EP2507317A1 - Verfahren zur herstellung von hydriertem polygerman und hydriertes polygerman - Google Patents
Verfahren zur herstellung von hydriertem polygerman und hydriertes polygermanInfo
- Publication number
- EP2507317A1 EP2507317A1 EP10787123A EP10787123A EP2507317A1 EP 2507317 A1 EP2507317 A1 EP 2507317A1 EP 10787123 A EP10787123 A EP 10787123A EP 10787123 A EP10787123 A EP 10787123A EP 2507317 A1 EP2507317 A1 EP 2507317A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- hydrogenated
- polygerman
- polygermane
- halogenated
- mixture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 150000001875 compounds Chemical class 0.000 claims abstract description 39
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims abstract description 36
- 238000000034 method Methods 0.000 claims abstract description 35
- 239000000203 mixture Substances 0.000 claims abstract description 35
- 229910052732 germanium Inorganic materials 0.000 claims abstract description 22
- 238000005984 hydrogenation reaction Methods 0.000 claims description 17
- 229910052739 hydrogen Inorganic materials 0.000 claims description 16
- 239000001257 hydrogen Substances 0.000 claims description 15
- 150000002367 halogens Chemical class 0.000 claims description 12
- 229910052736 halogen Inorganic materials 0.000 claims description 11
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 10
- 239000007787 solid Substances 0.000 claims description 7
- 239000002904 solvent Substances 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 238000000425 proton nuclear magnetic resonance spectrum Methods 0.000 claims description 6
- 239000003795 chemical substances by application Substances 0.000 claims description 5
- 239000012442 inert solvent Substances 0.000 claims description 5
- 229910052752 metalloid Inorganic materials 0.000 claims description 5
- -1 metalloid hydrides Chemical class 0.000 claims description 5
- 238000000197 pyrolysis Methods 0.000 claims description 4
- 238000001237 Raman spectrum Methods 0.000 claims description 3
- 229910052987 metal hydride Inorganic materials 0.000 claims description 3
- 150000004681 metal hydrides Chemical class 0.000 claims description 3
- 125000001424 substituent group Chemical group 0.000 description 14
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 9
- 238000002360 preparation method Methods 0.000 description 7
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 6
- 229910052801 chlorine Inorganic materials 0.000 description 5
- 239000000460 chlorine Substances 0.000 description 5
- 150000002431 hydrogen Chemical class 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 239000002243 precursor Substances 0.000 description 4
- 229910052794 bromium Inorganic materials 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 229910052740 iodine Inorganic materials 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000007858 starting material Substances 0.000 description 3
- UWNADWZGEHDQAB-UHFFFAOYSA-N 2,5-dimethylhexane Chemical group CC(C)CCC(C)C UWNADWZGEHDQAB-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000012847 fine chemical Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- 229910006113 GeCl4 Inorganic materials 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- SIPUZPBQZHNSDW-UHFFFAOYSA-N bis(2-methylpropyl)aluminum Chemical compound CC(C)C[Al]CC(C)C SIPUZPBQZHNSDW-UHFFFAOYSA-N 0.000 description 1
- 239000012876 carrier material Substances 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000029087 digestion Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- QUZPNFFHZPRKJD-UHFFFAOYSA-N germane Chemical compound [GeH4] QUZPNFFHZPRKJD-UHFFFAOYSA-N 0.000 description 1
- 229910052986 germanium hydride Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 231100001261 hazardous Toxicity 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 150000002738 metalloids Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000005191 phase separation Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000011541 reaction mixture Substances 0.000 description 1
- 239000013049 sediment Substances 0.000 description 1
- IEXRMSFAVATTJX-UHFFFAOYSA-N tetrachlorogermane Chemical compound Cl[Ge](Cl)(Cl)Cl IEXRMSFAVATTJX-UHFFFAOYSA-N 0.000 description 1
- 238000004448 titration Methods 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/60—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which all the silicon atoms are connected by linkages other than oxygen atoms
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G17/00—Compounds of germanium
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G79/00—Macromolecular compounds obtained by reactions forming a linkage containing atoms other than silicon, sulfur, nitrogen, oxygen, and carbon with or without the latter elements in the main chain of the macromolecule
- C08G79/14—Macromolecular compounds obtained by reactions forming a linkage containing atoms other than silicon, sulfur, nitrogen, oxygen, and carbon with or without the latter elements in the main chain of the macromolecule a linkage containing two or more elements other than carbon, oxygen, nitrogen, sulfur and silicon
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/50—Improvements relating to the production of bulk chemicals
- Y02P20/582—Recycling of unreacted starting or intermediate materials
Definitions
- Polygerman and hydrogenated polygerman as pure compound or mixture of compounds.
