IMC] associated with components encapsulated in the insulating substrate of the PCBs; associated with components incorporated in internal layers of multilayer circuit boards
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    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/14—Related to the order of processing steps
    • H05K2203/1461—Applying or finishing the circuit pattern after another process, e.g. after filling of vias with conductive paste, after making printed resistors
    • H05K2203/1469—Circuit made after mounting or encapsulation of the components
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    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
    • H10P72/7416—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
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    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
    • H10P72/744—Details of chemical or physical process used for separating the auxiliary support from a device or a wafer
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    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01—Manufacture or treatment
    • H10W70/05—Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers
    • H10W70/093—Connecting or disconnecting other interconnections thereto or therefrom, e.g. connecting bond wires or bumps
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    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/099—Connecting interconnections to insulating or insulated package substrates, interposers or redistribution layers
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    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/65—Shapes or dispositions of interconnections
    • H10W70/654—Top-view layouts
    • H10W70/655—Fan-out layouts
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    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68—Shapes or dispositions thereof
    • H10W70/682—Shapes or dispositions thereof comprising holes having chips therein
    • H—ELECTRICITY
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    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/019—Manufacture or treatment of bond pads
    • H10W72/01931—Manufacture or treatment of bond pads using blanket deposition
    • H10W72/01936—Manufacture or treatment of bond pads using blanket deposition in solid form, e.g. by using a powder or by laminating a foil
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    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/019—Manufacture or treatment of bond pads
    • H10W72/01951—Changing the shapes of bond pads
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    • H10W72/073—Connecting or disconnecting of die-attach connectors
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    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H10W72/07321—Aligning
    • H10W72/07323—Active alignment, e.g. using optical alignment using marks or sensors
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    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H10W72/07321—Aligning
    • H10W72/07327—Aligning involving guiding structures, e.g. spacers or supporting members
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    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/074—Connecting or disconnecting of anisotropic conductive adhesives
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    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/29—Bond pads specially adapted therefor
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    • H10W72/00—Interconnections or connectors in packages
    • H10W72/30—Die-attach connectors
    • H10W72/321—Structures or relative sizes of die-attach connectors
    • H10W72/325—Die-attach connectors having a filler embedded in a matrix
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    • H10W72/00—Interconnections or connectors in packages
    • H10W72/30—Die-attach connectors
    • H10W72/351—Materials of die-attach connectors
    • H10W72/352—Materials of die-attach connectors comprising metals or metalloids, e.g. solders
    • H—ELECTRICITY
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    • H10W72/00—Interconnections or connectors in packages
    • H10W72/30—Die-attach connectors
    • H10W72/351—Materials of die-attach connectors
    • H10W72/353—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics
    • H10W72/354—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics comprising polymers
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    • H10W72/921—Structures or relative sizes of bond pads
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    • H10W72/952—Materials of bond pads comprising metals or metalloids, e.g. PbSn, Ag or Cu
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    • H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
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    • H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/736—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked lead frame, conducting package substrate or heat sink

Definitions

  • PCBs printed circuit boards
  • Such processing using thick printed circuit boards are generally incompatible with chips that are thinned or have stretchable interconnects.
  • various examples described herein are directed generally to methods for embedding thin device islands, including IC chips, and/or stretchable interconnects in a flexible polymer.
  • Various examples described herein are also directed generally to apparatus and systems based on thin device islands, including IC chips, and/or stretchable interconnects embedded in flexible polymer.
  • an apparatus can include a substrate comprising a standoff well region.
  • the substrate can include a layer of a first conductive material disposed on a layer of a flexible polymer, and a patterned portion of the first conductive material comprises a standoff bordering a portion of exposed flexible polymer, thereby forming the standoff well region.
  • the apparatus can also include a thin chip disposed within the standoff well region on a portion of the exposed flexible polymer proximate to the standoff. The height of the standoff can be comparable to a height of the thin chip.
  • the apparatus can include an adhesive material disposed within the standoff well region at a portion of the exposed flexible polymer proximate to the standoff.
  • the thin chip can be disposed on the adhesive material proximate to the standoff.
  • the adhesive material can have a thickness of about 8 ⁇ , about 10 ⁇ , about 12 ⁇ , about 15 ⁇ , about 20 ⁇ , about 25 ⁇ , or about 30 ⁇ .
  • the adhesive material comprises a conductive adhesive or a non-conductive adhesive.
  • the patterned portion of the first conductive material can be formed using laser ablation or etching.
  • the flexible polymer can be a polyimide or a liquid crystal polymer.
  • the first conductive material includes copper, gold, aluminum, or some combination thereof.
  • the substrate can be a copper-clad polyimide.
  • the layer of flexible polymer can have a thickness of about 8 ⁇ , about 10 ⁇ , about 15 ⁇ , about 25 ⁇ , about 35 ⁇ , about 50 ⁇ , about 60 ⁇ , about 75 ⁇ , or about 85 ⁇
  • the layer of first conductive material can have a thickness of about 2 ⁇ , about 5 ⁇ , about 8 ⁇ , about 12 ⁇ , about 15 ⁇ , about 25 ⁇ , about 35 ⁇ , about 50 ⁇ , about 60 ⁇ , or about 70 ⁇ .
  • the thin chip can have a thickness of about 2 ⁇ , about 5 ⁇ , about 8 ⁇ , about 12 ⁇ , about 15 ⁇ , about 25 ⁇ , about 35 ⁇ , about 50 ⁇ , about 60 ⁇ , or about 70 ⁇ .
  • the thin chip can be a thinned chip.
  • the thinned chip can be formed from a chip that can be thinned using an etching process or a grinding process.
  • the thin chip can be disposed within the standoff well region such that the height of the standoff can be greater than or about equal to the height of the thin chip.
  • the thin chip can be disposed within the standoff well region such that the height of the standoff can be less than the height of the thin chip.
  • the thin chip can have a layer of first conductive material can have a thickness of about 2 ⁇ , about 5 ⁇ , about 8 ⁇ , about 12 ⁇ , about 15 ⁇ , about 25 ⁇ , about 35 ⁇ , about 50 ⁇ , about 60 ⁇ , or about 70 ⁇ .
  • the apparatus can also include a polymer sheet disposed over the substrate. At least one via can be formed through the polymer sheet.
  • the apparatus can also include a second conductive material disposed on a portion of the polymer sheet proximate to the at least one via, such that the second conductive material forms an electrical
  • the second conductive material can include titanium, tungsten, gold, nickel, chromium, or some combination thereof.
  • the standoff surrounds a portion of the thin chip. In another example, the standoff can completely surrounds the thin chip. In one example, a dielectric material can be disposed between the standoff and a portion of the thin chip.
  • At least one additional layer can be disposed on the first conductive material or on the flexible polymer, wherein the at least one additional layer positions the thin chip at a neutral mechanical plane of the apparatus.
  • a method for embedding thin chips can include providing a substrate comprising a standoff well region, wherein the substrate includes a layer of a first conductive material disposed on a layer of a flexible polymer.
  • the substrate can also include at least a portion of the first conductive material can be patterned to form a standoff bordering a portion of exposed flexible polymer, thereby forming the standoff well region.
  • the method can also include disposing a thin chip on a portion of the exposed flexible polymer proximate to the standoff such that a height of the standoff can be comparable to a height of the thin chip.
  • the method can also include disposing an adhesive material on a portion of the exposed flexible polymer proximate to the standoff, and disposing the thin chip on the adhesive material disposed on the portion of the exposed flexible polymer proximate to the standoff.
  • the height of the standoff can be greater than or about equal to a height of a thin chip.
  • the disposing step can also include disposing the thin chip on a portion of the flexible polymer proximate to the standoff such that the height of the standoff can be greater than or about equal to the height of the thin chip.
  • the thin chip can be a thinned chip, and the thinning a chip can be provided by an etching process or a grinding process.
  • the thinned chip can be disposed on a portion of the exposed flexible polymer proximate to the standoff such that a height of the standoff can be comparable to a height of the thinned chip.
  • the method can also include disposing a polymer sheet over the substrate and forming at least one via through the polymer sheet.
  • the method can further include disposing a conductive material on a portion of the second polymer sheet proximate to the at least one via, such that the conductive material forms an electrical communication with an electrical contact of the thin chip.
  • the method can further include disposing at least one additional layer on the first conductive material or on the flexible polymer, wherein the at least one additional layer positions the thin chip at a neutral mechanical plane of the apparatus.
  • an apparatus can include a substrate with a polymer well region.
  • the substrate can include a layer of a fiexible polymer disposed on a layer of a first conductive material.
  • the substrate can also include a cavity in at least a portion of the flexible polymer to form at least one polymer wall bordering a portion of exposed first conductive material, thereby forming the polymer well region.
  • the apparatus can also include a thin chip disposed within the polymer well region on at least a portion of the exposed first conductive material proximate to the at least one polymer wall.
  • the apparatus can also include an adhesive material disposed within the polymer well region on at least a portion of the exposed first conductive material proximate to the at least one polymer wall, wherein the thin chip can be disposed on the adhesive material proximate to the at least one polymer wall.
  • the adhesive material can have a thickness of about 8 ⁇ , about 10 ⁇ , about 12 ⁇ , about 15 ⁇ , about 20 ⁇ , about 25 ⁇ , or about 30 ⁇ .
  • the adhesive material can include a conductive adhesive or a non-conductive adhesive.
  • the cavity can be formed using laser ablation or etching.
  • the flexible polymer can be a polyimide or a liquid crystal polymer.
  • the first conductive material can include copper, gold, aluminum, or some combination thereof.
  • the substrate can include a copper-clad polyimide.
  • the layer of fiexible polymer can have a thickness of about 8 ⁇ , about 10 ⁇ , about 15 ⁇ , about 25 ⁇ , about 35 ⁇ , about 50 ⁇ , about 60 ⁇ , about 75 ⁇ , or about 85 ⁇ .
  • the layer of first conductive material can have a thickness of about 2 ⁇ , about 5 ⁇ , about 8 ⁇ , about 12 ⁇ , about 15 ⁇ , about 25 ⁇ , about 35 ⁇ , about 50 ⁇ m, about 60 ⁇ , or about 70 ⁇ .
  • the thin chip can have a thickness of about 2 ⁇ , about 5 ⁇ , about 8 ⁇ , about 12 ⁇ , about 15 ⁇ m, about 25 ⁇ , about 35 ⁇ , about 50 ⁇ m, about 60 ⁇ , or about 70 ⁇ .
  • the thin chip can be a thinned chip.
  • the thinned chip can be formed from a chip that can be thinned using an etching process or a grinding process.
  • the thin chip can be disposed within the polymer well region such that the height of the at least one polymer wall can be greater than or about equal to the height of the thin chip.
  • the thin chip can be disposed within the polymer well region such that the height of the at least one polymer wall can be less than the height of the thin chip.
  • the thin chip can have a layer of first conductive material can have a thickness of about 2 ⁇ , about 5 ⁇ , about 8 ⁇ , about 12 ⁇ , about 15 ⁇ , about 25 ⁇ , about 35 ⁇ , about 50 ⁇ , about 60 ⁇ , or about 70 ⁇ .
  • the apparatus can also include a polymer sheet disposed over the substrate.
  • the apparatus can further include at least one via formed through the polymer sheet, and a second conductive material disposed on a portion of the polymer sheet proximate to the at least one via, such that the second conductive material forms an electrical communication with an electrical contact of the thin chip.
  • the second conductive material can include titanium, tungsten, gold, nickel, chromium, or some combination thereof.
  • the at least one polymer wall can surround a portion of the thin chip.
  • the at least one polymer wall can completely surround the thin chip in another example.
  • a dielectric material can be disposed between the at least one polymer wall and a portion of the thin chip.
  • the apparatus can further include at least one additional layer disposed on the first conductive material or on the fiexible polymer, wherein the at least one additional layer positions the thin chip at a neutral mechanical plane of the apparatus.
  • the thin chip can be a thinned chip, and the thin chip can be thinned using an etching process or a grinding process, and disposed within the polymer well region on at least a portion of the exposed first conductive material proximate to the at least one polymer wall such that a height of the least one wall can be comparable to a height of the thinned chip.
  • a method for embedding thin chips can include providing a substrate comprising a polymer well region, the substrate comprising a layer of a flexible polymer and a layer of a first conductive material, the polymer well region comprising at least one polymer wall formed from a portion of the flexible polymer and a base region formed from at least a portion of the first conductive material, and disposing the thin chip within the polymer well region on a portion of the first conductive material proximate to the at least one polymer wall.
  • the method can also include disposing an adhesive material at the portion of the first conductive proximate to the at least one polymer wall, and disposing the thin chip on the adhesive material proximate to the at least one polymer wall.
  • the thin chip can be disposed within the polymer well region such that the height of the at least one polymer wall can be greater than or about equal to the height of the thin chip. In another example, the thin chip can be disposed within the polymer well region such that the height of the at least one polymer wall can be less than the height of the thin chip. In yet another example, thin chip can be disposed within the polymer well region such that the first conductive material can be in physical and electrical communication with the thin chip.
  • the method can further include disposing a polymer sheet over the substrate, forming at least one via through the polymer sheet, and disposing a second conductive material on a portion of the polymer sheet proximate to the at least one via, such that the second conductive material forms an electrical communication with an electrical contact of the thin chip.
  • the method can further include disposing at least one additional layer disposed on the first conductive material or on the flexible polymer, wherein the at least one additional layer positions the thin chip at a neutral mechanical plane of the apparatus.
  • an apparatus can include a flexible substrate including a well region.
  • the flexible substrate can include a polyimide or a liquid crystal polymer, and the flexible substrate can include a cavity forming a well region in the flexible substrate.
  • the apparatus can also include a thin chip disposed within the well region, wherein the height of at least one polymer wall of the well region can be comparable to a height of the thin chip.
  • the apparatus can further include a polymer adhesive material disposed in the well region in substantial contact with at least a portion of the thin chip.
  • the apparatus can also include a polymer sheet disposed over the flexible substrate and at least one via formed through the polymer sheet.
  • the apparatus can also include a conductive material disposed on a portion of the polymer sheet proximate to the at least one via, such that the second conductive material forms an electrical
  • the apparatus can also include at least one via formed through the polymer adhesive material, and a conductive material disposed on a portion of the polymer adhesive material proximate to the at least one via, such that the conductive material forms an electrical communication with an electrical contact of the thin chip.
  • an adhesive material can be disposed within the well region, wherein the thin chip can be disposed on the adhesive material.
  • the thin chip can be disposed within the well region such that the height of the at least one polymer wall can be greater than or about equal to the height of the thin chip.
  • the thin chip can be disposed within the well region such that the height of the at least one polymer wall can be less than the height of the thin chip.
  • a dielectric material can be disposed between the at least one polymer wall and a portion of the thin chip.
  • an apparatus can include: (A) a substrate including at least two standoff well regions, and (B) at least two thin chips.
  • the substrate comprises a layer of a first conductive material disposed on a layer of a flexible polymer, and a patterned portion of the first conductive material comprises at least two standoffs bordering portions of exposed flexible polymer, each of the standoffs forming at least one of the at least two standoff well regions.
  • Each of the at least two thin chips is disposed within a respective one of the at least two standoff well regions on a portion of the exposed flexible polymer proximate to the standoff of the respective one of the at least two standoff well regions.
  • the thickness of one of the at least two thin chips is greater than a thickness of another the at least two thin chips.
  • the height of the standoff is comparable to a height of one of the at least two thin chips.
  • an apparatus can include: (A) a substrate including at least one polymer well region and at least one standoff well region, and (B) at least two thin chips.
  • the substrate includes a layer of a flexible polymer disposed on a layer of a first conductive material, a cavity is formed in at least a portion of the flexible polymer to form at least one polymer wall bordering a portion of exposed first conductive material, thereby forming the polymer well region, and a patterned portion of the first conductive material comprises a standoff bordering a portion of exposed flexible polymer, thereby forming a standoff well region.
  • One of the at least two thin chips is disposed within the polymer well region on at least a portion of the exposed first conductive material proximate to the at least one polymer wall. Another of the at least two thin chips is disposed within the standoff well region on at least a portion of the exposed flexible polymer proximate to the standoff. A thickness of one of the at least two thin chips is greater than a thickness of another of the at least two thin chips.
  • FIG. 1 shows a cross sectional view of an example apparatus that includes a thin chip disposed in a well region, according to the principles described herein.
  • FIGs. 2A-2E show example configurations of well regions, according to the principles described herein.
  • FIGs. 3 A-3E illustrate an example manufacturing process for embedding a thin chip in standoff well region formed in an conductive layer, according to the principles described herein.
  • FIG. 4 shows a cross sectional view of an example apparatus that includes a thin chip disposed in a well region, according to the principles described herein.
  • FIGs. 5A-5E show example configurations of well regions, according to the principles described herein.
  • FIGs. 6A-6G illustrate an example manufacturing process based on a thin chip embedded in a polymer well region, according to the principles described herein.
  • FIG. 7A - 7D show an example thinning of a chip to generate a thinned chip, according to the principles described herein.
  • FIGs. 8A-8H illustrate example manufacturing processes that can be performed on an embedded thin chip, according to the principles described herein.
  • FIGs. 9A-9B show cross sectional views of example apparatus, where one apparatus includes a thin chip (FIG. 9A), and the other example apparatus includes a well region (FIG. 9A), according to the principles described herein.
  • FIGs. 10A-10B show cross sectional views of another example apparatus, where one apparatus includes a thin chip (10A), and the other example apparatus includes a well region (10B), according to the principles described herein.
  • FIG. 11 A shows cross sectional views of another example apparatus, where one apparatus includes multiple thin chips, and the other example apparatus includes multiple well regions, according to the principles described herein.
  • FIG. 1 IB shows cross sectional views of another example apparatus, where one apparatus includes multiple thin chips, and the other example apparatus includes multiple well regions, according to the principles described herein.
  • FIG. l lC shows cross sectional views of another example apparatus, where one apparatus includes multiple thin chips, and the other example apparatus includes multiple well regions, according to the principles described herein.
  • the term “includes” means includes but is not limited to, the term “including” means including but not limited to.
  • the term “based on” means based at least in part on.
  • the term “disposed on” or “disposed above” is defined to encompass “at least partially embedded in.”
  • any references to “top” surface and “bottom” surface are used primarily to indicate relative position, alignment and/or orientation of various elements/components with respect to the substrate and each other, and these terms do not necessarily indicate any particular frame of reference (e.g., a gravitational frame of reference).
  • reference to a “bottom” of a substrate or a layer does not necessarily require that the indicated surface or layer be facing a ground surface.
  • a system, apparatus and method described herein provides for embedding chips in well regions.
  • the well region can be generated as a standoff well region or a polymer well region, as described herein.
  • a "thin chip” refers to chips or other device islands that are formed to have thicknesses of about 5 microns, about 8 microns, about 10 microns or more, or that have been thinned to thicknesses of about 5 microns, about 8 microns, about 10 microns or more.
  • the chips (or other device islands) can be fabricated as thin as (or be thinned to) about 5 microns, about 8 microns, about 15 microns, about 20 microns, about 25 microns, 30 microns, 37.5 microns, 42 microns, 50 microns or more.
  • the chips can be fabricated as thin as (or be thinned to) about 60 microns, about 70 microns, 80 microns, about 90 microns, about 100 microns, about 120 microns, about 135 microns, or about 150 microns.
  • An example standoff well region can be formed in a substrate that includes a layer of a conductive material disposed on a layer of a flexible polymer. Portion of the conductive material can be patterned to create standoffs bordering a portion of exposed flexible polymer, forming the standoff well region.
  • a thin chip can be disposed within the standoff well region on a portion of the exposed flexible polymer proximate to the standoff. Based on the thickness of the thin chips herein, the height of the standoff is comparable to the height of the thin chip.
  • the thin chip can be disposed in the standoff well region such that the plane of the top surface of the thin chip is below the plane of the top surface of the standoff(s).
  • the thin chip can be disposed such that its top surface is disposed about 10 microns, about 20 microns, about 25 microns, about 30 microns, about 35 microns, about 40 microns, or about 45 microns below the top surface of the standoff(s).
  • the thin chip can be nestled in a thinned portion of the substrate such that its top surface is at the prescribed height below the standoff wall.
  • an adhesive can be disposed on the exposed portion of the flexible polymer prior to the thin chip being disposed in the standoff well region.
  • the adhesive can be a non-conductive (dielectric) adhesive that is configured to withstand the temperatures of further processing.
  • the adhesive can be a conductive adhesive or a non- conductive (dielectric) adhesive that is configured to withstand the temperatures of further processing.
  • the conductive adhesive can be used to establish electrical communication between the substrate and conductive contact pads on a surface of the thin chip. For example, a voltage may be applied to a conductive portion of the substrate and the conductive contact pads.
  • the electrical conductivity of the conductive adhesive can facilitate maintaining both the conductive portion of the substrate and the conductive contact pads at substantially the same voltage.
  • the electrical conductivity of the conductive adhesive can facilitate maintaining both the conductive portion of the substrate and the conductive contact pads at a ground potential.
  • the thin chip can be a portion of a Bluetooth® chip.
  • the adhesive may be a thermally conductive adhesive that is configured to withstand the temperatures of further processing.
  • the thermally conductive adhesive can be used to establish a thermal pathway between the substrate and the thin chip.
  • the thermal conductivity of the adhesive can be used to reduce or eliminate heating of the thin chip.
  • the thermally conductive adhesive can facilitate management of the temperature of a thin chip that is a heat sensitive chip or to a chip with a larger surface area.
  • the thin chip may be a Bluetooth® chip.
  • a coolant or other cooling technology such as but not limited to thermoelectric cooling
  • further processing can be performed on the apparatus including the thin chip disposed in the standoff well region.
  • an additional adhesive can be disposed over the thin chip to fill the void between the thin chip and the standoff of the standoff well region.
  • at least one additional sheet of a flexible polymer can be disposed on the apparatus or vias can be generated to establish an electrical communication with the thin chip, as described in greater detail below.
  • the principles described herein can be applied to rigid or flexible printed circuit boards.
  • the printed circuit boards are referred to herein as flex and/or PCB.
  • a PCB board or flex sheet that includes a metal clad polymer sheet can be patterned, including being etched, to generate at least one standoff well region in the metal layer that extends down to the polymer.
  • a thin chip is disposed in the standoff well region on the exposed portions of the polymer sheet of the flex board.
  • An adhesive can be placed above the nestled chip and a second flex sheet is placed above the polymer.
  • the sandwiched structure can be subjected to further processing to cause the adhesive to flow around at least a portion of the chip.
  • At least one via can be formed through the top flex board down to the chip, and filled with a conductive material, to provide electrical communication with the bond pads of the thin chip.
  • An example polymer well region according to the principles described herein can be formed in a layer of flexible polymer disposed on a layer of a conductive material.
  • a cavity can be formed in at least a portion of the flexible polymer to form the at least one polymer wall bordering a portion of the exposed first conductive material to form the polymer well region.
  • a thin chip can be disposed in the polymer well region on at least a portion of the exposed first conductive material proximate to the at least one polymer wall.
  • the height of the polymer wall may be comparable to the height of the thin chip.
  • the thin chip can be mounted in the polymer well region such that the level of the top surface of the thin chip is comparable to the top surface of the polymer wall.
  • the thin chip can be disposed in the polymer well region such that the plane of the top surface of the thin chip is below the plane of the top surface of the polymer wall.
  • the thin chip can be disposed such that its top surface is disposed about 10 microns, 20 microns, 25 microns, 30 microns, about 35 microns, 40 microns, or about 45 microns below the top surface of the polymer wall.
  • the thin chip can be nestled in a thinned portion of the substrate such that its top surface is at the prescribed height below the polymer wall.
  • an adhesive can be disposed on the exposed portion of the conductive material prior to the thin chip being disposed in the polymer well region.
  • the adhesive can be a conductive adhesive or a non-conductive (dielectric) adhesive that is configured to withstand the temperatures of further processing.
  • the conductive adhesive can be used to establish electrical communication between the conductive material of the substrate and conductive contact pads on the bottom surface of the thin chip.
  • further processing can be performed on the apparatus including the thin chip disposed in the polymer well region.
  • an additional adhesive can be disposed over the thin chip to fill the void between the thin chip and the polymer wall of the polymer well region.
  • At least one additional sheet of a flexible polymer can be disposed on the apparatus including the thin chip disposed in the polymer well region. Vias can be generated to establish an electrical communication with the thin chip, as described in greater detail below.
  • the additional sheet of a flexible polymer can include a layer of a conductive material, and can be disposed on the apparatus such that the side that includes the conductive material layer is directed away from the thin chip.
  • the conductive layer of the substrate and the conductive layer of the additional sheet would be located on the outside of the "sandwich" with the thin chip embedded within the sandwich. Vias can be generated through the conductive material layers and the flexible polymer layers as described herein to facilitate the electrical communication to the thin chip.
  • an embedded device formed according to the principles herein can be encapsulated using an encapsulant, such as but not limited to a polymer, to form an encapsulated device.
  • the encapsulated device can be placed on the skin to perform a measurement or other diagnostic or therapeutic procedure.
  • the embedded device and the encapsulated device are configured to withstand deformation in more than one direction (for example, in x, y and/or z-directions), torsion, compression, expansion, or other change in conformation.
  • the encapsulated structure can be placed on a surface, such as but not limited to skin or other tissue.
