CN108538847B - 制造三维半导体存储装置的方法 - Google Patents

制造三维半导体存储装置的方法 Download PDF

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CN108538847B
CN108538847B CN201810373088.XA CN201810373088A CN108538847B CN 108538847 B CN108538847 B CN 108538847B CN 201810373088 A CN201810373088 A CN 201810373088A CN 108538847 B CN108538847 B CN 108538847B
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layer
pattern
gate
lower semiconductor
semiconductor pattern
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CN108538847A (zh
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刘东哲
南泌旭
梁俊圭
李雄
李宇城
金振均
严大弘
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Samsung Electronics Co Ltd
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Samsung Electronics Co Ltd
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Priority claimed from KR1020120100516A external-priority patent/KR102031179B1/ko
Priority claimed from KR1020130013509A external-priority patent/KR102054258B1/ko
Priority claimed from KR1020130013510A external-priority patent/KR102045858B1/ko
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B43/00—EEPROM devices comprising charge-trapping gate insulators
    • H10B43/20—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional [3D] arrangements, e.g. with cells on different height levels
    • H10B43/23—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional [3D] arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
    • H10B43/27—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional [3D] arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B43/00—EEPROM devices comprising charge-trapping gate insulators
    • H10B43/30—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region
    • H10B43/35—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region with cell select transistors, e.g. NAND
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/69—IGFETs having charge trapping gate insulators, e.g. MNOS transistors
    • H10D30/693—Vertical IGFETs having charge trapping gate insulators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17—Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/213—Channel regions of field-effect devices
    • H10D62/221—Channel regions of field-effect devices of FETs
    • H10D62/235—Channel regions of field-effect devices of FETs of IGFETs
    • H10D62/292—Non-planar channels of IGFETs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/40—Crystalline structures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311—Gate electrodes for field-effect devices
    • H10D64/411—Gate electrodes for field-effect devices for FETs
    • H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/512—Disposition of the gate electrodes, e.g. buried gates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311—Gate electrodes for field-effect devices
    • H10D64/411—Gate electrodes for field-effect devices for FETs
    • H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/514—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the insulating layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311—Gate electrodes for field-effect devices
    • H10D64/411—Gate electrodes for field-effect devices for FETs
    • H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/512—Disposition of the gate electrodes, e.g. buried gates
    • H10D64/513—Disposition of the gate electrodes, e.g. buried gates within recesses in the substrate, e.g. trench gates, groove gates or buried gates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/68—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator
    • H10D64/681—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator having a compositional variation, e.g. multilayered