- Polygermane are for example from the
- Source material avoids, as well as the provision of
- Polygerman as pure compound or mixture of compounds, wherein halogenated polygerman is hydrogenated.
- hydrogenated polygerman for example, a pure compound or a mixture of compounds can be understood, each having at least one direct bond between two germanium atoms.
- the hydrogenated polygerman may have substituents Z which comprise hydrogen, a ratio Z: germanium which is at least 1: 1, an averaged formula GeZ x , where x is selected from 1 -S x -S 3, preferably 1.5 -S x -S 3, in particular 2 ⁇ x ⁇ 3, and have an average chain length n with 2 ⁇ n ⁇ 100.
- the hydrogenated polygerman has compounds which have no differences in their chain length, if any, their branches and / or the number and type of their cycles. In other words, there is only one fraction of hydrogenated polygerman in a pure compound.
- "pure" is to be understood according to customary fine-chemical standards, meaning that pure compounds can also contain small amounts of impurities, for example traces of
- mixture of compounds is understood below to mean that the hydrogenated polygerman has at least two fractions whose hydrogenated polygermanes differ in their chain length, if any, in their branches and / or their type and number of cycles. Accordingly, either all molecules of the pure compound or all molecules of at least two fractions of the
- At least 50% means at least 50%
- the hydrogenated polygermans produced by the process may, depending on which halogenated polygerman they are
- Hydrogenated polygermans as well as hydrogenated oligogermans can be prepared by this method.
- Oligogermans have a chain length n, from the Range 2 ⁇ n ⁇ 8 is selected. Their molecular formula is
- Hydrogenated polygermanes have chain length n of n> 8 and a molecular formula Ge n Z2 n +2 or the mean molecular formula of the mixture Ge n Z2 n .
- chain lengths of 2 ⁇ n ⁇ 6 are called short-chain and chain lengths of n> 6 are long-chain.
- Chain length is understood to mean the number of germanium atoms bonded directly to one another
- the halogenated polygerman may be selected from
- Thermally produced halogenated polygerman may have a higher proportion of branching than plasma-chemically produced halogenated polygerman which may be substantially free of branching.
- the halogenated ones may have a higher proportion of branching than plasma-chemically produced halogenated polygerman which may be substantially free of branching.
- Polygermans can be pure compounds or mixtures of
- the halogenated, especially highly halogenated, polygermanes may have substituents selected from a group comprising F, Cl, Br and I and mixtures thereof. These halogens can be largely completely replaced by H as a substituent during hydrogenation.
- the halogen content of the hydrogenated polygerman prepared by this process may be less than 2 atomic%, In particular, be less than 1 atomic%.
- a hydrogenated polygerman can only hydrogen or
- Determination of the H content is carried out by integration of 1 H-NMR spectra using an internal standard and comparison of the integrals obtained in known
- the molecular weights of the halogenated and hydrogenated polygermanes according to the invention and the average molar mass of the halogenated and hydrogenated polygender mixtures are determined by means of freezing point depression. From the parameters mentioned, the halogen or hydrogen: germanium ratio can be determined.
- the halogenated polygerman can with hydridic
- Hydrogenating agents are reacted, which are selected from metal hydrides and / or metalloid hydrides.
- the hydrogenation may, according to one embodiment, be carried out at a temperature which is in one range
- the temperature range may be -30 ° C to 40 ° C, especially -10 ° C to 25 ° C.
- the hydrogenation may be carried out at a pressure selected from a range including 1 Pa to 2,000 hPa, preferably 1 hPa to 1,500 hPa, particularly 20 hPa to 1,200 hPa. This gentle hydrogenation conditions are set at lower compared to the prior art temperatures and pressures. This also allows the less stable halogenated
- Polygermane be hydrogenated with good yield and high turnover.
- the halogenated polygerman may be diluted in a solvent prior to hydrogenation.
- the solvent is chosen so that it is inert to the halogenated Polygerman, so no chemical reaction with him.
- inert solvents alkanes or aromatics
- benzene, toluene or hexane can be selected.
- mixtures of solvents are conceivable.
- the hydrogenation can also be carried out with undissolved halogenated polygerman.