  • the encapsulated structure can be configured such that it conforms to a contour of the surface.
  • the flexible polymer and/or the encapsulant can be formed from the same polymer or polymeric material or different polymers or polymeric materials.
  • applicable polymers or polymeric materials include, but are not limited to, a polyimide, a polyethylene terephthalate (PET), or a polyurethane.
  • Other non- limiting examples of applicable polymers or polymeric materials include plastics, elastomers, thermoplastic elastomers, elastoplastics, thermostats, thermoplastics, acrylates, acetal polymers, biodegradable polymers, cellulosic polymers, fluoropolymers, nylons,
  • polyacrylonitrile polymers polyamide-imide polymers, polyarylates, polybenzimidazole, polybutylene, polycarbonate, polyesters, polyetherimide, polyethylene, polyethylene copolymers and modified polyethylenes, polyketones, poly(methyl methacrylate,
  • a polymer or polymeric material herein can be a DYMAX® polymer (Dymax Corporation, Torrington, CT).or other UV curable polymer.
  • a method of embedding chips inside rigid or flexible printed circuit boards is provided.
  • the method can be used to embed chips and/or other components, including but not limited to light emitting diodes (LEDs) or interconnects, inside polymers or polymeric materials.
  • the embedding process provides for protection of the embedded device against the environment and for connecting them to each other to form larger electronic circuits, including integrated electronic circuits.
  • the conductive material of any of the examples described herein can be but is not limited to a metal, a metal alloy, or other conductive material.
  • the metal or metal alloy of the coating may include but is not limited to aluminum or a transition metal (including copper, silver, gold, platinum, zinc, nickel, titanium, chromium, or palladium, or any combination thereof) and any applicable metal alloy, including alloys with carbon.
  • suitable conductive materials may include a semiconductor- based conductive material, including a silicon-based conductive material, indium tin oxide or other transparent conductive oxide, or Group III-IV conductor (including GaAs).
  • the layer of flexible polymer can have a thickness of about 8 ⁇ , about 10 ⁇ , about 15 ⁇ , about 25 ⁇ , about 35 ⁇ , about 50 ⁇ , about 60 ⁇ , about 75 ⁇ , about 85 ⁇ , about 100 ⁇ , about 125 ⁇ , about 150 ⁇ , about 175 ⁇ or about 200 ⁇ .
  • the layer of conductive material can have a thickness of about 2 ⁇ , about 5 ⁇ , about 8 ⁇ , about 12 ⁇ , about 15 ⁇ , about 25 ⁇ , about 35 ⁇ , about 50 ⁇ , about 60 ⁇ , or about 70 ⁇ .
  • the thin chip can have a thickness of about 2 ⁇ , about 5 ⁇ , about 8 ⁇ , about 12 ⁇ , about 15 ⁇ , about 25 ⁇ , about 35 ⁇ , about 50 ⁇ , about 60 ⁇ , about 70 ⁇ , about 85 ⁇ , about 100 ⁇ , or about 125 ⁇ .
  • the adhesive material can have a thickness of about 8 ⁇ , about 10 ⁇ , about 12 ⁇ , about 15 ⁇ , about 20 ⁇ , about 25 ⁇ , about 30 ⁇ , about 40 ⁇ , about 50 ⁇ , about 55 ⁇ , or more.
  • FIG. 1 is a cross sectional view of an example apparatus 100 that is formed from a thin chip 101 embedded in a well region 102.
  • the thin chip 101 can be a thinned chip.
  • the well region 102 is formed from standoffs 103 bordering exposed portions of a flexible polymer 104.
  • the standoff 103 forms a wall of the well region 102, thereby providing a standoff well region.
  • the thin chip 101 is disposed on the exposed portions of the flexible polymer 104 proximate to a standoff 103.
  • the standoff 103 can have a height 105 that is comparable to the height of the thin chip 101.
  • the thin chip 101 can be one or more passive electronic components and/or active electronic components.
  • components that can be embedded according to any of the principles described herein include a transistor, an amplifier, an antenna, a photodetector, a photodiode array, a display, a light-emitting device, a photovoltaic device, a sensor, a LED, a semiconductor laser array, an optical imaging system, a large-area electronic device, a logic gate array, a microprocessor, an integrated circuit, an electronic device, an optical device, an opto-electronic device, a mechanical device, a microelectromechanical device, a
  • nanoelectromechanical device a microfluidic device, a thermal device, a transmitter, a transceiver, or other device structures.
  • embedded devices according to the principles described herein can be formed by embedding a plurality of chips (or other device islands) and/or a plurality of the interconnects in the flexible polymer according to the principles herein.
  • the embedded device e.g., thin chip 101
  • the embedded device can be formed from an integrated device, or formed from a plurality of chips (or other device islands) interconnected by a plurality of
  • the thin chip 101 (including an integrated device or device island as described herein) can be made thinner than the thickness of the conductive coating on the flexible polymer layer 104 from which the standoffs 103 of the standoff well region 102 is created.
  • the conductive material coating can include, but is not limited to, metal traces or other metal coatings.
  • the standoff well region 102 can be formed in the conductive coating through, e.g., patterning the conductive material coating on a flexible polymer and etching through to the surface of the flexible polymer 104. The etch process might include to the removal of some surface portion of the flexible polymer 104 as well. In another example, the patterning may be performed with laser ablation or similar patterning process.
  • the chip (including any device island) can be disposed and fixed between walls of the conductive coating "well," creating features above the polymer that are roughly the same height as the walls of the standoff well region.
  • the height of the standoff 105 can be greater than or less than the height of the thin chip 101.
  • the standoff well 102 can be formed such that the positioned chip or other device island is shorter than or approximately equal to the well height 104. In other examples, the well 102 can be formed such that the positioned the thin chip 101 (including a device island and/or an interconnect) is taller than the height of the walls of the well.
  • the standoffs 103 of the standoff well region 103 can be about 80%, about 90%>, about, 100%, about 110%, about 120%, about 140%, or about 150% of the thickness of the thin chip 101 (including a device island and/or interconnect). In other examples, the standoffs 103 of the standoff well region 103 can be about twice the thickness of the thin chip 101 or other device island and/or interconnect.
  • FIGs. 2A-2E show non-limiting examples of different conformations of the standoff well region.
  • the standoff well region 102 (including the standoffs 103) can have a square shape, a rectangular shape, a rounded or other donut shape, or any other polygonal shape, such that a chip or other device island and/or interconnect can be disposed therein.
  • FIG. 2D shows a non-limiting example standoff well region (including the standoffs) that is fabricated to not completely surround the thin chip (including a device island and/or the interconnect).
  • the standoff well region 102 borders three sides of the thin chip 101.
  • the standoff well region (including the standoffs) is fabricated to border portions of the sides of the thin chip 101 (including a device island and/or the interconnect, with some gaps in portions of the standoffs of the standoff well regions.
  • an adhesive can be caused to flow around the thin chip 101 (including any other device island and/or interconnect).
  • the adhesive can be caused to flow using a heat-treatment process.
  • the heat-treatment process can be carried out at temperatures that vary from about 60°C to about 250°C.
  • the stacked layers, including the device islands and/or interconnects and any adhesive layer between the flexible polymer sheets, can be positioned between two metal plates and brought up to temperature to cause the adhesive to flow around the device islands and/or interconnects.
  • the embedded device is configured such that an embedded serpentine interconnect retains substantial range of motion and stretchability within the plane of the embedded device.
  • the embedded device is configured such that an embedded serpentine interconnect retains substantial range of motion such that portions of it can rotate out of the plane to provide increased stretchability.
  • interconnects of other configurations including zig-zag, wavy, or any other corrugated form of interconnect, can be embedded according to the principles described herein.
  • metal traces and accordingly the well wall height 105, can be typically 36 ⁇ ("1 oz. copper”), 18 ⁇ ("1/2 oz. copper”), 9 ⁇ ("1/4 oz. copper”) or 5 ⁇ .
  • Printed circuit boards specify copper thickness in ounces. This represents the thickness of 1 ounce of copper rolled out to an area of 1 square foot. The thickness of 1 oz. of copper is 1.4 mils or 35.56 microns.
  • the thin chips 101 can be thinned to about 25 ⁇ to be more suitable for 1 oz. copper traces (which determines the height of the standoff s). In an example, the thin chips 101 (including any other device islands and/or interconnects) can be thinned to 10 ⁇ to be suitable for 1 ⁇ 2 oz. copper traces (which determines the well wall or standoff height).
  • some margin can be left between the thin chip and the standoff for disposing an adhesion layer, which is either dispensed on the flexible polymer layer 104 prior to placement of the thin chip 101 (including any other device island and/or interconnects)), or which is pre-adhered to the thin chips (including any other device islands and/or
  • an additional layer of conductive material may be added to the metallization on the chip or other device island.
  • Some amount of metallization is generally provided at selected portions of the thin chip 101 (including any other device island and/or interconnects) to facilitate creating an electrical contact to the functional capability of the thin chip (including any other device island and/or interconnects).
  • This metallization can be about 1 ⁇ to about 2 ⁇ thick.
  • the metallization is made of aluminum.
  • Laser drilling may be used to create channels through the flexible polymer and the adhesive material to create access to the metallization of the thin chip 101 or other device island within the embedded device structure. It can be difficult to control the laser drilling so that it stops at the metallization and does not remove the metallization or puncture the thin chip 101 or other device island. For example, about 5 ⁇ thickness of copper may be needed to terminate the laser drilling without the risk of removing the metallization or puncture.
  • Other techniques for creating the through channels, including etching can present similar risks of damage to the thin chip 101 or other device island.
  • the additional layer of conductive material added to the metallization on the thin chip 101 or other device island in this example provides extra thickness that can help to withstand the laser drilling.
  • the additional layer of conductive material (such as but not limited to added metal or metal stacks) is selected to have properties such as but not limited to adherence to the metallization of the chip or other device island; possible to be added to a thickness of about 2 ⁇ to about 7 ⁇ ; and/or the ability to support, and form an electrical communication with, the material that is
  • electroplated into via such as but not limited to a metal or metal alloy electroplating
  • the additional layer of conductive material (such as but not limited to the added metal) can be patterned and etched to form the standoffs 103.
  • the additional layer of conductive material may be added to the metallization on the chip or other device island in a variety of ways.
  • an under-bump metallization (UBM) suitable for copper micro-pillars could be carried out, without following through with the usual bumps that would be added, to generate the additional layer of conductive material on the metallization.
  • the UBM can be carried out based on, e.g., a multilayer chromium- copper system (Cr:Cr-Cu:Cu), titanium-nickel-vanadium system (Ti-Ni-V), titanium-copper system (Ti-Cu), titanium-tungsten-gold system (Ti-W-Au), or a nickel-gold system (Ni-Au).
  • the additional layer of conductive material may be added using electroplating on to the chip (or other device island) pads, after deposition of one or more suitable seed layers.
  • the electroplating can be caused to deposit only on the regions of the chip (or other device island) where the metallization exists.
  • conductive material can be added to larger portions of the chip (or other device island) and can be patterned and selectively removed (e.g., by etching) to be present only in the regions of the thin chip 101 (or other device island) with the original metallization to provide the additional layer of conductive material.
  • wafer bumping technology such as but not limited to an electroless nickel gold bump (ENiG) may be used facilitate electrical communication between the thin chip and external circuitry.
  • the ENiG is an electroless nickel bump with a thin gold layer.
  • the ENiG may be deposited onto a portion of the contact pads of the thin chip.
  • Process parameters that can be controlled in the formation of the ENiG from the electroless nickel solution include solution temperature, pH, stabilizer concentration, and aluminum pad size.
  • an embedded device formed according to the principles herein can be patterned or sliced to remove a portion of the flexible polymer that does not enclose a portion of the chip (or other device island) and/or the interconnect.
  • the embedded device can be patterned along the outline and/or contour of the device structure that is embedded within the flexible polymer. According to any of these examples, the embedded device can be patterned along the outline and/or contour of a serpentine interconnect of the embedded device.
  • the example systems, apparatus and methods described herein exploit chips or other device islands that are thinner than the surrounding standoffs or well walls to embed the chips or other device islands between flex board layers.
  • the surrounding standoffs or well walls are formed from metal traces.
  • the surrounding standoffs or well walls are formed from a process of writing an "ink" of conductive material, rather than from patterning and etching a coating layer.
  • the "ink" of conductive material can be written using an inkjet printer device or other device.
  • the example systems, apparatus and methods described herein provide for good adhesion of layers, conformability of embedding material around the chip or other device islands, elimination of air pockets, and prevention of ingress of liquids from the outside.
  • the example systems, apparatus and methods described herein provide for embedding thin chips or other device islands and/or stretchable interconnects to provide entire assemblies that are flexible.
  • the embedded device formed in the flexible polymer can be cut or otherwise formed into serpentine traces that can cause the entire assembly circuit to become even become stretchable, and not merely just flexible.
  • the example embedded devices according to the systems, apparatus and methods described herein present little or no possibility that a device component can "pop off or be otherwise detached, if the embedded structure is bent, or otherwise deformed.
  • the chip or other device island and/or the interconnect is disposed close to the neutral mechanical plane of the overall embedded device.
  • a functional layer herein can include the chips or other device islands and/or stretchable interconnects.
  • the flexible polymer can be formed of a material having a Young's modulus of about 3 GPa.
  • Non-limiting examples of such flexible polymers include a polyimide, such as but not limited to KAPTON® (available from DuPont, Delaware).
  • the chips 101 or other device islands and/or stretchable interconnects can be positioned such that the functional layer of the embedded device lies at a neutral mechanical plane (NMP) or neutral mechanical surface (NMS) of the system or apparatus.
  • the NMP or NMS lies at the position through the thickness of the device layers for the system or apparatus where any applied strains are minimized or substantially zero.
  • the functional layer of a system or apparatus according to the principles described herein includes a plurality of chips or other device islands and/or stretchable interconnects.
  • the location of the NMP or NMS can be changed relative to the layer structure of the system or apparatus through introduction of materials that aid in strain isolation in various layers of the system or apparatus.
  • polymer materials described herein can be introduced to serve as strain isolation materials.
  • the encapsulating material described hereinabove also can be used to position the NMP or NMS, e.g., by varying the encapsulating material type and/or layer thickness.
  • the thickness of encapsulating material disposed over the functional layers described herein may be modified ⁇ i.e., decreased or increased) to depress the functional layer relative to the overall system or apparatus thickness, which can vary the position of the NMP or NMS relative to the functional layer.
  • the type of encapsulating including any differences in the elastic (Young's) modulus of the encapsulating material.
  • At least a partial intermediate layer of a material capable of providing strain isolation can be disposed between the functional layer and the flexible substrate to position the NMP or NMS relative to the functional layer.
  • the intermediate layer can be formed from any of the polymer materials described herein, aerogel materials or any other material with applicable elastic mechanical properties.
  • the NMP or NMS can be positioned proximate to, coincident with or adjacent to a layer of the system or apparatus that includes the strain-sensitive component, such as but not limited to the functional layer.
  • the layer can be considered "strain-sensitive" if it is prone to fractures or its performance can be otherwise impaired in response to a level of applied strain.
  • the position of the NMP or NMS may still provide a mechanical benefit to the strain-sensitive component, such as substantially lowering the strain that would otherwise be exerted on the strain-sensitive component in the absence of strain isolation layers.
  • the NMS or NMP layer is considered proximate to the strain-sensitive component that provides at least 10%, 20%, 50% or 75% reduction in strain in the strain-sensitive component for a given applied strain, e.g., where the embedded device is deformed.
  • the encapsulating material and/or the intermediate layer material may be disposed at positions relative to the embedded device that are coincident with the strain-sensitive component.
  • portions of the encapsulating material and/or the intermediate layer material may be interspersed with portions of the strain- sensitive component, through the embedding layer, including at positions within the functional layer.
  • FIGs. 3A-3E show an example method for embedding a thinned chip in a standoff well region created in an conductive layer.
  • FIG. 3A provides a top view and cross-sectional view of a thin chip 301 disposed on a flexible polymer 304 and within a standoff well region 302 defined by standoffs 303.
  • the process can begin with a substrate formed as a metal coated flexible polymer sheet. The metal-coating can then be pattered to create the standoffs 303.
  • alignment marks can be formed in the metal layer during the pattering process to create the standoffs. The alignment marks can assist in properly registering the thin chip 101 within the standoff well region 302.
  • additional processing can be performed on the apparatus including the standoffs 303 and the thin chip 301 disposed within the standoff well region 302.
  • an adhesive 310 can be disposed over the thin chip.
  • the adhesive 310 can be caused to flow within the standoff well region and around the thin chip 301 as a result of a temperature treatment.
  • an additional polymer sheet 320 can be disposed over the apparatus including the thin chip 301.
  • the second flexible polymer 320 can be coupled with a second conductive layer 322.
  • the layers 320 and 322 are the same as the respective polymer layer 304 and conductive material layer 303 used in forming the standoff well region 302.
  • the polymer layer 320 and conductive material layer 303 can be different from polymer layer 304 and conductive material layer 303.
  • the respective layers can comprise different materials and/or have different thicknesses.
  • the adhesive polymer layer 310 can be DuPontTM PYRALUX® Bond-Ply.
  • the material of adhesive polymer layer 310 can be selected such that it is non-conductive (a dielectric) and capable of adhering flexible polymer layers.
  • the layered structure of FIG. 3B can be, heat treated and cured such that the adhesive layer 310 is caused to flow around the thin chip 301 and within the standoff well region 302.
  • standoffs 303 can be taller than the thin chip 301, and the second polymer layer 320 is not in contact with the thin chip 301 when the curing process is completed.
  • vias can be generated as channels through the top conductive layer 322, the top flexible polymer sheet 320, and the adhesive layer 310 to the thin chip 301. Once the vias have been created, the vias can be electroplated or filled through sputtering to create electrical vias 325 from the top conductive layer 322 to the electrical contact pad of the thin chip 301.
  • the conductive layer 322 can then be patterned.
  • An overlay 330 can be applied to the top conductive layer 322.
  • the overlay 330 is non-conductive.
  • the overlay can be patterned to expose the underlying metal and, as in this example, an additional tarnish-resistant metallization 335 can be added to the exposed metal 322, to protect the exposed metal 322 from reacting with oxygen, water and other components of the environment.
  • Such an example device can be between about 10 microns and about 100 microns in height.
  • the embedded device also can be encapsulated to increase the overall thickness of the multilayer embedded device.
  • FIG. 4 shows a cross sectional view of another example apparatus 400 that is formed from a thin chip 401 embedded in a polymer well region 402 according to the principles described herein.
  • the thin chip 401 can be a thinned chip.
  • the polymer well region 402 is formed from at least one polymer wall 403 bordering exposed portions of a layer of conductive material 404.
  • the polymer wall 403 forms a wall of the polymer well region 402, thereby providing the polymer well region.
  • the thin chip 401 is disposed on the exposed portions of the conductive material 404 proximate to a polymer wall 403.
  • the polymer wall 403 can have a height 405 that is comparable to the height of the thin chip 401. In other examples, polymer wall 403 can have a height 405 that is greater than or less than the height of the thin chip 401.
  • the thin chip 401 can be one or more passive electronic components and/or active electronic components.
  • components that can be embedded according to any of the principles described herein include a transistor, an amplifier, a photodetector, a photodiode array, a display, a light-emitting device, a photovoltaic device, a sensor, a LED, a
  • semiconductor laser array an optical imaging system, a large-area electronic device, a logic gate array, a microprocessor, an integrated circuit, an electronic device, an optical device, an opto-electronic device, a mechanical device, a microelectromechanical device, a
  • nanoelectromechanical device a microfluidic device, a thermal device, or other device structures.
  • embedded devices can be formed by embedding a plurality of chips (or other device islands) and/or a plurality of the interconnects in the polymer well region formed in the flexible polymer according to the principles herein.
  • the embedded device e.g., thin chip 401
  • the embedded device can be formed from an integrated device, or formed from a plurality of chips (or other device islands) interconnected by a plurality of interconnects, that is embedded according to the principles herein.
  • the thin chip 401 (including an integrated device or device island as described herein) can be made thinner than the thickness of the flexible polymer layer 404 from which the polymer walls 403 of the polymer well region 402 is created.
  • the conductive material coating can include, but is not limited to, metal traces or other metal coatings.
  • the polymer well region 402 can be formed in the flexible polymer through, e.g. , etching through to the surface of the conductive material 404, drilling, or laser ablation of the flexible polymer.
  • the chip (including any device island) can be disposed and fixed between walls of the polymer "well," creating features above the polymer that are roughly the same height as the walls of the polymer well region.
  • the height 405 of the polymer wall 403 can be greater than or less than the height of the thin chip 401.
  • the polymer well region 402 can be formed such that the positioned chip or other device island is shorter than or approximately equal to the well height 405. In other examples, the polymer well region 402 can be formed such that the positioned thin chip 401 (including a device island and/or an interconnect) is taller than the height of the walls of the well.
  • the polymer walls 403 of the polymer well region 403 can be about 80%, about 90%, about, 100%, about 110%, about 120%, about 140%, or about 150% of the thickness of the thin chip 401 (including a device island and/or interconnect). In other examples, the polymer walls 403 of the polymer well region 403 can be about twice the thickness of the thin chip 401 or other device island and/or interconnect.
  • an adhesive can be disposed on the exposed portion of the conductive material prior to the thin chip being disposed in the polymer well region.
  • the adhesive can be a conductive adhesive or a non-conductive (dielectric) adhesive that is configured to withstand the temperatures of further processing.
  • the conductive adhesive can be used to establish electrical communication between the conductive material of the substrate and conductive contact pads on a surface of the thin chip. For example, a voltage may be applied to the conductive material of the substrate and the conductive contact pads.
  • the electrical conductivity of the conductive adhesive can facilitate maintaining both the conductive material of the substrate and the conductive contact pads at substantially the same voltage.
  • the electrical conductivity of the conductive adhesive can facilitate maintaining both the conductive material of the substrate and the conductive contact pads at a ground potential.
  • the thin chip can be a portion of a Bluetooth® chip.
  • the adhesive may be a thermally conductive adhesive that is configured to withstand the temperatures of further processing.
  • the thermally conductive adhesive can be used to establish a thermal pathway between the substrate and the thin chip.
  • the thermal conductivity of the adhesive can be used to reduce or eliminate heating of the thin chip.
  • the thermally conductive adhesive can facilitate management of the temperature of a thin chip that is a heat sensitive chip or to a chip with a larger surface area.
  • the thin chip may be a Bluetooth® chip.
  • a coolant or other cooling technology such as but not limited to thermoelectric cooling
  • the polymer well region can have different conformations.
  • FIGs. 5A-5E show non-limiting examples of different conformations of the polymer well region.
  • the polymer well region 402 (including the polymer walls 403) can have a square shape, a rectangular shape, a rounded or other donut shape, or any other polygonal shape, such that a chip or other device island and/or interconnect can be disposed therein.
  • FIG. 5D shows a non-limiting example polymer well region (including the polymer walls) that is fabricated to not completely surround the thin chip (including a device island and/or the interconnect).
  • the polymer well region 402 borders three sides of the thin chip 401.
  • the thin chip 401 (including the polymer walls) is fabricated to border portions of the sides of the thin chip 401 (including a device island and/or the interconnect), with some gaps in portions of the polymers of the polymer well regions.
  • an adhesive can be caused to flow around the thin chip 401 (including any other device island and/or interconnect).
  • the adhesive can be caused to flow using a heat-treatment process.
  • the heat-treatment process can be carried out at temperatures that vary from about 60°C to about 250°C.
  • the stacked layers, including the device islands and/or interconnects and adhesive layer between the flexible polymer walls 103 can be positioned between two metal plates and brought up to temperature to cause the adhesive to flow around the device islands and/or interconnects.
  • FIGs. 6A - 6G illustrates an example process to fabricate an apparatus having a thin chip embedded within a polymer well region.
  • a cavity is generated in the flexible polymer layer down to a portion of the metal layer to create a polymer well region.
  • the thin chip is disposed within the polymer well region on a portion of the exposed conductive material.
  • an electrical communication can be established between the thin chip 401 and the conductive material of the substrate without use of vias if, for example, a conductive adhesive is disposed between the thin chip and the conductive material.
  • several of the apparatus according to this example can be stacked to create a multilayered device.
  • FIG. 6A shows a substrate that includes a flexible polymer layer 505 disposed on a layer of conductive material 506.
  • the polymer layer 505 can include, as non- limiting examples, a polyimide film such as but not limited to a DuPontTMKAPTON® film), or a liquid crystal polymer, with a thickness of about 20 ⁇ , about 30 ⁇ , about 35 ⁇ , about 45 ⁇ , about 55 ⁇ , about 66 ⁇ , or about 75 ⁇ .
  • the conductive material layer 506 can be a copper layer, and can be about 5 ⁇ , about 8 ⁇ , about 15 ⁇ , about 20 ⁇ , or about 30 ⁇ thick.
  • a cavity can be formed in the polymer layer 505 to generate a polymer well region.
  • the polymer layer 505 can be etched to expose the conductive material layer 506.
  • the cavity forms a polymer well region 507 including at least one polymer wall 504.
  • the polymer well region 507 can be generated by a cavity formed from laser ablation, drilling, patterning, and/or die cutting.
  • an adhesive 508 can be placed in the polymer well region 507 on a portion of the conductive material 506 prior to placement of the thin chip.
