JP4870719B2 - モノスゲート構造を有する不揮発性メモリ素子 - Google Patents
モノスゲート構造を有する不揮発性メモリ素子 Download PDFInfo
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- JP4870719B2 JP4870719B2 JP2008123882A JP2008123882A JP4870719B2 JP 4870719 B2 JP4870719 B2 JP 4870719B2 JP 2008123882 A JP2008123882 A JP 2008123882A JP 2008123882 A JP2008123882 A JP 2008123882A JP 4870719 B2 JP4870719 B2 JP 4870719B2
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- 239000004065 semiconductor Substances 0.000 claims description 48
- 239000000758 substrate Substances 0.000 claims description 43
- 230000002093 peripheral effect Effects 0.000 claims description 26
- 239000012535 impurity Substances 0.000 claims description 15
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 12
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 12
- 239000010410 layer Substances 0.000 description 35
- 238000000034 method Methods 0.000 description 23
- 238000004519 manufacturing process Methods 0.000 description 17
- 229920002120 photoresistant polymer Polymers 0.000 description 17
- 238000002955 isolation Methods 0.000 description 14
- 239000011229 interlayer Substances 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 238000002161 passivation Methods 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 4
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B99/00—Subject matter not provided for in other groups of this subclass
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/105—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including field-effect components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/792—Field effect transistors with field effect produced by an insulated gate with charge trapping gate insulator, e.g. MNOS-memory transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
- H10B41/41—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region of a memory region comprising a cell select transistor, e.g. NAND
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Description
3 素子分離膜
5 第1ウェル
7a ポケットウェル
7b 第2ウェル
9 トンネル酸化膜
11 シリコン窒化膜パターン
13 上部酸化膜パターン
14 セルゲート絶縁膜
17 高電圧ゲート絶縁膜
23c セルゲート電極
23h 高電圧ゲート電極
24c セルゲートパターン
24h 高電圧ゲートパターン
24s 選択ゲートパターン
25 低濃度ソース/ドレーン領域
30h 高電圧ソース/ドレーン領域
a セルアレイ領域
b 周辺回路領域
Claims (6)
- セルアレイ領域及び周辺回路領域を有する不揮発性メモリ素子において、
前記セルアレイ領域のうちの半導体基板の上に順次にスタックされた選択ゲート絶縁膜及び選択ゲート電極で構成された選択ゲートパターン有する選択トランジスタと、
前記セルアレイ領域のうちの半導体基板の上に順次にスタックされたセルゲート絶縁膜及びセルゲート電極で構成されたセルゲートパターンを有し、前記セルゲート絶縁膜は、順次にスタックされたトンネル酸化膜、シリコン窒化膜及び上部酸化膜で構成されたセルトランジスタと、
前記周辺回路領域のうちの半導体基板の上に順次にスタックされた高電圧ゲート絶縁膜及び高電圧ゲート電極で構成された高電圧ゲートパターンを有し、前記高電圧ゲート絶縁膜は、第1ゲート酸化膜で形成された高電圧モストランジスタと、
前記周辺回路領域のうちの半導体基板の上に順次にスタックされた低電圧ゲート絶縁膜及び低電圧ゲート電極で構成された低電極ゲートパターンを有する低電圧モストランジスタとを含み、
前記低電圧ゲート絶縁膜は、前記第1ゲート酸化膜より薄い第2ゲート酸化膜で形成され、前記第2ゲート酸化膜は、前記セルゲート絶縁膜の等価酸化膜厚さより薄く、
前記セルアレイ領域のうちの前記半導体基板に形成されたポケットウェル、及び前記ポケットウェルを囲む第1ウェルをさらに含み、前記セルトランジスタ及び前記選択トランジスタは、前記ポケットウェルのうちに形成され、
前記選択ゲート絶縁膜は前記第2ゲート酸化膜または前記セルゲート絶縁膜で形成され、
前記トンネル酸化膜は前記セルアレイ領域のうちの半導体基板に直接接しており、及び前記上部酸化膜は前記セルゲート電極に直接接していることを特徴とする不揮発性メモリ素子。 - 前記選択ゲートパターンの両側の前記半導体基板及び前記セルゲートパターンの両側の前記半導体基板に形成された第1ソース/ドレーン領域をさらに含むことを特徴とする請求項1に記載の不揮発性メモリ素子。
- 前記低電圧ゲートパターンの両側の前記半導体基板に形成された第2ソース/ドレーン領域をさらに含み、前記第2ソース/ドレーン領域は、前記第1ソース/ドレーン領域の不純物濃度より濃い不純物濃度である高濃度ソース/ドレーン領域を有するLDD構造であることを特徴とする請求項2に記載の不揮発性メモリ素子。
- 前記高電圧ゲートパターンの両側の前記半導体基板に形成された第3ソース/ドレーン領域をさらに含み、前記第3ソース/ドレーン領域は、前記第1ソース/ドレーン領域の不純物濃度より濃い不純物濃度である高濃度ソース/ドレーン領域を有するLDD構造であり、前記第2ソース/ドレーン領域の高濃度ソース/ドレーン領域は、前記第3ソース/ドレーン領域の高濃度ソース/ドレーン領域における不純物濃度と同一又はそれより低い不純物濃度であることを特徴とする請求項3に記載の不揮発性メモリ素子。
- 前記第3ソース/ドレーン領域は、前記第2ソース/ドレーン領域より深いことを特徴とする請求項4に記載の不揮発性メモリ素子。
- 前記周辺回路領域のうちの前記半導体基板の所定領域で形成された第2ウェルをさらに含み、前記低電圧モストランジスタは、前記第2ウェルのうちに形成されることを特徴とする請求項1に記載の不揮発性メモリ素子。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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KR10-2001-0013930A KR100414211B1 (ko) | 2001-03-17 | 2001-03-17 | 모노스 게이트 구조를 갖는 비휘발성 메모리소자 및 그제조방법 |
KR2001-013930 | 2001-03-17 |
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JP2002070792A Division JP4610840B2 (ja) | 2001-03-17 | 2002-03-14 | モノスゲート構造を有する不揮発性メモリ素子の製造方法 |