- Hydrogenated polygerman can thus be produced in good yield, of any chain length and with less dangerous precursors using this process.
- the structure of the hydrogenated polygerman can be largely predetermined by suitable selection of the precursors.
- a largely complete hydrogenation of the halogenated polygerman can be achieved with this method.
- the hydrogenated polygerman has substituents Z which comprise hydrogen, a ratio Z: germanium which is at least 1: 1, an averaged formula GeZ x , where x is selected from 1 -S x -S 3, preferably 1.5 -S x -S 3, more preferably 2 ⁇ x -S 3, and an average chain length n with 2 ⁇ n ⁇ 100 on.
- substituents Z which comprise hydrogen, a ratio Z: germanium which is at least 1: 1, an averaged formula GeZ x , where x is selected from 1 -S x -S 3, preferably 1.5 -S x -S 3, more preferably 2 ⁇ x -S 3, and an average chain length n with 2 ⁇ n ⁇ 100 on.
- Impurities for example, traces of carbon or halogens. Small proportions are less than 0.5 mol%, preferably less than 10 ppm.
- the chain length of the hydrogenated polygerman may in particular be selected from 4 ⁇ n ⁇ 50, in particular from 6 -S n ⁇ 20.
- the averaged formula GeZ x is to be understood as meaning that a germanium atom in the hydrogenated polygermanine in the
- the hydrogenated polygerman may be prepared according to a method as described above. It is thus produced by hydrogenation of halogenated polygermanes. Thus, by the method of preparation, the structure of the hydrogenated polygerman can be derivable from, or consistent with, the structure of the halogenated polymer.
- Polygermanen be obtained.
- the hydrogenation can be carried out substantially completely, so that the substituents Z in the polygerman largely comprise hydrogen.
- largely is again meant a proportion of hydrogen on the substituents of at least 50%
- the hydrogenated polygerman may according to one embodiment have a proportion of polygerman molecules with more than three directly connected germanium atoms, wherein at least 8%, in particular more than 11%, of these germanium atoms
- the proportion of polygerman molecules with more than three directly connected germanium atoms can be a pure compound, or a fraction of the hydrogenated polygerman in the case of a mixture of Represent connections. In any case, such
- Branching points are understood to mean those germanium atoms which are connected to more than two further germanium atoms, ie have only one or no substituent Z at all. Branching points can be determined, for example, by means of 1 H-NMR spectra.
- the hydrogenated polygerman which is a mixture of compounds, in the form of the mixture may have a higher solubility than at least one single compound contained in the mixture.
- Polygerman have a proportion of Polygermanmolekülen with more than three directly connected germanium atoms, said polygerman molecules have an average formula GeZ x with 2.2 ⁇ x ⁇ 2.5.
- x can be selected from 2.25 ⁇ x ⁇ 2.4.
- the hydrogenated polygerman may have a substituent Z which additionally comprises a halogen.
- the hydrogenated polygerman may also have halogens, for example F, Br, I or Cl or mixtures thereof as substituents.
- the proportion of halogen in the hydrogenated polygerman be less than 2 atomic%, in particular less than 1 atomic%.
- hydrogen which is greater than 50 atomic%, preferably greater than 60 atomic%, in particular greater than 66 atomic%.
- the hydrogenated polygerman has a very high proportion of hydrogen, whereby the ratio substituent:
- Germanium of at least 1: 1 is produced at a high hydrogen content at the same time.
- the hydrogenated polygerman may exhibit significant product signals in the chemical shift range between 6.5 and 2.0, in particular between 4.0 and 2.1, ppm in 1 H-NMR spectra.
- “Significant” in this context means a
- Integral is greater than 1% of the total integral. Furthermore, the hydrogenated polygerman in 1 H-NMR spectra at least 80% of the signal intensity of the total integral of its
- the hydrogenated polygerman in Raman spectra can have significant product bands in the range of 2250 to 2000
- Wavelengths and below 330 wave numbers have.
- the hydrogenated polygerman may be colorless to light yellow or ivory white. It can be present as an amorphous or crystalline solid. Preferably, it is not viscous. Furthermore, the hydrogenated polygerman may be at least 20% soluble in inert solvents at concentrations of up to 10%. This means that at least one
- inert solvents solvents which do not react with the hydrogenated polygerman.
- solvents selected from the group consisting of benzene, toluene,
- the readily soluble hydrogenated polygerman of the above mixture of compounds may be more than 20%, preferably more than 80%, non-degraded, volatile and / or distillable under reduced pressure.
