JP4463843B2 - リソグラフィ装置及びデバイス製造方法 - Google Patents
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
- G03F9/7034—Leveling
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
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- Public Health (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Description
投影放射線ビームを供給する放射系と、
所望のパターンに従って該投影ビームをパターニングするように働くパターニング手段を支持する支持構造と、
基板を保持する基板テーブルと、
基板の目標部分上にパターニングされたビームを投影する投影系と、
前記投影系の最終段要素と前記基板との間の空間を液体で充填する液体供給系と、
前記基板上の点の位置を測定する測定系と
を備えたリソグラフィ投影装置に関する。
マスク。マスクの概念はリソグラフィで公知であり、これは、バイナリ交替位相シフト及び減衰位相シフトマスク・タイプ並びに各種ハイブリッド・マスク・タイプなどのマスク・タイプを含む。放射線ビーム中にそのようなマスクを配置することによって、マスク上のパターンに従って、マスクに投射する放射線を(透過性マスクの場合)選択的に透過させ、又は(反射性マスクの場合に)反射させる。マスクの場合、支持体構造は、一般にマスク・テーブルであり、これによって確実にマスクを入射放射線ビーム中の所望の位置に保持することが可能になり、必要ならばビームに対して移動できるようになる。
プログラム可能ミラー・アレイ。このようなデバイスの一例は、粘弾性制御層及び反射面を有するマトリックス・アドレス指定可能面である。そのような装置を支える基本原理は、(たとえば)反射面のアドレス指定領域で入射光が回折光として反射し、一方アドレス指定されていない領域で入射光が非回折光として反射することである。適切なフィルタを使用して、上記の非回折光を反射ビームからフィルタ除去して、後方に回折光のみを残すことが可能であり、この方式で、マトリックス・アドレス指定可能面のアドレス指定パターンに従ってビームがパターニングされる。プログラム可能ミラー・アレイの一代替例では、複数の微小ミラーからなるマトリックス配列を使用する。各微小ミラーは、適切な局所電界を印加するか、圧電作動手段を使用することにより、軸に対してそれぞれ傾けることが可能である。やはり、このミラーもマトリックス・アドレス指定可能であり、その結果、アドレス指定されたミラーが入射放射ビームをアドレス指定されていないミラーと異なる方向に反射するようになっている。このようにして、反射したビームはマトリックス・アドレス指定可能ミラーのアドレス指定パターンに従ってパターニングされる。必要なマトリックス・アドレス指定は、適切な電子手段を使用して実行することができる。上記の事例の双方において、パターニング手段は1つ又は複数のプラグラム可能ミラー・アレイを備えることが可能である。このようなミラー・アレイに関するさらなる情報は、たとえば米国特許US5296891及びUS5523193、並びにPCT特許出願WO98/38597及びWO98/33096から得ることができ、これらは、参照として本明細書に組み込まれる。プログラム可能ミラー・アレイの場合、上記の支持体構造は、必要に応じて固定又は可動にできる、たとえばフレーム又はテーブルとして具現化できる。
プログラム可能LCDアレイ。そのような構造の例は、米国特許US5229872に示されており、該特許は参照として本明細書に組み込まれる。上述のように、この場合の支持体構造は、必要に応じて固定又は可動にできる、たとえばフレーム又はテーブルとして具現化できる。
話を簡単にするために、本文書の残りでは、ある種の設定の下、マスク及びマスク・テーブルを含む例が特に対象となるが、そのような例で考察する一般的原理は、本明細書で先に示したパターニング方法のより広範な文脈で理解されるべきである。
少なくとも部分的に感放射線材料の層で覆われた基板を、基準マークを有する基板テーブル上で準備するステップと、
測定系から投影された測定ビームを用いて前記基板上の点の位置を測定するステップと、
放射系を用いて投影放射線ビームを供給するステップと、
液体を供給して基板と前記投影ステップで用いた投影系の最終段要素との間の空間を充填するステップと、
パターニング手段を使用して、投影ビームにその断面においてパターンを与えるステップと、
感放射線材料の層の目標部分上にパターニングされた放射線ビームを投影するステップと
を含み、
前記測定ビームは前記液体を経由して投影されないことを特徴とする。