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JP2008258642A JP2008258642A (ja) | 2008-10-23 |
JP4870719B2 true JP4870719B2 (ja) | 2012-02-08 |
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JP2002070792A Expired - Fee Related JP4610840B2 (ja) | 2001-03-17 | 2002-03-14 | モノスゲート構造を有する不揮発性メモリ素子の製造方法 |
JP2008123882A Expired - Fee Related JP4870719B2 (ja) | 2001-03-17 | 2008-05-09 | モノスゲート構造を有する不揮発性メモリ素子 |
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US (2) | US6750525B2 (ja) |
JP (2) | JP4610840B2 (ja) |
KR (1) | KR100414211B1 (ja) |
TW (1) | TW494573B (ja) |
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JP6649855B2 (ja) * | 2016-08-10 | 2020-02-19 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
US10504899B2 (en) * | 2017-11-30 | 2019-12-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | Transistors with various threshold voltages and method for manufacturing the same |
US11011535B1 (en) | 2019-12-22 | 2021-05-18 | United Microelectronics Corp. | Semiconductor device with integrated memory devices and MOS devices and process of making the same |
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Publication number | Priority date | Publication date | Assignee | Title |
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JPH05110109A (ja) * | 1991-10-14 | 1993-04-30 | Toshiba Corp | 半導体装置およびその製造方法 |
JPH0653519A (ja) * | 1992-07-28 | 1994-02-25 | Citizen Watch Co Ltd | 半導体不揮発性メモリおよびその製造方法 |
KR960012303B1 (ko) * | 1992-08-18 | 1996-09-18 | 삼성전자 주식회사 | 불휘발성 반도체메모리장치 및 그 제조방법 |
JPH06244434A (ja) * | 1993-02-18 | 1994-09-02 | Rohm Co Ltd | 不揮発性記憶装置及びその製造方法 |
JP3383428B2 (ja) * | 1994-08-19 | 2003-03-04 | 株式会社東芝 | 半導体記憶装置 |
JPH08148586A (ja) * | 1994-11-21 | 1996-06-07 | Toshiba Corp | 半導体装置の製造方法 |
JPH08306889A (ja) * | 1995-05-08 | 1996-11-22 | Toshiba Corp | 不揮発性半導体記憶装置及びその製造方法 |
US6518617B1 (en) * | 1996-12-31 | 2003-02-11 | Sony Corporation | Nonvolatile semiconductor memory device |
US6103572A (en) | 1997-02-07 | 2000-08-15 | Citizen Watch Co., Ltd. | Method of fabricating a semiconductor nonvolatile storage device |
JPH10247692A (ja) * | 1997-03-04 | 1998-09-14 | Sony Corp | 不揮発性記憶素子 |
US5953599A (en) * | 1997-06-12 | 1999-09-14 | National Semiconductor Corporation | Method for forming low-voltage CMOS transistors with a thin layer of gate oxide and high-voltage CMOS transistors with a thick layer of gate oxide |
US5861347A (en) * | 1997-07-03 | 1999-01-19 | Motorola Inc. | Method for forming a high voltage gate dielectric for use in integrated circuit |
KR100250729B1 (ko) * | 1997-08-30 | 2000-04-01 | 김영환 | 반도체 소자의 트랜지스터 제조방법 |
KR19990060607A (ko) * | 1997-12-31 | 1999-07-26 | 윤종용 | 비휘발성 메모리 장치 및 그 제조 방법 |
JP3113240B2 (ja) * | 1999-02-24 | 2000-11-27 | 株式会社東芝 | 不揮発性半導体記憶装置とその製造方法 |
JP2000031436A (ja) * | 1998-07-09 | 2000-01-28 | Toshiba Corp | 半導体記憶装置およびその製造方法 |
KR20000032294A (ko) * | 1998-11-13 | 2000-06-15 | 윤종용 | 노어형 플래시 메모리 장치 |
JP2002026153A (ja) * | 2000-07-10 | 2002-01-25 | Toshiba Corp | 半導体メモリ |
JP2001060675A (ja) * | 1999-08-23 | 2001-03-06 | Sony Corp | 不揮発性の電気的書き換えが可能な半導体メモリ素子 |
JP2001102553A (ja) * | 1999-09-29 | 2001-04-13 | Sony Corp | 半導体装置、その駆動方法および製造方法 |
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2001
- 2001-03-17 KR KR10-2001-0013930A patent/KR100414211B1/ko active IP Right Grant
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2002
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-
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Also Published As
Publication number | Publication date |
---|---|
US20020130314A1 (en) | 2002-09-19 |
KR20020073959A (ko) | 2002-09-28 |
US6750525B2 (en) | 2004-06-15 |
TW494573B (en) | 2002-07-11 |
US20030205728A1 (en) | 2003-11-06 |
US6734065B2 (en) | 2004-05-11 |
JP2002324860A (ja) | 2002-11-08 |
JP2008258642A (ja) | 2008-10-23 |
KR100414211B1 (ko) | 2004-01-07 |
JP4610840B2 (ja) | 2011-01-12 |
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