  • the adhesive 508 has low stress properties after being cured, so as to avoid cracking the die during the curing step.
  • the adhesive 508 can be a thermoset adhesive that can withstand the temperatures of later processing without re-flowing.
  • the adhesive 508 can be thermally and/or electrically conductive, or non-conductive (dielectric).
  • an electrically conductive adhesive can be used to establish an electrical connection between the die chip and a portion of the conductive material layer 506.
  • this electrically conductive adhesive material can be employed to establish a ground plane connection for the completed device between the underside of the thin chip and the conductive material layer 506.
  • the polymer layer 505 does not include a base conductive material layer 506.
  • the cavity generated to create the polymer wall 503 and the polymer well region 507 does not extend completely through the polymer layer 505. Rather, the cavity is created through a portion of the thickness of the polymer layer 505, into which the die 504 is later embedded.
  • This example can be used to provide embedded thin chips based on commercially-available polyimides or liquid crystal polymers, including the polymers of PCB boards, without need for the more expensive processing of a photo- definable spin-on polyimide.
  • the thin chip die 504 is placed into the polymer well region 507.
  • the adhesive 507 can be cured, securing the thin chip die 504 into the polymer well region 507.
  • an adhesive polymer layer 509 can be disposed over the thin chip die in the polymer well region 507, and caused to flow into the area around the thin chip die through thermal processing.
  • the adhesive 509 can be disposed between a polymer sheet 511 that includes a polymer layer 510 and the polymer well region 507.
  • the conductive material-clad polymer layer can be a metal-clad polyimide layer.
  • the layers 511 and 510 are the same as the respective polymer 505 and conductive material layer 506 used in forming the polymer well region 507.
  • the polymer layer 511 and conductive material layer 510 can be different from polymer layer 505 and conductive material layer 506.
  • the respective layers can comprise different materials and/or have different thicknesses.
  • the adhesive polymer layer 509 can be DuPontTM PYRALUX® Bond-Ply.
  • the material of adhesive polymer layer 509 can be selected such that it is non-conductive (a dielectric) and capable of adhering flexible polymer layers.
  • the adhesive polymer layer 509, polymer layer 51 1, and conductive material layer 510 can be pressed onto the polymer well region and die layer.
  • the layers can be coupled using vacuum lamination while being heated to a processing temperature.
  • the vacuum lamination process can cause the adhesive polymer 509 to flow around the thin chip die 504, filling the polymer well region 507.
  • the top metal layer 510 and/or the bottom conductive material layer 506 can be patterned and additional circuitry applied.
  • channels can be created through at least one of the polymer layers and conductive material layers.
  • channels can be created by laser ablation or reactive ion etching to form vias 512 from the top surface of the embedded system to the electrical contact pads of the thin chip die.
  • the channels can then be metalized, e.g., by electroplating, evaporation, and/or sputtering, to create electrical communication to circuitry within the thin chips of the embedded device.
  • metalized vias 512 can facilitate electrical communication with the thin chip die's bond-pads or other such electrical contacts.
  • the through channel can be created without previously adding additional conductive material to the die's bond-pads (a process referred to in the industry as bumping the die).
  • wafer bump technology is described
  • metals such as copper, titanium, titanium-tungsten alloy, gold, nickel, and chromium can be used to metalize the vias.
  • FIGs. 7 A - 7D show an example process that can be used to generate a thinned chip.
  • a chip having a thicker substrate is thinned prior to being embedded according to any of the systems, methods and apparatus described herein.
  • the chip dies can be thinned using a dicing before grinding (DBG) technique.
  • DBG dicing before grinding
  • the DBG technique allows the thinning of chips to about 5 ⁇ , about 8 ⁇ , about 10 ⁇ , about 15 ⁇ , about 25 ⁇ , about 35 ⁇ or about 50 ⁇ thickness.
  • the DBG technique also can reduce the risk of wafer bowing that can be seen in other grinding techniques. As illustrated in FIG.
  • the process can begin with the initial half die cut of the die with a dicing saw 705 or other dicing process.
  • the channels 701 in the wafer 700 by the die cut are cut to a depth 702 that is used as a guide to the desired thickness of the thinned die.
  • the wafer 700 can be turned over, and the dies are applied to a tape 703.
  • the tape 703 can hold the wafer in place as the backside of the wafer is ground to the desired thickness.
  • the grinding process reaches the channels 701 used to indicate a stop, the thinned chip dies 704 are released from the wafer 700.
  • a second layer of tape can be applied now-separate backs of the chips.
  • the thin chips can then be released from the tape 703 by exposing tap 703 to ultraviolet light.
  • the thinned chips 740 can be used in any of the processing described herein in connection with a thin chip, including thin chip 101 and thin chip 401.
  • FIGs. 8 A - 8H show non- limiting examples of manufacturing processes that may be applied to one or more of the methods, apparatus, or systems described herein.
  • the manufacturing processes described in Figs. 8 A - 8H can be performed on an embedded thin chip generated according to any of the systems, methods and apparatus described herein, including in Figs. 1 - 7D.
  • the processing can be applied to a polymer sheet 801 that includes a conductive metal coating on either side.
  • the conductive material layers 802 and 803 are 17.5 ⁇ copper layers on a 75 ⁇ thick KAPTON® substrate.
  • through channels are created from one conductive material layer to the second conductive material layer.
  • the through channels are electroplated to create electrical vias 804.
  • one or both of the conductive material layers 802 and 803 can be patterned.
  • an adhesive layer 806 is inserted between the patterned conductive material layers 802 and 803 and additional polymer sheets 806.
  • each of the polymer sheets 806 are metal-coated to create conductive layers 807.
  • one or both of the second polymer sheets 806 are not metal-coated.
  • the adhesive layers 805 are subjected to heat and pressure.
  • the heat and pressure cause the adhesive layers 805 to melt and flow into the gaps created by in the vias and the patterned conductive layers 802 and 803.
  • additional through channels are created and electroplated to connect the various conductive layers.
  • the vias one or more layers.
  • via 808 electrically connects the bottom conductive layer 807 to internal conductive layer 802
  • via 809 electrically connects bottom conductive layer 807 to internal conducive layer 803.
  • the now external conductive layers 807 can be patterned.
  • both external conductive layers 807 are patterned, but in another example, one or none of the external layers 807 can be patterned.
  • an overlay 810 can be applied to the external conductive layers 807.
  • the overlay 810 can also be patterned.
  • a corrosion and solder resistant metallization can be electro-deposited on any exposed copper traces.
  • FIGs. 9A and 9B show cross-sectional views of example apparatus 900 and 910 that can be used to form an embedded thin chip, where the thin chip 901 is embedded in a standoff well region 902.
  • the thin chip 901 may be a thinned chip.
  • Example apparatus 900 includes a flexible polymer 904 and well region 902 formed from standoffs 903 bordering exposed portions of the flexible polymer 904.
  • the standoff 103 forms a wall of the well region 902, thereby providing a standoff well region.
  • Example apparatus 910 includes thin chip 901 disposed on a substrate 908.
  • Substrate 908 may be a flexible polymer.
  • substrate 908 may include at least one layer of a conductive material, where the conductive material may be in communication with thin chip 901.
  • the process for forming the embedded thin chip includes coupling the apparatus 900 with the apparatus 910 such that the thin chip 901 is disposed proximate to the exposed portions of the flexible polymer 904 and proximate to a standoff 903.
  • the standoff 903 can have a height 905 that is comparable to the height 909 of the thin chip 901.
  • FIGs. 10A and 10B show cross-sectional views of example apparatus 1000 and 1010 that can be used to form an embedded thin chip, where the thin chip 1001 is embedded in a polymer well region 1002.
  • the thin chip 1001 may be a thinned chip.
  • Example apparatus 1000 includes a polymer well region 1002 formed from at least one polymer wall 1003 bordering exposed portions of a layer of conductive material 1004.
  • the polymer wall 1003 forms a wall of the polymer well regionl002.
  • the polymer wall 1003 forms a wall of the polymer well region 402, thereby providing the polymer well region.
  • Example apparatus 1010 includes thin chip 901 disposed on a substrate 908.
  • Substrate 1008 may be a flexible polymer.
  • substrate 1008 may include at least one layer of a conductive material, where the conductive material may be in
  • the process for forming the embedded thin chip includes coupling the apparatus 1000 with the apparatus 1010 such that the thin chip 1001 is disposed proximate to the exposed portions of the conductive material 1004 proximate to a polymer wall 1003.
  • the polymer wall 1003 can have a height 1005 that is comparable to the height of the thin chip 1001. In other examples, polymer wall 1003 can have a height 1005 that is greater than or less than the height of the thin chip 1001.
  • the thin chip 901 or 1001 can be one or more passive electronic components and/or active electronic components.
  • Non- limiting examples of components that can be embedded according to any of the principles described herein include a transistor, an amplifier, an antenna, a
  • photodetector a photodiode array, a display, a light-emitting device, a photovoltaic device, a sensor, a LED, a semiconductor laser array, an optical imaging system, a large-area electronic device, a logic gate array, a microprocessor, an integrated circuit, an electronic device, an optical device, an opto-electronic device, a mechanical device, a microelectromechanical device, a nanoelectromechanical device, a microfluidic device, a thermal device, a transmitter, a transceiver, or other device structures.
  • embedded devices according to the principles described herein can be formed by embedding a plurality of chips (or other device islands) and/or a plurality of the interconnects in the flexible polymer according to the principles herein.
  • the embedded device e.g., thin chip 101
  • the embedded device can be formed from an integrated device, or formed from a plurality of chips (or other device islands) interconnected by a plurality of
  • FIGs. 1 1A - 1 1C show non- limiting examples of configurations of apparatus that can be used to form an arrangement of thin chips embedded in well regions.
  • thin chip 1 101-Z? is at a height 1 109- ⁇ » above the substrate 1 108 that is greater than height 1 109-a of thin chip 1 101-a.
  • thin chip 1 101-a is at a height 1 109-a above the substrate 1 108 that is greater than height 1 109-c of thin chip 1 101-c.
  • the arrangement of embedded thin chips includes at least one thin chip embedded in a standoff well region and at least one thin chip embedded in a polymer well region.
  • FIG. 1 IB shows an example process for forming the embedded thin chips where example apparatus 1 100 is coupled with example apparatus 1 150.
  • thin chip 1101-6 is at a greater height 1109-6 above the substrate than height 1109-c of thin chip 1101-c, therefore, the adhesive material 1111-c extends to a greater distance into well region 1102-c than adhesive material 1111-6 extends into well region 1102-6.
  • FIG. l lC shows another example process for forming the embedded thin chips, where example apparatus 1160 that includes the thin chips is coupled with example apparatus 1170 that includes the well regions.
  • example apparatus 1150 one or more regions of the substrate 1108 may be thinned and the thin chip disposed in the thinned region.
  • the wall of each well region may extend to different heights from base 1180.
  • t a wall of well region 1102-c extends to a height 1125 which is less than the height 1135 of a wall of well region 1102-a.
  • well region 1102-a has walls of differing heights (height 1135 versus height 1145). As demonstrated in FIG.
  • the height of the wall of any given well region is configured based on the height of the thin chip to be embedded in the well region, and the degree of depression of the thin chip into the mounting substrate 1108.
  • the arrangement of embedded thin chips includes at least one thin chip embedded in a standoff well region and at least one thin chip embedded in a polymer well region.
  • the conductive material coating can include, but is not limited to, metal traces or other metal coatings.
  • Any standoff well region(s) in these embedded thin chip structures can be formed in the conductive coating through, e.g. , patterning the conductive material coating on a flexible polymer and etching through to the surface of the flexible polymer. The etch process might include to the removal of some surface portion of the flexible polymer as well. In another example, the patterning may be performed with laser ablation or similar patterning process.
  • the thin chip (including any device island) can be disposed and fixed between walls of the conductive coating "well," creating features above the polymer that are roughly the same height as the walls of the standoff well region.
  • the height of any of the standoffs can be greater than or less than the height of the thin chip 1101 -/.
  • the standoff well or polymer well can be formed such that the positioned thin chip (including any other device island) is shorter than or approximately equal to the well height.
  • the well region can be formed such that the positioned the thin chip 1101-/ (including a device island and/or an interconnect) is taller than the height of the walls of the well region.
  • the standoffs of any standoff well region of the embedded thin chip structure can be of any of about 80%, about 90%, about, 100%), about 110%>, about 120%), about 140%), or about 150% of the thickness of the thin chip 101 (including a device island and/or interconnect).
  • the standoffs of the standoff well region(s) can be about twice the thickness of the thin chip 101 (including any other device island and/or interconnect).
  • the example embedded thin chip structures of any of FIGs. 11A - 11C can include well regions configured according to any of the non-limiting examples of different conformations of the standoff well regions of FIGs. 2A-2E and/or any of the non-limiting examples of different conformations of the polymer well regions of FIGs. 5A-5E.
  • the height of the polymer wall or standoff may be comparable to the height of the thin chip.
  • the thin chip can be mounted in the polymer well region or standoff well region such that the level of the top surface of the thin chip is comparable to the top surface of the thin chip.
  • the thin chip is about 50 microns, about 60 microns, about 70 microns, 80 microns, about 90 microns, about 100 microns, about 120 microns, about 135 microns, or about 150 microns.
  • the thin chip can be disposed in the standoff well region such that the plane of the top surface of the thin chip is below the plane of the top surface of the standoff(s).
  • the thin chip can be disposed such that its top surface is disposed about 10 microns, 20 microns, 25 microns, 30 microns, about 35 microns, 40 microns, or about 45 microns below the top surface of the standoff(s).
  • the thin chip can be nestled in a thinned portion of the substrate such that its top surface is at the prescribed height below the standoff wall.
  • the thin chip can be disposed in the polymer well region such that the plane of the top surface of the thin chip is below the plane of the top surface of the polymer wall.
  • the thin chip can be disposed such that its top surface is disposed about 10 microns, 20 microns, 25 microns, 30 microns, about 35 microns, 40 microns, or about 45 microns below the top surface of the polymer wall.
  • the thin chip can be nestled in a thinned portion of the substrate such that its top surface is at the prescribed height below the polymer wall.
  • the technology described herein may be embodied as a method, of which at least one example has been provided.
  • the acts performed as part of the method may be ordered in any suitable way. Accordingly, embodiments may be constructed in which acts are performed in an order different than illustrated, which may include performing some acts simultaneously, even though shown as sequential acts in illustrative embodiments.
  • a reference to "A and/or B", when used in conjunction with open-ended language such as “comprising” can refer, in one embodiment, to A only (optionally including elements other than B); in another embodiment, to B only (optionally including elements other than A); in yet another embodiment, to both A and B (optionally including other elements); etc.
  • the phrase "at least one,” in reference to a list of one or more elements, should be understood to mean at least one element selected from any one or more of the elements in the list of elements, but not necessarily including at least one of each and every element specifically listed within the list of elements and not excluding any combinations of elements in the list of elements.
  • This definition also allows that elements may optionally be present other than the elements specifically identified within the list of elements to which the phrase "at least one" refers, whether related or unrelated to those elements specifically identified.
  • At least one of A and B can refer, in one embodiment, to at least one, optionally including more than one, A, with no B present (and optionally including elements other than B); in another embodiment, to at least one, optionally including more than one, B, with no A present (and optionally including elements other than A); in yet another embodiment, to at least one, optionally including more than one, A, and at least one, optionally including more than one, B (and optionally including other elements); etc

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Structure Of Printed Boards (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Wire Bonding (AREA)
  • Structures For Mounting Electric Components On Printed Circuit Boards (AREA)
PCT/US2013/064152 2012-10-09 2013-10-09 Embedding thin chips in polymer Ceased WO2014059032A1 (en)

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JP2015536868A JP2016504751A (ja) 2012-10-09 2013-10-09 ポリマー内への薄型チップの埋込み
CN201380052896.1A CN104798196A (zh) 2012-10-09 2013-10-09 在聚合物中嵌入薄芯
KR1020157011793A KR20150067302A (ko) 2012-10-09 2013-10-09 폴리머에 박형 칩들을 내장하는 방법

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Cited By (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9123614B2 (en) 2008-10-07 2015-09-01 Mc10, Inc. Methods and applications of non-planar imaging arrays
US9119533B2 (en) 2008-10-07 2015-09-01 Mc10, Inc. Systems, methods, and devices having stretchable integrated circuitry for sensing and delivering therapy
US9159635B2 (en) 2011-05-27 2015-10-13 Mc10, Inc. Flexible electronic structure
US9171794B2 (en) 2012-10-09 2015-10-27 Mc10, Inc. Embedding thin chips in polymer
US9168094B2 (en) 2012-07-05 2015-10-27 Mc10, Inc. Catheter device including flow sensing
US9186060B2 (en) 2008-10-07 2015-11-17 Mc10, Inc. Systems, methods and devices having stretchable integrated circuitry for sensing and delivering therapy
US9226402B2 (en) 2012-06-11 2015-12-29 Mc10, Inc. Strain isolation structures for stretchable electronics
US9247637B2 (en) 2012-06-11 2016-01-26 Mc10, Inc. Strain relief structures for stretchable interconnects
US9295842B2 (en) 2012-07-05 2016-03-29 Mc10, Inc. Catheter or guidewire device including flow sensing and use thereof
US9372123B2 (en) 2013-08-05 2016-06-21 Mc10, Inc. Flexible temperature sensor including conformable electronics
US9545216B2 (en) 2011-08-05 2017-01-17 Mc10, Inc. Catheter balloon methods and apparatus employing sensing elements
US9545285B2 (en) 2011-10-05 2017-01-17 Mc10, Inc. Cardiac catheter employing conformal electronics for mapping
US9579040B2 (en) 2011-09-01 2017-02-28 Mc10, Inc. Electronics for detection of a condition of tissue
USD781270S1 (en) 2014-10-15 2017-03-14 Mc10, Inc. Electronic device having antenna
US9629586B2 (en) 2008-10-07 2017-04-25 Mc10, Inc. Systems, methods, and devices using stretchable or flexible electronics for medical applications
US9655560B2 (en) 2008-10-07 2017-05-23 Mc10, Inc. Catheter balloon having stretchable integrated circuitry and sensor array
US9702839B2 (en) 2011-03-11 2017-07-11 Mc10, Inc. Integrated devices to facilitate quantitative assays and diagnostics
US9706647B2 (en) 2013-05-14 2017-07-11 Mc10, Inc. Conformal electronics including nested serpentine interconnects
US9723122B2 (en) 2009-10-01 2017-08-01 Mc10, Inc. Protective cases with integrated electronics
US9757050B2 (en) 2011-08-05 2017-09-12 Mc10, Inc. Catheter balloon employing force sensing elements
JP2017531919A (ja) * 2014-10-03 2017-10-26 エムシー１０ インコーポレイテッドＭｃ１０，Ｉｎｃ． 集積回路ダイが埋設された可撓性電子回路並びにその製造方法及び使用方法
US9810623B2 (en) 2014-03-12 2017-11-07 Mc10, Inc. Quantification of a change in assay
US9846829B2 (en) 2012-10-09 2017-12-19 Mc10, Inc. Conformal electronics integrated with apparel
US9894757B2 (en) 2008-10-07 2018-02-13 Mc10, Inc. Extremely stretchable electronics
US9949691B2 (en) 2013-11-22 2018-04-24 Mc10, Inc. Conformal sensor systems for sensing and analysis of cardiac activity
US9972649B2 (en) 2015-10-21 2018-05-15 Massachusetts Institute Of Technology Nanowire FET imaging system and related techniques
US10277386B2 (en) 2016-02-22 2019-04-30 Mc10, Inc. System, devices, and method for on-body data and power transmission
US10297572B2 (en) 2014-10-06 2019-05-21 Mc10, Inc. Discrete flexible interconnects for modules of integrated circuits
US10300371B2 (en) 2015-10-01 2019-05-28 Mc10, Inc. Method and system for interacting with a virtual environment
US10398343B2 (en) 2015-03-02 2019-09-03 Mc10, Inc. Perspiration sensor
US10410962B2 (en) 2014-01-06 2019-09-10 Mc10, Inc. Encapsulated conformal electronic systems and devices, and methods of making and using the same
US10447347B2 (en) 2016-08-12 2019-10-15 Mc10, Inc. Wireless charger and high speed data off-loader
US10467926B2 (en) 2013-10-07 2019-11-05 Mc10, Inc. Conformal sensor systems for sensing and analysis
US10477354B2 (en) 2015-02-20 2019-11-12 Mc10, Inc. Automated detection and configuration of wearable devices based on on-body status, location, and/or orientation
