US20120321540A1 - Method for producing oligosilanes - Google Patents
Method for producing oligosilanes Download PDFInfo
- Publication number
- US20120321540A1 US20120321540A1 US13/513,384 US201013513384A US2012321540A1 US 20120321540 A1 US20120321540 A1 US 20120321540A1 US 201013513384 A US201013513384 A US 201013513384A US 2012321540 A1 US2012321540 A1 US 2012321540A1
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- Prior art keywords
- catalyst
- metal hydride
- solvent
- alkali metal
- oligosilanes
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/60—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which all the silicon atoms are connected by linkages other than oxygen atoms
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G17/00—Compounds of germanium
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G79/00—Macromolecular compounds obtained by reactions forming a linkage containing atoms other than silicon, sulfur, nitrogen, oxygen, and carbon with or without the latter elements in the main chain of the macromolecule
- C08G79/14—Macromolecular compounds obtained by reactions forming a linkage containing atoms other than silicon, sulfur, nitrogen, oxygen, and carbon with or without the latter elements in the main chain of the macromolecule a linkage containing two or more elements other than carbon, oxygen, nitrogen, sulfur and silicon
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/50—Improvements relating to the production of bulk chemicals
- Y02P20/582—Recycling of unreacted starting or intermediate materials
Definitions
- This disclosure relates to a method for producing oligosilanes.
- Oligosilanes are usually produced by hydrogenation of halogenated silicon compounds with metal or semimetal hydrides. Methods reliant on high reaction temperatures, for example, hydrogenation of halogenated silicon compounds in the absence of solvent are not very suitable for preparing oligosilanes. At high reaction temperatures, decomposition of a silicon compound or of an oligosilane can occur with dissociation of a monosilane, for example. Such dissociation can be effected, for example, as a result of a reductive cleavage of a Si—Si bond. Methods that are sufficiently fast at low reaction temperatures need readily soluble complex metal hydrides. These complex metal hydrides, for example, metal borohydrides or metal aluminum hydrides, are more soluble than alkali or alkaline earth metal hydrides, but lead to a significant increase in manufacturing costs.
- complex metal hydrides for example, metal borohydrides or metal aluminum hydrides, are more soluble than alkali or alkaline earth metal
- Methods for producing oligosilanes are therefore desired to be simpler and more economical to carry out and provide oligosilanes in high purity. It could therefore be helpful to provide an improved and more economical method for producing oligosilanes.
- oligosilanes by reacting halogenated oligosilanes with a metal hydride, wherein the reaction takes place in the presence of a catalyst and of an alkali metal halide, the catalyst comprises a halide of a multivalent metal, and the reaction takes place in an ethereal solvent.
- Oligosilanes are produced according to this method by reacting halogenated oligosilanes with a metal hydride, wherein
- Halogenated oligosilanes are predominantly or completely substituted with halogen atoms. “Oligosilanes” are predominantly or completely substituted with hydrogen atoms. The halogenated oligosilanes are reduced by our method to oligosilanes.
- the oligosilanes and halogenated oligosilanes may each be mixtures of compounds or single compounds. Oligosilanes and halogenated oligosilanes are compounds which either have a single central silicon atom or, if they have two or more silicon atoms, they are interconnected by Si—Si bonds. More particularly, oligosilanes and halogenated oligosilanes have from 1 to 8 silicon atoms.
- a multivalent metal has an oxidation number>1.
- Alkali metal halides herein are not counted as catalysts.
- a reaction mixture may be a solution and more particularly a suspension and may be through-mixed by shaking or stirring.
- the alkali metal halide serves inter alia to improve the solubility of the metal hydride and of other reactive species so that their reactivity is enhanced, or to convert the catalyst into a more reactive form. It is thus the case that in the presence of the alkali metal halide, conversion of halogenated oligosilanes into oligosilanes is accelerated compared with a conventional method in the absence of such an alkali metal halide. This makes it possible to use smaller amounts of catalyst which can act as a Lewis acid. Yet the reaction rate is not adversely affected by the low concentration of catalyst and may even be enhanced. Thus, in our method, the amount of catalyst added can be reduced by the less costly alkali metal halide, to thereby lower manufacturing costs. Alkali metal halides are ecologically unconcerning, and so the method is not just more economical than conventional methods, but also has a lesser environmental impact.
