JP2010199574A5 - - Google Patents

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Publication number
JP2010199574A5
JP2010199574A5 JP2010026009A JP2010026009A JP2010199574A5 JP 2010199574 A5 JP2010199574 A5 JP 2010199574A5 JP 2010026009 A JP2010026009 A JP 2010026009A JP 2010026009 A JP2010026009 A JP 2010026009A JP 2010199574 A5 JP2010199574 A5 JP 2010199574A5
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JP
Japan
Prior art keywords
exposure apparatus
fluid
immersion
immersion exposure
containment member
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JP2010026009A
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Japanese (ja)
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JP5088388B2 (ja
JP2010199574A (ja
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Publication of JP2010199574A5 publication Critical patent/JP2010199574A5/ja
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Anticipated expiration legal-status Critical
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JP2010026009A 2003-04-10 2010-02-08 液浸リソグフラフィ装置用の移送領域を含む環境システム Expired - Fee Related JP5088388B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US46211203P 2003-04-10 2003-04-10
US60/462,112 2003-04-10
US48503303P 2003-07-02 2003-07-02
US60/485,033 2003-07-02

Related Parent Applications (1)

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JP2006509568A Division JP4650413B2 (ja) 2003-04-10 2004-04-01 液浸リソグフラフィ装置用の移送領域を含む環境システム

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2011106092A Division JP5644660B2 (ja) 2003-04-10 2011-05-11 露光装置、露光方法、及びデバイス製造方法
JP2012083122A Division JP5644804B2 (ja) 2003-04-10 2012-03-30 露光装置及びデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2010199574A JP2010199574A (ja) 2010-09-09
JP2010199574A5 true JP2010199574A5 (https=) 2011-09-15
JP5088388B2 JP5088388B2 (ja) 2012-12-05

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ID=33303064

Family Applications (10)

Application Number Title Priority Date Filing Date
JP2006509568A Expired - Fee Related JP4650413B2 (ja) 2003-04-10 2004-04-01 液浸リソグフラフィ装置用の移送領域を含む環境システム
JP2010026009A Expired - Fee Related JP5088388B2 (ja) 2003-04-10 2010-02-08 液浸リソグフラフィ装置用の移送領域を含む環境システム
JP2011106092A Expired - Fee Related JP5644660B2 (ja) 2003-04-10 2011-05-11 露光装置、露光方法、及びデバイス製造方法
JP2012083122A Expired - Fee Related JP5644804B2 (ja) 2003-04-10 2012-03-30 露光装置及びデバイス製造方法
JP2013269879A Expired - Fee Related JP5765414B2 (ja) 2003-04-10 2013-12-26 液浸リソグフラフィ装置用の移送領域を含む環境システム
JP2014247000A Expired - Fee Related JP5954394B2 (ja) 2003-04-10 2014-12-05 液浸リソグフラフィ装置用の移送領域を含む環境システム
JP2015219233A Expired - Lifetime JP6319270B2 (ja) 2003-04-10 2015-11-09 液浸露光方法及びそれを用いたマイクロデバイスの製造方法
JP2016227059A Expired - Fee Related JP6409853B2 (ja) 2003-04-10 2016-11-22 液浸露光装置及びデバイス製造方法
JP2017238410A Pending JP2018041111A (ja) 2003-04-10 2017-12-13 液浸露光装置
JP2018237299A Withdrawn JP2019045881A (ja) 2003-04-10 2018-12-19 装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2006509568A Expired - Fee Related JP4650413B2 (ja) 2003-04-10 2004-04-01 液浸リソグフラフィ装置用の移送領域を含む環境システム

Family Applications After (8)

Application Number Title Priority Date Filing Date
JP2011106092A Expired - Fee Related JP5644660B2 (ja) 2003-04-10 2011-05-11 露光装置、露光方法、及びデバイス製造方法
JP2012083122A Expired - Fee Related JP5644804B2 (ja) 2003-04-10 2012-03-30 露光装置及びデバイス製造方法
JP2013269879A Expired - Fee Related JP5765414B2 (ja) 2003-04-10 2013-12-26 液浸リソグフラフィ装置用の移送領域を含む環境システム
JP2014247000A Expired - Fee Related JP5954394B2 (ja) 2003-04-10 2014-12-05 液浸リソグフラフィ装置用の移送領域を含む環境システム
JP2015219233A Expired - Lifetime JP6319270B2 (ja) 2003-04-10 2015-11-09 液浸露光方法及びそれを用いたマイクロデバイスの製造方法
JP2016227059A Expired - Fee Related JP6409853B2 (ja) 2003-04-10 2016-11-22 液浸露光装置及びデバイス製造方法
JP2017238410A Pending JP2018041111A (ja) 2003-04-10 2017-12-13 液浸露光装置
JP2018237299A Withdrawn JP2019045881A (ja) 2003-04-10 2018-12-19 装置

Country Status (7)

Country Link
US (11) US7251017B2 (https=)
EP (3) EP3062152B1 (https=)
JP (10) JP4650413B2 (https=)
KR (9) KR101431938B1 (https=)
CN (1) CN101813892B (https=)
HK (1) HK1253211A1 (https=)
WO (1) WO2004092833A2 (https=)

Families Citing this family (193)

* Cited by examiner, † Cited by third party
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