US10485118B2 (en) 2014-03-04 2019-11-19 Mc10, Inc. Multi-part flexible encapsulation housing for electronic devices and methods of making the same
US10532211B2 (en) 2015-10-05 2020-01-14 Mc10, Inc. Method and system for neuromodulation and stimulation
US10653332B2 (en) 2015-07-17 2020-05-19 Mc10, Inc. Conductive stiffener, method of making a conductive stiffener, and conductive adhesive and encapsulation layers
US10673280B2 (en) 2016-02-22 2020-06-02 Mc10, Inc. System, device, and method for coupled hub and sensor node on-body acquisition of sensor information
US10709384B2 (en) 2015-08-19 2020-07-14 Mc10, Inc. Wearable heat flux devices and methods of use
WO2020162935A1 (en) * 2019-02-06 2020-08-13 Wickersham Jill Anne Systems and methods for real-time item identification and sourcing
US11154235B2 (en) 2016-04-19 2021-10-26 Medidata Solutions, Inc. Method and system for measuring perspiration
US11538094B2 (en) * 2018-02-06 2022-12-27 James Pat Simmons Systems and methods for real-time item identification and sourcing
US11768262B2 (en) 2019-03-14 2023-09-26 Massachusetts Institute Of Technology Interface responsive to two or more sensor modalities

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2101975A2 (en) 2006-11-03 2009-09-23 Trustees of Tufts College Biopolymer sensor and method of manufacturing the same
WO2008127403A2 (en) 2006-11-03 2008-10-23 Trustees Of Tufts College Biopolymer optofluidic device and method of manufacturing the same
EP2650112B1 (en) 2006-11-03 2016-08-24 Trustees Of Tufts College Nanopatterned biopolymer optical device and method of manufacturing the same
WO2017185050A1 (en) * 2016-04-21 2017-10-26 Sensoria, Inc. Sensor assemblies; sensor-enabled garments and objects; devices and systems for data collection
FR2988223B1 (fr) * 2012-03-19 2016-09-02 Solarwell Dispositif emettant de la lumiere contenant des nanocristaux colloidaux semiconducteurs anisotropes aplatis et procede de fabrication de tels dispositifs
DE102012110358B4 (de) * 2012-10-30 2016-04-07 Leibniz-Institut für Neurobiologie Magdeburg Mikroelektrodenarray
US10840536B2 (en) * 2013-02-06 2020-11-17 The Board Of Trustees Of The University Of Illinois Stretchable electronic systems with containment chambers
US10492703B2 (en) * 2014-03-28 2019-12-03 Board Of Regents, The University Of Texas System Epidermal sensor system and process
FR3030112B1 (fr) * 2014-12-12 2018-02-02 Stmicroelectronics (Crolles 2) Sas Assemblage d'une puce de circuits integres et d'une plaque
US9633883B2 (en) 2015-03-20 2017-04-25 Rohinni, LLC Apparatus for transfer of semiconductor devices
US10264669B2 (en) * 2015-05-01 2019-04-16 Research Triangle Institute Flexible electronic assemblies with embedded electronic devices and methods for their fabrication
US10182284B2 (en) * 2015-06-11 2019-01-15 Facebook Technologies, Llc Connector assembly for detachable audio system
TWI592955B (zh) * 2015-06-25 2017-07-21 威華微機電股份有限公司 Embedded passive components and methods of mass production
TWI555044B (zh) * 2015-06-25 2016-10-21 威華微機電股份有限公司 A method for producing a passive element with a terminal electrode
WO2017052254A1 (ko) * 2015-09-23 2017-03-30 주식회사 아모그린텍 웨어러블 디바이스 및 그의 제조 방법
US10083888B2 (en) * 2015-11-19 2018-09-25 Advanced Semiconductor Engineering, Inc. Semiconductor device package
EP3206229B1 (en) 2016-02-09 2020-10-07 AT & S Austria Technologie & Systemtechnik Aktiengesellschaft Methods of manufacturing flexible electronic devices
WO2017156502A1 (en) * 2016-03-10 2017-09-14 Carnegie Mellon University Integrated electronic device with flexible and stretchable substrate
JP6761592B2 (ja) * 2016-03-31 2020-09-30 大日本印刷株式会社 電子デバイス及びその製造方法
JP6191808B1 (ja) * 2016-04-20 2017-09-06 株式会社村田製作所 多層基板および電子機器
WO2017183394A1 (ja) * 2016-04-20 2017-10-26 株式会社村田製作所 多層基板および電子機器
US9930773B2 (en) 2016-06-21 2018-03-27 Microsoft Technology Licensing, Llc Flexible interconnect
US10815121B2 (en) * 2016-07-12 2020-10-27 Hewlett-Packard Development Company, L.P. Composite wafers
US10141215B2 (en) 2016-11-03 2018-11-27 Rohinni, LLC Compliant needle for direct transfer of semiconductor devices
US10504767B2 (en) 2016-11-23 2019-12-10 Rohinni, LLC Direct transfer apparatus for a pattern array of semiconductor device die
US10471545B2 (en) 2016-11-23 2019-11-12 Rohinni, LLC Top-side laser for direct transfer of semiconductor devices
US10445634B2 (en) 2016-12-14 2019-10-15 Trackonomy Systems, Inc. Fabricating multifunction adhesive product for ubiquitous realtime tracking
US11138490B2 (en) 2016-12-14 2021-10-05 Ajay Khoche Hierarchical combination of distributed statistics in a monitoring network
US10885420B2 (en) 2016-12-14 2021-01-05 Ajay Khoche Package sealing tape types with varied transducer sampling densities
US10902310B2 (en) 2016-12-14 2021-01-26 Trackonomy Systems, Inc. Wireless communications and transducer based event detection platform
US11003978B2 (en) 2016-12-14 2021-05-11 Ajay Khoche Programmable network node roles in hierarchical communications network
US10062588B2 (en) 2017-01-18 2018-08-28 Rohinni, LLC Flexible support substrate for transfer of semiconductor devices
US10410905B1 (en) 2018-05-12 2019-09-10 Rohinni, LLC Method and apparatus for direct transfer of multiple semiconductor devices
JP7322072B2 (ja) * 2018-05-31 2023-08-07 セント・ジュード・メディカル，カーディオロジー・ディヴィジョン，インコーポレイテッド 柔軟回路を有するカテーテルハンドル
US11094571B2 (en) 2018-09-28 2021-08-17 Rohinni, LLC Apparatus to increase transferspeed of semiconductor devices with micro-adjustment
JP2020150168A (ja) * 2019-03-14 2020-09-17 キオクシア株式会社 半導体装置および半導体装置の製造方法
WO2020247354A1 (en) 2019-06-05 2020-12-10 Trackonomy Systems, Inc. Temperature monitoring in cold supply chains
US11317516B2 (en) 2019-09-13 2022-04-26 Trackonomy Systems, Inc. Roll-to-roll additive manufacturing method and device
US11464451B1 (en) 2020-03-11 2022-10-11 Huxley Medical, Inc. Patch for improved biometric data capture and related processes
US11123011B1 (en) 2020-03-23 2021-09-21 Nix, Inc. Wearable systems, devices, and methods for measurement and analysis of body fluids
US11864058B1 (en) 2020-10-04 2024-01-02 Trackonomy Systems, Inc. Flexible tracking device for cables and equipment
WO2022020822A1 (en) 2020-07-24 2022-01-27 Trackonomy Systems, Inc. Tearing to turn on wireless node with multiple cutouts for re-use
US12124904B2 (en) 2020-09-05 2024-10-22 Trackonomy Systems, Inc. Wireless sensor device with an attachable external sensor probe
US12047841B2 (en) 2020-09-21 2024-07-23 Trackonomy Systems, Inc. Detecting special events and strategically important areas in an IoT tracking system
EP4205053A4 (en) 2020-10-03 2024-09-18 Trackonomy Systems, Inc. SYSTEM AND METHOD FOR GENERATING ENVIRONMENTAL PROFILES TO DETERMINE ASSET LOGISTICS
US11527148B1 (en) 2020-10-04 2022-12-13 Trackonomy Systems, Inc. Augmented reality for guiding users to assets in IOT applications
US12051916B1 (en) 2020-10-05 2024-07-30 Trackonomy Systems, Inc. Method for recharging wireless IOT devices and system thereof
US11869994B2 (en) 2020-12-12 2024-01-09 Trackonomy Systems, Inc. Flexible solar-powered wireless communication device
US12225638B2 (en) * 2021-02-12 2025-02-11 William Marsh Rice University Integrated microheater array for efficient and localized heating of magnetic nanoparticles at microwave frequencies
US12178552B1 (en) 2021-06-04 2024-12-31 Huxley Medical, Inc. Systems and processes for detecting oxygen saturation and compensating for skin tone variation
US11660005B1 (en) 2021-06-04 2023-05-30 Huxley Medical, Inc. Processing and analyzing biometric data
US12279853B1 (en) 2021-08-24 2025-04-22 Huxley Medical, Inc. Photoplethysmography sensors and processes
US12114980B1 (en) 2021-08-24 2024-10-15 Huxley Medical, Inc. Photoplethysmography sensors and processes
US20240112969A1 (en) * 2022-08-31 2024-04-04 Industrial Technology Research Institute In-mold electronics device
CN115939089A (zh) * 2022-11-25 2023-04-07 珠海越亚半导体股份有限公司 封装基板及其制作方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050067293A1 (en) * 2003-09-29 2005-03-31 Toshiki Naito Producing method of flexible wired circuit board
US20080211087A1 (en) * 2006-12-20 2008-09-04 Infineon Technologies Ag Chip module and method for producing a chip module
US20080237840A1 (en) * 2007-03-26 2008-10-02 Endicott Interconnect Technologies, Inc. Flexible circuit electronic package with standoffs
US20100002402A1 (en) * 2008-03-05 2010-01-07 Rogers John A Stretchable and Foldable Electronic Devices
US20110051384A1 (en) * 2006-02-02 2011-03-03 Arno Kriechbaum Printed circuit board element having at least one component embedded therein and method for embedding at least one component in a printed circuit board element
US20120074546A1 (en) * 2010-09-24 2012-03-29 Chooi Mei Chong Multi-chip Semiconductor Packages and Assembly Thereof
US20120091594A1 (en) * 2010-10-18 2012-04-19 Christof Landesberger Method of Producing a Chip Package, and Chip Package

Family Cites Families (784)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3716861A (en) 1971-03-22 1973-02-13 J Root Serpentine antenna mounted on a rotatable capacitive coupler
US3805427A (en) 1972-12-18 1974-04-23 H Epstein Medical alarm bracelet
US3838240A (en) 1973-04-04 1974-09-24 Rca Corp Bonding tool and method of bonding therewith
US4058418A (en) 1974-04-01 1977-11-15 Solarex Corporation Fabrication of thin film solar cells utilizing epitaxial deposition onto a liquid surface to obtain lateral growth
US3949410A (en) 1975-01-23 1976-04-06 International Business Machines Corporation Jet nozzle structure for electrohydrodynamic droplet formation and ink jet printing system therewith
CA1105565A (en) 1978-09-12 1981-07-21 Kaufman (John G.) Hospital Products Ltd. Electrosurgical electrode
US4278474A (en) 1980-03-25 1981-07-14 The United States Of America As Represented By The United States Department Of Energy Device for conversion of electromagnetic radiation into electrical current
US4416288A (en) 1980-08-14 1983-11-22 The Regents Of The University Of California Apparatus and method for reconstructing subsurface electrophysiological patterns
US4487162A (en) 1980-11-25 1984-12-11 Cann Gordon L Magnetoplasmadynamic apparatus for the separation and deposition of materials
US4471003A (en) 1980-11-25 1984-09-11 Cann Gordon L Magnetoplasmadynamic apparatus and process for the separation and deposition of materials
US4392451A (en) 1980-12-31 1983-07-12 The Boeing Company Apparatus for forming thin-film heterojunction solar cells employing materials selected from the class of I-III-VI2 chalcopyrite compounds
US4658153A (en) 1984-06-18 1987-04-14 Amnon Brosh Planar coil apparatus for providing a frequency output vs. position
US4761335A (en) 1985-03-07 1988-08-02 National Starch And Chemical Corporation Alpha-particle protection of semiconductor devices
US4855017A (en) 1985-05-03 1989-08-08 Texas Instruments Incorporated Trench etch process for a single-wafer RIE dry etch reactor
US4784720A (en) 1985-05-03 1988-11-15 Texas Instruments Incorporated Trench etch process for a single-wafer RIE dry etch reactor
US4663828A (en) 1985-10-11 1987-05-12 Energy Conversion Devices, Inc. Process and apparatus for continuous production of lightweight arrays of photovoltaic cells
US4763275A (en) 1986-02-20 1988-08-09 Carlin John A Force accumulating device for sporting protective gear
US4918811A (en) * 1986-09-26 1990-04-24 General Electric Company Multichip integrated circuit packaging method
US4766670A (en) 1987-02-02 1988-08-30 International Business Machines Corporation Full panel electronic packaging structure and method of making same
JPH01223064A (ja) 1988-03-02 1989-09-06 Hitachi Ltd 駆動輪空転防止装置
US5439575A (en) 1988-06-30 1995-08-08 Board Of Trustees Of The University Of Illinois Hybrid method for depositing semi-conductive materials
CA1292572C (en) 1988-10-25 1991-11-26 Fernando C. Lebron Cardiac mapping system simulator
US4911169A (en) 1989-03-13 1990-03-27 Ferrari Robert K Biomedical electrode with limb band
US5178957A (en) 1989-05-02 1993-01-12 Minnesota Mining And Manufacturing Company Noble metal-polymer composites and flexible thin-film conductors prepared therefrom
US5250903A (en) 1989-05-31 1993-10-05 Amoco Corporation Method and apparatus using oscillatory magnetic field to determine state of charge of an electrolytic storage cell
US5086785A (en) 1989-08-10 1992-02-11 Abrams/Gentille Entertainment Inc. Angular displacement sensors
US5059424A (en) 1989-11-01 1991-10-22 Ndm Acquisition Corp. Hydrogel wound dressing product
US5118400A (en) 1990-01-29 1992-06-02 Spire Corporation Method of making biocompatible electrodes
US5108819A (en) 1990-02-14 1992-04-28 Eli Lilly And Company Thin film electrical component
EP0455067B1 (de) 1990-05-03 2003-02-26 F. Hoffmann-La Roche Ag Mikrooptischer Sensor
US5147519A (en) 1990-07-27 1992-09-15 Motorola, Inc. Method of manufacturing elastomers containing fine line conductors
US5206749A (en) 1990-12-31 1993-04-27 Kopin Corporation Liquid crystal display having essentially single crystal transistors pixels and driving circuits
US5475514A (en) 1990-12-31 1995-12-12 Kopin Corporation Transferred single crystal arrayed devices including a light shield for projection displays
US6387052B1 (en) 1991-01-29 2002-05-14 Edwards Lifesciences Corporation Thermodilution catheter having a safe, flexible heating element
US5560974A (en) 1991-03-22 1996-10-01 Kappler Safety Group, Inc. Breathable non-woven composite barrier fabric and fabrication process
AU654552B2 (en) 1991-04-05 1994-11-10 Medtronic, Inc. Subcutaneous multi-electrode sensing system
US5204144A (en) 1991-05-10 1993-04-20 Celestech, Inc. Method for plasma deposition on apertured substrates
JPH0587511A (ja) 1991-07-24 1993-04-06 Yamaha Corp 曲げ検出装置
US5246003A (en) 1991-08-28 1993-09-21 Nellcor Incorporated Disposable pulse oximeter sensor
US5272375A (en) 1991-12-26 1993-12-21 E. I. Du Pont De Nemours And Company Electronic assembly with optimum heat dissipation
US5539935A (en) 1992-01-10 1996-07-30 Rush, Iii; Gus A. Sports helmet
US5313094A (en) 1992-01-28 1994-05-17 International Business Machines Corportion Thermal dissipation of integrated circuits using diamond paths
US5491651A (en) 1992-05-15 1996-02-13 Key, Idea Development Flexible wearable computer
US5306917A (en) 1992-08-12 1994-04-26 Reliant Laser Corporation Electro-optical system for measuring and analyzing accumulated short-wave and long-wave ultraviolet radiation exposure
US5549108A (en) 1992-09-25 1996-08-27 Ep Technologies, Inc. Cardiac mapping and ablation systems
US5309910A (en) 1992-09-25 1994-05-10 Ep Technologies, Inc. Cardiac mapping and ablation systems
US5471982A (en) 1992-09-29 1995-12-05 Ep Technologies, Inc. Cardiac mapping and ablation systems
US5687737A (en) 1992-10-09 1997-11-18 Washington University Computerized three-dimensional cardiac mapping with interactive visual displays
DE4241045C1 (de) 1992-12-05 1994-05-26 Bosch Gmbh Robert Verfahren zum anisotropen Ätzen von Silicium
JPH08505303A (ja) 1992-12-31 1996-06-11 アルザ・コーポレーション フレキシブル手段を有するイオン導入薬物投与装置
US6233491B1 (en) 1993-03-16 2001-05-15 Ep Technologies, Inc. Cardiac mapping and ablation systems
GB2276326B (en) 1993-03-23 1996-10-09 Mclaughlin James A Profiled biosignal electrode device
US5617870A (en) 1993-04-29 1997-04-08 Scimed Life Systems, Inc. Intravascular flow measurement system
US5477088A (en) 1993-05-12 1995-12-19 Rockett; Angus A. Multi-phase back contacts for CIS solar cells
US5326521A (en) 1993-05-26 1994-07-05 East Douglas A Method for preparing silicone mold tooling
US5860974A (en) 1993-07-01 1999-01-19 Boston Scientific Corporation Heart ablation catheter with expandable electrode and method of coupling energy to an electrode on a catheter shaft
CA2170402C (en) 1993-08-24 2000-07-18 Michael P. Allen Novel disposable electronic assay device
US5837546A (en) 1993-08-24 1998-11-17 Metrika, Inc. Electronic assay device and method
US5591941A (en) 1993-10-28 1997-01-07 International Business Machines Corporation Solder ball interconnected assembly
US5793107A (en) 1993-10-29 1998-08-11 Vlsi Technology, Inc. Polysilicon pillar heat sinks for semiconductor on insulator circuits
US5360987A (en) 1993-11-17 1994-11-01 At&T Bell Laboratories Semiconductor photodiode device with isolation region
US5427096A (en) 1993-11-19 1995-06-27 Cmc Assemblers, Inc. Water-degradable electrode
US5904545A (en) 1993-12-17 1999-05-18 The Regents Of The University Of California Apparatus for fabricating self-assembling microstructures
US5545291A (en) 1993-12-17 1996-08-13 The Regents Of The University Of California Method for fabricating self-assembling microstructures
US5824186A (en) 1993-12-17 1998-10-20 The Regents Of The University Of California Method and apparatus for fabricating self-assembling microstructures
US6864570B2 (en) 1993-12-17 2005-03-08 The Regents Of The University Of California Method and apparatus for fabricating self-assembling microstructures
US5514242A (en) 1993-12-30 1996-05-07 Saint Gobain/Norton Industrial Ceramics Corporation Method of forming a heat-sinked electronic component
EP0676814B1 (en) 1994-04-06 2006-03-22 Denso Corporation Process of producing trench semiconductor device
US5434751A (en) 1994-04-11 1995-07-18 Martin Marietta Corporation Reworkable high density interconnect structure incorporating a release layer
US5753529A (en) 1994-05-05 1998-05-19 Siliconix Incorporated Surface mount and flip chip technology for total integrated circuit isolation
US5454270A (en) 1994-06-06 1995-10-03 Motorola, Inc. Hermetically sealed pressure sensor and method thereof
US5567975A (en) 1994-06-30 1996-10-22 Santa Barbara Research Center Group II-VI radiation detector for simultaneous visible and IR detection
US5525815A (en) 1994-10-03 1996-06-11 General Electric Company Diamond film structure with high thermal conductivity
US5767578A (en) 1994-10-12 1998-06-16 Siliconix Incorporated Surface mount and flip chip technology with diamond film passivation for total integated circuit isolation
US5625471A (en) 1994-11-02 1997-04-29 Litel Instruments Dual plate holographic imaging technique and masks
US6266623B1 (en) 1994-11-21 2001-07-24 Phatrat Technology, Inc. Sport monitoring apparatus for determining loft time, speed, power absorbed and other factors such as height
US5686697A (en) 1995-01-06 1997-11-11 Metatech Corporation Electrical circuit suspension system
US6176842B1 (en) 1995-03-08 2001-01-23 Ekos Corporation Ultrasound assembly for use with light activated drugs
US5917534A (en) 1995-06-29 1999-06-29 Eastman Kodak Company Light-emitting diode arrays with integrated photodetectors formed as a monolithic device and methods and apparatus for using same
US6639578B1 (en) 1995-07-20 2003-10-28 E Ink Corporation Flexible displays
US6459418B1 (en) 1995-07-20 2002-10-01 E Ink Corporation Displays combining active and non-active inks
US6023638A (en) 1995-07-28 2000-02-08 Scimed Life Systems, Inc. System and method for conducting electrophysiological testing using high-voltage energy pulses to stun tissue
US5872051A (en) 1995-08-02 1999-02-16 International Business Machines Corporation Process for transferring material to semiconductor chip conductive pads using a transfer substrate
GB9611437D0 (en) 1995-08-03 1996-08-07 Secr Defence Biomaterial
DE69524247T2 (de) 1995-08-04 2002-08-08 International Business Machines Corp., Armonk Stempel für lithographie-verfahren
US6518168B1 (en) 1995-08-18 2003-02-11 President And Fellows Of Harvard College Self-assembled monolayer directed patterning of surfaces
US5612513A (en) 1995-09-19 1997-03-18 Micron Communications, Inc. Article and method of manufacturing an enclosed electrical circuit using an encapsulant
US5772905A (en) 1995-11-15 1998-06-30 Regents Of The University Of Minnesota Nanoimprint lithography
NL1001890C2 (nl) 1995-12-13 1997-06-17 Cordis Europ Catheter met plaatvormige elektrode-reeks.
WO1997024059A1 (en) 1995-12-28 1997-07-10 Cygnus, Inc. Continuous monitoring of physiological analyte
GB9601289D0 (en) 1996-01-23 1996-03-27 Nimbus Manufacturing Uk Limite Manufacture of optical data storage disc
SE9600334D0 (sv) 1996-01-30 1996-01-30 Radi Medical Systems Combined flow, pressure and temperature sensor
JP3957803B2 (ja) 1996-02-22 2007-08-15 キヤノン株式会社 光電変換装置
US5880369A (en) 1996-03-15 1999-03-09 Analog Devices, Inc. Micromachined device with enhanced dimensional control
US5790151A (en) 1996-03-27 1998-08-04 Imaging Technology International Corp. Ink jet printhead and method of making
US6628987B1 (en) 2000-09-26 2003-09-30 Medtronic, Inc. Method and system for sensing cardiac contractions during vagal stimulation-induced cardiopalegia
US5968839A (en) 1996-05-13 1999-10-19 Metrika, Inc. Method and device producing a predetermined distribution of detectable change in assays
US6784023B2 (en) 1996-05-20 2004-08-31 Micron Technology, Inc. Method of fabrication of stacked semiconductor devices
US5978972A (en) 1996-06-14 1999-11-09 Johns Hopkins University Helmet system including at least three accelerometers and mass memory and method for recording in real-time orthogonal acceleration data of a head
DE19643550A1 (de) 1996-10-24 1998-05-14 Leybold Systems Gmbh Lichttransparentes, Wärmestrahlung reflektierendes Schichtensystem
US5691245A (en) 1996-10-28 1997-11-25 He Holdings, Inc. Methods of forming two-sided HDMI interconnect structures
US5817008A (en) 1996-10-31 1998-10-06 Spacelabs Medical, Inc. Conformal pulse oximetry sensor and monitor
GB9704737D0 (en) 1997-03-07 1997-04-23 Optel Instr Limited Biological measurement system
US6980196B1 (en) 1997-03-18 2005-12-27 Massachusetts Institute Of Technology Printable electronic display
US5998291A (en) 1997-04-07 1999-12-07 Raytheon Company Attachment method for assembly of high density multiple interconnect structures
US6063046A (en) 1997-04-11 2000-05-16 Allum; John H. Method and apparatus for the diagnosis and rehabilitation of balance disorders
AUPO662497A0 (en) 1997-05-05 1997-05-29 Cardiac Crc Nominees Pty Limited An epicardial electrode array
US5907189A (en) 1997-05-29 1999-05-25 Lsi Logic Corporation Conformal diamond coating for thermal improvement of electronic packages
DE19829309B4 (de) 1997-07-04 2008-02-07 Fuji Electric Co., Ltd., Kawasaki Verfahren zur Herstellung eines thermischen Oxidfilms auf Siliciumcarbid
US6024702A (en) 1997-09-03 2000-02-15 Pmt Corporation Implantable electrode manufactured with flexible printed circuit
US5928001A (en) 1997-09-08 1999-07-27 Motorola, Inc. Surface mountable flexible interconnect
FR2769640B1 (fr) 1997-10-15 1999-12-17 Sgs Thomson Microelectronics Amelioration de la resistance mecanique d'une tranche de silicium monocristallin
US6730047B2 (en) 1997-10-24 2004-05-04 Creative Sports Technologies, Inc. Head gear including a data augmentation unit for detecting head motion and providing feedback relating to the head motion
DE19748173A1 (de) 1997-10-31 1999-05-06 Ahlers Horst Dr Ing Habil Elektronikbauelemente einschließlich Sensoren
US6171730B1 (en) 1997-11-07 2001-01-09 Canon Kabushiki Kaisha Exposure method and exposure apparatus
US20050096513A1 (en) 1997-11-11 2005-05-05 Irvine Sensors Corporation Wearable biomonitor with flexible thinned integrated circuit
US6009632A (en) 1997-12-12 2000-01-04 Mercury Diagnostics, Inc. Alignment system for optical analyte testing meter components
ES2219788T3 (es) 1997-12-31 2004-12-01 Societe D'applications Electroniques Pour La Physique, La Science Et L'industrie Captador capacitativo de la medicion de la humedad y procedimiento de fabricacion de estos captadores.
