JP2011521470A - 静電チャック - Google Patents
静電チャック Download PDFInfo
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- 239000000758 substrate Substances 0.000 claims abstract description 223
- 239000002344 surface layer Substances 0.000 claims abstract description 68
- 239000002245 particle Substances 0.000 claims description 121
- 239000010410 layer Substances 0.000 claims description 84
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 66
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 66
- 239000000203 mixture Substances 0.000 claims description 41
- 239000000463 material Substances 0.000 claims description 40
- 238000005498 polishing Methods 0.000 claims description 37
- 239000003989 dielectric material Substances 0.000 claims description 23
- 238000000576 coating method Methods 0.000 claims description 18
- 238000009826 distribution Methods 0.000 claims description 18
- 238000004519 manufacturing process Methods 0.000 claims description 18
- 239000011248 coating agent Substances 0.000 claims description 17
- 230000003746 surface roughness Effects 0.000 claims description 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 12
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 12
- 238000001020 plasma etching Methods 0.000 claims description 11
- 238000005530 etching Methods 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 230000000694 effects Effects 0.000 claims description 7
- 238000000059 patterning Methods 0.000 claims description 7
- 230000001464 adherent effect Effects 0.000 claims description 6
- 239000011324 bead Substances 0.000 claims description 6
- 238000005422 blasting Methods 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 6
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 4
- 239000007833 carbon precursor Substances 0.000 claims description 4
- 239000003610 charcoal Substances 0.000 claims description 4
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 4
- 238000000206 photolithography Methods 0.000 claims description 4
- 239000012686 silicon precursor Substances 0.000 claims description 4
- 229910000676 Si alloy Inorganic materials 0.000 claims description 3
- 239000002345 surface coating layer Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 123
- 235000012431 wafers Nutrition 0.000 description 94
- 238000000034 method Methods 0.000 description 56
- 230000008569 process Effects 0.000 description 40
- 239000000112 cooling gas Substances 0.000 description 15
- 239000010408 film Substances 0.000 description 15
- 238000012546 transfer Methods 0.000 description 14
- 239000004065 semiconductor Substances 0.000 description 11
- 229910052799 carbon Inorganic materials 0.000 description 9
- 238000012545 processing Methods 0.000 description 9
- 239000000919 ceramic Substances 0.000 description 8
- 239000001307 helium Substances 0.000 description 7
- 229910052734 helium Inorganic materials 0.000 description 7
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 7
- 230000002596 correlated effect Effects 0.000 description 6
- 230000000875 corresponding effect Effects 0.000 description 6
- 238000010884 ion-beam technique Methods 0.000 description 6
- 239000012790 adhesive layer Substances 0.000 description 5
- 238000001816 cooling Methods 0.000 description 5
- 238000005240 physical vapour deposition Methods 0.000 description 5
