JPH0123137Y2 - - Google Patents

Info

Publication number
JPH0123137Y2
JPH0123137Y2 JP1985050919U JP5091985U JPH0123137Y2 JP H0123137 Y2 JPH0123137 Y2 JP H0123137Y2 JP 1985050919 U JP1985050919 U JP 1985050919U JP 5091985 U JP5091985 U JP 5091985U JP H0123137 Y2 JPH0123137 Y2 JP H0123137Y2
Authority
JP
Japan
Prior art keywords
photomask
protection device
adhesive layer
support frame
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985050919U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61167652U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985050919U priority Critical patent/JPH0123137Y2/ja
Publication of JPS61167652U publication Critical patent/JPS61167652U/ja
Application granted granted Critical
Publication of JPH0123137Y2 publication Critical patent/JPH0123137Y2/ja
Expired legal-status Critical Current

Links

JP1985050919U 1985-04-05 1985-04-05 Expired JPH0123137Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985050919U JPH0123137Y2 (enExample) 1985-04-05 1985-04-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985050919U JPH0123137Y2 (enExample) 1985-04-05 1985-04-05

Publications (2)

Publication Number Publication Date
JPS61167652U JPS61167652U (enExample) 1986-10-17
JPH0123137Y2 true JPH0123137Y2 (enExample) 1989-07-17

Family

ID=30569500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985050919U Expired JPH0123137Y2 (enExample) 1985-04-05 1985-04-05

Country Status (1)

Country Link
JP (1) JPH0123137Y2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69727782T2 (de) * 1996-07-17 2004-12-09 Mitsui Chemicals, Inc. Maskenschutzvorrichtung
JP2001005169A (ja) * 1999-06-24 2001-01-12 Shin Etsu Chem Co Ltd ペリクルおよびペリクルの製造方法
JP2006184817A (ja) * 2004-12-28 2006-07-13 Fujitsu Ltd ペリクル及び転写基板
JP6837433B2 (ja) * 2014-11-17 2021-03-03 エーエスエムエル ネザーランズ ビー．ブイ． ペリクル取り付け装置及びペリクル取り付け方法

Also Published As

Publication number Publication date
JPS61167652U (enExample) 1986-10-17

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