JP2022066392A5 - - Google Patents
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- JP2022066392A5 JP2022066392A5 JP2022033068A JP2022033068A JP2022066392A5 JP 2022066392 A5 JP2022066392 A5 JP 2022066392A5 JP 2022033068 A JP2022033068 A JP 2022033068A JP 2022033068 A JP2022033068 A JP 2022033068A JP 2022066392 A5 JP2022066392 A5 JP 2022066392A5
- Authority
- JP
- Japan
- Prior art keywords
- mask assembly
- pellicle frame
- submount
- patterning device
- movement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000059 patterning Methods 0.000 claims 12
- 230000000295 complement effect Effects 0.000 claims 1
- 238000001459 lithography Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023117230A JP7509969B2 (ja) | 2014-11-17 | 2023-07-19 | マスクアセンブリ |
| JP2024099760A JP2024111212A (ja) | 2014-11-17 | 2024-06-20 | マスクアセンブリ |
Applications Claiming Priority (13)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201462080561P | 2014-11-17 | 2014-11-17 | |
| US62/080,561 | 2014-11-17 | ||
| US201562108348P | 2015-01-27 | 2015-01-27 | |
| US62/108,348 | 2015-01-27 | ||
| US201562110841P | 2015-02-02 | 2015-02-02 | |
| US62/110,841 | 2015-02-02 | ||
| US201562126173P | 2015-02-27 | 2015-02-27 | |
| US62/126,173 | 2015-02-27 | ||
| US201562149176P | 2015-04-17 | 2015-04-17 | |
| US62/149,176 | 2015-04-17 | ||
| US201562183342P | 2015-06-23 | 2015-06-23 | |
| US62/183,342 | 2015-06-23 | ||
| JP2020127414A JP7037606B2 (ja) | 2014-11-17 | 2020-07-28 | マスクアセンブリ |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020127414A Division JP7037606B2 (ja) | 2014-11-17 | 2020-07-28 | マスクアセンブリ |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023117230A Division JP7509969B2 (ja) | 2014-11-17 | 2023-07-19 | マスクアセンブリ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022066392A JP2022066392A (ja) | 2022-04-28 |
| JP2022066392A5 true JP2022066392A5 (enExample) | 2022-06-15 |
| JP7318040B2 JP7318040B2 (ja) | 2023-07-31 |
Family
ID=54542272
Family Applications (10)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017522010A Active JP6769954B2 (ja) | 2014-11-17 | 2015-11-16 | マスクアセンブリ |
| JP2017522491A Active JP6837433B2 (ja) | 2014-11-17 | 2015-11-16 | ペリクル取り付け装置及びペリクル取り付け方法 |
| JP2019209301A Active JP6882431B2 (ja) | 2014-11-17 | 2019-11-20 | ペリクルフレーム取り付け装置及びペリクルアセンブリの取り付け方法 |
| JP2020127414A Active JP7037606B2 (ja) | 2014-11-17 | 2020-07-28 | マスクアセンブリ |
| JP2021018959A Active JP7123206B2 (ja) | 2014-11-17 | 2021-02-09 | ペリクル取り付け装置及びペリクル取り付け方法 |
| JP2022033068A Active JP7318040B2 (ja) | 2014-11-17 | 2022-03-04 | マスクアセンブリ |
| JP2022127298A Active JP7438287B2 (ja) | 2014-11-17 | 2022-08-09 | 装置 |
| JP2023117230A Active JP7509969B2 (ja) | 2014-11-17 | 2023-07-19 | マスクアセンブリ |
| JP2024019495A Active JP7689216B2 (ja) | 2014-11-17 | 2024-02-13 | スタッド取り付け装置及びスタッド取り付け方法 |
| JP2024099760A Pending JP2024111212A (ja) | 2014-11-17 | 2024-06-20 | マスクアセンブリ |
