JP2016524581A - 光学特性が維持された耐擦傷性物品 - Google Patents
光学特性が維持された耐擦傷性物品 Download PDFInfo
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- JP2016524581A JP2016524581A JP2016512998A JP2016512998A JP2016524581A JP 2016524581 A JP2016524581 A JP 2016524581A JP 2016512998 A JP2016512998 A JP 2016512998A JP 2016512998 A JP2016512998 A JP 2016512998A JP 2016524581 A JP2016524581 A JP 2016524581A
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- 230000003287 optical effect Effects 0.000 title abstract description 33
- 230000003678 scratch resistant effect Effects 0.000 title description 9
- 239000012788 optical film Substances 0.000 claims abstract description 430
- 239000000758 substrate Substances 0.000 claims abstract description 376
- 229910052809 inorganic oxide Inorganic materials 0.000 claims abstract description 169
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 113
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 113
- 238000001429 visible spectrum Methods 0.000 claims abstract description 26
- 150000004767 nitrides Chemical class 0.000 claims abstract description 15
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 171
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 156
- 229910052710 silicon Inorganic materials 0.000 claims description 99
- 239000010703 silicon Substances 0.000 claims description 86
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 85
- 238000002834 transmittance Methods 0.000 claims description 73
- 238000002310 reflectometry Methods 0.000 claims description 16
- 229910005793 GeO 2 Inorganic materials 0.000 claims description 14
- 239000010432 diamond Substances 0.000 claims description 13
- 229910003460 diamond Inorganic materials 0.000 claims description 13
- 238000012360 testing method Methods 0.000 claims description 12
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims 2
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 claims 1
- 238000004737 colorimetric analysis Methods 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 abstract description 46
- 238000000034 method Methods 0.000 abstract description 41
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 8
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052814 silicon oxide Inorganic materials 0.000 abstract description 3
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium oxide Inorganic materials O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 abstract 1
- PVADDRMAFCOOPC-UHFFFAOYSA-N oxogermanium Chemical compound [Ge]=O PVADDRMAFCOOPC-UHFFFAOYSA-N 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 604
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 166
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 104
- 239000001301 oxygen Substances 0.000 description 104
- 229910052760 oxygen Inorganic materials 0.000 description 103
- AIRCTMFFNKZQPN-UHFFFAOYSA-N AlO Inorganic materials [Al]=O AIRCTMFFNKZQPN-UHFFFAOYSA-N 0.000 description 94
- 229910052757 nitrogen Inorganic materials 0.000 description 80
- 239000011521 glass Substances 0.000 description 69
- 239000010408 film Substances 0.000 description 59
- 239000000463 material Substances 0.000 description 59
- 239000000203 mixture Substances 0.000 description 46
- 239000003607 modifier Substances 0.000 description 33
- 239000002241 glass-ceramic Substances 0.000 description 31
- 230000008859 change Effects 0.000 description 22
- 230000007423 decrease Effects 0.000 description 22
- 239000005341 toughened glass Substances 0.000 description 22
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 18