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  • Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
CN201810373088.XA 2012-09-11 2013-09-11 制造三维半导体存储装置的方法 Active CN108538847B (zh)

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KR1020120100516A KR102031179B1 (ko) 2012-09-11 2012-09-11 3차원 반도체 메모리 장치 및 그 제조 방법
KR10-2012-0100516 2012-09-11
KR1020130013509A KR102054258B1 (ko) 2013-02-06 2013-02-06 3차원 반도체 장치 및 그 제조 방법
KR10-2013-0013509 2013-02-06
KR10-2013-0013510 2013-02-06
KR1020130013510A KR102045858B1 (ko) 2013-02-06 2013-02-06 3차원 반도체 장치 및 그 제조 방법
CN201310412616.5A CN103681687B (zh) 2012-09-11 2013-09-11 三维半导体存储装置及其制造方法

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Families Citing this family (140)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130015428A (ko) * 2011-08-03 2013-02-14 삼성전자주식회사 반도체 소자
US9343469B2 (en) 2012-06-27 2016-05-17 Intel Corporation Three dimensional NAND flash with self-aligned select gate
US9076879B2 (en) * 2012-09-11 2015-07-07 Samsung Electronics Co., Ltd. Three-dimensional semiconductor memory device and method for fabricating the same
KR20140068627A (ko) * 2012-11-28 2014-06-09 삼성전자주식회사 가변저항막을 갖는 저항 메모리 소자 및 그 제조방법
US9230987B2 (en) 2014-02-20 2016-01-05 Sandisk Technologies Inc. Multilevel memory stack structure and methods of manufacturing the same
KR20140127577A (ko) * 2013-04-25 2014-11-04 에스케이하이닉스 주식회사 3차원 저항 가변 메모리 장치 및 그 제조방법
KR102154784B1 (ko) * 2013-10-10 2020-09-11 삼성전자주식회사 반도체 장치 및 그 제조방법
US9236394B2 (en) * 2013-11-08 2016-01-12 Conversant Intellectual Property Management Inc. Three dimensional nonvolatile memory cell structure with upper body connection
JPWO2015115002A1 (ja) * 2014-01-29 2017-03-23 株式会社日立国際電気 微細パターンの形成方法、半導体装置の製造方法、基板処理装置及び記録媒体
CN106663682B (zh) * 2014-06-23 2019-09-03 三星电子株式会社 制造半导体装置的方法
US9324729B2 (en) * 2014-06-24 2016-04-26 Kabushiki Kaisha Toshiba Non-volatile memory device having a multilayer block insulating film to suppress gate leakage current
US9490331B2 (en) * 2014-06-30 2016-11-08 Taiwan Semiconductor Manufacturing Company Limited Formation of semiconductor arrangement comprising buffer layer and semiconductor column overlying buffer layer
KR102234799B1 (ko) * 2014-08-14 2021-04-02 삼성전자주식회사 반도체 장치
CN104167392B (zh) * 2014-08-29 2017-02-08 武汉新芯集成电路制造有限公司 三维nand存储器的制造方法
US9263459B1 (en) * 2014-09-26 2016-02-16 Intel Corporation Capping poly channel pillars in stacked circuits
CN106716638B (zh) * 2014-09-26 2021-01-29 三星电子株式会社 半导体存储器件及其制造方法
KR102285788B1 (ko) * 2014-09-29 2021-08-04 삼성전자 주식회사 메모리 소자의 제조 방법
KR102300728B1 (ko) 2014-10-14 2021-09-14 삼성전자주식회사 반도체 메모리 장치 및 그 제조 방법
US9368509B2 (en) * 2014-10-15 2016-06-14 Sandisk Technologies Inc. Three-dimensional memory structure having self-aligned drain regions and methods of making thereof
US9379132B2 (en) * 2014-10-24 2016-06-28 Sandisk Technologies Inc. NAND memory strings and methods of fabrication thereof
KR20160050536A (ko) * 2014-10-30 2016-05-11 램테크놀러지 주식회사 질화막 식각 조성물 및 이를 이용한 반도체 장치의 제조 방법
KR102251366B1 (ko) * 2014-11-03 2021-05-14 삼성전자주식회사 반도체 소자 및 그 제조 방법
US9780102B2 (en) 2014-11-07 2017-10-03 Micron Technology, Inc. Memory cell pillar including source junction plug
US9761601B2 (en) * 2015-01-30 2017-09-12 Toshiba Memory Corporation Semiconductor memory device and method for manufacturing same
KR102321739B1 (ko) * 2015-02-02 2021-11-05 삼성전자주식회사 반도체 장치 및 그 제조 방법
US9553105B2 (en) * 2015-03-10 2017-01-24 Samsung Electronics Co., Ltd. Semiconductor devices including gate insulation layers on channel materials
US10020364B2 (en) * 2015-03-12 2018-07-10 Toshiba Memory Corporation Nonvolatile semiconductor memory device and method of manufacturing the same