JP3219043B2 (ja) 1998-01-07 2001-10-15 日本電気株式会社 半導体装置のパッケージ方法および半導体装置
US5955781A (en) 1998-01-13 1999-09-21 International Business Machines Corporation Embedded thermal conductors for semiconductor chips
US6479890B1 (en) 1998-01-22 2002-11-12 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Semiconductor microsystem embedded in flexible foil
GB9805214D0 (en) 1998-03-11 1998-05-06 Univ Glasgow Cell adhesion
US6316283B1 (en) 1998-03-25 2001-11-13 Asulab Sa Batch manufacturing method for photovoltaic cells
WO1999052588A1 (en) 1998-04-14 1999-10-21 Koninklijke Philips Electronics N.V. Electro-stimulation apparatus
US6181551B1 (en) 1998-04-15 2001-01-30 Dell Usa, L.P. Pin soldering enhancement and method
US6338727B1 (en) 1998-08-13 2002-01-15 Alsius Corporation Indwelling heat exchange catheter and method of using same
US5979972A (en) 1998-04-29 1999-11-09 Fleetwood Folding Trailers, Inc. Folding trailer with integral cargo platform
US6057212A (en) 1998-05-04 2000-05-02 International Business Machines Corporation Method for making bonded metal back-plane substrates
KR100275730B1 (ko) 1998-05-11 2000-12-15 윤종용 트렌치 소자분리 방법
JP3511895B2 (ja) 1998-06-05 2004-03-29 株式会社村田製作所 セラミック多層基板の製造方法
US6322963B1 (en) 1998-06-15 2001-11-27 Biosensor Systems Design., Inc. Sensor for analyte detection
US7209787B2 (en) 1998-08-05 2007-04-24 Bioneuronics Corporation Apparatus and method for closed-loop intracranial stimulation for optimal control of neurological disease
US6239980B1 (en) * 1998-08-31 2001-05-29 General Electric Company Multimodule interconnect structure and process
US6148127A (en) 1998-09-23 2000-11-14 Lucent Technologies Inc. Tunable dispersion compensator and optical system comprising same
AU1722700A (en) 1998-11-16 2000-06-05 Cambridge Scientific, Inc. Biopolymer-based holographic optical element
US6097984A (en) 1998-11-25 2000-08-01 Medtronic, Inc. System and method of stimulation for treating gastro-esophageal reflux disease
IT1310000B1 (it) 1999-01-26 2002-02-05 Consiglio Nazionale Ricerche Sensore a fibra ottica e trasduttore fotocromico per fotometria eradiometria e relativo metodo
US6236883B1 (en) 1999-02-03 2001-05-22 The Trustees Of Columbia University In The City Of New York Methods and systems for localizing reentrant circuits from electrogram features
US6850312B2 (en) 1999-03-16 2005-02-01 Alien Technology Corporation Apparatuses and methods for flexible displays
US6281038B1 (en) 1999-02-05 2001-08-28 Alien Technology Corporation Methods for forming assemblies
KR100686784B1 (ko) 1999-02-05 2007-02-23 알리엔 테크놀로지 코포레이션 어셈블리를 형성하는 방법 및 장치
US6683663B1 (en) 1999-02-05 2004-01-27 Alien Technology Corporation Web fabrication of devices
US6274508B1 (en) 1999-02-05 2001-08-14 Alien Technology Corporation Apparatuses and methods used in forming assemblies
US6555408B1 (en) 1999-02-05 2003-04-29 Alien Technology Corporation Methods for transferring elements from a template to a substrate
US6380729B1 (en) 1999-02-16 2002-04-30 Alien Technology Corporation Testing integrated circuit dice
US6291896B1 (en) 1999-02-16 2001-09-18 Alien Technology Corporation Functionally symmetric integrated circuit die
US6606079B1 (en) 1999-02-16 2003-08-12 Alien Technology Corporation Pixel integrated circuit
US6752505B2 (en) 1999-02-23 2004-06-22 Solid State Opto Limited Light redirecting films and film systems
US6334960B1 (en) 1999-03-11 2002-01-01 Board Of Regents, The University Of Texas System Step and flash imprint lithography
US6468638B2 (en) 1999-03-16 2002-10-22 Alien Technology Corporation Web process interconnect in electronic assemblies
US6316278B1 (en) 1999-03-16 2001-11-13 Alien Technology Corporation Methods for fabricating a multiple modular assembly
KR100434537B1 (ko) 1999-03-31 2004-06-05 삼성전자주식회사 다공질 실리콘 혹은 다공질 산화 실리콘을 이용한 두꺼운 희생층을 가진 다층 구조 웨이퍼 및 그 제조방법
US6433401B1 (en) 1999-04-06 2002-08-13 Analog Devices Imi, Inc. Microfabricated structures with trench-isolation using bonded-substrates and cavities
EE04249B1 (et) 1999-04-21 2004-02-16 Asper O� Meetod biopolümeermaatriksi lugemiseks ja fluorestsentsdetektor
US6276775B1 (en) 1999-04-29 2001-08-21 Hewlett-Packard Company Variable drop mass inkjet drop generator
US6225149B1 (en) 1999-05-03 2001-05-01 Feng Yuan Gan Methods to fabricate thin film transistors and circuits
US6150602A (en) 1999-05-25 2000-11-21 Hughes Electronics Corporation Large area solar cell extended life interconnect
US7426409B2 (en) 1999-06-25 2008-09-16 Board Of Regents, The University Of Texas System Method and apparatus for detecting vulnerable atherosclerotic plaque
JP3419348B2 (ja) 1999-06-28 2003-06-23 日本電気株式会社 集積回路素子接続用ケーブルおよびその製造方法
US20020082515A1 (en) 1999-07-01 2002-06-27 Campbell Thomas H. Thermography catheter
JP4948726B2 (ja) 1999-07-21 2012-06-06 イー インク コーポレイション 電子ディスプレイを制御するための電子回路素子を作製する好適な方法
US6517995B1 (en) 1999-09-14 2003-02-11 Massachusetts Institute Of Technology Fabrication of finely featured devices by liquid embossing
GB2355116B (en) 1999-10-08 2003-10-08 Nokia Mobile Phones Ltd An antenna assembly and method of construction
AU1348901A (en) 1999-10-28 2001-05-08 P1 Diamond, Inc. Improved diamond thermal management components
US6527964B1 (en) 1999-11-02 2003-03-04 Alien Technology Corporation Methods and apparatuses for improved flow in performing fluidic self assembly
US6623579B1 (en) 1999-11-02 2003-09-23 Alien Technology Corporation Methods and apparatus for fluidic self assembly
US6420266B1 (en) 1999-11-02 2002-07-16 Alien Technology Corporation Methods for creating elements of predetermined shape and apparatuses using these elements
US6479395B1 (en) 1999-11-02 2002-11-12 Alien Technology Corporation Methods for forming openings in a substrate and apparatuses with these openings and methods for creating assemblies with openings
US6451191B1 (en) 1999-11-18 2002-09-17 3M Innovative Properties Company Film based addressable programmable electronic matrix articles and methods of manufacturing and using the same
US6641860B1 (en) 2000-01-03 2003-11-04 T-Ink, L.L.C. Method of manufacturing printed circuit boards
US6220916B1 (en) 2000-01-21 2001-04-24 Philip D. Bart Toy band with pre-recorded message
US6533905B2 (en) 2000-01-24 2003-03-18 Tini Alloy Company Method for sputtering tini shape-memory alloys
US6489178B2 (en) * 2000-01-26 2002-12-03 Texas Instruments Incorporated Method of fabricating a molded package for micromechanical devices
WO2001066833A1 (en) 2000-03-06 2001-09-13 University Of Connecticut Apparatus and method for fabrication of photonic crystals
JP4360015B2 (ja) 2000-03-17 2009-11-11 セイコーエプソン株式会社 有機ｅｌ表示体の製造方法、半導体素子の配置方法、半導体装置の製造方法
ATE280976T1 (de) * 2000-03-24 2004-11-15 Infineon Technologies Ag Gehäuse für biometrische sensorchips
NZ522128A (en) 2000-03-31 2003-08-29 Rita Medical Systems Inc Tissue biopsy and treatment apparatus and method
US7252664B2 (en) 2000-05-12 2007-08-07 Cardima, Inc. System and method for multi-channel RF energy delivery with coagulum reduction
EP1296833A4 (en) 2000-05-24 2006-01-18 Silverbrook Res Pty Ltd ENCODER ENCODER FOR PRINTED PAGES
US6360615B1 (en) 2000-06-06 2002-03-26 Technoskin, Llc Wearable effect-emitting strain gauge device
WO2001097276A1 (fr) 2000-06-14 2001-12-20 Sekisui Chemical Co., Ltd. Film muni de microparticules, film pour connexions electriques, et procede de depot de microparticules
US6787052B1 (en) 2000-06-19 2004-09-07 Vladimir Vaganov Method for fabricating microstructures with deep anisotropic etching of thick silicon wafers
EP1226470A2 (en) 2000-06-22 2002-07-31 Koninklijke Philips Electronics N.V. Method of forming optical images, mask for use in this method, method of manufacturing a device using this method, and apparatus for carrying out this method
US6403397B1 (en) 2000-06-28 2002-06-11 Agere Systems Guardian Corp. Process for fabricating organic semiconductor device involving selective patterning
AU2001271799A1 (en) 2000-06-30 2002-01-14 President And Fellows Of Harvard College Electric microcontact printing method and apparatus
US6723576B2 (en) 2000-06-30 2004-04-20 Seiko Epson Corporation Disposing method for semiconductor elements
JP4120184B2 (ja) 2000-06-30 2008-07-16 セイコーエプソン株式会社 実装用微小構造体および光伝送装置
US6511478B1 (en) 2000-06-30 2003-01-28 Scimed Life Systems, Inc. Medical probe with reduced number of temperature sensor wires
TW548406B (en) 2000-07-03 2003-08-21 Matsushita Electric Works Ltd Capacitance type moisture sensor and method of producing the same
DE60107688D1 (de) 2000-07-21 2005-01-13 Micro Managed Photons As Roski Bandlücken strukturen für oberflächenplasmonenpolariton
US6938783B2 (en) * 2000-07-26 2005-09-06 Amerasia International Technology, Inc. Carrier tape
DE10037715A1 (de) 2000-08-02 2002-02-14 Endress Hauser Gmbh Co Vorrichtung zur Messung des Füllstands eines Füllguts in einem Behälter
US6836744B1 (en) 2000-08-18 2004-12-28 Fareid A. Asphahani Portable system for analyzing human gait
US6780696B1 (en) 2000-09-12 2004-08-24 Alien Technology Corporation Method and apparatus for self-assembly of functional blocks on a substrate facilitated by electrode pairs
JP2002092984A (ja) 2000-09-18 2002-03-29 Hitachi Maxell Ltd スタンパ及びその製造方法、並びにプラスチック基板
US6980184B1 (en) 2000-09-27 2005-12-27 Alien Technology Corporation Display devices and integrated circuits
US6640120B1 (en) 2000-10-05 2003-10-28 Scimed Life Systems, Inc. Probe assembly for mapping and ablating pulmonary vein tissue and method of using same
US6826509B2 (en) 2000-10-11 2004-11-30 Riddell, Inc. System and method for measuring the linear and rotational acceleration of a body part
US7526389B2 (en) 2000-10-11 2009-04-28 Riddell, Inc. Power management of a system for measuring the acceleration of a body part
US6814898B1 (en) 2000-10-17 2004-11-09 Seagate Technology Llc Imprint lithography utilizing room temperature embossing
US6775906B1 (en) 2000-10-20 2004-08-17 Silverbrook Research Pty Ltd Method of manufacturing an integrated circuit carrier
US6421016B1 (en) 2000-10-23 2002-07-16 Motorola, Inc. Antenna system with channeled RF currents
GB2385975B (en) 2000-11-21 2004-10-13 Avery Dennison Corp Display device and methods of manufacture and control
AU2002219895A1 (en) 2000-11-27 2002-06-03 Kopin Corporation Bipolar transistor with lattice matched base layer
AU2002239360A1 (en) 2000-11-28 2002-06-11 Allez Physionix Limited Systems and methods for making non-invasive physiological assessments
US6743982B2 (en) 2000-11-29 2004-06-01 Xerox Corporation Stretchable interconnects using stress gradient films
AUPR174800A0 (en) 2000-11-29 2000-12-21 Australian National University, The Semiconductor processing
GB0029312D0 (en) 2000-12-01 2001-01-17 Philips Corp Intellectual Pty Flexible electronic device
US20020070443A1 (en) * 2000-12-08 2002-06-13 Xiao-Chun Mu Microelectronic package having an integrated heat sink and build-up layers
US6603440B2 (en) 2000-12-14 2003-08-05 Protura Wireless, Inc. Arrayed-segment loop antenna
US6608360B2 (en) 2000-12-15 2003-08-19 University Of Houston One-chip micro-integrated optoelectronic sensor
US20070031607A1 (en) 2000-12-19 2007-02-08 Alexander Dubson Method and apparatus for coating medical implants
US20020079572A1 (en) * 2000-12-22 2002-06-27 Khan Reza-Ur Rahman Enhanced die-up ball grid array and method for making the same
US6541098B2 (en) * 2000-12-22 2003-04-01 Avery Dennison Corporation Three-dimensional flexible adhesive film structures
US6666821B2 (en) 2001-01-08 2003-12-23 Medtronic, Inc. Sensor system
EP1372602B1 (en) 2001-01-09 2007-04-18 Microchips, Inc. Flexible microchip devices for ophthalmic and other applications
US7078582B2 (en) 2001-01-17 2006-07-18 3M Innovative Properties Company Stretch removable adhesive articles and methods
US6655286B2 (en) 2001-01-19 2003-12-02 Lucent Technologies Inc. Method for preventing distortions in a flexibly transferred feature pattern
US20030017848A1 (en) 2001-07-17 2003-01-23 Engstrom G. Eric Personalizing electronic devices and smart covering
US6944482B2 (en) 2001-01-22 2005-09-13 Wildseed Ltd. Visualization supplemented wireless mobile telephony
US20020110766A1 (en) 2001-02-09 2002-08-15 Industrial Technology Research Institute Process method of using excimer laser for forming micro spherical and non-spherical polymeric structure array
JP3665579B2 (ja) 2001-02-26 2005-06-29 ソニーケミカル株式会社 電気装置製造方法
KR20020093113A (ko) 2001-03-06 2002-12-12 코닌클리케 필립스 일렉트로닉스 엔.브이. 디스플레이 디바이스
WO2002072192A2 (en) 2001-03-08 2002-09-19 Medtronic, Inc. Lead with adjustable angular and spatial relationships between electrodes
US7189435B2 (en) 2001-03-14 2007-03-13 University Of Massachusetts Nanofabrication
US6417025B1 (en) 2001-04-02 2002-07-09 Alien Technology Corporation Integrated circuit packages assembled utilizing fluidic self-assembly
US6600363B2 (en) 2001-04-05 2003-07-29 Cornell Research Foundation, Inc. Folded floating-gate differential pair amplifier
US6667548B2 (en) 2001-04-06 2003-12-23 Intel Corporation Diamond heat spreading and cooling technique for integrated circuits
US6477417B1 (en) 2001-04-12 2002-11-05 Pacesetter, Inc. System and method for automatically selecting electrode polarity during sensing and stimulation
US6864435B2 (en) 2001-04-25 2005-03-08 Alien Technology Corporation Electrical contacts for flexible displays
US7232460B2 (en) 2001-04-25 2007-06-19 Xillus, Inc. Nanodevices, microdevices and sensors on in-vivo structures and method for the same
KR100380107B1 (ko) 2001-04-30 2003-04-11 삼성전자주식회사 발열체를 갖는 회로 기판과 기밀 밀봉부를 갖는 멀티 칩패키지
DE10122324A1 (de) 2001-05-08 2002-11-14 Philips Corp Intellectual Pty Flexible integrierte monolithische Schaltung
US6533731B2 (en) 2001-05-15 2003-03-18 Lifecheck, Llc Method and apparatus for measuring heat flow
US6455931B1 (en) 2001-05-15 2002-09-24 Raytheon Company Monolithic microelectronic array structure having substrate islands and its fabrication
US20020173033A1 (en) 2001-05-17 2002-11-21 Kyle Hammerick Device and method or three-dimensional spatial localization and functional interconnection of different types of cells
US6606247B2 (en) 2001-05-31 2003-08-12 Alien Technology Corporation Multi-feature-size electronic structures
US6988667B2 (en) 2001-05-31 2006-01-24 Alien Technology Corporation Methods and apparatuses to identify devices
WO2002103760A2 (en) 2001-06-14 2002-12-27 Amberware Systems Corporation Method of selective removal of sige alloys
US6626940B2 (en) 2001-06-15 2003-09-30 Scimed Life Systems, Inc. Medical device activation system
US20030006527A1 (en) 2001-06-22 2003-01-09 Rabolt John F. Method of fabricating micron-and submicron-scale elastomeric templates for surface patterning
US6984934B2 (en) 2001-07-10 2006-01-10 The Trustees Of Princeton University Micro-lens arrays for display intensity enhancement
US6410971B1 (en) 2001-07-12 2002-06-25 Ferrotec (Usa) Corporation Thermoelectric module with thin film substrates
US6657289B1 (en) 2001-07-13 2003-12-02 Alien Technology Corporation Apparatus relating to block configurations and fluidic self-assembly processes
US6590346B1 (en) 2001-07-16 2003-07-08 Alien Technology Corporation Double-metal background driven displays
US6856830B2 (en) 2001-07-19 2005-02-15 Bin He Method and apparatus of three dimension electrocardiographic imaging
US6661037B2 (en) 2001-07-20 2003-12-09 Microlink Devices, Inc. Low emitter resistance contacts to GaAs high speed HBT
AU2002322581A1 (en) 2001-07-20 2003-03-03 Microlink Devices, Inc. Graded base gaassb for high speed gaas hbt
WO2003009396A2 (en) 2001-07-20 2003-01-30 Microlink Devices, Inc. Algaas or ingap low turn-on voltage gaas-based heterojunction bipolar transistor
US6706402B2 (en) 2001-07-25 2004-03-16 Nantero, Inc. Nanotube films and articles
US6770966B2 (en) 2001-07-31 2004-08-03 Intel Corporation Electronic assembly including a die having an integrated circuit and a layer of diamond to transfer heat
JP4638626B2 (ja) 2001-08-01 2011-02-23 北川工業株式会社 磁性体の成形方法、磁性体、およびプリント基板
US6949199B1 (en) 2001-08-16 2005-09-27 Seagate Technology Llc Heat-transfer-stamp process for thermal imprint lithography
US6731353B1 (en) 2001-08-17 2004-05-04 Alien Technology Corporation Method and apparatus for transferring blocks
US6863219B1 (en) 2001-08-17 2005-03-08 Alien Technology Corporation Apparatuses and methods for forming electronic assemblies
US6861757B2 (en) * 2001-09-03 2005-03-01 Nec Corporation Interconnecting substrate for carrying semiconductor device, method of producing thereof and package of semiconductor device
WO2003021679A2 (en) 2001-09-03 2003-03-13 National Microelectronic Research Centre University College Cork - National University Of Ireland Cork Integrated circuit structure and a method of making an integrated circuit structure
JP2003077940A (ja) 2001-09-06 2003-03-14 Sony Corp 素子の転写方法及びこれを用いた素子の配列方法、画像表示装置の製造方法
AUPR795401A0 (en) 2001-09-28 2001-10-18 University Of Queensland, The Components based on melanin and melanin-like bio-molecules and processes for their production
US7193504B2 (en) 2001-10-09 2007-03-20 Alien Technology Corporation Methods and apparatuses for identification
US6936181B2 (en) 2001-10-11 2005-08-30 Kovio, Inc. Methods for patterning using liquid embossing
TW594947B (en) 2001-10-30 2004-06-21 Semiconductor Energy Lab Semiconductor device and method of manufacturing the same
US7146221B2 (en) 2001-11-16 2006-12-05 The Regents Of The University Of California Flexible electrode array for artifical vision
WO2003061517A2 (en) 2001-11-20 2003-07-31 California Institute Of Technology Neural prosthetic micro system
JP4301950B2 (ja) 2001-12-04 2009-07-22 オリジン エナジー ソーラー ピーティーワイ リミテッド 太陽電池用の薄いシリコンシートを製造する方法
US6844673B1 (en) 2001-12-06 2005-01-18 Alien Technology Corporation Split-fabrication for light emitting display structures
US20040092806A1 (en) 2001-12-11 2004-05-13 Sagon Stephen W Microelectrode catheter for mapping and ablation
JP4263400B2 (ja) 2001-12-21 2009-05-13 株式会社ブリヂストン 路面摩擦係数推定方法と路面摩擦係数推定装置
US6887450B2 (en) 2002-01-02 2005-05-03 Zyvex Corporation Directional assembly of carbon nanotube strings
US7998080B2 (en) 2002-01-15 2011-08-16 Orsan Medical Technologies Ltd. Method for monitoring blood flow to brain
DE10202123A1 (de) 2002-01-21 2003-07-31 Infineon Technologies Ag Verfahren und Vorrichtung zur Integration von Elektronik in Textilien
WO2003063211A1 (en) 2002-01-23 2003-07-31 Alien Technology Corporation Apparatus incorporating small-feature-size and large-feature-size components and method for making same
US6653030B2 (en) 2002-01-23 2003-11-25 Hewlett-Packard Development Company, L.P. Optical-mechanical feature fabrication during manufacture of semiconductors and other micro-devices and nano-devices that include micron and sub-micron features
US6608370B1 (en) 2002-01-28 2003-08-19 Motorola, Inc. Semiconductor wafer having a thin die and tethers and methods of making the same
US20030149456A1 (en) 2002-02-01 2003-08-07 Rottenberg William B. Multi-electrode cardiac lead adapter with multiplexer
US6693384B1 (en) 2002-02-01 2004-02-17 Alien Technology Corporation Interconnect structure for electronic devices
US20030162507A1 (en) 2002-02-20 2003-08-28 Vatt Gregory B. Semiconductor structure for high speed digital and radio frequency processing
JP3975272B2 (ja) 2002-02-21 2007-09-12 独立行政法人産業技術総合研究所 超微細流体ジェット装置
EP1340622B1 (en) 2002-03-01 2006-12-13 Dai Nippon Printing Co., Ltd. Thermally transferable image protective sheet, method for protective layer formation, and record produced by said method
JP4532908B2 (ja) 2002-03-07 2010-08-25 アクレオ アーベー 電気化学デバイス
JP3889700B2 (ja) 2002-03-13 2007-03-07 三井金属鉱業株式会社 Ｃｏｆフィルムキャリアテープの製造方法
US6950220B2 (en) 2002-03-18 2005-09-27 E Ink Corporation Electro-optic displays, and methods for driving same
US20060134713A1 (en) 2002-03-21 2006-06-22 Lifescan, Inc. Biosensor apparatus and methods of use
JP3980918B2 (ja) 2002-03-28 2007-09-26 株式会社東芝 アクティブマトリクス基板及びその製造方法、表示装置
JP2003297974A (ja) 2002-03-29 2003-10-17 Seiko Epson Corp 半導体装置、電気光学装置および半導体装置の製造方法
US6872645B2 (en) 2002-04-02 2005-03-29 Nanosys, Inc. Methods of positioning and/or orienting nanostructures
US20040026684A1 (en) 2002-04-02 2004-02-12 Nanosys, Inc. Nanowire heterostructures for encoding information
JP4736324B2 (ja) 2002-04-22 2011-07-27 コニカミノルタホールディングス株式会社 半導体素子及びその製造方法
US8328420B2 (en) 2003-04-22 2012-12-11 Marcio Marc Abreu Apparatus and method for measuring biologic parameters
KR100896167B1 (ko) 2002-04-24 2009-05-11 이 잉크 코포레이션 전자 표시장치
US6946205B2 (en) 2002-04-25 2005-09-20 Matsushita Electric Industrial Co., Ltd. Wiring transfer sheet and method for producing the same, and wiring board and method for producing the same
DE10219120A1 (de) 2002-04-29 2003-11-20 Infineon Technologies Ag Oberflächenfunktionalisierte anorganische Halbleiterpartikel als elektrische Halbleiter für mikroelektronische Anwendungen
CN1659810B (zh) 2002-04-29 2012-04-25 三星电子株式会社 直接连接信号传送系统
US6930608B2 (en) 2002-05-14 2005-08-16 Motorola, Inc Apparel having multiple alternative sensors and corresponding method
JP4052631B2 (ja) 2002-05-17 2008-02-27 株式会社東芝 アクティブマトリクス型表示装置
AU2003253690A1 (en) 2002-06-24 2004-01-06 Massachusetts Institute Of Technology Silk biomaterials and methods of use thereof
CA2525994C (en) 2002-06-24 2012-10-16 Tufts University Silk biomaterials and methods of use thereof
AU2003258969A1 (en) 2002-06-27 2004-01-19 Nanosys Inc. Planar nanowire based sensor elements, devices, systems and methods for using and making same
US6665187B1 (en) * 2002-07-16 2003-12-16 International Business Machines Corporation Thermally enhanced lid for multichip modules
US7371963B2 (en) 2002-07-31 2008-05-13 Kyocera Corporation Photovoltaic power generation system
WO2004013102A1 (de) 2002-07-31 2004-02-12 Schering Aktiengesellschaft Vegfr-2 und vegfr-3 inhibitorische anthranylamidpyrimidene
US6980777B2 (en) 2002-07-31 2005-12-27 Nokia Corporation Smart pouch cover for mobile device
US6848162B2 (en) 2002-08-02 2005-02-01 Matrics, Inc. System and method of transferring dies using an adhesive surface
US7186957B2 (en) 2002-08-07 2007-03-06 Phoenix Consultants, Ltd. Temperature regulated clothing
US6965160B2 (en) * 2002-08-15 2005-11-15 Micron Technology, Inc. Semiconductor dice packages employing at least one redistribution layer
NL1021298C2 (nl) 2002-08-19 2004-02-20 Tno Voertuigbediening die gebruikmaakt van een wegdek-band interactiemodel.