- 235000019589 hardness Nutrition 0.000 description 17
- 230000000052 comparative effect Effects 0.000 description 16
- 239000011734 sodium Substances 0.000 description 15
- 150000002500 ions Chemical class 0.000 description 13
- 229910010413 TiO 2 Inorganic materials 0.000 description 12
- 238000013461 design Methods 0.000 description 11
- 239000003989 dielectric material Substances 0.000 description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- 229910001873 dinitrogen Inorganic materials 0.000 description 10
- 229910001882 dioxygen Inorganic materials 0.000 description 10
- 239000002019 doping agent Substances 0.000 description 10
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 9
- 238000000151 deposition Methods 0.000 description 9
- 230000009467 reduction Effects 0.000 description 9
- 229910052594 sapphire Inorganic materials 0.000 description 9
- 239000010980 sapphire Substances 0.000 description 9
- 229910052796 boron Inorganic materials 0.000 description 8
- 239000006059 cover glass Substances 0.000 description 8
- 230000008021 deposition Effects 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen(.) Chemical compound [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 7
- 229910052709 silver Inorganic materials 0.000 description 7
- 239000005358 alkali aluminosilicate glass Substances 0.000 description 6
- 229910052804 chromium Inorganic materials 0.000 description 6
- 239000013078 crystal Substances 0.000 description 6
- 238000005342 ion exchange Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000006060 molten glass Substances 0.000 description 6
- 229910052718 tin Inorganic materials 0.000 description 6
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 5
- 238000005299 abrasion Methods 0.000 description 5
- 239000003513 alkali Substances 0.000 description 5
- -1 alkali metal salts Chemical class 0.000 description 5
- 230000003667 anti-reflective effect Effects 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 5
- 230000006835 compression Effects 0.000 description 5
- 238000007906 compression Methods 0.000 description 5
- 150000003839 salts Chemical class 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 238000001771 vacuum deposition Methods 0.000 description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 4
- 229910018068 Li 2 O Inorganic materials 0.000 description 4
- 229910006404 SnO 2 Inorganic materials 0.000 description 4
- 239000005407 aluminoborosilicate glass Substances 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 238000005137 deposition process Methods 0.000 description 4
- 229910052731 fluorine Inorganic materials 0.000 description 4
- 239000011737 fluorine Substances 0.000 description 4
- 238000010348 incorporation Methods 0.000 description 4
- 238000010884 ion-beam technique Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 239000002086 nanomaterial Substances 0.000 description 4
- 229910052708 sodium Inorganic materials 0.000 description 4
- 230000003595 spectral effect Effects 0.000 description 4
- 238000000411 transmission spectrum Methods 0.000 description 4
- 229910017083 AlN Inorganic materials 0.000 description 3
- 229910001413 alkali metal ion Inorganic materials 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 238000000231 atomic layer deposition Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052791 calcium Inorganic materials 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000000572 ellipsometry Methods 0.000 description 3
- 238000003286 fusion draw glass process Methods 0.000 description 3