US20160268269A1 (en) 2015-03-12 2016-09-15 Kabushiki Kaisha Toshiba Nonvolatile semiconductor memory device and method of manufacturing the same
JP6437351B2 (ja) 2015-03-13 2018-12-12 東芝メモリ株式会社 半導体記憶装置及び半導体装置の製造方法
US9548369B2 (en) * 2015-03-26 2017-01-17 Macronix International Co., Ltd. Memory device and method of manufacturing the same
US10068914B2 (en) * 2015-04-17 2018-09-04 Macronix International Co., Ltd. Semiconductor structure and manufacturing method of the same
KR102415401B1 (ko) * 2015-05-21 2022-07-01 삼성전자주식회사 3차원 반도체 메모리 장치 및 그것의 동작 방법
WO2016194211A1 (ja) * 2015-06-04 2016-12-08 株式会社 東芝 半導体記憶装置及びその製造方法
US9646981B2 (en) 2015-06-15 2017-05-09 Sandisk Technologies Llc Passive devices for integration with three-dimensional memory devices
US9589981B2 (en) * 2015-06-15 2017-03-07 Sandisk Technologies Llc Passive devices for integration with three-dimensional memory devices
US9793290B2 (en) 2015-07-16 2017-10-17 Toshiba Memory Corporation Method of manufacturing semiconductor memory device having charge accumulation layer positioned between control gate electrode and semiconductor layer
US9449987B1 (en) * 2015-08-21 2016-09-20 Sandisk Technologies Llc Three dimensional memory device with epitaxial semiconductor pedestal for peripheral transistors
KR102447489B1 (ko) * 2015-09-02 2022-09-27 삼성전자주식회사 반도체 메모리 소자
US9716098B2 (en) * 2015-09-04 2017-07-25 Kabushiki Kaisha Toshiba Semiconductor device and manufacturing method thereof
KR102440221B1 (ko) 2015-09-09 2022-09-05 삼성전자주식회사 반도체 소자 및 이의 제조 방법
US10304849B2 (en) 2015-09-10 2019-05-28 Toshiba Memory Corporation Semiconductor memory device
US9711527B2 (en) 2015-09-11 2017-07-18 Kabushiki Kaisha Toshiba Semiconductor memory device
US9679911B2 (en) 2015-09-11 2017-06-13 Kabushiki Kaisha Toshiba Semiconductor memory device and production method thereof
US9842853B2 (en) 2015-09-14 2017-12-12 Toshiba Memory Corporation Memory cell array with improved substrate current pathway
US9911748B2 (en) 2015-09-28 2018-03-06 Sandisk Technologies Llc Epitaxial source region for uniform threshold voltage of vertical transistors in 3D memory devices
CN106571368B (zh) * 2015-10-08 2022-01-25 三星电子株式会社 半导体装置
KR102532490B1 (ko) * 2015-10-08 2023-05-17 삼성전자주식회사 반도체 소자 및 이의 제조 방법
US9711531B2 (en) 2015-10-08 2017-07-18 Samsung Electronics Co., Ltd. Semiconductor device and method of fabricating the same
KR102571561B1 (ko) * 2015-10-19 2023-08-29 삼성전자주식회사 3차원 반도체 소자
US9892929B2 (en) 2016-02-29 2018-02-13 Toshiba Memory Corporation Semiconductor manufacturing method and semiconductor device
US9679907B1 (en) 2016-02-29 2017-06-13 Sandisk Technologies Llc Three-dimensional memory device with charge-trapping-free gate dielectric for top select gate electrode and method of making thereof
US9929171B2 (en) * 2016-03-08 2018-03-27 Toshiba Memory Corporation Semiconductor memory device and method of manufacturing the same
US9842856B2 (en) 2016-03-09 2017-12-12 Toshiba Memory Corporation Semiconductor memory device and method of manufacturing the same
US9831180B2 (en) 2016-03-10 2017-11-28 Toshiba Memory Corporation Semiconductor device and method for manufacturing same
US9768117B1 (en) 2016-03-15 2017-09-19 Toshiba Memory Corporation Semiconductor device and method for manufacturing semiconductor device
US9911752B2 (en) * 2016-03-16 2018-03-06 Toshiba Memory Corporation Semiconductor memory device and method for manufacturing same
US10141327B2 (en) * 2016-03-18 2018-11-27 Toshiba Memory Corporation Semiconductor memory device
JP6542149B2 (ja) * 2016-03-18 2019-07-10 東芝メモリ株式会社 半導体記憶装置
KR102456494B1 (ko) * 2016-03-29 2022-10-20 에스케이하이닉스 주식회사 반도체 장치 및 그 제조 방법