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 5
- 239000002243 precursor Substances 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 4
- 239000011253 protective coating Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 239000002826 coolant Substances 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- 238000004377 microelectronic Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 239000013529 heat transfer fluid Substances 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000007665 sagging Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 241000135309 Processus Species 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000012636 effector Substances 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002065 inelastic X-ray scattering Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 239000012815 thermoplastic material Substances 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/6875—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of individual support members, e.g. support posts or protrusions
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
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Abstract
Description
本出願は、2008年5月19日に出願された米国特許仮出願第61/054259号(件名「Electrostatic Chuck」)、ならびに2008年9月5日に出願された米国特許仮出願第61/094700号(件名「Electrostatic Chuck」)の利益を主張するものである。これらの出願の教示はすべて、参照によって本明細書に組み込まれている。
この実施例では、本発明の一実施形態による、静電チャックの表面に形成した、三角形パターンの、高さ6ミクロンのバンプ群(突起群)について計算された力について説明する。図8の実施形態に示すように、一例は、突起群801を含んでおり、突起群801は、中心から中心までの間隔827が4ミリメートルであり、直径828が0.75ミリメートルである。図8の実施形態では、突起群801は、Si源およびC源からPECVDによってアルミナ誘電体層の上に蒸着された、10ミクロン厚のSiCから作製することが可能である。SiCは、低応力である。SiC層を、30ミクロンのフォトマスクを介する反応性イオンエッチングでエッチングして、突起群を形成することが可能である。ガスシール環は、静電チャックの外周の周囲、ならびに静電チャックのリフトピンホールおよびグラウンドピンホールの周囲に形成可能である。ガス(たとえば、ヘリウムまたは水素または別のガス熱移動用流体)を追加したり除去したりするためのガスポートを、チャック内に形成することが可能である。
この実施例では、本発明の一実施形態による、静電チャックの表面に形成した、三角形パターンの、中心から中心までの突起間隔が8ミリメートルである突起群について説明する。突起群の直径は、0.5ミリメートルであった。静電チャックのプラテン上の突起群は、3つのセクションに分割されており、異なる材料(SiC、炭素が欠乏している非化学量論的SiC、およびSiセクション)から作製されている。個々のセクションは、PECVDにより、好適な前駆体ガスをアルミナ誘電体層上に堆積させて作製されている。これらのセクションを、30ミクロンのフォトマスクを介する反応性イオンエッチングでエッチングして、突起群を形成した。ガスシール環は、静電チャックの外周の周囲、ならびに静電チャックのリフトピンホールおよびグラウンドピンホールの周囲に形成することが可能である。ガス(たとえば、ヘリウムまたは水素または別のガス熱移動用流体)を追加したり除去したりするためのガスポートを、チャック内に形成することが可能である。
Claims (39)
- 静電チャックであって、
電極と、
表面層と、を備え、前記表面層は、前記電極の電圧によって活性化されて、基板を前記静電チャックに静電的にクランプする電荷を形成し、前記表面層は、複数の突起(突起群)を含み、前記突起群は、前記突起群を囲む前記表面層の複数部分の上の、ある高さまで伸びることにより、前記基板が静電クランプされている間、前記基板を前記突起群の上で支持し、前記突起群は、隣接する突起のペアの中心から中心までの距離として測定される間隔が、前記表面層の全体にわたって、ほぼ等しくなるように配置される、
静電チャック。 - 前記突起群は、三角形パターンで配置される、請求項1に記載の静電チャック。
- 前記静電クランプ中に前記基板が加熱されている場合に、前記基板の温度および温度分布のうちの少なくとも1つが、前記基板と、前記突起群と、前記突起群を囲む前記表面層の前記複数部分との間の空間におけるガスのガス熱伝導によって、ほぼ制御されるように、前記突起群の前記高さと接触面積と粗度とのうちの少なくとも1つが設定されている、請求項1に記載の静電チャック。
- 前記突起群のそれぞれの上部面積のうちの、約25%、約50%、および約75%からなる群から選択される割合を超える面積が、前記静電クランプ中に前記基板と接触する、請求項1に記載の静電チャック。
- 約5000個、約3000個、約2500個、および約1500個からなる群から選択される数より少ない付着粒子が、前記静電チャックの使用の結果として前記基板の裏側に堆積され、前記静電チャックの前記使用は、前記基板を前記静電クランプすることと、前記基板を前記静電クランプからクランプ解除することと、前記基板に対して実行される製造プロセスの間に前記静電クランプを実行することと、のうちの少なくとも1つを含む、請求項1に記載の静電チャック。
- 前記突起群は、少なくとも1つの低応力材料から形成される、請求項1に記載の静電チャック。
- 前記低応力材料は、非晶質誘電体材料および多結晶誘電体材料のうちの少なくとも一方を含む、請求項6に記載の静電チャック。
- 前記突起群は、約1012Ω−cmを超える抵抗率を有する誘電体材料を含む、請求項1に記載の静電チャック。
- 前記突起群は、シリコン、シリコンと少なくとも1種類の他の元素との合金、シリコンカーバイド、および非化学量論的シリコンカーバイドのうちの少なくとも1つを含む誘電体材料を含む、請求項1に記載の静電チャック。