AU2003253192A1 (en) 2002-08-27 2004-04-30 Nanosys Gmbh Method for applying a hydrophobic coating to the surface of a porous substrate, maintaining its porosity
US6805809B2 (en) 2002-08-28 2004-10-19 Board Of Trustees Of University Of Illinois Decal transfer microfabrication
AU2003298998A1 (en) 2002-09-05 2004-04-08 Nanosys, Inc. Oriented nanostructures and methods of preparing
CN100584921C (zh) 2002-09-05 2010-01-27 奈米系统股份有限公司 促进电荷转移至纳米结构或自纳米结构转移出电荷的有机物
WO2004022714A2 (en) 2002-09-05 2004-03-18 Nanosys, Inc. Organic species that facilitate charge transfer to or from nanostructures
EP1540741B1 (en) 2002-09-05 2014-10-29 Nanosys, Inc. Nanostructure and nanocomposite based compositions and photovoltaic devices
US7227240B2 (en) 2002-09-10 2007-06-05 Semiconductor Components Industries, L.L.C. Semiconductor device with wire bond inductor and method
KR100512960B1 (ko) 2002-09-26 2005-09-07 삼성전자주식회사 플렉서블 ｍｅｍｓ 트랜스듀서와 그 제조방법 및 이를채용한 플렉서블 ｍｅｍｓ 무선 마이크로폰
WO2004032190A2 (en) 2002-09-30 2004-04-15 Nanosys, Inc. Integrated displays using nanowire transistors
US7051945B2 (en) 2002-09-30 2006-05-30 Nanosys, Inc Applications of nano-enabled large area macroelectronic substrates incorporating nanowires and nanowire composites
TWI319201B (en) 2002-09-30 2010-01-01 Nanosys Inc Applications of nano-enabled large area macroelectronic substrates incorporating nanowires and nanowire composites
WO2004032193A2 (en) 2002-09-30 2004-04-15 Nanosys, Inc. Large-area nanoenabled macroelectronic substrates and uses therefor
US7698909B2 (en) 2002-10-01 2010-04-20 Nellcor Puritan Bennett Llc Headband with tension indicator
US7303875B1 (en) 2002-10-10 2007-12-04 Nanosys, Inc. Nano-chem-FET based biosensors
US20040081384A1 (en) 2002-10-25 2004-04-29 Datesman Aaron M. Multiple-mode planar-waveguide sensor, fabrication materials and techniques
US20040085469A1 (en) 2002-10-30 2004-05-06 Eastman Kodak Company Method to eliminate bus voltage drop effects for pixel source follower amplifiers
TWI239606B (en) 2002-11-07 2005-09-11 Kobe Steel Ltd Heat spreader and semiconductor device and package using the same
WO2004045374A2 (en) 2002-11-14 2004-06-03 Ethicon Endo-Surgery, Inc. Methods and devices for detecting tissue cells
JP2004179258A (ja) 2002-11-25 2004-06-24 Hamamatsu Photonics Kk 紫外線センサ
US7204130B2 (en) 2002-12-03 2007-04-17 Ppg Industries Ohio, Inc. Windshield moisture detector
US20040200734A1 (en) 2002-12-19 2004-10-14 Co Man Sung Nanotube-based sensors for biomolecules
WO2004062697A2 (en) 2003-01-07 2004-07-29 Tufts University Silk fibroin materials and use thereof
EP1592342A4 (en) 2003-01-16 2009-05-27 Galil Medical Ltd DEVICE, SYSTEM AND METHOD FOR DETECTING, LOCATING AND IDENTIFYING A PLAQUE-INDUCED TRANSMISSION OF A BLOOD VESSEL
US7190051B2 (en) 2003-01-17 2007-03-13 Second Sight Medical Products, Inc. Chip level hermetic and biocompatible electronics package using SOI wafers
US6894265B2 (en) 2003-01-31 2005-05-17 Foveon, Inc. Vertical color filter sensor group and semiconductor integrated circuit fabrication method for fabricating same
US20040149921A1 (en) 2003-02-05 2004-08-05 Alexander Smyk Personal solar adviser
EP1601612A2 (en) 2003-03-11 2005-12-07 Nanosys, Inc. Process for producing nanocrystals and nanocrystals produced thereby
US7253735B2 (en) 2003-03-24 2007-08-07 Alien Technology Corporation RFID tags and processes for producing RFID tags
US6855638B2 (en) 2003-03-24 2005-02-15 Union Semiconductor Technology Corporation Process to pattern thick TiW metal layers using uniform and selective etching
US20050227389A1 (en) 2004-04-13 2005-10-13 Rabin Bhattacharya Deformable organic devices
US7465678B2 (en) 2003-03-28 2008-12-16 The Trustees Of Princeton University Deformable organic devices
US7491892B2 (en) 2003-03-28 2009-02-17 Princeton University Stretchable and elastic interconnects
EP1467224A1 (en) 2003-04-07 2004-10-13 CSEM Centre Suisse d'Electronique et de Microtechnique SA Optical proximity detector
CA2562415C (en) 2003-04-10 2015-10-27 Tufts University Concentrated aqueous silk fibroin solutions free of organic solvents and uses thereof
US7056409B2 (en) 2003-04-17 2006-06-06 Nanosys, Inc. Structures, systems and methods for joining articles and materials and uses therefor
US7074294B2 (en) 2003-04-17 2006-07-11 Nanosys, Inc. Structures, systems and methods for joining articles and materials and uses therefor
US20050038498A1 (en) 2003-04-17 2005-02-17 Nanosys, Inc. Medical device applications of nanostructured surfaces
JP4871726B2 (ja) 2003-04-28 2012-02-08 ナノシス・インク． 超疎液性表面、その作製法及び用途
US20040211458A1 (en) 2003-04-28 2004-10-28 General Electric Company Tandem photovoltaic cell stacks
US7337012B2 (en) 2003-04-30 2008-02-26 Lawrence Livermore National Security, Llc Stretchable polymer-based electronic device
TWI427709B (zh) 2003-05-05 2014-02-21 Nanosys Inc 用於增加表面面積之應用的奈米纖維表面
US7803574B2 (en) 2003-05-05 2010-09-28 Nanosys, Inc. Medical device applications of nanostructured surfaces
AU2003902270A0 (en) 2003-05-09 2003-05-29 Origin Energy Solar Pty Ltd Separating and assembling semiconductor strips
US7244326B2 (en) 2003-05-16 2007-07-17 Alien Technology Corporation Transfer assembly for manufacturing electronic devices
US7374949B2 (en) 2003-05-29 2008-05-20 Bayer Healthcare Llc Diagnostic test strip for collecting and detecting an analyte in a fluid sample
US7265298B2 (en) 2003-05-30 2007-09-04 The Regents Of The University Of California Serpentine and corduroy circuits to enhance the stretchability of a stretchable electronic device
US7129935B2 (en) 2003-06-02 2006-10-31 Synaptics Incorporated Sensor patterns for a capacitive sensing apparatus
US7317532B2 (en) 2003-06-04 2008-01-08 Inverness Medical Switzerland Gmbh Flow sensing for determination of assay results
WO2005000483A1 (en) 2003-06-06 2005-01-06 Tufts University Method for forming inorganic coatings
WO2004112356A1 (en) 2003-06-12 2004-12-23 Nokia Corporation Mobile communication device cover and method for its operation
US7494896B2 (en) 2003-06-12 2009-02-24 International Business Machines Corporation Method of forming magnetic random access memory (MRAM) devices on thermally-sensitive substrates using laser transfer
US7413919B2 (en) 2003-06-20 2008-08-19 Acellent Technologies, Inc. Method of manufacturing a structural health monitoring layer
US7033961B1 (en) 2003-07-15 2006-04-25 Rf Micro Devices, Inc. Epitaxy/substrate release layer
US7439158B2 (en) 2003-07-21 2008-10-21 Micron Technology, Inc. Strained semiconductor by full wafer bonding
US20080119703A1 (en) 2006-10-04 2008-05-22 Mark Brister Analyte sensor
CN1863954B (zh) 2003-08-04 2013-07-31 纳米系统公司 制备纳米线复合体的系统和方法及由此得到的电子衬底
JP2005052212A (ja) 2003-08-05 2005-03-03 Axiom Co Ltd 肌センサ
EP1665120B1 (en) 2003-08-09 2013-04-17 Alien Technology Corporation Methods and apparatuses to identify devices
US7223609B2 (en) 2003-08-14 2007-05-29 Agilent Technologies, Inc. Arrays for multiplexed surface plasmon resonance detection of biological molecules
JP4554176B2 (ja) 2003-08-19 2010-09-29 株式会社ブリヂストン 路面状態推定方法
AU2004266725B2 (en) 2003-08-20 2011-03-10 Philometron, Inc. Hydration monitoring
JP2005072528A (ja) 2003-08-28 2005-03-17 Shin Etsu Chem Co Ltd 薄層電界効果トランジスター及びその製造方法
US7029951B2 (en) 2003-09-12 2006-04-18 International Business Machines Corporation Cooling system for a semiconductor device and method of fabricating same
DE202004021953U1 (de) 2003-09-12 2013-06-19 Vessix Vascular, Inc. Auswählbare exzentrische Remodellierung und/oder Ablation von atherosklerotischem Material
WO2005029578A1 (en) 2003-09-24 2005-03-31 Koninklijke Philips Electronics N.V. Semiconductor device, method of manufacturing same, identification label and information carrier
EP1519220A1 (en) 2003-09-27 2005-03-30 3M Innovative Properties Company Electrochemical display device
GB0323285D0 (en) 2003-10-04 2003-11-05 Koninkl Philips Electronics Nv Device and method of making a device having a patterned layer on a flexible substrate
GB0323286D0 (en) 2003-10-04 2003-11-05 Koninkl Philips Electronics Nv Device and method of making a device having a flexible layer structure
US20050082526A1 (en) 2003-10-15 2005-04-21 International Business Machines Corporation Techniques for layer transfer processing
JP2005126595A (ja) 2003-10-24 2005-05-19 Dainippon Ink & Chem Inc ポリウレタン樹脂組成物、及びそれを用いてなるホットメルト接着剤
DE10349963A1 (de) 2003-10-24 2005-06-02 Leonhard Kurz Gmbh & Co. Kg Verfahren zur Herstellung einer Folie
WO2005046470A1 (en) 2003-11-06 2005-05-26 The Regents Of The University Of Colorado, A Body Corporate Shape-memory polymer coated electrodes
US20070058254A1 (en) 2003-11-11 2007-03-15 Tae Il Kim Advertising sheet using micro-prism retroreflective sheet and method for manufacturing the same
US20050113744A1 (en) 2003-11-21 2005-05-26 Cyberkinetics, Inc. Agent delivery systems and related methods under control of biological electrical signals
JP2007523468A (ja) 2003-12-01 2007-08-16 ザ ボード オブ トラスティーズ オブ ザ ユニヴァーシティー オブ イリノイ ３次元ナノスケール構造を形成するための方法及び装置
US20050124712A1 (en) 2003-12-05 2005-06-09 3M Innovative Properties Company Process for producing photonic crystals
WO2005058083A2 (en) 2003-12-12 2005-06-30 Beck Gregory S Safety helmet with shock detector, helmet attachement device with shock detector & methods
EP3242318A1 (en) 2003-12-19 2017-11-08 The University of North Carolina at Chapel Hill Monodisperse micro-structure or nano-structure product
US7632087B2 (en) 2003-12-19 2009-12-15 Wd Media, Inc. Composite stamper for imprint lithography
US20090198293A1 (en) 2003-12-19 2009-08-06 Lawrence Cauller Microtransponder Array for Implant
DE10361940A1 (de) 2003-12-24 2005-07-28 Restate Patent Ag Degradationssteuerung biodegradierbarer Implantate durch Beschichtung
KR20050066128A (ko) 2003-12-26 2005-06-30 주식회사 팬택앤큐리텔 체인지 커버를 이용한 메모리카드의 교체구조 및 방법
US7150745B2 (en) 2004-01-09 2006-12-19 Barrx Medical, Inc. Devices and methods for treatment of luminal tissue
US20060003709A1 (en) 2004-06-30 2006-01-05 Nokia Corporation Protective enclosure for a mobile terminal
US8025960B2 (en) 2004-02-02 2011-09-27 Nanosys, Inc. Porous substrates, articles, systems and compositions comprising nanofibers and methods of their use and production
US7618260B2 (en) 2004-02-27 2009-11-17 Daniel Simon R Wearable modular interface strap
ATE490567T1 (de) 2004-03-08 2010-12-15 Univ Illinois Mikrofluidische elektrochemische reaktoren
DE102004011617B4 (de) 2004-03-10 2013-07-18 Hilti Aktiengesellschaft Planetengetriebe
TWI299358B (en) 2004-03-12 2008-08-01 Hon Hai Prec Ind Co Ltd Thermal interface material and method for making same
US20050203366A1 (en) 2004-03-12 2005-09-15 Donoghue John P. Neurological event monitoring and therapy systems and related methods
US7727228B2 (en) 2004-03-23 2010-06-01 Medtronic Cryocath Lp Method and apparatus for inflating and deflating balloon catheters
US7259030B2 (en) 2004-03-29 2007-08-21 Articulated Technologies, Llc Roll-to-roll fabricated light sheet and encapsulated semiconductor circuit devices
MXPA06011114A (es) 2004-03-29 2007-01-25 Articulated Technologies Llc Hoja luminosa fabricada de rodillo a rodillo y dispositivos encapsulados de circuito semiconductor.
US7052924B2 (en) 2004-03-29 2006-05-30 Articulated Technologies, Llc Light active sheet and methods for making the same
CN100383213C (zh) 2004-04-02 2008-04-23 清华大学 一种热界面材料及其制造方法
US20080055581A1 (en) 2004-04-27 2008-03-06 Rogers John A Devices and methods for pattern generation by ink lithography
US7195733B2 (en) 2004-04-27 2007-03-27 The Board Of Trustees Of The University Of Illinois Composite patterning devices for soft lithography
JP4814873B2 (ja) 2004-04-28 2011-11-16 アイユーシーエフ‐エイチワイユー 可撓性電気光学装置及びその製造方法
US7302751B2 (en) 2004-04-30 2007-12-04 Hewlett-Packard Development Company, L.P. Method of fabricating a rat's nest RFID antenna
TWI255572B (en) 2004-05-05 2006-05-21 Advanced Connectek Inc A portable electrical power unit with transmission display
JP2005322858A (ja) 2004-05-11 2005-11-17 Shinko Electric Ind Co Ltd 半導体装置の製造方法
US7473816B2 (en) 2004-05-18 2009-01-06 Lohmann & Rauscher, Inc. Multilayer moisture management fabric
US8268145B2 (en) 2004-05-21 2012-09-18 Agamatrix, Inc. Electrochemical cell and method of making an electrochemical cell
US20050261561A1 (en) 2004-05-24 2005-11-24 Christopher W. Jones Blood testing and therapeutic compound delivery system
US8217381B2 (en) 2004-06-04 2012-07-10 The Board Of Trustees Of The University Of Illinois Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics
EP2650907B1 (en) 2004-06-04 2024-10-23 The Board Of Trustees Of The University Of Illinois Methods and devices for fabricating and assembling printable semiconductor elements
EP1605502A1 (en) 2004-06-08 2005-12-14 Interuniversitair Microelektronica Centrum Vzw Transfer method for the manufacturing of electronic devices
US7521292B2 (en) 2004-06-04 2009-04-21 The Board Of Trustees Of The University Of Illinois Stretchable form of single crystal silicon for high performance electronics on rubber substrates
US7799699B2 (en) 2004-06-04 2010-09-21 The Board Of Trustees Of The University Of Illinois Printable semiconductor structures and related methods of making and assembling
US7943491B2 (en) 2004-06-04 2011-05-17 The Board Of Trustees Of The University Of Illinois Pattern transfer printing by kinetic control of adhesion to an elastomeric stamp
US6987314B1 (en) * 2004-06-08 2006-01-17 Amkor Technology, Inc. Stackable semiconductor package with solder on pads on which second semiconductor package is stacked
JP2008502739A (ja) 2004-06-11 2008-01-31 トラスティーズ オブ タフツ カレッジ 絹に基づく薬物送達システム
US7629691B2 (en) 2004-06-16 2009-12-08 Honeywell International Inc. Conductor geometry for electronic circuits fabricated on flexible substrates
US20080204021A1 (en) 2004-06-17 2008-08-28 Koninklijke Philips Electronics N.V. Flexible and Wearable Radio Frequency Coil Garments for Magnetic Resonance Imaging
US7425523B2 (en) 2004-07-05 2008-09-16 Dai Nippon Printing Co., Ltd. Thermal transfer recording material and thermal transfer recording method
JP2006044383A (ja) 2004-08-02 2006-02-16 Fuji Heavy Ind Ltd 車両のタイヤ情報表示装置
US7687886B2 (en) 2004-08-19 2010-03-30 Microlink Devices, Inc. High on-state breakdown heterojunction bipolar transistor
WO2006026748A1 (en) 2004-08-31 2006-03-09 Lifescan Scotland Limited Method of manufacturing an auto-calibrating sensor
US7214189B2 (en) 2004-09-02 2007-05-08 Proteus Biomedical, Inc. Methods and apparatus for tissue activation and monitoring
WO2006028996A2 (en) 2004-09-03 2006-03-16 Trustees Of Tufts College Emulsan-alginate microspheres and methods of use thereof
KR100643756B1 (ko) 2004-09-10 2006-11-10 삼성전자주식회사 유연소자, 유연압력센서, 및 이들의 제조방법
US20060068576A1 (en) 2004-09-30 2006-03-30 Burdick William E Jr Lithography transfer for high density interconnect circuits
JP2006108431A (ja) 2004-10-06 2006-04-20 Sharp Corp 半導体装置
WO2006042287A2 (en) 2004-10-12 2006-04-20 Trustees Of Tufts College Method for producing biomaterial scaffolds
US7662545B2 (en) 2004-10-14 2010-02-16 The Board Of Trustees Of The University Of Illinois Decal transfer lithography
JP2006118441A (ja) 2004-10-21 2006-05-11 Toyota Motor Corp 内燃機関の制御装置
US7621044B2 (en) 2004-10-22 2009-11-24 Formfactor, Inc. Method of manufacturing a resilient contact
US20060095121A1 (en) 2004-10-28 2006-05-04 Medtronic Vascular, Inc. Autologous platelet gel on a stent graft
WO2006050325A2 (en) 2004-10-29 2006-05-11 Worcester Polytechnic Institute System and method for multi-channel electrophysiologic signal data acquisition
EP1817571B1 (en) 2004-11-04 2011-09-07 Renishaw Diagnostics Limited Metal nano-void photonic crystal for enhanced raman spectroscopy
JP4825488B2 (ja) 2004-11-09 2011-11-30 株式会社リコー 画像形成装置
US7695602B2 (en) 2004-11-12 2010-04-13 Xerox Corporation Systems and methods for transporting particles
US7999023B2 (en) 2004-12-03 2011-08-16 3M Innovative Properties Company Process for making pressure sensitive adhesive hydrogels
JP2006186294A (ja) 2004-12-03 2006-07-13 Toppan Printing Co Ltd 薄膜トランジスタ及びその製造方法
US20060129056A1 (en) 2004-12-10 2006-06-15 Washington University Electrocorticography telemitter
US20060127817A1 (en) 2004-12-10 2006-06-15 Eastman Kodak Company In-line fabrication of curved surface transistors
JP4517845B2 (ja) 2004-12-13 2010-08-04 日本電気株式会社 フレキシブルケーブル及び電子機器の製造方法
US7229901B2 (en) 2004-12-16 2007-06-12 Wisconsin Alumni Research Foundation Fabrication of strained heterojunction structures
US8118740B2 (en) 2004-12-20 2012-02-21 Ipventure, Inc. Moisture sensor for skin
EP1827583B1 (en) 2004-12-22 2013-01-23 Proteus Digital Health, Inc. Implantable hermetically sealed structures
JP4137061B2 (ja) 2005-01-11 2008-08-20 株式会社カイジョー ワイヤループ形状、そのワイヤループ形状を備えた半導体装置、ワイヤボンディング方法
WO2006076711A2 (en) 2005-01-14 2006-07-20 Trustees Of Tufts College Fibrous protein fusions and use thereof in the formation of advanced organic/inorganic composite materials
KR100688826B1 (ko) 2005-01-20 2007-03-02 삼성전기주식회사 리지드-플렉시블 인쇄회로기판 제조방법
US7374968B2 (en) 2005-01-28 2008-05-20 Hewlett-Packard Development Company, L.P. Method of utilizing a contact printing stamp
US7794742B2 (en) 2005-02-08 2010-09-14 University Of Washington Devices for promoting epithelial cell differentiation and keratinization
US20090291508A1 (en) 2008-05-20 2009-11-26 Rapid Pathogen Screening Inc. Nanoparticles in diagnostic tests
WO2006087503A1 (en) 2005-02-15 2006-08-24 Vodafone Group Plc Improved security for wireless communication
WO2006089377A1 (en) 2005-02-28 2006-08-31 Commonwealth Scientific And Industrial Research Organisation Flexible electronic device
GB0505826D0 (en) 2005-03-22 2005-04-27 Uni Microelektronica Ct Vsw Methods for embedding of conducting material and devices resulting from said methods
CN102125430A (zh) 2005-03-28 2011-07-20 明诺医学有限公司 选择性地治疗目标组织的内腔电组织表征和调谐射频能量
WO2006104069A1 (ja) 2005-03-28 2006-10-05 Pioneer Corporation ゲート絶縁膜、有機トランジスタ、有機ｅｌ表示装置の製造方法、ディスプレイ
US9290579B2 (en) 2005-04-20 2016-03-22 Trustees Of Tufts College Covalently immobilized protein gradients in three-dimensional porous scaffolds
TW200707799A (en) 2005-04-21 2007-02-16 Aonex Technologies Inc Bonded intermediate substrate and method of making same
EP2932998B1 (en) 2005-04-28 2019-12-25 Second Sight Medical Products, Inc. Flexible circuit electrode array
US7300631B2 (en) 2005-05-02 2007-11-27 Bioscale, Inc. Method and apparatus for detection of analyte using a flexural plate wave device and magnetic particles
US8252191B2 (en) 2005-05-10 2012-08-28 Dow Corning Corporation Sub-micron decal transfer lithography
CA2608252A1 (en) 2005-05-13 2006-11-16 Imbibo Incorporated Method for customizing cover for electronic device
US8688189B2 (en) 2005-05-17 2014-04-01 Adnan Shennib Programmable ECG sensor patch
US20060266475A1 (en) 2005-05-24 2006-11-30 American Standard Circuits, Inc. Thermally conductive interface
US8024022B2 (en) 2005-05-25 2011-09-20 Alfred E. Mann Foundation For Scientific Research Hermetically sealed three-dimensional electrode array
WO2006130558A2 (en) 2005-06-01 2006-12-07 The Board Of Trustees Of The University Of Illinois Flexible structures for sensors and electronics
WO2006130721A2 (en) 2005-06-02 2006-12-07 The Board Of Trustees Of The University Of Illinois Printable semiconductor structures and related methods of making and assembling
MY151572A (en) 2005-06-02 2014-06-13 Univ Illinois Printable semiconductor structures and related methods of making and assembling
US7763353B2 (en) 2005-06-10 2010-07-27 Ut-Battelle, Llc Fabrication of high thermal conductivity arrays of carbon nanotubes and their composites
US20070103697A1 (en) * 2005-06-17 2007-05-10 Degertekin Fahrettin L Integrated displacement sensors for probe microscopy and force spectroscopy
US20070031283A1 (en) 2005-06-23 2007-02-08 Davis Charles Q Assay cartridges and methods for point of care instruments
US7226821B2 (en) * 2005-06-24 2007-06-05 Cardiac Pacemakers, Inc. Flip chip die assembly using thin flexible substrates
WO2007000037A1 (en) 2005-06-29 2007-01-04 Mitchell, Richard, J. Bendable high flux led array
US7991465B2 (en) 2005-07-01 2011-08-02 K.U.Leuven Research & Development Means for functional restoration of a damaged nervous system
US7479404B2 (en) 2005-07-08 2009-01-20 The Board Of Trustees Of The University Of Illinois Photonic crystal biosensor structure and fabrication method
US20070015357A1 (en) * 2005-07-15 2007-01-18 Government Of The Usa, As Represented By Secretary Of U.S. Army Process of adhesive bonding with patternable polymers for producing microstructure devices on a wafer assembly
US7268428B2 (en) * 2005-07-19 2007-09-11 International Business Machines Corporation Thermal paste containment for semiconductor modules
US20070027485A1 (en) 2005-07-29 2007-02-01 Kallmyer Todd A Implantable medical device bus system and method
US7769472B2 (en) 2005-07-29 2010-08-03 Medtronic, Inc. Electrical stimulation lead with conformable array of electrodes
US8354501B2 (en) 2005-08-02 2013-01-15 Trustees Of Tufts College Methods for stepwise deposition of silk fibroin coatings
US20070043416A1 (en) 2005-08-19 2007-02-22 Cardiac Pacemakers, Inc. Implantable electrode array
US8657814B2 (en) 2005-08-22 2014-02-25 Medtronic Ablation Frontiers Llc User interface for tissue ablation system
KR100758699B1 (ko) 2005-08-29 2007-09-14 재단법인서울대학교산학협력재단 고종횡비 나노구조물 형성방법 및 이를 이용한 미세패턴형성방법
US8005526B2 (en) 2005-08-31 2011-08-23 The Regents Of The University Of Michigan Biologically integrated electrode devices
US8058951B2 (en) * 2005-09-30 2011-11-15 Panasonic Corporation Sheet-like composite electronic component and method for manufacturing same
JP2009512209A (ja) 2005-10-13 2009-03-19 エヌエックスピー ビー ヴィ 電子装置または回路およびその製造方法
JP2007105316A (ja) 2005-10-14 2007-04-26 Konica Minolta Sensing Inc 生体情報測定器
KR100730152B1 (ko) 2005-10-14 2007-06-19 삼성에스디아이 주식회사 플렉시블 평판 표시장치
US20070213616A1 (en) 2005-10-20 2007-09-13 Thomas Anderson Systems and methods for arteriotomy localization
JP2009514602A (ja) 2005-11-02 2009-04-09 セカンド サイト メディカル プロダクツ インコーポレイテッド 植え込み型マイクロ電子デバイス及びその作製方法
US8771805B2 (en) 2005-11-10 2014-07-08 Second Sight Medical Products, Inc. Polymer layer comprising silicone and at least one metal trace and a process of manufacturing the same