- the reduced pressure preferably comprises 1 to 100 Pa. This is the hydrogenated
- germanium layer made of a hydrogenated polygerman as described above.
- the hydrogenated polygerman is a readily available on a technical scale starting compound for the preparation of
- Germanium layers Due to the low pyrolysis temperature of less than 500 ° C, preferably less than 450 ° C, the hydrogenated polygerman is a precursor with which germanium layers can be deposited on substrates at low temperature.
- the low pyrolysis temperature allows for a greater choice of materials for the support layers or substrates on which germanium layers are applied, for example support layers of glass.
- a process for producing a germanium layer on a substrate comprising
- This process leads to high yields and high conversion rates to germanium layers produced from hydrogenated polygermanes.
- the hydrogenated polygermans can be processed into germanium layers with higher yield and higher conversion rate than conventional germanium precursors.
- dissolved or even solid hydrogenated polygermanes can be applied to the substrate in a simple manner.
- a CVD Chemical Vapor Deposition
- PVD Physical Vapor Deposition
- Germanium chemistry are also conceivable, for example the
- PCG Polychlorogelerman
- Sediment reacts in the course of about 1 h to a light yellow powder.
- the reaction mixture is stirred for 16 h while warming to room temperature.
- the solid is filtered off and washed twice with 25 ml abs. hexane
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Polymers & Plastics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
- Silicon Polymers (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
- Chemical Vapour Deposition (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Catalysts (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009056731A DE102009056731A1 (de) | 2009-12-04 | 2009-12-04 | Halogenierte Polysilane und Polygermane |
PCT/EP2010/068979 WO2011067411A1 (de) | 2009-12-04 | 2010-12-06 | Verfahren zur herstellung von hydriertem polygerman und hydriertes polygerman |
Publications (1)
Publication Number | Publication Date |
---|---|
EP2507317A1 true EP2507317A1 (de) | 2012-10-10 |
Family
ID=43499339
Family Applications (7)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP10787448A Withdrawn EP2507169A1 (de) | 2009-12-04 | 2010-12-06 | Verfahren zum entfernen von verunreinigungen aus silicium |
EP10793199.0A Revoked EP2507174B1 (de) | 2009-12-04 | 2010-12-06 | Verfahren zur herstellung von halogenierten polysilanen |
EP10787123A Withdrawn EP2507317A1 (de) | 2009-12-04 | 2010-12-06 | Verfahren zur herstellung von hydriertem polygerman und hydriertes polygerman |
EP10787124.6A Revoked EP2507296B1 (de) | 2009-12-04 | 2010-12-06 | Kinetisch stabile chlorierte polysilane und deren herstellung und verwendung |
EP10787451A Withdrawn EP2507299A2 (de) | 2009-12-04 | 2010-12-06 | Chlorierte oligogermane und verfahren zu deren herstellung |
EP10788316A Withdrawn EP2507171A1 (de) | 2009-12-04 | 2010-12-06 | Verfahren zur herstellung von hydriertem polygermasilan und hydriertes polygermasilan |
EP10792879.8A Not-in-force EP2507172B1 (de) | 2009-12-04 | 2010-12-06 | Verfahren zur herstellung von oligosilanen |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP10787448A Withdrawn EP2507169A1 (de) | 2009-12-04 | 2010-12-06 | Verfahren zum entfernen von verunreinigungen aus silicium |
EP10793199.0A Revoked EP2507174B1 (de) | 2009-12-04 | 2010-12-06 | Verfahren zur herstellung von halogenierten polysilanen |
Family Applications After (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP10787124.6A Revoked EP2507296B1 (de) | 2009-12-04 | 2010-12-06 | Kinetisch stabile chlorierte polysilane und deren herstellung und verwendung |