- 239000002223 garnet Substances 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 229910052749 magnesium Inorganic materials 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000006911 nucleation Effects 0.000 description 3
- 238000010899 nucleation Methods 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 238000000985 reflectance spectrum Methods 0.000 description 3
- 238000006748 scratching Methods 0.000 description 3
- 230000002393 scratching effect Effects 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 238000005728 strengthening Methods 0.000 description 3
- 229910020068 MgAl Inorganic materials 0.000 description 2
- 238000006124 Pilkington process Methods 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 229910052783 alkali metal Inorganic materials 0.000 description 2
- 229910000287 alkaline earth metal oxide Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 150000001768 cations Chemical class 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 238000003280 down draw process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004927 fusion Effects 0.000 description 2
- 150000001247 metal acetylides Chemical class 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229910001414 potassium ion Inorganic materials 0.000 description 2
- 238000001314 profilometry Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 238000003283 slot draw process Methods 0.000 description 2
- 239000005361 soda-lime glass Substances 0.000 description 2
- JHJLBTNAGRQEKS-UHFFFAOYSA-M sodium bromide Chemical compound [Na+].[Br-] JHJLBTNAGRQEKS-UHFFFAOYSA-M 0.000 description 2
- PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Chemical compound [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 description 2
- 229910001415 sodium ion Inorganic materials 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 229910052596 spinel Inorganic materials 0.000 description 2
- 239000011029 spinel Substances 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 238000005496 tempering Methods 0.000 description 2
- 238000002207 thermal evaporation Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- FGRBYDKOBBBPOI-UHFFFAOYSA-N 10,10-dioxo-2-[4-(N-phenylanilino)phenyl]thioxanthen-9-one Chemical compound O=C1c2ccccc2S(=O)(=O)c2ccc(cc12)-c1ccc(cc1)N(c1ccccc1)c1ccccc1 FGRBYDKOBBBPOI-UHFFFAOYSA-N 0.000 description 1
- BXVSAYBZSGIURM-UHFFFAOYSA-N 2-phenoxy-4h-1,3,2$l^{5}-benzodioxaphosphinine 2-oxide Chemical compound O1CC2=CC=CC=C2OP1(=O)OC1=CC=CC=C1 BXVSAYBZSGIURM-UHFFFAOYSA-N 0.000 description 1
- 229910008556 Li2O—Al2O3—SiO2 Inorganic materials 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910000272 alkali metal oxide Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 229910052792 caesium Inorganic materials 0.000 description 1
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052878 cordierite Inorganic materials 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- WVMPCBWWBLZKPD-UHFFFAOYSA-N dilithium oxido-[oxido(oxo)silyl]oxy-oxosilane Chemical compound [Li+].[Li+].[O-][Si](=O)O[Si]([O-])=O WVMPCBWWBLZKPD-UHFFFAOYSA-N 0.000 description 1
- JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000006025 fining agent Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910021389 graphene Inorganic materials 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 238000005552 hardfacing Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- FUJCRWPEOMXPAD-UHFFFAOYSA-N lithium oxide Chemical compound [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 description 1