- Combining catalyst and alkali metal halide makes it possible to perform conversion of halogenated oligosilanes to oligosilanes at low reaction temperatures.
- undesired decompositions such as dissociation of monosilanes for example, can be reduced or almost completely prevented. Almost completely is to be understood as meaning to an extent of at least 95% and more particularly to an extent of at least 99%. Since less decomposition occurs, the overall yield of the method increases, making it more economical.
- the desired oligosilanes are also obtained in high purity, since they are less contaminated with decomposition products than is the case with conventional methods.
- Oligosilanes are generally volatile and advantageously removable from the reaction mixture via the gas phase and are thus easy to isolate.
- the catalyst may be used in superstoichiometric quantity relative to the metal hydride. That is, more than one equivalent of catalyst can be used per equivalent of metal hydride.
- the catalyst may be used in a stoichiometric or a substoichiometric amount relative to the metal hydride.
- the catalyst may preferably be used in a substoichiometric amount relative to the metal hydride.
- “Substoichiometric” amount is to be understood as meaning an amount of less than one equivalent. That is, less than one equivalent of catalyst per equivalent of metal hydride can be used in the method.
- the metal hydride may be used in a molar ratio to catalyst ranging from 1:1 to 200:1.
- the metal hydride can be used in a molar ratio to catalyst ranging from 4:1 to 150:1, preferably from 20:1 to 100:1.
- the combination of the catalyst with the alkali metal halide makes it possible to use particularly small amounts of the catalyst in the method.
- the alkali metal halide may be used in a substoichiometric amount relative to the metal hydride.
- the catalyst may be used in a ratio to alkali metal halide of 1:4 to 10:1 and preferably 1:3 to 2:1. Examples of the method in which only small amounts of alkali metal halide are needed are particularly advantageous. Since both the catalyst and alkali metal halide can be used in substoichiometric amounts, the apparatus requirements of the method are also reduced. For example, the reaction mixture is easier to through-mix in those cases where the catalyst and/or the alkali metal halide are not present in solution or only present to a small degree. This in turn facilitates the method.
- the metal hydride may be used in a molar ratio to halide contained in the halogenated oligosilane of 1:1.1 to 5:1 and particularly 1:1 to 1.5:1.
- the method requires only stoichiometric or slightly superstoichiometric amounts of metal hydride per halide in the silane, even in the presence of small amounts of catalyst.
- the molar amount of halide in the halogenated oligosilane is greater than the molar amount of the halogenated oligosilane.
- the molar amount of chloride in the halogenated oligosilane Si 2 Cl 6 is equal to six times the molar amount of Si 2 Cl 6 used.
- a metal hydride may be used which comprises or consists of an alkali metal hydride, an alkaline earth metal hydride or a combination thereof.
- the alkali metal hydride used can be lithium hydride (LiH), sodium hydride (NaH), potassium hydride (KH) and a combination thereof.
- the alkaline earth metal hydride used can be magnesium hydride (MgH 2 ), calcium hydride (CaH 2 ) and a combination thereof.
- alkali metal hydrides or alkaline earth metal hydrides are less costly than the complex hydrides, for example, metal borohydrides or metal aluminum hydrides obtained therefrom. Therefore, our method is more economical than conventional methods involving complex metal hydrides since the alkali metal and/or alkaline earth metal hydrides are activated by adding substoichiometric amounts of catalyst compounds and alkali metal halides. Catalyst compounds are more particularly the catalysts recited hereinbelow.
- Examples of complex hydrides are sodium borohydride, lithium aluminum hydride and Red-Al®.
- alkali metal hydrides and alkaline earth metal hydrides are not just less costly than complex hydrides, they are also easier to handle.
- Some alkali metal hydrides are commercially available at low cost in the form of a dispersion in organic solvents and can also be used in our method in the form of that dispersion.