- 前記突起群は、アルミナおよびアルミニウム窒化物のうちの少なくとも一方を含む誘電体材料を含む、請求項1に記載の静電チャック。
- 前記突起群は、前記静電クランプ中にジョンソンラーベック力または部分ハイブリッドジョンソンラーベック力が前記基板に作用しないような誘電体材料を含む、請求項1に記載の静電チャック。
- 前記突起群は、コンプライアント誘電体材料を含む、請求項1に記載の静電チャック。
- 前記突起群は、前記静電クランプ中にジョンソンラーベック効果により前記基板が前記静電チャック上に保持されるような抵抗率を有する誘電体材料を含む、請求項1に記載の静電チャック。
- 前記突起群と前記基板との接触面積が、前記静電チャックの全面積の約1%から約10%を含む、請求項1に記載の静電チャック。
- 前記突起群は、直径が約0.75ミリメートルから約1ミリメートルである、請求項1に記載の静電チャック。
- 前記隣接する突起のペアの中心から中心までの距離は、約8ミリメートル未満である、請求項1に記載の静電チャック。
- 前記突起群は、直径が約0.75ミリメートルから約1ミリメートルであり、前記隣接する突起のペアの中心から中心までの距離は、約8ミリメートル未満である、請求項2に記載の静電チャック。
- 前記隣接する突起のペアの中心から中心までの距離は、約6ミリメートル、約4ミリメートル、および約2ミリメートルからなる群から選択される距離より短い、請求項1に記載の静電チャック。
- 前記突起群は、少なくとも1つの、部分突起を含み、前記突起の一部分は、前記静電チャックの表面構造物の少なくとも一部分を含む、請求項1に記載の静電チャック。
- 前記表面構造物としては、ガスチャネル、リフトピン、およびグラウンドピンから少なくとも1つが選択される、請求項19に記載の静電チャック。
- 前記突起群の前記高さは、前記静電クランプ中に、前記基板と、前記突起群と、前記突起群を囲む前記表面層の前記複数部分との間の空間に位置するガスの平均自由行程とほぼ等しい、請求項1に記載の静電チャック。
- 前記突起群は、少なくとも何らかの機械研磨によって、表面粗度指標が、手磨きのみの同様の突起群に比べて約25%から約75%低減されている上部表面を含む、請求項1に記載の静電チャック。
- 前記表面粗度指標は、約50%低減される、請求項22に記載の静電チャック。
- 前記突起群は、突起の丸み部分の特徴的な高さが、手磨きのみの同様の突起の対応する高さに比べて低くなるように、かつ、丸み部分の特徴的な長さが、手磨きのみの同様の突起の対応する長さに比べて長くなるように、少なくとも何らかの機械研磨によって修正されたエッジ形状を有する、請求項1に記載の静電チャック。
- 丸み部分の特徴的な前記長さに対する丸み部分の特徴的な前記高さの比率は、手磨きのみの前記同様の突起に比べて、約1/2から約1/5と、約1/3から約1/4とからなる群から選択される割合に低減される、請求項24に記載の静電チャック。
- 前記静電チャックの前記使用の結果として、前記基板の裏側に堆積する、粒子サイズ範囲が0.16μm以上である付着粒子が約5000個未満である、請求項22に記載の静電チャック。
- 前記静電チャックの前記使用の結果として、前記基板の裏側に堆積する、粒子サイズ範囲が0.16μm以上である付着粒子が約2000個未満である、請求項22に記載の静電チャック。
- 前記静電チャックの前記使用の結果として、前記基板の裏側に堆積する、粒子サイズ範囲が0.16μm以上である付着粒子が約2000個未満である、請求項23に記載の静電チャック。
- 前記突起群は、突起の丸み部分の特徴的な長さに対する丸み部分の特徴的な高さの比率が、約0.00407から約0.00306と、約0.00611から約0.002444とからなる群から選択される比率に等しいように修正されたエッジ形状を有する、請求項1に記載の静電チャック。
- 前記表面層は、電荷制御表面層を含む、請求項1に記載の静電チャック。
- 前記電荷制御表面層は、約1×108Ω/スクエアから約1×1011Ω/スクエアの範囲の表面抵抗率を有する、請求項30に記載の静電チャック。
- 前記電荷制御表面層は、シリコンカーバイド組成物を含む、請求項30に記載の静電チャック。
- 前記電荷制御表面層の前記表面抵抗率は、前記シリコンカーバイド組成物を作る際に用いられるシリコン前駆体ガスおよび炭素前駆体ガスの量を変えることにより制御される、請求項32に記載の静電チャック。
- 前記シリコンカーバイド組成物は、シリコンカーバイドを含む、請求項32に記載の静電チャック。
- 前記シリコンカーバイド組成物は、非化学量論的シリコンカーバイドを含む、請求項32に記載の静電チャック。
- 前記電荷制御表面層は、少なくとも1つの突起と、表面コーティング層とを含む、請求項30に記載の静電チャック。
- 前記電荷制御表面層は、
シリコンカーバイド組成物層を誘電体上に一括堆積させることと、
フォトリソグラフィを用いて前記シリコンカーバイド組成物層をパターン化することと、
反応性イオンエッチングを用いて前記シリコンカーバイド組成物層の複数部分を除去して、少なくとも1つのシリコンカーバイド組成物の突起を残すことと、
によって形成される、請求項30に記載の静電チャック。 - 前記電荷制御表面層は、
ビードブラスチングまたはエッチングを用いて誘電体層をパターン化することと、
前記誘電体層に前記電荷制御表面層を絶縁保護コーティングすることと、
によって形成される、請求項30に記載の静電チャック。 - 前記電荷制御表面層は、ダイヤモンド様炭素、非晶質シリコン、金属ドープ酸化物、およびこれらの組み合わせからなる群から選択される少なくとも1つの材料を含む、請求項30に記載の静電チャック。
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Also Published As
Publication number | Publication date |
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WO2009142710A1 (en) | 2009-11-26 |
JP5492875B2 (ja) | 2014-05-14 |
TW200949897A (en) | 2009-12-01 |
SG190668A1 (en) | 2013-06-28 |
EP2286448B1 (en) | 2018-11-28 |
US20090284894A1 (en) | 2009-11-19 |
US10395963B2 (en) | 2019-08-27 |
KR101673039B1 (ko) | 2016-11-04 |
TWI475594B (zh) | 2015-03-01 |
KR20110020269A (ko) | 2011-03-02 |
US20170098568A1 (en) | 2017-04-06 |
CN103236413B (zh) | 2016-09-07 |
US9543187B2 (en) | 2017-01-10 |
CN102067302A (zh) | 2011-05-18 |
EP2286448A1 (en) | 2011-02-23 |
CN103236413A (zh) | 2013-08-07 |
CN102067302B (zh) | 2013-06-05 |
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