- 229910001947 lithium oxide Inorganic materials 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 230000003278 mimic effect Effects 0.000 description 1
- 239000012768 molten material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 235000021317 phosphate Nutrition 0.000 description 1
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000052 poly(p-xylylene) Polymers 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229910052611 pyroxene Inorganic materials 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229910052701 rubidium Inorganic materials 0.000 description 1
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 238000007655 standard test method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 229910000500 β-quartz Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C21/00—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface
- C03C21/001—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions
- C03C21/002—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions to perform ion-exchange between alkali ions
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
- C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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Abstract
Description
色座標距離=√((a* 物品−a* 基板)2+(b* 物品−b* 基板)2)
によって算出される。
図1〜5に示すように、無機酸化物基板110は、少なくとも1つの対向する主要面(112、114)上に配置される光学フィルム系120、220、320、420、520を含む。無機酸化物基板110は、その上に配置されるフィルムまたは材料を含んでもよく、または含まなくてもよい、マイナー表面116、118を含む。無機酸化物基板110は、非晶質基板、結晶質基板またはそれらの組合せを含んでもよい。1つ以上の実施形態において、非晶質基板として、強化されてもよく、または強化されていなくてもよいガラス基板を含んでもよい。適切なガラス基板の例には、ソーダ石灰ガラス基板、アルカリアルミノシリケートガラス基板、アルカリ含有ボロシリケートガラス基板、およびアルカリアルミノボロシリケートガラス基板が含まれる。いくつかの変形形態において、ガラス基板は酸化リチウムを含まなくてもよい。1つ以上の他の実施形態において、無機酸化物基板110は、ガラスセラミック基板(強化されていても、または強化されていなくてもよい)などの結晶の基板を含んでもよく、あるいはサファイヤなどの単結晶構造を含んでもよい。1つ以上の特定の実施形態において、無機酸化物基板110は、非晶質ベース(例えば、ガラス)および結晶質クラッディング(例えば、サファイヤ層、多結晶質アルミナ層および/または尖晶石(MgAl2O4)層)を含む。
本明細書に記載される光学フィルム構造は耐擦傷性を有し、これは、光学フィルム構造の硬度、および/または光学フィルム構造を形成する層の1つ以上の硬度によって特徴づけられてもよい。1つ以上の特定の実施形態において、光学フィルム構造は、ダイヤモンドBerkovitchインデンター試験で測定した場合、約16GPa以上、約17GPa以上、約18GPa以上、約19GPa以上、約20GPa以上、約22GPa以上の硬度を有する。本明細書で使用される場合、「Berkovitchインデンター試験」には、Berkovitchインデンターで表面にインデントをつけ、表面から少なくとも約100nmのインデント深さを有するインデントを形成することによる表面上の硬度を測定するための試験を含む。光学フィルム構造120は、ダイヤモンドBerkovitchインデンター試験で測定した場合、約16GPa以上、約17GPa以上、約18GPa以上、約19GPa以上、約20GPa以上、約22GPa以上の硬度を有する少なくとも1つの層を有してもよい。
以下の実施例において、3層光学フィルム構造が設計され、そして試料の透過率は、様々なモデルを使用して、可視スペクトルに渡って評価された。3層光学フィルム構造の各層の屈折率および減衰係数を特徴づけるために偏光解析法が使われた。実施例1〜8に記載される光学フィルム構造の光学挙動を決定するために、各層の屈折率および減衰係数情報を、既知のモデルツール(例えば、薄フィルム設計コード)において使用した。上記特徴決定およびモデリングは、本明細書に記載される光学フィルム構造の2層、4層または他の層構成において使用することができる。
実施例9および比較例9Aのそれぞれの試料1つは、スパッタリング法を使用して形成された。各試料は、それぞれ、50mmの長さおよび幅寸法を有する、実施例1〜8で利用されたものと同一の基板を提供することによって製造された。実施例9は、SiuAlvOxNy(式中、u、v、xおよびyは、層の厚さに沿って変動して、酸素含有量勾配、ケイ素含有量勾配、アルミニウム含有量勾配および窒素含有量勾配を提供する)を含んでなる層を含んだ。比較例9AはAlN層を含んだ。実施例9のSiuAlvOxNyを含む層は、プロフィロメトリーで測定される約260nmの厚さを有し、そしてケイ素およびアルミニウムターゲット、ならびに窒素および酸素ガスを使用して、スパッタリングプロセスによって形成された。AlN層(勾配なし)は、プロフィロメトリーで測定したところ、約250nmの厚さを有した。比較例9Aの勾配のない層は、実施例9の層と同様の方法で形成されたが、アルミニウムターゲットのみが利用され、そして窒素ガスのみが利用された。実施例9および比較例9Aのそれぞれの層を形成するための全堆積時間は、約6時間であった。