放射線投影ビームPB(たとえばUV放射線)を供給する放射系Ex、IL(この特定の例では、これはさらに放射線源LAを備えている)、
マスクMA(たとえばレチクル)を保持するマスク・ホルダを備え、物品PLに対して正確にマスクを位置決めする第1位置決め手段に接続された第1物体テーブル(マスク・テーブル)MT、
基板W(たとえばレジスト被覆されたシリコン・ウェーハ)を保持する基板ホルダを備え、物品PLに対して正確に基板を位置決めする第2位置決め手段に接続された第2物体テーブル(基板テーブル)WT、並びに、
基板Wの目標(target)部分C(たとえば1つ又は複数のダイを含む)に対してマスクMAの被放射部分を結像するための投影系(「レンズ」)PL(たとえば回折レンズ系)。
ここで示したように、該装置は(たとえば透過マスクを有する)透過型のものである。ただし、一般には、該装置はたとえば、(たとえば反射マスクを備えた)反射型のものでもよい。あるいは、該装置は、先に示したプログラム可能ミラー・アレイなど、他の種類のパターニング手段を使用してもよい。
1.ステップ・モードでは、マスク・テーブルMTは基本的に静止状態に維持され、マスク・イメージ全体は1回の行程(one go)(すなわち1回のフラッシュ)で目標部分C上に投影される。次いで、基板テーブルWTはx及び/又はy方向にシフトして、ビームPBが別の目標部分Cを照射できるようにされる。
2.スキャン・モードでは、基本的に同様の手順が適用されるが、所与の目標部分Cが1回の「フラッシュ」で露光されない点が異なる。その代わりに、マスク・テーブルMTは所与の方向(いわゆる「スキャン方向」、たとえばy方向)に速度vで移動可能であり、その結果投影ビームPBがマスク・イメージ上をスキャンするようになる。これと共に、基板テーブルWTは同一方向又は反対方向に速度V=Mvで同時に移動し、ただし、Mは投影系PLの倍率(通常はM=1/4又は1/5)である。このようにして、分解能を犠牲にする必要がない状況で比較的広い目標部分Cが露光可能になる。
12 封止部材
14 出口
15 入口
16 封止ガス
18 液体供給手段
30 測定系
AM 調節手段
C 目標部分
CO 集光装置
Ex 放射系(ビーム拡大器)
F1 基準部
IF 干渉計測定手段
IL 照射系(照射装置)
IN インテグレータ
IN 入口
LA 放射線源
MA マスク
MT マスクテーブル
OUT 出口
PB ビーム
PL 投影系
W 基板
WT 基板テーブル
Claims (11)
- 投影放射線ビームを供給する放射系と、
所望のパターンに従って該投影ビームをパターニングするように働くパターニング手段を支持する支持構造と、
基板を保持する基板テーブルと、
基板の目標部分上にパターニングされたビームを投影する投影系と、
前記投影系の最終段要素と前記基板との間であって封止部材の内部空間を液体で充填する液体供給系と、
前記基板上の点の位置を測定する測定系と
を備えたリソグラフィ投影装置であって、
前記測定系が前記封止部材の外側において、前記液体供給系の前記液体を介さずに、前記液体とは異なる前記基板と前記測定系の間に供給される液体を介して前記基板上の点の位置を測定するように構成されたことを特徴とする
リソグラフィ投影装置。 - 前記測定系が、前記基板上の複数のアライメント・マークの位置を測定するアライメント系を備えている、請求項1に記載のリソグラフィ投影装置。
- 前記基板テーブルは基準部を有し、前記測定系は、前記供給系の前記液体を介さずに前記基準部の位置を測定する、請求項1又は2に記載のリソグラフィ投影装置。
- 前記測定系は、前記基板上の複数の前記アライメント・マークの位置を前記基板テーブル上の前記基準に対して測定する、請求項3に記載のリソグラフィ投影装置。
- 前記測定系は前記基板上の点の高さ及び/又は傾きを測定する平準度センサを備えた、請求項1から4までのいずれか一項に記載のリソグラフィ投影装置。
- 前記基板を露光できる露光ステーション及び別の測定ステーションを有しており、前記測定系は前記測定ステーションに設けられ、前記基板テーブルは前記露光ステーションと前記測定ステーションの間で可動である、請求項1から5までのいずれか一項に記載のリソグラフィ投影装置。
- 複数の基板テーブルを有し、各基板テーブルが露光ステーションと測定ステーションの間で可動である、請求項6に記載のリソグラフィ投影装置。
- 前記基準部が透過イメージ・センサである、請求項1から7までのいずれか一項に記載のリソグラフィ投影装置。
- デバイス製造方法であって、
少なくとも部分的に感放射線材料の層で覆われた基板を、基準マークを有する基板テーブル上で準備するステップと、
測定系から投影された測定ビームを用いて前記基板上の点の位置を測定するステップと、
放射系を用いて投影放射線ビームを供給するステップと、
基板と前記投影ステップで用いた投影系の最終段要素との間であって封止部材の内部空間を液体で充填するステップと、