US7271393B2 (en) 2005-11-15 2007-09-18 Nokia Corporation UV radiation meter using visible light sensors
US7759167B2 (en) 2005-11-23 2010-07-20 Imec Method for embedding dies
US20070122819A1 (en) 2005-11-25 2007-05-31 Industrial Technology Research Institute Analyte assay structure in microfluidic chip for quantitative analysis and method for using the same
KR101199250B1 (ko) 2005-12-12 2012-11-09 삼성디스플레이 주식회사 연성회로필름 및 이를 갖는 표시패널 어셈블리
US20070139451A1 (en) 2005-12-20 2007-06-21 Somasiri Nanayakkara L Microfluidic device having hydrophilic microchannels
WO2007075928A2 (en) 2005-12-22 2007-07-05 Provex Technologies, Llc. Integrated patch and assay device with visual detection means
US9629567B2 (en) 2006-01-12 2017-04-25 Biosense Webster, Inc. Mapping of complex fractionated atrial electrogram
US7936062B2 (en) * 2006-01-23 2011-05-03 Tessera Technologies Ireland Limited Wafer level chip packaging
DE102006008501B3 (de) 2006-02-23 2007-10-25 Albert-Ludwigs-Universität Freiburg Sonde und Verfahren zur Datenübertragung zwischen einem Gehirn und einer Datenverarbeitungsvorrichtung
US8398603B2 (en) 2006-02-28 2013-03-19 Coloplast A/S Leak sensor
EP1991723A2 (en) 2006-03-03 2008-11-19 The Board Of Trustees Of The University Of Illinois Methods of making spatially aligned nanotubes and nanotube arrays
US20080038236A1 (en) 2006-03-06 2008-02-14 Artecel Sciences, Inc. Biocompatible scaffolds and adipose-derived stem cells
IL174211A0 (en) 2006-03-09 2007-07-04 Rotschild Carmel Method and system for using a cellular phone in water activities
US20070233208A1 (en) 2006-03-28 2007-10-04 Eastman Kodak Company Light therapy bandage with imbedded emitters
US20070227586A1 (en) 2006-03-31 2007-10-04 Kla-Tencor Technologies Corporation Detection and ablation of localized shunting defects in photovoltaics
JP2009533839A (ja) 2006-04-07 2009-09-17 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 弾性変形可能な集積回路装置
JP4844216B2 (ja) * 2006-04-26 2011-12-28 凸版印刷株式会社 多層回路配線基板及び半導体装置
US8126554B2 (en) 2006-05-17 2012-02-28 Cardiac Pacemakers, Inc. Implantable medical device with chemical sensor and related methods
WO2007136726A2 (en) 2006-05-18 2007-11-29 Ndi Medical, Llc Portable assemblies, systems, and methods for providing functional or therapeutic neurostimulation
TWI288067B (en) 2006-06-22 2007-10-11 Univ Chung Hua Microarray bioprobe device integrated with a semiconductor amplifier
EP1883107A3 (en) 2006-07-07 2014-04-09 Imec Method for forming packaged microelectronic devices and devices thus obtained
WO2008030666A2 (en) 2006-07-25 2008-03-13 The Board Of Trustees Of The University Of Illinois Multispectral plasmonic crystal sensors
KR101272332B1 (ko) 2006-07-26 2013-06-07 삼성디스플레이 주식회사 유기 발광 표시 장치
US7368930B2 (en) 2006-08-04 2008-05-06 Formfactor, Inc. Adjustment mechanism
DE102006037433B4 (de) 2006-08-09 2010-08-19 Ovd Kinegram Ag Verfahren zur Herstellung eines Mehrschichtkörpers sowie Mehrschichtkörper
US20080036097A1 (en) 2006-08-10 2008-02-14 Teppei Ito Semiconductor package, method of production thereof and encapsulation resin
TWI378747B (en) 2006-08-18 2012-12-01 Ind Tech Res Inst Flexible electronic assembly
AU2007289057C1 (en) 2006-09-01 2014-01-16 Pacific Biosciences Of California, Inc. Substrates, systems and methods for analyzing materials
US8786033B2 (en) 2006-09-01 2014-07-22 IVI Holdings, Ltd. Biometric sensor and sensor panel, method for detecting biometric pattern using the same, and method for manufacturing the same
MY149475A (en) 2006-09-06 2013-08-30 Univ Illinois Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics
WO2008036837A2 (en) 2006-09-20 2008-03-27 The Board Of Trustees Of The University Of Illinois Release strategies for making transferable semiconductor structures, devices and device components
US7751663B2 (en) * 2006-09-21 2010-07-06 Uni-Pixel Displays, Inc. Backside reflection optical display
US20080077225A1 (en) 2006-09-22 2008-03-27 Carlin Donald B Accuracy lumen sizing and stent expansion
EP1903000B1 (fr) 2006-09-25 2019-09-18 Sorin CRM SAS Composant biocompatible implantable incorporant un élément actif intégré tel qu'un capteur de mesure d'un paramètre physiologique, microsystème électromécanique ou circuit électronique
WO2008118133A2 (en) 2006-09-26 2008-10-02 Trustees Of Tufts College Silk microspheres for encapsulation and controlled release
US20080074383A1 (en) 2006-09-27 2008-03-27 Dean Kenneth A Portable electronic device having appearance customizable housing
AU2007310986B2 (en) 2006-10-18 2013-07-04 Boston Scientific Scimed, Inc. Inducing desirable temperature effects on body tissue
EP2455036B1 (en) 2006-10-18 2015-07-15 Vessix Vascular, Inc. Tuned RF energy and electrical tissue characterization for selective treatment of target tissues
JP5559539B2 (ja) 2006-10-18 2014-07-23 べシックス・バスキュラー・インコーポレイテッド 身体組織に望ましい温度作用を誘発するシステム
US8046039B2 (en) 2006-10-20 2011-10-25 Lg Electronics Inc. Mobile terminal and case for mobile terminal
US20100068740A1 (en) 2006-11-03 2010-03-18 Trustees Of Tufts College Microfluidic device with a cylindrical microchannel and a method for fabricating same
EP2101975A2 (en) 2006-11-03 2009-09-23 Trustees of Tufts College Biopolymer sensor and method of manufacturing the same
US20100046902A1 (en) 2006-11-03 2010-02-25 Trustees Of Tufts College Biopolymer photonic crystals and method of manufacturing the same
EP2650112B1 (en) 2006-11-03 2016-08-24 Trustees Of Tufts College Nanopatterned biopolymer optical device and method of manufacturing the same
WO2008127403A2 (en) 2006-11-03 2008-10-23 Trustees Of Tufts College Biopolymer optofluidic device and method of manufacturing the same
WO2008056499A1 (fr) * 2006-11-06 2008-05-15 Nec Corporation Dispositif semi-conducteur et son procédé de fabrication
US7868354B2 (en) 2006-11-08 2011-01-11 Duke University GaN-based nitric oxide sensors and methods of making and using the same
US8975073B2 (en) 2006-11-21 2015-03-10 The Charles Stark Draper Laboratory, Inc. Microfluidic device comprising silk films coupled to form a microchannel
WO2008070809A2 (en) 2006-12-06 2008-06-12 Spinal Modulation, Inc. Implantable flexible circuit leads and methods of use
US8979755B2 (en) 2006-12-08 2015-03-17 The Boeing Company Devices and systems for remote physiological monitoring
KR100849363B1 (ko) 2006-12-27 2008-07-29 동부일렉트로닉스 주식회사 반도체 소자 및 그 제조 방법
WO2008085904A1 (en) 2007-01-05 2008-07-17 Charles Stark Draper Laboratory, Inc. Biodegradable electronic devices
MY149292A (en) 2007-01-17 2013-08-30 Univ Illinois Optical systems fabricated by printing-based assembly
WO2008088349A1 (en) 2007-01-19 2008-07-24 3M Innovative Properties Company Cable for a capacitive proximity sensor
JP2008202022A (ja) 2007-01-23 2008-09-04 Fujifilm Corp 光ナノインプリントリソグラフィ用硬化性組成物およびそれを用いたパターン形成方法
US8057390B2 (en) 2007-01-26 2011-11-15 The Regents Of The University Of Michigan High-resolution mapping of bio-electric fields
US7709812B2 (en) 2007-02-01 2010-05-04 Barrington L. Simon Ultraviolet radiation monitoring device and a method of using the same
US9944031B2 (en) 2007-02-13 2018-04-17 3M Innovative Properties Company Molded optical articles and methods of making same
US20080200973A1 (en) 2007-02-20 2008-08-21 General Electric Company Method and system using MRI compatibility defibrillation pads
WO2008106485A2 (en) 2007-02-27 2008-09-04 Trustees Of Tufts College Tissue-engineered silk organs
EP2146654A4 (en) 2007-03-27 2011-09-28 X Spine Systems Inc PEDICULAR SCREW SYSTEM CONFIGURED TO RECEIVE A RIGHT OR CURVED ROD
US8761846B2 (en) 2007-04-04 2014-06-24 Motorola Mobility Llc Method and apparatus for controlling a skin texture surface on a device
US20080262381A1 (en) 2007-04-12 2008-10-23 Magneto Inertial Sensing Technology, Inc. Infant SID Monitor Based On Accelerometer
TWI339087B (en) 2007-04-18 2011-03-11 Ind Tech Res Inst Stretchable flexible printed circuit (fpc) and fabricating method thereof
WO2008136958A1 (en) 2007-04-30 2008-11-13 Opthera, Inc. Uva1-led phototherapy device and method
US7525304B1 (en) 2007-05-14 2009-04-28 Kla-Tencor Corporation Measurement of effective capacitance
US7693167B2 (en) 2007-05-22 2010-04-06 Rockwell Collins, Inc. Mobile nodal based communication system, method and apparatus
CA2688431C (en) 2007-05-29 2016-07-05 Trustees Of Tufts College Method for silk fibroin gelation using sonication
US8093789B2 (en) 2007-06-08 2012-01-10 Koninklijke Philips Electronics N.V. Light output device
US8140154B2 (en) 2007-06-13 2012-03-20 Zoll Medical Corporation Wearable medical treatment device
US8877565B2 (en) 2007-06-28 2014-11-04 Intel Corporation Method of forming a multilayer substrate core structure using sequential microvia laser drilling and substrate core structure formed according to the method
US20090000377A1 (en) 2007-06-29 2009-01-01 Shipps J Clay Brain impact measurement system
US20090015560A1 (en) 2007-07-13 2009-01-15 Motorola, Inc. Method and apparatus for controlling a display of a device
US9061494B2 (en) 2007-07-19 2015-06-23 The Board Of Trustees Of The University Of Illinois High resolution electrohydrodynamic jet printing for manufacturing systems
US7651891B1 (en) * 2007-08-09 2010-01-26 National Semiconductor Corporation Integrated circuit package with stress reduction
WO2009023615A1 (en) 2007-08-10 2009-02-19 Trustees Of Tufts College Tubular silk compositions and methods of use thereof
JP2010536434A (ja) 2007-08-17 2010-12-02 イシス バイオポリマー エルエルシー イオン泳動薬物送達システム
US8764653B2 (en) 2007-08-22 2014-07-01 Bozena Kaminska Apparatus for signal detection, processing and communication
EP2194847A1 (en) 2007-09-14 2010-06-16 Corventis, Inc. Adherent device with multiple physiological sensors
US20090088750A1 (en) 2007-09-28 2009-04-02 Tyco Healthcare Group Lp Insulating Boot with Silicone Overmold for Electrosurgical Forceps
DE102007046886B4 (de) 2007-09-28 2010-07-29 Dieter Miehlich EMS-Kleidungsstück und Elektrode sowie EMS-Modul dafür
US7739791B2 (en) 2007-10-26 2010-06-22 Delphi Technologies, Inc. Method of producing an overmolded electronic module with a flexible circuit pigtail
WO2009061823A1 (en) 2007-11-05 2009-05-14 Trustees Of Tufts College Fabrication of silk fibroin photonic structures by nanocontact imprinting
US20090149930A1 (en) 2007-12-07 2009-06-11 Thermage, Inc. Apparatus and methods for cooling a treatment apparatus configured to non-invasively deliver electromagnetic energy to a patient's tissue
AU2008336322B2 (en) 2007-12-10 2013-02-14 Neuronano Ab Medical electrode, electrode bundle and electrode bundle array
US8290557B2 (en) 2007-12-12 2012-10-16 Medtronic, Inc. Implantable optical sensor and method for use
KR100919642B1 (ko) 2007-12-17 2009-09-30 한국전자통신연구원 지향성 음향 생성 장치 및 그를 이용한 휴대용 단말기
JP2009170173A (ja) 2008-01-11 2009-07-30 Denso Corp Ｅｌ素子及びその製造方法
GB0800797D0 (en) 2008-01-16 2008-02-27 Cambridge Entpr Ltd Neural interface
JP4530180B2 (ja) 2008-01-22 2010-08-25 Ｏｋｉセミコンダクタ株式会社 紫外線センサおよびその製造方法
CN101970023A (zh) 2008-02-07 2011-02-09 塔夫茨大学信托人 三维的丝羟基磷灰石组合物
US7838964B2 (en) 2008-02-25 2010-11-23 Fairchild Semiconductor Corporation Micromodules including integrated thin film inductors
WO2009114115A1 (en) 2008-03-10 2009-09-17 S.E.A. Medical Systems, Inc. Intravenous fluid monitoring
EP2265171B1 (en) 2008-03-12 2016-03-09 The Trustees of the University of Pennsylvania Flexible and scalable sensor arrays for recording and modulating physiologic activity
US8206774B2 (en) 2008-03-13 2012-06-26 Trustees Of Tufts College Diazonium salt modification of silk polymer
US8152744B2 (en) 2008-03-25 2012-04-10 Comfort Lab. Inc. Shoe or insole fitting navigation system
WO2009118678A1 (en) 2008-03-26 2009-10-01 Philips Intellectual Property & Standards Gmbh Light emitting diode device
US8470701B2 (en) 2008-04-03 2013-06-25 Advanced Diamond Technologies, Inc. Printable, flexible and stretchable diamond for thermal management
WO2009126689A2 (en) 2008-04-08 2009-10-15 Trustees Of Tufts College System and method for making biomaterial structures
US7619416B2 (en) 2008-04-17 2009-11-17 Universität Zürich Prorektorat Forschung Eidgenössische Technische Hochschule Coil assembly and multiple coil arrangement for magnetic resonance imaging
JP2009275060A (ja) * 2008-05-12 2009-11-26 Nitto Denko Corp 粘着シート、その粘着シートを使用した被着体の加工方法、及び粘着シート剥離装置
WO2010005707A1 (en) 2008-06-16 2010-01-14 The Board Of Trustees Of The University Of Illinois Medium scale carbon nanotube thin film integrated circuits on flexible plastic substrates
US8207473B2 (en) 2008-06-24 2012-06-26 Imec Method for manufacturing a stretchable electronic device
US20090322480A1 (en) 2008-06-30 2009-12-31 Robert Leon Benedict Rfid tag and method of vehicle attachment thereof
WO2010033901A1 (en) 2008-09-19 2010-03-25 Sensors For Medicine & Science, Inc. Optical sensor assembly
US8679888B2 (en) 2008-09-24 2014-03-25 The Board Of Trustees Of The University Of Illinois Arrays of ultrathin silicon solar microcells
EP2349366B1 (en) 2008-09-26 2013-08-28 Trustees Of Tufts College Active silk muco-adhesives, silk electrogelation process, and devices
WO2010090658A1 (en) 2008-10-02 2010-08-12 Trantzas Constantin M An integrated system to assist in the rehabilitation and/or exercising of a single leg after stroke or other unilateral injury
WO2010042957A2 (en) 2008-10-07 2010-04-15 Mc10, Inc. Systems, devices, and methods utilizing stretchable electronics to measure tire or road surface conditions
US8886334B2 (en) 2008-10-07 2014-11-11 Mc10, Inc. Systems, methods, and devices using stretchable or flexible electronics for medical applications
US9545216B2 (en) 2011-08-05 2017-01-17 Mc10, Inc. Catheter balloon methods and apparatus employing sensing elements
US8097926B2 (en) 2008-10-07 2012-01-17 Mc10, Inc. Systems, methods, and devices having stretchable integrated circuitry for sensing and delivering therapy
US20100271191A1 (en) 2008-10-07 2010-10-28 De Graff Bassel Systems, devices, and methods utilizing stretchable electronics to measure tire or road surface conditions
US9123614B2 (en) 2008-10-07 2015-09-01 Mc10, Inc. Methods and applications of non-planar imaging arrays
EP2349440B1 (en) 2008-10-07 2019-08-21 Mc10, Inc. Catheter balloon having stretchable integrated circuitry and sensor array
US9119533B2 (en) 2008-10-07 2015-09-01 Mc10, Inc. Systems, methods, and devices having stretchable integrated circuitry for sensing and delivering therapy
US8389862B2 (en) 2008-10-07 2013-03-05 Mc10, Inc. Extremely stretchable electronics
US8372726B2 (en) 2008-10-07 2013-02-12 Mc10, Inc. Methods and applications of non-planar imaging arrays
JP5896743B2 (ja) 2008-10-09 2016-03-30 タフツ ユニバーシティー／トラスティーズ オブ タフツ カレッジ グリセロールを含有する改変された絹フィルム
CN102281834B (zh) 2008-10-10 2017-08-22 卡斯滕·尼尔斯·古特 用于植入的装置和用于植入的方法
US8056819B2 (en) 2008-10-14 2011-11-15 Hong Kong Applied Science And Technology Research Institute Co., Ltd. Miniature and multi-band RF coil design
FR2937511B1 (fr) 2008-10-23 2014-05-16 Oreal Dispositif de distribution d'un produit avec ajustement automatique ou semi-automatique des proprietes du produit grace a un capteur d'ambiance integre
US9281239B2 (en) 2008-10-27 2016-03-08 Nxp B.V. Biocompatible electrodes and methods of manufacturing biocompatible electrodes
KR101013557B1 (ko) 2008-11-06 2011-02-14 주식회사 하이닉스반도체 플랙시블 반도체 패키지 및 이를 제조하기 위한 와이어 본딩 장치
EP2902293B1 (en) 2008-11-12 2020-03-04 Mc10, Inc. Methods of making extremely stretchable electronics
WO2010057142A2 (en) 2008-11-17 2010-05-20 Trustees Of Tufts College Surface modification of silk fibroin matrices with poly(ethylene glycol) useful as anti adhesion barriers and anti thrombotic materials
US20110101789A1 (en) 2008-12-01 2011-05-05 Salter Jr Thomas Steven Rf power harvesting circuit
WO2010065957A2 (en) 2008-12-05 2010-06-10 Trustees Of Tufts College Vascularized living skin constructs and methods of use thereof
WO2010082993A2 (en) 2008-12-11 2010-07-22 Mc10, Inc. Systems, methods, and devices using stretchable or flexible electronics for medical applications
WO2010081137A2 (en) 2009-01-12 2010-07-15 Mc10, Inc. Methods and applications of non-planar imaging arrays
GR1006723B (el) 2009-01-16 2010-03-09 ������������ ������������-������� ����������� ����������� ��������� ������� (���� ������� 5%) Ολοκληρωμενο ή τυπωμενο πηνιο σε σχημα μαργαριτας
US20100188799A1 (en) 2009-01-28 2010-07-29 Avx Corporation Controlled esr low inductance capacitor
WO2010086034A1 (en) 2009-01-30 2010-08-05 Interuniversitair Microelektronica Centrum Vzw Stretchable electronic device
WO2010086033A1 (en) 2009-01-30 2010-08-05 Interuniversitair Microelektronica Centrum Vzw Stretchable electronic device
KR100992411B1 (ko) 2009-02-06 2010-11-05 (주)실리콘화일 피사체의 근접여부 판단이 가능한 이미지센서
US8747886B2 (en) 2009-02-12 2014-06-10 Tufts University Nanoimprinting of silk fibroin structures for biomedical and biophotonic applications
EP2404171A4 (en) 2009-03-03 2016-01-27 Mc10 Inc SYSTEMS, METHODS AND DEVICES WITH EXPANDABLE INTEGRATED CIRCUITS FOR MEASUREMENT AND THERAPY ADMINISTRATION
US20120052124A1 (en) 2009-03-04 2012-03-01 Trustees Of Tufts College Silk fibroin systems for antibiotic delivery
US8845187B2 (en) 2009-03-13 2014-09-30 Koninklijke Philips N.V. Zero heat flux temperature sensing device
US10729357B2 (en) 2010-04-22 2020-08-04 Leaf Healthcare, Inc. Systems and methods for generating and/or adjusting a repositioning schedule for a person
EP2413785A4 (en) 2009-04-03 2014-12-10 Intrapace Inc FEEDBACK SYSTEMS AND METHOD FOR IMPROVING TREATMENTS OF OBSTRUCTIVE AND OTHER ADIPOSITAS
US8476668B2 (en) 2009-04-06 2013-07-02 Cree, Inc. High voltage low current surface emitting LED
US8332053B1 (en) 2009-04-28 2012-12-11 Hrl Laboratories, Llc Method for fabrication of a stretchable electronic skin
WO2010132552A1 (en) 2009-05-12 2010-11-18 The Board Of Trustees Of The University Of Illinois Printed assemblies of ultrathin, microscale inorganic light emitting diodes for deformable and semitransparent displays
US20120070427A1 (en) 2009-06-01 2012-03-22 Trustees Of Tufts College Vortex-induced silk fibroin gelation for encapsulation and delivery
US8593256B2 (en) 2009-06-23 2013-11-26 Avery Dennison Corporation Washable RFID device for apparel tracking
US20100327387A1 (en) 2009-06-26 2010-12-30 Ichiro Kasai Avalanche Photodiode
US8183349B2 (en) 2009-06-30 2012-05-22 Abbott Laboratories Markers of XMRV infection and uses thereof
JP4788850B2 (ja) 2009-07-03 2011-10-05 株式会社村田製作所 アンテナモジュール
CA2791403C (en) 2009-07-06 2017-10-17 Autonomous Identity Management Systems Inc. - Aims Gait-based authentication system
JP2011018805A (ja) * 2009-07-09 2011-01-27 Sumitomo Bakelite Co Ltd 半導体用フィルムおよび半導体装置の製造方法
CA2805403A1 (en) 2009-07-10 2011-01-13 Trustees Of Tufts College Bioengineered silk protein-based nucleic acid delivery systems
CA2812635A1 (en) 2009-07-14 2011-01-20 Trustees Of Tufts College Electrospun silk material systems for wound healing
EP2275805A1 (en) 2009-07-16 2011-01-19 Acreo AB Moister sensor
AU2010307268B2 (en) 2009-07-20 2015-05-14 Tufts University/Trustees Of Tufts College All-protein implantable, resorbable reflectors
WO2011011347A2 (en) 2009-07-21 2011-01-27 Trustees Of Tufts College Functionalization of silk material by avidin-biotin interaction
TW201104540A (en) 2009-07-22 2011-02-01 Ritdisplay Corp Capacitive type touch sensor
EP2474054A4 (en) 2009-08-31 2013-03-13 Tufts University Trustees Of Tufts College SILK TRANSISTOR DEVICES
US20110066041A1 (en) 2009-09-15 2011-03-17 Texas Instruments Incorporated Motion/activity, heart-rate and respiration from a single chest-worn sensor, circuits, devices, processes and systems
US20110071603A1 (en) 2009-09-24 2011-03-24 Joshua John Edward Moore Cyclic Heat Therapy Device
US9074302B2 (en) 2009-09-28 2015-07-07 Trustees Of Tufts College Methods of making drawn silk fibers
CA2774643A1 (en) 2009-09-29 2011-04-07 Trustees Of Tufts College Silk nanospheres and microspheres and methods of making same
US20110218756A1 (en) 2009-10-01 2011-09-08 Mc10, Inc. Methods and apparatus for conformal sensing of force and/or acceleration at a person's head
US20120065937A1 (en) 2009-10-01 2012-03-15 Mc10, Inc. Methods and apparatus for measuring technical parameters of equipment, tools and components via conformal electronics
US9099224B2 (en) 2009-10-01 2015-08-04 Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College Apparatus and method for nanocomposite sensors
WO2011041727A1 (en) 2009-10-01 2011-04-07 Mc10, Inc. Protective cases with integrated electronics
US20130192356A1 (en) 2009-10-01 2013-08-01 Mc10, Inc. Methods and apparatus for measuring technical parameters of equipment, tools, and components via conformal electronics
KR101611422B1 (ko) 2009-11-17 2016-04-12 삼성전자주식회사 그래핀과 나노구조체의 복합 구조체 및 그 제조방법
US8390516B2 (en) 2009-11-23 2013-03-05 Harris Corporation Planar communications antenna having an epicyclic structure and isotropic radiation, and associated methods
CN102741865B (zh) 2009-11-30 2016-04-06 康宁股份有限公司 Rfid状况锁存
US10441185B2 (en) 2009-12-16 2019-10-15 The Board Of Trustees Of The University Of Illinois Flexible and stretchable electronic systems for epidermal electronics
US9936574B2 (en) 2009-12-16 2018-04-03 The Board Of Trustees Of The University Of Illinois Waterproof stretchable optoelectronics
EP2513953B1 (en) 2009-12-16 2017-10-18 The Board of Trustees of the University of Illionis Electrophysiology using conformal electronics
EP2509497A4 (en) 2009-12-17 2014-02-05 Mc10 Inc METHOD AND APPARATUS FOR CONFORMANCE COLLECTION OF FORCES AND / OR MOVEMENT CHANGES
US8618914B2 (en) 2010-01-05 2013-12-31 The Regents Of The University Of California MEMS sensor enabled RFID system and method for operating the same
US9057994B2 (en) 2010-01-08 2015-06-16 The Board Of Trustees Of The University Of Illinois High resolution printing of charge
KR101732178B1 (ko) 2010-01-15 2017-05-04 삼성전자주식회사 나노 섬유-나노 와이어 복합체 및 그 제조방법
US8872663B2 (en) 2010-01-19 2014-10-28 Avery Dennison Corporation Medication regimen compliance monitoring systems and methods
WO2011094307A1 (en) 2010-01-26 2011-08-04 Meggitt ( San Juan Capistrano) , Inc. Measurement system using body mounted physically decoupled sensor