EP10787451A Withdrawn EP2507299A2 (de) | 2009-12-04 | 2010-12-06 | Chlorierte oligogermane und verfahren zu deren herstellung |
EP10788316A Withdrawn EP2507171A1 (de) | 2009-12-04 | 2010-12-06 | Verfahren zur herstellung von hydriertem polygermasilan und hydriertes polygermasilan |
EP10792879.8A Not-in-force EP2507172B1 (de) | 2009-12-04 | 2010-12-06 | Verfahren zur herstellung von oligosilanen |
Country Status (9)
Country | Link |
---|---|
US (7) | US9139702B2 (ja) |
EP (7) | EP2507169A1 (ja) |
JP (6) | JP2013512844A (ja) |
CN (3) | CN102639644A (ja) |
BR (2) | BR112012014106A2 (ja) |
CA (2) | CA2782226A1 (ja) |
DE (1) | DE102009056731A1 (ja) |
TW (7) | TW201139283A (ja) |
WO (7) | WO2011067417A1 (ja) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009056731A1 (de) | 2009-12-04 | 2011-06-09 | Rev Renewable Energy Ventures, Inc. | Halogenierte Polysilane und Polygermane |
CN102918684B (zh) | 2010-05-28 | 2016-09-14 | 巴斯夫欧洲公司 | 膨胀石墨在锂/硫电池组中的用途 |
KR101250172B1 (ko) * | 2012-08-20 | 2013-04-05 | 오씨아이머티리얼즈 주식회사 | 고수율로 모노 게르만 가스를 제조하는 방법 |
DE102012224202A1 (de) * | 2012-12-21 | 2014-07-10 | Evonik Industries Ag | Verfahren zum Hydrieren höherer Halogen-haltiger Silanverbindungen |
DE102013207444A1 (de) * | 2013-04-24 | 2014-10-30 | Evonik Degussa Gmbh | Verfahren und Vorrichtung zur Herstellung von Polychlorsilanen |
DE102013207447A1 (de) * | 2013-04-24 | 2014-10-30 | Evonik Degussa Gmbh | Verfahren und Vorrichtung zur Herstellung von Octachlortrisilan |
US9174853B2 (en) | 2013-12-06 | 2015-11-03 | Gelest Technologies, Inc. | Method for producing high purity germane by a continuous or semi-continuous process |
DE102014007766A1 (de) * | 2014-05-21 | 2015-11-26 | Psc Polysilane Chemicals Gmbh | Verfahren zur plasmachemischen Herstellung halogenierter Oligosilane aus Tetrachlorsilan |
DE102014007685B4 (de) | 2014-05-21 | 2022-04-07 | Sven Holl | Verfahren zur Herstellung von Hexachlordisilan |
DE102014007767A1 (de) * | 2014-05-21 | 2015-11-26 | Psc Polysilane Chemicals Gmbh | Verfahren und Vorrichtung zur Herstellung halogenierter Oligosilane aus Silicium und Tetrachlorsilan |
DE102014007768A1 (de) | 2014-05-21 | 2015-11-26 | Psc Polysilane Chemicals Gmbh | Verfahren zur Herstellung von Mischungen chlorierter Silane mit erhöhten Anteilen von Si4Cl10 und/oder Si5Cl12 |
DE102015009129B4 (de) * | 2014-07-22 | 2016-12-15 | Norbert Auner | Verfahren zur Spaltung von Silicium-Silicium-Bindungen und/oder von Silicium-Chlor-Bindungen in Mono-, Poly- und/oder Oligosilanen |
DE102014013250B4 (de) * | 2014-09-08 | 2021-11-25 | Christian Bauch | Verfahren zur Aufreinigung halogenierter Oligosilane |
WO2016095953A1 (de) * | 2014-12-15 | 2016-06-23 | Spawnt Private S.À.R.L. | Verfahren zur herstellung von chlorierten oligosilanen |
DE102016014900A1 (de) * | 2016-12-15 | 2018-06-21 | Psc Polysilane Chemicals Gmbh | Verfahren zur Erhöhung der Reinheit von Oligosilanen und Oligosilanverbindungen |
DE102016225872A1 (de) * | 2016-12-21 | 2018-06-21 | Evonik Degussa Gmbh | Verfahren zur Trennung von Gemischen höherer Silane |
EP3596117A4 (en) | 2017-03-17 | 2021-01-13 | The Johns Hopkins University | TARGETED EPIGENETIC THERAPY AGAINST THE DISTAL EXPRESSION REGULATORY ELEMENT OF TGFB2 |
BR112020022309A2 (pt) * | 2018-05-02 | 2021-02-23 | Hysilabs, Sas | compostos carreadores de hidrogênio |
JP7125062B2 (ja) * | 2019-01-25 | 2022-08-24 | 株式会社東芝 | 判定方法及び処理方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070078252A1 (en) * | 2005-10-05 | 2007-04-05 | Dioumaev Vladimir K | Linear and cross-linked high molecular weight polysilanes, polygermanes, and copolymers thereof, compositions containing the same, and methods of making and using such compounds and compositions |
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