JP2005243904A5 - - Google Patents
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- Publication number
- JP2005243904A5 JP2005243904A5 JP2004051442A JP2004051442A JP2005243904A5 JP 2005243904 A5 JP2005243904 A5 JP 2005243904A5 JP 2004051442 A JP2004051442 A JP 2004051442A JP 2004051442 A JP2004051442 A JP 2004051442A JP 2005243904 A5 JP2005243904 A5 JP 2005243904A5
- Authority
- JP
- Japan
- Prior art keywords
- optical
- prism
- illumination optical
- illumination
- optical device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 42
- 238000005286 illumination Methods 0.000 claims 19
- 239000013078 crystal Substances 0.000 claims 7
- 210000001747 pupil Anatomy 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 238000000034 method Methods 0.000 claims 3
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims 1
- 230000000295 complement effect Effects 0.000 claims 1
- 239000010436 fluorite Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004051442A JP2005243904A (ja) | 2004-02-26 | 2004-02-26 | 照明光学装置、露光装置及び露光方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004051442A JP2005243904A (ja) | 2004-02-26 | 2004-02-26 | 照明光学装置、露光装置及び露光方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005243904A JP2005243904A (ja) | 2005-09-08 |
| JP2005243904A5 true JP2005243904A5 (enExample) | 2008-03-21 |
Family
ID=35025321
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004051442A Pending JP2005243904A (ja) | 2004-02-26 | 2004-02-26 | 照明光学装置、露光装置及び露光方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005243904A (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101547077B1 (ko) | 2003-04-09 | 2015-08-25 | 가부시키가이샤 니콘 | 노광 방법 및 장치, 그리고 디바이스 제조 방법 |
| TWI569308B (zh) | 2003-10-28 | 2017-02-01 | 尼康股份有限公司 | 照明光學裝置、曝光裝置、曝光方法以及元件製造 方法 |
| TWI385414B (zh) | 2003-11-20 | 2013-02-11 | 尼康股份有限公司 | 光學照明裝置、照明方法、曝光裝置、曝光方法以及元件製造方法 |
| TWI379344B (en) | 2004-02-06 | 2012-12-11 | Nikon Corp | Polarization changing device, optical illumination apparatus, light-exposure apparatus and light-exposure method |
| JP4535260B2 (ja) * | 2004-10-19 | 2010-09-01 | 株式会社ニコン | 照明光学装置、露光装置、および露光方法 |
| KR101762083B1 (ko) | 2005-05-12 | 2017-07-26 | 가부시키가이샤 니콘 | 투영 광학계, 노광 장치 및 노광 방법 |
| JP5267029B2 (ja) | 2007-10-12 | 2013-08-21 | 株式会社ニコン | 照明光学装置、露光装置及びデバイスの製造方法 |
| US8379187B2 (en) | 2007-10-24 | 2013-02-19 | Nikon Corporation | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
| US9116346B2 (en) | 2007-11-06 | 2015-08-25 | Nikon Corporation | Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method |
| CN102221785A (zh) * | 2010-04-14 | 2011-10-19 | 上海微电子装备有限公司 | 一种使用汞灯光源的光刻照明装置 |
| JP5459399B2 (ja) * | 2010-06-03 | 2014-04-02 | 株式会社ニコン | 顕微鏡装置 |
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2004
- 2004-02-26 JP JP2004051442A patent/JP2005243904A/ja active Pending