KR100814980B1 - 산화물, 규산염 및 인산염의 증기를 이용한 석출 - Google Patents

산화물, 규산염 및 인산염의 증기를 이용한 석출 Download PDF

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KR100814980B1
KR100814980B1 KR1020077024096A KR20077024096A KR100814980B1 KR 100814980 B1 KR100814980 B1 KR 100814980B1 KR 1020077024096 A KR1020077024096 A KR 1020077024096A KR 20077024096 A KR20077024096 A KR 20077024096A KR 100814980 B1 KR100814980 B1 KR 100814980B1
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metal
vapor
ald
precursor
silicon
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KR20070107813A (ko
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로이 지이. 고돈
질 베커
데니스 하우스만
세이기 수우
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프레지던트 앤드 펠로우즈 오브 하바드 칼리지
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US20160268121A1 (en) 2016-09-15
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US20130122328A1 (en) 2013-05-16
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US20160111276A1 (en) 2016-04-21
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US20150118395A1 (en) 2015-04-30
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