Family Applications Before (5)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017522010A Active JP6769954B2 (ja) | 2014-11-17 | 2015-11-16 | マスクアセンブリ |
| JP2017522491A Active JP6837433B2 (ja) | 2014-11-17 | 2015-11-16 | ペリクル取り付け装置及びペリクル取り付け方法 |
| JP2019209301A Active JP6882431B2 (ja) | 2014-11-17 | 2019-11-20 | ペリクルフレーム取り付け装置及びペリクルアセンブリの取り付け方法 |
| JP2020127414A Active JP7037606B2 (ja) | 2014-11-17 | 2020-07-28 | マスクアセンブリ |
| JP2021018959A Active JP7123206B2 (ja) | 2014-11-17 | 2021-02-09 | ペリクル取り付け装置及びペリクル取り付け方法 |
Family Applications After (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022127298A Active JP7438287B2 (ja) | 2014-11-17 | 2022-08-09 | 装置 |
| JP2023117230A Active JP7509969B2 (ja) | 2014-11-17 | 2023-07-19 | マスクアセンブリ |
| JP2024019495A Active JP7689216B2 (ja) | 2014-11-17 | 2024-02-13 | スタッド取り付け装置及びスタッド取り付け方法 |
| JP2024099760A Pending JP2024111212A (ja) | 2014-11-17 | 2024-06-20 | マスクアセンブリ |
Country Status (9)
| Country | Link |
|---|---|
| US (5) | US10539886B2 (enExample) |
| EP (4) | EP3221748B1 (enExample) |
| JP (10) | JP6769954B2 (enExample) |
| KR (7) | KR102634793B1 (enExample) |
| CN (5) | CN117826520A (enExample) |
| CA (4) | CA2968151C (enExample) |
| NL (2) | NL2015795A (enExample) |
| TW (4) | TWI724612B (enExample) |
| WO (2) | WO2016079052A2 (enExample) |
Families Citing this family (75)
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| KR102797693B1 (ko) | 2015-12-14 | 2025-04-17 | 에이에스엠엘 네델란즈 비.브이. | Euv 리소그래피용 멤브레인 |
| KR102186010B1 (ko) * | 2016-01-26 | 2020-12-04 | 한양대학교 산학협력단 | Euv 펠리클 구조체, 및 그 제조 방법 |
| KR102408195B1 (ko) | 2016-04-25 | 2022-06-13 | 에이에스엠엘 네델란즈 비.브이. | Euv 리소그래피를 위한 멤브레인 |
| SG11201811618RA (en) * | 2016-07-05 | 2019-01-30 | Mitsui Chemicals Inc | Pellicle film, pellicle frame, pellicle, method for producing same, original plate for light exposure, light exposure apparatus and method for manufacturing semiconductor device |
| KR102483397B1 (ko) * | 2016-07-29 | 2022-12-29 | 에이에스엠엘 홀딩 엔.브이. | 멤브레인 조립체 및 입자 트랩 |
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| KR102690337B1 (ko) * | 2022-12-19 | 2024-08-05 | 주식회사 에프에스티 | 3d 탄성 픽스쳐를 포함하는 펠리클 마운팅 어셈블리 및 이를 이용한 펠리클 마운팅 방법과 이를 이용한 펠리클 디 마운팅 방법, 이를 포함한 euv 노광 장치 |
| WO2024183988A1 (en) | 2023-03-06 | 2024-09-12 | Asml Netherlands B.V. | System for supporting a pellicle in a lithographic apparatus, allowing for pressure increase in a region between the pellicle and a patterning device |
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| KR102834398B1 (ko) * | 2023-07-28 | 2025-07-15 | 주식회사 에프에스티 | 교체형 멤브레인을 포함하는 euv 펠리클, 이를 포함하는 euv 노광 장치 및 euv 펠리클에서 멤브레인의 마운팅 및 디마운팅 방법 |
| KR102687699B1 (ko) * | 2023-08-18 | 2024-07-24 | 주식회사 에프에스티 | 응력 완충구조를 구비하는 euv 펠리클의 마운팅 블록, 마운팅 블록을 포함하는 euv 펠리클 구조체, euv 펠리클 구조체를 포함하는 euv 노광 장치 및 euv 펠리클의 마운팅 및 디마운팅 방법 |
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