US20110185611A1 (en) 2010-01-29 2011-08-04 Global Emergency Resources, Llc Apparatus and method for rapid identification and tracking of individuals in an emergency situation
US8930147B2 (en) 2010-02-05 2015-01-06 Prima-Temp, Inc. Multi-sensor patch and system
JP2011176112A (ja) * 2010-02-24 2011-09-08 Renesas Electronics Corp 半導体集積回路及びその製造方法
WO2011112931A1 (en) 2010-03-12 2011-09-15 The Board Of Trustees Of The University Of Illinois Waterproof stretchable optoelectronics
JP2012013676A (ja) 2010-03-15 2012-01-19 Seiko Instruments Inc 紫外線測定装置および紫外線計測機能付電子腕時計
JP5751728B2 (ja) 2010-03-17 2015-07-22 ザ ボード オブ トラスティーズ オブ ザ ユニヴァーシティー オブ イリノイ 生体吸収性基板上の埋め込み型バイオメディカルデバイス
EP2556392A4 (en) 2010-04-07 2014-03-19 Mc10 Inc METHODS AND APPARATUSES FOR MEASURING TECHNICAL PARAMETERS OF EQUIPMENT, TOOLS AND COMPONENTS VIA ADAPTABLE ELECTRONIC SHEET
GB201005889D0 (en) 2010-04-08 2010-05-26 Cambridge Entpr Ltd Tuning of mechanical properties of polymers
KR101130697B1 (ko) 2010-05-07 2012-04-02 삼성전자주식회사 복수 층의 신축성 배선
ES3041855T3 (en) 2010-05-08 2025-11-17 Univ California Radiofrequency sensing method and apparatus for early detection of pressure ulcers
CN102907184B (zh) 2010-05-20 2016-08-24 3M创新有限公司 柔性电路覆盖膜的附着增强
CN103068346B (zh) 2010-06-11 2016-03-02 W·R·曼德尔 用于对人或哺乳动物的身体部分进行治疗性冷却和加温的装置
US8715204B2 (en) 2010-07-14 2014-05-06 Prima Temp, Inc. Wireless vaginal sensor probe
JP5540960B2 (ja) * 2010-07-15 2014-07-02 日本電気株式会社 機能素子内蔵基板
CN102511129B (zh) 2010-07-23 2014-12-31 松下电器（美国）知识产权公司 近场无线通信装置、以及其控制方法
US8198109B2 (en) 2010-08-27 2012-06-12 Quarkstar Llc Manufacturing methods for solid state light sheet or strip with LEDs connected in series for general illumination
US8035284B2 (en) 2010-09-22 2011-10-11 Bridgelux, Inc. Distributed LED-based light source
US8506158B2 (en) 2010-10-12 2013-08-13 P.S.L. Limited Watch
US20120101413A1 (en) 2010-10-20 2012-04-26 Medtronic Ardian Luxembourg S.a.r.I. Catheter apparatuses having expandable mesh structures for renal neuromodulation and associated systems and methods
CN103313671B (zh) 2010-10-25 2017-06-06 美敦力Af卢森堡有限责任公司 用于神经调节治疗的估算及反馈的装置、系统及方法
US8520399B2 (en) * 2010-10-29 2013-08-27 Palo Alto Research Center Incorporated Stretchable electronics modules and circuits
US8562095B2 (en) 2010-11-01 2013-10-22 The Board Of Trustees Of The University Of Illinois High resolution sensing and control of electrohydrodynamic jet printing
US8456021B2 (en) 2010-11-24 2013-06-04 Texas Instruments Incorporated Integrated circuit device having die bonded to the polymer side of a polymer substrate
FR2968532B1 (fr) 2010-12-14 2013-04-26 Commissariat Energie Atomique Dispositif et procede de determination d'un taux d'excretion d'un fluide corporel par un individu ou un animal
US8391947B2 (en) 2010-12-30 2013-03-05 Biosense Webster (Israel), Ltd. Catheter with sheet array of electrodes
US9442285B2 (en) 2011-01-14 2016-09-13 The Board Of Trustees Of The University Of Illinois Optical component array having adjustable curvature
EP2484750A1 (en) 2011-02-07 2012-08-08 Ecole Polytechnique Fédérale de Lausanne (EPFL) Monitoring system for cell culture
WO2012112407A1 (en) 2011-02-14 2012-08-23 Chung Wayne Wireless physiological sensor system and method
US8581731B2 (en) 2011-02-16 2013-11-12 Connor Kent Purks Circuits, systems, and methods for monitoring and reporting foot impact, foot placement, shoe life, and other running/walking characteristics
EP2683291B1 (en) 2011-03-11 2019-07-31 Proteus Digital Health, Inc. Wearable personal body associated device with various physical configurations
EP2681538B1 (en) 2011-03-11 2019-03-06 Mc10, Inc. Integrated devices to facilitate quantitative assays and diagnostics
KR20120111661A (ko) 2011-04-01 2012-10-10 삼성전자주식회사 신축가능한 전도성 나노섬유, 이를 이용한 신축가능한 섬유전극 및 그 제조방법
JP2012218147A (ja) 2011-04-11 2012-11-12 Imec マイクロキャビティを封止するための方法
CN202068986U (zh) 2011-04-19 2011-12-14 江苏太阳鸟校园服饰有限公司 防紫外线的智能预警服装
US20120279762A1 (en) 2011-05-03 2012-11-08 Industry-Academic Cooperation Foundation, Yonsei University Composition for forming stretchable conductive pattern, method of producing the stretchable conductive pattern using the composition, and electronic device including stretchable conductive electrode
US9765934B2 (en) 2011-05-16 2017-09-19 The Board Of Trustees Of The University Of Illinois Thermally managed LED arrays assembled by printing
KR102000302B1 (ko) 2011-05-27 2019-07-15 엠씨10, 인크 전자, 광학, 및/또는 기계 장치 및 시스템, 그리고 이를 제조하기 위한 방법
US8934965B2 (en) 2011-06-03 2015-01-13 The Board Of Trustees Of The University Of Illinois Conformable actively multiplexed high-density surface electrode array for brain interfacing
US20120316455A1 (en) 2011-06-10 2012-12-13 Aliphcom Wearable device and platform for sensory input
US20130185003A1 (en) 2011-07-14 2013-07-18 Mc10, Inc. Detection of a force on a foot or footwear
US9555644B2 (en) 2011-07-14 2017-01-31 The Board Of Trustees Of The University Of Illinois Non-contact transfer printing
US9757050B2 (en) 2011-08-05 2017-09-12 Mc10, Inc. Catheter balloon employing force sensing elements
US9176530B2 (en) 2011-08-17 2015-11-03 Apple Inc. Bi-stable spring with flexible display
US8702619B2 (en) 2011-08-26 2014-04-22 Symap Holding Limited Mapping sympathetic nerve distribution for renal ablation and catheters for same
EP3470830A1 (en) 2011-09-01 2019-04-17 MC10 Inc. Electronics for detection of a condition of tissue
US20130116520A1 (en) 2011-09-01 2013-05-09 Masoud Roham Single and multi node, semi-disposable wearable medical electronic patches for bio-signal monitoring and robust feature extraction
EP2753242A4 (en) 2011-09-08 2015-01-14 Paofit Holdings Pte Ltd SENSOR DEVICE AND SYSTEM FOR PHYSICAL CONDITIONING EQUIPMENT
US8496842B2 (en) * 2011-09-12 2013-07-30 Texas Instruments Incorporated MEMS device fabricated with integrated circuit
WO2013049716A1 (en) 2011-09-28 2013-04-04 Mc10, Inc. Electronics for detection of a property of a surface
WO2013052919A2 (en) 2011-10-05 2013-04-11 Mc10, Inc. Cardiac catheter employing conformal electronics for mapping
US9105483B2 (en) 2011-10-17 2015-08-11 Invensas Corporation Package-on-package assembly with wire bond vias
US9603560B2 (en) 2012-01-26 2017-03-28 The University Of Akron Flexible electrode for detecting changes in temperature, humidity, and sodium ion concentration in sweat
WO2013116013A1 (en) 2012-02-02 2013-08-08 The United States Government, As Represented By The Department Of Veterans Affairs Integrated surface stimulation device for pain management and wound therapy
EP2626755B1 (en) 2012-02-10 2019-04-10 Nxp B.V. Calibration method, calibration device and measurement device
US20130215467A1 (en) 2012-02-21 2013-08-22 Zih Corp. Method and apparatus for implementing near field communications with a printer
US9184798B2 (en) 2012-03-12 2015-11-10 Broadcom Corporation Near field communications (NFC) device having adjustable gain
US8895864B2 (en) 2012-03-30 2014-11-25 Nokia Corporation Deformable apparatus and method
US20140121540A1 (en) 2012-05-09 2014-05-01 Aliphcom System and method for monitoring the health of a user
US20130316645A1 (en) 2012-05-23 2013-11-28 Health & Life Co., Ltd. Near field communication enabled medical device system
US20130321373A1 (en) 2012-05-31 2013-12-05 Semiconductor Energy Laboratory Co., Ltd. Electronic device, program, and recording medium
US8803089B2 (en) 2012-06-01 2014-08-12 Landauer, Inc. System and method for wireless, motion and position-sensing, integrating radiation sensor for occupational and environmental dosimetry
US9226402B2 (en) 2012-06-11 2015-12-29 Mc10, Inc. Strain isolation structures for stretchable electronics
US20130331914A1 (en) 2012-06-11 2013-12-12 Martin Lee Thermal therapy system and method of use
US9247637B2 (en) 2012-06-11 2016-01-26 Mc10, Inc. Strain relief structures for stretchable interconnects
US8948832B2 (en) 2012-06-22 2015-02-03 Fitbit, Inc. Wearable heart rate monitor
US9295842B2 (en) 2012-07-05 2016-03-29 Mc10, Inc. Catheter or guidewire device including flow sensing and use thereof
JP2015521894A (ja) 2012-07-05 2015-08-03 エムシー１０ インコーポレイテッドＭｃ１０，Ｉｎｃ． 流量センシングを含むカテーテルデバイス
SG11201502203QA (en) 2012-09-21 2015-04-29 Proteus Digital Health Inc Wireless wearable apparatus, system, and method
US9171794B2 (en) 2012-10-09 2015-10-27 Mc10, Inc. Embedding thin chips in polymer
JP2016500869A (ja) 2012-10-09 2016-01-14 エムシー１０ インコーポレイテッドＭｃ１０，Ｉｎｃ． 衣類と一体化されたコンフォーマル電子回路
US20140188426A1 (en) 2012-12-27 2014-07-03 Steven FASTERT Monitoring hit count for impact events
WO2014110176A1 (en) 2013-01-08 2014-07-17 Fastert Steven Application for monitoring a property of a surface
WO2014124044A1 (en) 2013-02-06 2014-08-14 The Board Of Trustees Of The University Of Illinois Self-similar and fractal design for stretchable electronics
US9516743B2 (en) * 2013-02-27 2016-12-06 Apple Inc. Electronic device with reduced-stress flexible display
US8810430B2 (en) 2013-03-04 2014-08-19 Hello Inc. System using wearable device with unique user ID and telemetry system
US20150164377A1 (en) 2013-03-13 2015-06-18 Vaidhi Nathan System and method of body motion analytics recognition and alerting
US10456038B2 (en) 2013-03-15 2019-10-29 Cercacor Laboratories, Inc. Cloud-based physiological monitoring system
US20140308930A1 (en) 2013-04-12 2014-10-16 Bao Tran Timely, glanceable information on a wearable device
CA2915615A1 (en) 2013-05-10 2014-11-13 Amiigo, Inc. Platform for generating sensor data
US9706647B2 (en) 2013-05-14 2017-07-11 Mc10, Inc. Conformal electronics including nested serpentine interconnects
EP3003149A4 (en) 2013-06-03 2017-06-14 Kacyvenski, Isaiah Motion sensor and analysis
US10524661B2 (en) 2013-06-12 2020-01-07 Proactive Live, Inc. Sleep monitoring and stimulation
CA2913483A1 (en) 2013-06-21 2014-12-24 Mc10, Inc. Band with conformable electronics
US20150035743A1 (en) 2013-07-31 2015-02-05 Plantronics, Inc. Wrist Worn Platform for Sensors
WO2015021039A1 (en) 2013-08-05 2015-02-12 Xia Li Flexible temperature sensor including conformable electronics
JP2016532468A (ja) 2013-10-07 2016-10-20 エムシー１０ インコーポレイテッドＭｃ１０，Ｉｎｃ． 検知および分析のためのコンフォーマルセンサシステム
CN105849788A (zh) 2013-10-09 2016-08-10 Mc10股份有限公司 包括共形传感器的实用可穿戴设备
KR102365120B1 (ko) 2013-11-22 2022-02-18 메디데이타 솔루션즈, 인코포레이티드 심장 활동 감지 및 분석용 등각 센서 시스템
EP3089656A4 (en) 2014-01-03 2017-09-06 Mc10, Inc. Integrated devices for low power quantitative measurements
CA2934245A1 (en) 2014-01-03 2015-07-09 Mc10, Inc. Catheter or guidewire device including flow sensing and use thereof
WO2015103580A2 (en) 2014-01-06 2015-07-09 Mc10, Inc. Encapsulated conformal electronic systems and devices, and methods of making and using the same
KR20160124755A (ko) 2014-02-24 2016-10-28 엠씨10, 인크 변형 표시부를 가지는 등각적 전자기기
US10485118B2 (en) 2014-03-04 2019-11-19 Mc10, Inc. Multi-part flexible encapsulation housing for electronic devices and methods of making the same
WO2015138712A1 (en) 2014-03-12 2015-09-17 Mc10, Inc. Quantification of a change in assay
CN106132362A (zh) 2014-03-28 2016-11-16 马里奥·里尼 体温调节装置和方法
US20160015962A1 (en) 2014-07-16 2016-01-21 Mehdi Shokoueinejad Maragheh Smart Patch For Wound Management
US20160086909A1 (en) 2014-09-22 2016-03-24 Mc10, Inc. Methods and apparatuses for shaping and looping bonding wires that serve as stretchable and bendable interconnects
US9899330B2 (en) 2014-10-03 2018-02-20 Mc10, Inc. Flexible electronic circuits with embedded integrated circuit die
US10297572B2 (en) 2014-10-06 2019-05-21 Mc10, Inc. Discrete flexible interconnects for modules of integrated circuits
USD781270S1 (en) 2014-10-15 2017-03-14 Mc10, Inc. Electronic device having antenna
WO2016081244A1 (en) 2014-11-18 2016-05-26 Mc10, Inc. System, device, and method for electronic device activation
US10393414B2 (en) 2014-12-19 2019-08-27 Palo Alto Research Center Incorporated Flexible thermal regulation device
US20160228640A1 (en) 2015-02-05 2016-08-11 Mc10, Inc. Method and system for interacting with an environment
US10477354B2 (en) 2015-02-20 2019-11-12 Mc10, Inc. Automated detection and configuration of wearable devices based on on-body status, location, and/or orientation
US10398343B2 (en) 2015-03-02 2019-09-03 Mc10, Inc. Perspiration sensor
WO2016187536A1 (en) 2015-05-20 2016-11-24 Mc10 Inc. Ultra-thin wearable sensing device
WO2016205385A1 (en) 2015-06-15 2016-12-22 Mc10, Inc. Moisture wicking adhesives for skin-mounted devices
US20160371957A1 (en) 2015-06-22 2016-12-22 Mc10, Inc. Method and system for structural health monitoring
WO2017015000A1 (en) 2015-07-17 2017-01-26 Mc10, Inc. Conductive stiffener, method of making a conductive stiffener, and conductive adhesive and encapsulation layers
WO2017031129A1 (en) 2015-08-19 2017-02-23 Mc10, Inc. Wearable heat flux devices and methods of use
CN108293174A (zh) 2015-09-22 2018-07-17 Mc10股份有限公司 用于众包算法开发的方法和系统
CN108290070A (zh) 2015-10-01 2018-07-17 Mc10股份有限公司 用于与虚拟环境相互作用的方法和系统
US10532211B2 (en) 2015-10-05 2020-01-14 Mc10, Inc. Method and system for neuromodulation and stimulation

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050067293A1 (en) * 2003-09-29 2005-03-31 Toshiki Naito Producing method of flexible wired circuit board
US20110051384A1 (en) * 2006-02-02 2011-03-03 Arno Kriechbaum Printed circuit board element having at least one component embedded therein and method for embedding at least one component in a printed circuit board element
US20080211087A1 (en) * 2006-12-20 2008-09-04 Infineon Technologies Ag Chip module and method for producing a chip module
US20080237840A1 (en) * 2007-03-26 2008-10-02 Endicott Interconnect Technologies, Inc. Flexible circuit electronic package with standoffs
US20100002402A1 (en) * 2008-03-05 2010-01-07 Rogers John A Stretchable and Foldable Electronic Devices
US20120074546A1 (en) * 2010-09-24 2012-03-29 Chooi Mei Chong Multi-chip Semiconductor Packages and Assembly Thereof
US20120091594A1 (en) * 2010-10-18 2012-04-19 Christof Landesberger Method of Producing a Chip Package, and Chip Package

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2907159A4 *

Cited By (67)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9123614B2 (en) 2008-10-07 2015-09-01 Mc10, Inc. Methods and applications of non-planar imaging arrays
US9833190B2 (en) 2008-10-07 2017-12-05 Mc10, Inc. Methods of detecting parameters of a lumen
US9629586B2 (en) 2008-10-07 2017-04-25 Mc10, Inc. Systems, methods, and devices using stretchable or flexible electronics for medical applications
US10383219B2 (en) 2008-10-07 2019-08-13 Mc10, Inc. Extremely stretchable electronics
US10325951B2 (en) 2008-10-07 2019-06-18 Mc10, Inc. Methods and applications of non-planar imaging arrays
US9186060B2 (en) 2008-10-07 2015-11-17 Mc10, Inc. Systems, methods and devices having stretchable integrated circuitry for sensing and delivering therapy
US9119533B2 (en) 2008-10-07 2015-09-01 Mc10, Inc. Systems, methods, and devices having stretchable integrated circuitry for sensing and delivering therapy
US10186546B2 (en) 2008-10-07 2019-01-22 Mc10, Inc. Systems, methods, and devices having stretchable integrated circuitry for sensing and delivering therapy
US9704908B2 (en) 2008-10-07 2017-07-11 Mc10, Inc. Methods and applications of non-planar imaging arrays
US9894757B2 (en) 2008-10-07 2018-02-13 Mc10, Inc. Extremely stretchable electronics
US9655560B2 (en) 2008-10-07 2017-05-23 Mc10, Inc. Catheter balloon having stretchable integrated circuitry and sensor array
US9662069B2 (en) 2008-10-07 2017-05-30 Mc10, Inc. Systems, methods, and devices having stretchable integrated circuitry for sensing and delivering therapy
US9723122B2 (en) 2009-10-01 2017-08-01 Mc10, Inc. Protective cases with integrated electronics
US9702839B2 (en) 2011-03-11 2017-07-11 Mc10, Inc. Integrated devices to facilitate quantitative assays and diagnostics
US9723711B2 (en) 2011-05-27 2017-08-01 Mc10, Inc. Method for fabricating a flexible electronic structure and a flexible electronic structure
US9159635B2 (en) 2011-05-27 2015-10-13 Mc10, Inc. Flexible electronic structure
US9757050B2 (en) 2011-08-05 2017-09-12 Mc10, Inc. Catheter balloon employing force sensing elements
US9622680B2 (en) 2011-08-05 2017-04-18 Mc10, Inc. Catheter balloon methods and apparatus employing sensing elements
US9545216B2 (en) 2011-08-05 2017-01-17 Mc10, Inc. Catheter balloon methods and apparatus employing sensing elements
US9579040B2 (en) 2011-09-01 2017-02-28 Mc10, Inc. Electronics for detection of a condition of tissue
US9545285B2 (en) 2011-10-05 2017-01-17 Mc10, Inc. Cardiac catheter employing conformal electronics for mapping
US9844145B2 (en) 2012-06-11 2017-12-12 Mc10, Inc. Strain isolation structures for stretchable electronics
US9226402B2 (en) 2012-06-11 2015-12-29 Mc10, Inc. Strain isolation structures for stretchable electronics
US9408305B2 (en) 2012-06-11 2016-08-02 Mc10, Inc. Strain isolation structures for stretchable electronics
US9247637B2 (en) 2012-06-11 2016-01-26 Mc10, Inc. Strain relief structures for stretchable interconnects
US9295842B2 (en) 2012-07-05 2016-03-29 Mc10, Inc. Catheter or guidewire device including flow sensing and use thereof
US9168094B2 (en) 2012-07-05 2015-10-27 Mc10, Inc. Catheter device including flow sensing
US9554850B2 (en) 2012-07-05 2017-01-31 Mc10, Inc. Catheter device including flow sensing
US9750421B2 (en) 2012-07-05 2017-09-05 Mc10, Inc. Catheter or guidewire device including flow sensing and use thereof
US9801557B2 (en) 2012-07-05 2017-10-31 Mc10, Inc. Catheter or guidewire device including flow sensing and use thereof
US10296819B2 (en) 2012-10-09 2019-05-21 Mc10, Inc. Conformal electronics integrated with apparel
US9583428B2 (en) 2012-10-09 2017-02-28 Mc10, Inc. Embedding thin chips in polymer
US9846829B2 (en) 2012-10-09 2017-12-19 Mc10, Inc. Conformal electronics integrated with apparel
US9171794B2 (en) 2012-10-09 2015-10-27 Mc10, Inc. Embedding thin chips in polymer
US10032709B2 (en) 2012-10-09 2018-07-24 Mc10, Inc. Embedding thin chips in polymer
US10334724B2 (en) 2013-05-14 2019-06-25 Mc10, Inc. Conformal electronics including nested serpentine interconnects
US9706647B2 (en) 2013-05-14 2017-07-11 Mc10, Inc. Conformal electronics including nested serpentine interconnects
US9372123B2 (en) 2013-08-05 2016-06-21 Mc10, Inc. Flexible temperature sensor including conformable electronics
US10482743B2 (en) 2013-08-05 2019-11-19 Mc10, Inc. Flexible temperature sensor including conformable electronics
US10467926B2 (en) 2013-10-07 2019-11-05 Mc10, Inc. Conformal sensor systems for sensing and analysis
US10258282B2 (en) 2013-11-22 2019-04-16 Mc10, Inc. Conformal sensor systems for sensing and analysis of cardiac activity
US9949691B2 (en) 2013-11-22 2018-04-24 Mc10, Inc. Conformal sensor systems for sensing and analysis of cardiac activity
US10410962B2 (en) 2014-01-06 2019-09-10 Mc10, Inc. Encapsulated conformal electronic systems and devices, and methods of making and using the same
US10485118B2 (en) 2014-03-04 2019-11-19 Mc10, Inc. Multi-part flexible encapsulation housing for electronic devices and methods of making the same
US9810623B2 (en) 2014-03-12 2017-11-07 Mc10, Inc. Quantification of a change in assay
US9899330B2 (en) 2014-10-03 2018-02-20 Mc10, Inc. Flexible electronic circuits with embedded integrated circuit die
JP2017531919A (ja) * 2014-10-03 2017-10-26 エムシー１０ インコーポレイテッドＭｃ１０，Ｉｎｃ． 集積回路ダイが埋設された可撓性電子回路並びにその製造方法及び使用方法
US10297572B2 (en) 2014-10-06 2019-05-21 Mc10, Inc. Discrete flexible interconnects for modules of integrated circuits
USD825537S1 (en) 2014-10-15 2018-08-14 Mc10, Inc. Electronic device having antenna
USD781270S1 (en) 2014-10-15 2017-03-14 Mc10, Inc. Electronic device having antenna
US10986465B2 (en) 2015-02-20 2021-04-20 Medidata Solutions, Inc. Automated detection and configuration of wearable devices based on on-body status, location, and/or orientation
US10477354B2 (en) 2015-02-20 2019-11-12 Mc10, Inc. Automated detection and configuration of wearable devices based on on-body status, location, and/or orientation
US10398343B2 (en) 2015-03-02 2019-09-03 Mc10, Inc. Perspiration sensor
US10653332B2 (en) 2015-07-17 2020-05-19 Mc10, Inc. Conductive stiffener, method of making a conductive stiffener, and conductive adhesive and encapsulation layers
US10709384B2 (en) 2015-08-19 2020-07-14 Mc10, Inc. Wearable heat flux devices and methods of use
US10300371B2 (en) 2015-10-01 2019-05-28 Mc10, Inc. Method and system for interacting with a virtual environment
US10532211B2 (en) 2015-10-05 2020-01-14 Mc10, Inc. Method and system for neuromodulation and stimulation
US9972649B2 (en) 2015-10-21 2018-05-15 Massachusetts Institute Of Technology Nanowire FET imaging system and related techniques
US10567152B2 (en) 2016-02-22 2020-02-18 Mc10, Inc. System, devices, and method for on-body data and power transmission
US10673280B2 (en) 2016-02-22 2020-06-02 Mc10, Inc. System, device, and method for coupled hub and sensor node on-body acquisition of sensor information
US10277386B2 (en) 2016-02-22 2019-04-30 Mc10, Inc. System, devices, and method for on-body data and power transmission
US11154235B2 (en) 2016-04-19 2021-10-26 Medidata Solutions, Inc. Method and system for measuring perspiration
US11992326B2 (en) 2016-04-19 2024-05-28 Medidata Solutions, Inc. Method and system for measuring perspiration
US10447347B2 (en) 2016-08-12 2019-10-15 Mc10, Inc. Wireless charger and high speed data off-loader
US11538094B2 (en) * 2018-02-06 2022-12-27 James Pat Simmons Systems and methods for real-time item identification and sourcing
WO2020162935A1 (en) * 2019-02-06 2020-08-13 Wickersham Jill Anne Systems and methods for real-time item identification and sourcing
US11768262B2 (en) 2019-03-14 2023-09-26 Massachusetts Institute Of Technology Interface responsive to two or more sensor modalities

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US9171794B2 (en) 2015-10-27
KR20150067302A (ko) 2015-06-17
US20170200670A1 (en) 2017-07-13
US20140110859A1 (en) 2014-04-24
EP2907159A4 (en) 2016-06-01
US10032709B2 (en) 2018-07-24
JP2016504751A (ja) 2016-02-12
EP2907159A1 (en) 2015-08-19
CN104798196A (zh) 2015-07-22
US9583428B2 (en) 2017-02-28
US20160111353A1 (en) 2016-04-21

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