- the metal hydride in such dispersions is well protected from moisture and atmospheric oxygen. This provides more particularly a technical advantage over conventional methods involving complex metal hydrides, which are very sensitive to moisture and/or atmospheric oxygen. This also makes the method safer since the risk of upsets due to spontaneous, uncontrolled side reactions is reduced.
- a further advantage of alkali metal hydrides and alkaline earth metal hydrides is that, unlike borohydrides or metal borohydrides, they cannot release any volatile toxic compounds such as diborane.
- a metal hydride may be used which comprises or consists of an alkali metal hydride. More particularly, the alkali metal hydride may comprise or consist of lithium hydride.
- lithium hydride is very inexpensive and has a low molecular weight. Furthermore, the mass fraction of hydride is very much larger in lithium hydride than in other metal hydrides. Therefore, the mass of metal hydride used can be reduced compared with other metal hydrides, reducing manufacturing costs and waste. Lithium hydride is advantageously also easy to handle in the form of the pure solid material.
- the reaction may be carried out in an ethereal solvent comprising or consisting of a first solvent having an ether group and optionally a second solvent.
- first solvents which contain at least one ether group, are diethyl ether, tetrahydrofuran, dipropyl ether, butyl methyl ether, dibutyl ether, diphenyl ether, dioxane, dimethoxyethane or diethylene glycol dimethyl ether.
- the ethereal solvent may also comprise or consist of a combination of first solvents. Therefore, the ethereal solvent may contain at least one first solvent having an ether group, also called ether function, or consist thereof.
- a first solvent having an ether function is important for an efficient reaction because it improves solubility and/or is important for stabilizing some species in the reaction mixture.
- Nonlimiting examples of the second solvent which does not contain an ether group, optionally present in the ethereal solvent are aromatic compounds such as toluene, xylene, ethylbenzene or alkanes such as octane, decane or paraffin oil and also mixtures thereof. It is also possible for the reaction mixture to contain a mineral oil as a second solvent.
- the alkyl substituents also represent branched alkyl substituents.
- Propyl thus represents both n-propyl and isopropyl, which means that dipropyl ether, for example, is representative of di-n-propyl ether, n-propyl isopropyl ether and diisopropyl ether.
- butyl represents each of n-butyl, sec-butyl, tert-butyl and isobutyl.
- the solvents are further also representative of the entire family of solvents, i.e., xylene is representative of ortho-, meta- and para-xylene, octane is representative of n-octane or a branched octane, decane is representative of n-decane or a branched decane, or the like.
- Solvents used more particularly in the method have a higher boiling point and hence a lower vapor pressure than the desired product, the oligosilane.
- the solvent does not evaporate as readily as the desired reaction product, and so the oligosilane is preferentially removable from the reaction mixture via the gas phase.
- the oligosilane is thus easy to isolate.
- An example of a possible reaction product is the oligosilane Si 3 H 8 , which has a boiling point of about 60° C. under standard conditions. To produce Si 3 H 8 from Si 3 Cl 8 , therefore, it is preferable to select a solvent having a boiling point of >60° C.
- the catalyst may be a halide of a multivalent metal selected from the group consisting of: aluminum fluoride, aluminum chloride, aluminum bromide, aluminum iodide, gallium fluoride, gallium chloride, gallium bromide, gallium iodide and a combination thereof.
- a catalyst is used more particularly, which comprises or consists of aluminum chloride, aluminum bromide and a combination thereof.
- These inorganic catalysts are generally more economical than boron, aluminum or gallium compounds comprising organic substituents, wherein these organic substituents may be alkyl, aryl or alkoxy substituents for example.
- the inorganic catalysts used in the method are not just less costly than these organically substituted compounds, but they are also easier to handle, since they are not pyrophoric and not so sensitive to moisture and/or atmospheric oxygen. As a result, the above-described advantages are likewise achieved for our method.
- Aluminum chloride may be used as catalyst.
- aluminum chloride in conjunction with an alkali metal halide can be used without further catalysts, which are generally costlier than aluminum chloride. This makes our method more economical than conventional methods. For example, using pure aluminum chloride is less costly than using aluminum bromide since the latter is significantly more expensive. It is therefore thus possible for our method to be more particularly less costly to carry out than other, conventional methods.