実施例10および比較例10Aのそれぞれの試料1つは、スパッタリング法を使用して形成された。各試料は、それぞれ、50mmの長さおよび幅寸法を有する、実施例1〜8で利用されたものと同一の基板を提供することによって製造された。実施例10は、SiuAlvOxNy(式中、u、v、xおよびyは、層の厚さに沿って変動して、酸素含有量勾配、ケイ素含有量勾配、アルミニウム含有量勾配および窒素含有量勾配を提供する)を含んでなる121副層を有する層を含んだ。SiuAlvOxNy層の121副層は、ガラス基板の1つの側面上に形成された。層は、最初に、約20sccm(33.8×10−3Pa・m3/秒)の速度で流れるアルゴン、40sccm(67.6×10−3Pa・m3/秒)の速度で流れる窒素、および2sccm(3.38×10−3Pa・m3/秒)の速度で流れる酸素の存在下で、約3mTorr(0.4Pa)の圧力においてケイ素ターゲットをスパッタリングすることによって形成された。RF電力は、4Wで、少なくとも最初に3分間供給された。最初の3分後、次いで、DC電力を発生させ、50Wで開始してアルミニウムターゲットからアルミニウムをスパッタリングさせた。DC電力は、その後3分ごとに300Wまで20Wずつ増加させた。DC電力が増加する間、RF電力、アルゴンガス流速、窒素ガス流速および酸素ガス流速は一定だった。300WのDC電力に達した後、RF電力を、連続段階で400Wから0Wまで減少させ、そしてDC電力は、480WのDC電力が発生するまで、各増加の間に3分間で、20Wの増加で増加を続けた。その後、次いで、連続段階において、約0.2sccm(0.338×10−3Pa・m3/秒)の増加で、0.05sccm(0.0845×10−3Pa・m3/秒)の最終減少で、酸素ガス流速を、2sccm(3.38×10−3Pa・m3/秒)から0.25sccm(0.4225×10−3Pa・m3/秒)の酸素まで減少させた。酸素流速が0.25sccm(0.4225×10−3Pa・m3/秒)まで減少した後、堆積プロセスをさらに3時間続けて、そしてAlNのみの層が形成された。言い換えると、酸素が0.25sccm(0.4225×10−3Pa・m3/秒)で流された時に形成された副層は、AlNを含んでなった。全堆積プロセスの間、窒素およびアルゴンの流速は一定であり、かつ圧力は一定であった。クリーニングステップは、堆積の間、あるいは流速、RF電力またはDC電力のいずれかの変化の間に実行されなかった。
以下の実施例において、ガラス基板上で配置された3層光学フィルム構造が設計された。光学フィルム構造およびガラス基板の透過率および反射率は、実施例1〜8と同一の方法で、様々なモデルを使用して、可視スペクトルに渡って評価された。3層光学フィルム構造の各層の屈折率および減衰係数を特徴づけるために、再び偏光解析法が使われた。光学フィルム構造および基板の光学挙動を決定するために、各層の屈折率および減衰係数情報を、既知のモデルツール(例えば、薄フィルム設計コード)において使用した。
Claims (10)
- 対向する主要面を有する無機酸化物基板と、
前記無機酸化物基板の第1の主要面において配置される光学フィルム構造と
を含んでなる物品において、
前記光学フィルム構造が耐擦傷性を示し、前記物品が、可視スペクトルにおいて85%以上の平均透過率を示し、
前記光学フィルム構造が、ダイヤモンドBerkovitchインデンターテストで測定した場合、約16GPa以上の硬度を有する層を含んでなり、
前記物品が、
直入射で見た場合、透過率色座標と参照点との間の距離が約2未満であるような透過率色座標を有する(L、a*、b*)比色分析系の色透過率、および
直入射で見た場合、反射率色座標と参照点との間の距離が約2未満であるような反射率色座標を有する(L、a*、b*)比色分析系の色反射率
のいずれか1つ以上を示し、
前記参照点が、色座標(a*=0、b*=0)および前記基板の色座標の少なくとも1つを含んでなり、
前記参照色点が前記基板の前記色座標である場合、前記距離が、√((a* 物品−a* 基板)2+(b* 物品−b* 基板)2)に等しく、
前記参照点が、前記色座標(a*=0、b*=0)である場合、前記距離が、√((a* 物品)2+(b* 物品)2)に等しいことを特徴とする、物品。 - 前記物品が、前記無機酸化物基板であって、その上に前記光学フィルム構造が配置されていない前記無機酸化物基板の全反射率以下の全反射率を有することを特徴とする、請求項1に記載の物品。
- 前記光学フィルム構造が、ケイ素含有酸化物、ケイ素含有酸窒化物、窒化ケイ素、窒化アルミニウム、アルミニウム含有酸窒化物、アルミニウム含有酸化物、酸窒化ケイ素アルミニウムまたはそれらの組合せの1つを含んでなることを特徴とする、請求項1または2に記載の物品。
- 前記光学フィルム構造が少なくとも2つの層を含み、第1の層が前記無機酸化物基板と第2の層との間に配置されることを特徴とする、請求項1〜3のいずれか一項に記載の物品。
- 前記第1の層が、ケイ素含有酸化物、ケイ素含有酸窒化物、窒化ケイ素、窒化アルミニウム、アルミニウム含有酸窒化物、アルミニウム含有酸化物、酸窒化ケイ素アルミニウムまたはそれらの組合せを含んでなり、前記第2の層が、SiO2、GeO2、Al2O3またはそれらの組合せを含んでなることを特徴とする、請求項4に記載の物品。
- 前記第1の層が、Al2O3を含んでなる第1の副層およびAlNを含んでなる第2の副層を含んでなり、前記第1の副層が、前記無機酸化物基板と前記第2の副層との間に配置されることを特徴とする、請求項4または5に記載の物品。
- 前記第1の層が、AlOxNyを含んでなる第1の副層およびAlNを含んでなる第2の副層を含んでなり、前記第1の副層が、前記無機酸化物基板と前記第2の副層との間に配置されることを特徴とする、請求項4〜6のいずれか一項に記載の物品。
- 前記第1の層がSiO2をさらに含んでなることを特徴とする、請求項4〜7のいずれか一項に記載の物品。
- 前記光学フィルム構造が、第1の層および第2の層を含んでなり、前記第1の層が前記第2の層の厚さより大きい厚さを有することを特徴とする、請求項1〜8のいずれか一項に記載の物品。
- 対向する主要面を有する無機酸化物基板と、
前記無機酸化物基板の第1の主要面において配置され、アルミニウム含有窒化物、アルミニウム含有酸窒化物、アルミニウム含有酸化物またはそれらの組合せを含んでなる第1の層および前記第1の層において配置される第2の層を含んでなる光学フィルム構造と
を含んでなる物品において、
前記光学フィルム構造が、ダイヤモンドBerkovitchインデンターテストで測定した場合、16GPa以上の硬度を示し、
前記物品が、可視スペクトルにおいて85%以上の平均透過率、ならびに
透過率色座標であって、直入射で見た場合、前記透過率色座標と参照点との間の距離が約2未満であるような、透過率色座標を有する(L、a*、b*)比色分析系の色透過率、および
反射率色座標であって、直入射で見た場合、前記反射率色座標と参照点との間の距離が約2未満であるような、反射率色座標を有する(L、a*、b*)比色分析系の色反射率
のいずれか1つ以上を示し、
前記参照点が、色座標(a*=0、b*=0)および前記基板の色座標の少なくとも1つを含んでなり、
前記参照点が前記基板の前記色座標である場合、前記距離が、√((a* 物品−a* 基板)2+(b* 物品−b* 基板)2)に等しく、
前記参照点が、前記色座標(a*=0、b*=0)である場合、前記距離が、√((a* 物品)2+(b* 物品)2)に等しいことを特徴とする、物品。
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KR20160003286A (ko) | 2016-01-08 |
CN105377782A (zh) | 2016-03-02 |
US20140335335A1 (en) | 2014-11-13 |
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CN107352815A (zh) | 2017-11-17 |
CN105377782B (zh) | 2017-06-13 |
TW201447350A (zh) | 2014-12-16 |
CN107352815B9 (zh) | 2022-04-01 |
EP2994435B1 (en) | 2018-06-13 |
US11667565B2 (en) | 2023-06-06 |
KR101633245B1 (ko) | 2016-06-23 |
US20150376057A1 (en) | 2015-12-31 |
JP6052839B2 (ja) | 2016-12-27 |
WO2014182640A1 (en) | 2014-11-13 |
CN114349366A (zh) | 2022-04-15 |
CN114349366B (zh) | 2023-09-01 |
CN107352815B (zh) | 2022-02-18 |
US20230303432A1 (en) | 2023-09-28 |
EP2994435A1 (en) | 2016-03-16 |
TWI533017B (zh) | 2016-05-11 |
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