パターニング手段を使用して、投影ビームにその断面においてパターンを与えるステップと、
感放射線材料の層の目標部分上にパターニングされた放射線ビームを投影するステップと
を含み、
前記測定ビームは前記封止部材の外側において、前記液体供給系の前記液体を介さずに、前記液体とは異なる前記基板と前記測定系の間に供給される液体を介して投影されることを特徴とする、
デバイス製造方法。 - 位置を測定するステップは、前記基板上のアライメント・マークの位置を測定することを含む、請求項9に記載のデバイス製造方法。
- 位置を測定するステップは、前記基板上の点の高さ及び/又は傾きを測定することを含む、請求項9又は10に記載のデバイス製造方法。
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-
2003
- 2003-11-07 SG SG200306810A patent/SG121822A1/en unknown
- 2003-11-11 CN CNB2003101143979A patent/CN100562805C/zh not_active Expired - Lifetime
- 2003-11-11 JP JP2003381339A patent/JP4234567B2/ja not_active Expired - Fee Related
- 2003-11-11 KR KR1020030079513A patent/KR100588123B1/ko active IP Right Grant
- 2003-11-11 TW TW092131522A patent/TWI240851B/zh not_active IP Right Cessation
- 2003-11-12 US US10/705,816 patent/US7193232B2/en active Active
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2006
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- 2007-10-04 JP JP2007260925A patent/JP4463843B2/ja not_active Expired - Fee Related
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- 2008-12-19 US US12/318,036 patent/US7795603B2/en not_active Expired - Fee Related
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Also Published As
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US20090184270A1 (en) | 2009-07-23 |
US7795603B2 (en) | 2010-09-14 |
US8344341B2 (en) | 2013-01-01 |
KR20040044125A (ko) | 2004-05-27 |
US20040136494A1 (en) | 2004-07-15 |
SG121822A1 (en) | 2006-05-26 |
TWI240851B (en) | 2005-10-01 |
JP2004165666A (ja) | 2004-06-10 |
JP4234567B2 (ja) | 2009-03-04 |
US20160062248A1 (en) | 2016-03-03 |
KR100588123B1 (ko) | 2006-06-09 |
CN100562805C (zh) | 2009-11-25 |
JP4463863B2 (ja) | 2010-05-19 |
US20130128256A1 (en) | 2013-05-23 |
US20110027721A1 (en) | 2011-02-03 |
US20070040133A1 (en) | 2007-02-22 |
JP2008022038A (ja) | 2008-01-31 |
JP2008311684A (ja) | 2008-12-25 |
TW200421041A (en) | 2004-10-16 |
CN1499298A (zh) | 2004-05-26 |
US7482611B2 (en) | 2009-01-27 |
US9195153B2 (en) | 2015-11-24 |
US7193232B2 (en) | 2007-03-20 |
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