- An alkali metal halide may be used, which is selected from the group consisting of: lithium chloride, lithium bromide, lithium iodide, sodium chloride, sodium bromide, sodium iodide and a combination thereof. It is more particularly possible to use an alkali metal halide selected from lithium chloride, lithium bromide and a combination thereof. It is more particularly possible to use lithium bromide as alkali metal halide since it is more soluble in ethereal solvents and, hence, is more reactive than lithium chloride. It is particularly advantageous to have a combination of substoichiometric amounts of lithium bromide with substoichiometric amounts of aluminum chloride as catalyst for the method.
- Halogenated oligosilanes may have a composition represented by the formula Si n H p X m ⁇ p .
- n 1 to 8
- m 2n to 2n+2, 0 ⁇ p ⁇ 0.5*m
- the method may utilize not only linear, branched but also cyclic halogenated oligosilanes in order that the corresponding linear, branched as well as cyclic oligosilanes may be produced.
- the halogenated oligosilanes are oligochlorosilanes which have a composition represented by the formula Si n Cl m .
- Oligosilanes are produced from the halogenated oligosilanes having a composition represented by the formula Si n H q X m ⁇ q , where 0.95*m ⁇ q ⁇ m and more particularly 0.99*m ⁇ q ⁇ m. It is possible for n and m to be selected as described above.
- the reaction may take place at a pressure of 10 hPa to 1500 hPa.
- the reaction can take place more particularly at a pressure of 10 hPa to 500 hPa.
- the reaction can take place at an underpressure, i.e., at below 1000 hPa, as a result of which the reaction product, the oligosilane, is easy to remove from the reaction mixture and, hence, easy to isolate.
- An underpressure reaction further makes it possible to remove the reaction product from the reaction mixture at low temperatures via the gas phase.
- the reaction takes place at a temperature between ⁇ 20° C. and the boiling point of the solvent.
- the reaction can also take place at ⁇ 10° C. to 70° C. and more particularly 0° C. to 40° C.
- the method may comprise the steps of:
- the solvent may have an ether group, i.e., be an ethereal solvent as described above, or a further solvent having an ether group can be added in some other step, so that altogether an ethereal solvent is used in the method.
- the order of the reaction steps mentioned may be any desired, but this order is adopted in particular. Individual reaction steps may take place at the same time or be carried out together. The individual constituents of the reaction mixture may be chosen in accordance with the examples described.
- the metal hydride can be added in step (a) either in pure form, as a suspension in an ethereal solvent or as a dispersion in an organic solvent.
- step (b) the catalyst and the alkali metal halide can be added as solids, in dissolved form and/or as a suspension.
- the two compounds can be used separately from each other or as mixture. When the two compounds are added separately from each other, the order in which they are added is freely choosable.
- the reaction may take place under mixing of liquid and solid phase, for example, by shaking or stirring, more particularly by stirring. Mixing can take place in one or more steps.
- the halogenated oligosilane may be added in step (c) by metered addition. That is, the oligosilane is more particularly added in controlled fashion.
- the oligosilane formed may be removed from the reaction mixture in gaseous form in a further step (d). Isolating and enriching can take place separately. Step (d) can take place simultaneously or partly simultaneously with one or more other steps, more particularly simultaneously or partly simultaneously with step (c).
- alkali metal hydride is initially charged in a solvent which contains at least one ether group or mixtures of solvents which each contain at least one ether group or mixtures of at least one solvent which contains at least one ether group with further solvents which contain no ether groups, and AlCl 3 and lithium bromide LiBr are added.
- Nonlimiting examples of solvents containing at least one ether group are diethyl ether, tetrahydrofuran, dipropyl ether, butyl methyl ether, dibutyl ether, diphenyl ether, dioxane, dimethoxyethane or diethylene glycol dimethyl ether.
- Nonlimiting examples of solvents containing no ether group are aromatic compounds such as toluene, xylene, ethylbenzene or alkanes such as octane, decane or paraffin oil and also mixtures thereof.
- Preference is given to using solvents having a higher boiling point than the particular product. Accordingly, Si 3 H 8 is produced using solvents or solvent mixtures having an atmospheric pressure boiling point >60° C.
- alkali metal hydride examples include LiH, sodium hydride (NaH), potassium hydride (KH) or mixtures thereof. Preference is given to using LiH.
- AlCl 3 and LiBr can be added as solids or in dissolved form.
- the two compounds can be used separately from each other or as a mixture. When the two compounds are added separately from each other, the order of addition is freely choosable.
- the reaction is preferably carried out under mixing of liquid and solid phase, for example, by stirring.
- the silanes are produced at temperatures between ⁇ 20° C. and the boiling point of the solvent or solvent mixture used.
- the reaction temperature is preferably ⁇ 10° C. to 70° C. and more preferably 0° C. to 40° C.
- the method is carried out at a pressure of 10 hPa to 150 kPa.
- the production of Si 3 H 8 at reduced pressure of 10 hPa to 50 kPa is preferred.
- the molar ratio of AlCl 3 used to LiBr used is 1:4 to 10:1 and preferably 1:3 to 2:1.
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- Health & Medical Sciences (AREA)
- Silicon Compounds (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Silicon Polymers (AREA)
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
- Chemical Vapour Deposition (AREA)
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Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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DE102009056731.3 | 2009-12-04 | ||
DE102009056731A DE102009056731A1 (de) | 2009-12-04 | 2009-12-04 | Halogenierte Polysilane und Polygermane |
PCT/EP2010/068995 WO2011067418A1 (de) | 2009-12-04 | 2010-12-06 | Verfahren zur herstellung von oligosilanen |
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US20120321540A1 true US20120321540A1 (en) | 2012-12-20 |
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Family Applications (7)
Application Number | Title | Priority Date | Filing Date |
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US13/512,760 Abandoned US20130043429A1 (en) | 2009-12-04 | 2010-12-06 | Chlorinated oligogermanes and method for the production thereof |
US13/513,217 Abandoned US20120315392A1 (en) | 2009-12-04 | 2010-12-06 | Method for producing hydrogenated polygermasilane and hydrogenated polygermasilane |
US13/513,384 Abandoned US20120321540A1 (en) | 2009-12-04 | 2010-12-06 | Method for producing oligosilanes |
US13/513,036 Abandoned US20130004666A1 (en) | 2009-12-04 | 2010-12-06 | Method for producing hydrogenated polygermane and hydrogenated polygermane |
US13/513,611 Expired - Fee Related US9458294B2 (en) | 2009-12-04 | 2010-12-06 | Method for removing impurities from silicon |
US13/513,018 Expired - Fee Related US9040009B2 (en) | 2009-12-04 | 2010-12-06 | Kinetically stable chlorinated polysilanes and production thereof |
US13/512,999 Expired - Fee Related US9139702B2 (en) | 2009-12-04 | 2010-12-06 | Method for producing halogenated polysilanes |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
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US13/512,760 Abandoned US20130043429A1 (en) | 2009-12-04 | 2010-12-06 | Chlorinated oligogermanes and method for the production thereof |
US13/513,217 Abandoned US20120315392A1 (en) | 2009-12-04 | 2010-12-06 | Method for producing hydrogenated polygermasilane and hydrogenated polygermasilane |
Family Applications After (4)
Application Number | Title | Priority Date | Filing Date |
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US13/513,036 Abandoned US20130004666A1 (en) | 2009-12-04 | 2010-12-06 | Method for producing hydrogenated polygermane and hydrogenated polygermane |
US13/513,611 Expired - Fee Related US9458294B2 (en) | 2009-12-04 | 2010-12-06 | Method for removing impurities from silicon |
US13/513,018 Expired - Fee Related US9040009B2 (en) | 2009-12-04 | 2010-12-06 | Kinetically stable chlorinated polysilanes and production thereof |
US13/512,999 Expired - Fee Related US9139702B2 (en) | 2009-12-04 | 2010-12-06 | Method for producing halogenated polysilanes |
Country Status (9)
Country | Link |
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US (7) | US20130043429A1 (ja) |
EP (7) | EP2507174B1 (ja) |
JP (6) | JP2013512845A (ja) |
CN (3) | CN102639644A (ja) |
BR (2) | BR112012013500A2 (ja) |
CA (2) | CA2782226A1 (ja) |
DE (1) | DE102009056731A1 (ja) |
TW (7) | TW201139283A (ja) |
WO (7) | WO2011067418A1 (ja) |
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DE102009056731A1 (de) | 2009-12-04 | 2011-06-09 | Rev Renewable Energy Ventures, Inc. | Halogenierte Polysilane und Polygermane |
KR20130121001A (ko) | 2010-05-28 | 2013-11-05 | 바스프 에스이 | 리튬/황 배터리에서 팽창 흑연의 용도 |
KR101250172B1 (ko) * | 2012-08-20 | 2013-04-05 | 오씨아이머티리얼즈 주식회사 | 고수율로 모노 게르만 가스를 제조하는 방법 |
DE102012224202A1 (de) * | 2012-12-21 | 2014-07-10 | Evonik Industries Ag | Verfahren zum Hydrieren höherer Halogen-haltiger Silanverbindungen |
DE102013207447A1 (de) * | 2013-04-24 | 2014-10-30 | Evonik Degussa Gmbh | Verfahren und Vorrichtung zur Herstellung von Octachlortrisilan |
DE102013207444A1 (de) * | 2013-04-24 | 2014-10-30 | Evonik Degussa Gmbh | Verfahren und Vorrichtung zur Herstellung von Polychlorsilanen |
US9174853B2 (en) | 2013-12-06 | 2015-11-03 | Gelest Technologies, Inc. | Method for producing high purity germane by a continuous or semi-continuous process |
DE102014007767A1 (de) * | 2014-05-21 | 2015-11-26 | Psc Polysilane Chemicals Gmbh | Verfahren und Vorrichtung zur Herstellung halogenierter Oligosilane aus Silicium und Tetrachlorsilan |
DE102014007685B4 (de) | 2014-05-21 | 2022-04-07 | Sven Holl | Verfahren zur Herstellung von Hexachlordisilan |
DE102014007766A1 (de) * | 2014-05-21 | 2015-11-26 | Psc Polysilane Chemicals Gmbh | Verfahren zur plasmachemischen Herstellung halogenierter Oligosilane aus Tetrachlorsilan |
DE102014007768A1 (de) | 2014-05-21 | 2015-11-26 | Psc Polysilane Chemicals Gmbh | Verfahren zur Herstellung von Mischungen chlorierter Silane mit erhöhten Anteilen von Si4Cl10 und/oder Si5Cl12 |
DE102014013250B4 (de) * | 2014-09-08 | 2021-11-25 | Christian Bauch | Verfahren zur Aufreinigung halogenierter Oligosilane |
US20170334730A1 (en) * | 2014-12-15 | 2017-11-23 | Nagarjuna Fertilizers And Chemicals Limited | Method for producing chlorinated oligosilanes |
DE102016014900A1 (de) * | 2016-12-15 | 2018-06-21 | Psc Polysilane Chemicals Gmbh | Verfahren zur Erhöhung der Reinheit von Oligosilanen und Oligosilanverbindungen |
DE102016225872A1 (de) * | 2016-12-21 | 2018-06-21 | Evonik Degussa Gmbh | Verfahren zur Trennung von Gemischen höherer Silane |
US11771703B2 (en) | 2017-03-17 | 2023-10-03 | The Johns Hopkins University | Targeted epigenetic therapy against distal regulatory element of TGFβ2 expression |
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JP7125062B2 (ja) * | 2019-01-25 | 2022-08-24 | 株式会社東芝 | 判定方法及び処理方法 |
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Cited By (2)
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US20170166452A1 (en) * | 2014-07-22 | 2017-06-15 | Momentive Performance Materials Gmbh | Process For The Cleavage Of Silicon-Silicon Bonds And/Or Silicon-Chlorine Bonds In Mono-, Poly- And/Or Oligosilanes |
US11104582B2 (en) * | 2014-07-22 | 2021-08-31 | Momentive Performance Materials Gmbh | Process for the cleavage of silicon-silicon bonds and/or silicon-chlorine bonds in mono-, poly- and/or oligosilanes |
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