US10325779B2 (en) * 2016-03-30 2019-06-18 Tokyo Electron Limited Colloidal silica growth inhibitor and associated method and system
CN105870068A (zh) * 2016-04-14 2016-08-17 清华大学 存储装置及其制造方法
KR102512819B1 (ko) 2016-04-19 2023-03-23 삼성전자주식회사 딜레이 코드를 발생하는 전압 모니터
KR102609516B1 (ko) 2016-05-04 2023-12-05 삼성전자주식회사 반도체 장치
US10134752B2 (en) * 2016-06-22 2018-11-20 Samsung Electronics Co., Ltd. Memory device
US9748266B1 (en) 2016-07-20 2017-08-29 Sandisk Technologies Llc Three-dimensional memory device with select transistor having charge trapping gate dielectric layer and methods of making and operating thereof
US10283647B2 (en) 2016-08-04 2019-05-07 Toshiba Memory Corporation Semiconductor device
US9991272B2 (en) 2016-09-13 2018-06-05 Toshiba Memory Corporation Semiconductor memory device
US9842849B1 (en) 2016-09-16 2017-12-12 Toshiba Memory Corporation Semiconductor memory device and method for manufacturing the same
KR102609348B1 (ko) * 2016-10-26 2023-12-06 삼성전자주식회사 반도체 장치 및 그 제조 방법
KR102681114B1 (ko) 2016-10-28 2024-07-04 삼성전자주식회사 반도체 메모리 소자
KR102665676B1 (ko) * 2016-12-19 2024-05-14 에스케이하이닉스 주식회사 반도체 장치 및 그 제조방법
JP2018113322A (ja) 2017-01-11 2018-07-19 株式会社日立国際電気 半導体装置の製造方法、プログラムおよび基板処理装置
KR102332346B1 (ko) * 2017-04-10 2021-12-01 삼성전자주식회사 3차원 반도체 메모리 장치 및 그의 제조 방법
US10923492B2 (en) 2017-04-24 2021-02-16 Micron Technology, Inc. Elevationally-extending string of memory cells and methods of forming an elevationally-extending string of memory cells
KR102333439B1 (ko) * 2017-04-28 2021-12-03 삼성전자주식회사 반도체 장치 및 그 제조 방법
WO2018222443A1 (en) * 2017-05-31 2018-12-06 Applied Materials, Inc. Methods for wordline separation in 3d-nand devices
JP6946463B2 (ja) * 2017-06-05 2021-10-06 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ ワードライン抵抗を低下させる方法
KR20180137264A (ko) * 2017-06-16 2018-12-27 에스케이하이닉스 주식회사 반도체 장치 및 그 제조방법
KR102385568B1 (ko) * 2017-07-13 2022-04-12 삼성전자주식회사 수직형 메모리 장치
KR102399462B1 (ko) * 2017-07-25 2022-05-18 삼성전자주식회사 수직형 메모리 장치
EP3580782A4 (en) 2017-08-21 2020-12-02 Yangtze Memory Technologies Co., Ltd. STABLE THREE-DIMENSIONAL MEMORY DEVICES AND THEIR TRAINING PROCESSES
CN107658315B (zh) * 2017-08-21 2019-05-14 长江存储科技有限责任公司 半导体装置及其制备方法
CN107731828B (zh) * 2017-08-21 2019-01-01 长江存储科技有限责任公司 Nand存储器及其制备方法
CN107731840B (zh) * 2017-08-24 2019-01-29 长江存储科技有限责任公司 一种3d nand闪存结构的制备工艺
JP6969935B2 (ja) 2017-08-28 2021-11-24 キオクシア株式会社 半導体装置及びその製造方法
JP6842386B2 (ja) 2017-08-31 2021-03-17 キオクシア株式会社 半導体装置
KR102414294B1 (ko) 2017-09-08 2022-06-28 삼성전자주식회사 비휘발성 메모리 장치 및 그 제조 방법
KR102452612B1 (ko) * 2017-09-11 2022-10-11 삼성전자주식회사 반도체 메모리 소자 및 그 제조방법
US10892274B2 (en) * 2017-11-09 2021-01-12 Yangtze Memory Technologies Co., Ltd. Three-dimensional memory devices and fabricating methods thereof
KR102522164B1 (ko) * 2017-11-20 2023-04-17 삼성전자주식회사 3차원 반도체 메모리 장치 및 그 제조 방법
CN107887395B (zh) 2017-11-30 2018-12-14 长江存储科技有限责任公司 Nand存储器及其制备方法
JP2019102685A (ja) 2017-12-05 2019-06-24 東芝メモリ株式会社 半導体装置
JP6691152B2 (ja) * 2018-02-07 2020-04-28 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 半導体装置の製造方法、基板処理装置およびプログラム
JP2019161061A (ja) * 2018-03-14 2019-09-19 東芝メモリ株式会社 不揮発性半導体記憶装置
JP2019169571A (ja) * 2018-03-22 2019-10-03 東芝メモリ株式会社 記憶装置
KR102416099B1 (ko) * 2018-03-28 2022-07-01 에스케이하이닉스 주식회사 반도체 메모리 소자, 이의 구동 방법 및 이의 제조 방법
WO2019200582A1 (en) 2018-04-19 2019-10-24 Yangtze Memory Technologies Co., Ltd. Memory device and forming method thereof
CN109155319B (zh) 2018-08-08 2019-09-10 长江存储科技有限责任公司 存储器件以及形成存储器件的方法
CN109155313B (zh) * 2018-08-16 2019-12-17 长江存储科技有限责任公司 用于形成三维存储器器件中的结构增强型半导体插塞的方法
JP2020043189A (ja) 2018-09-10 2020-03-19 キオクシア株式会社 半導体記憶装置
EP3821467A4 (en) * 2018-10-09 2022-03-30 Yangtze Memory Technologies Co., Ltd. METHOD OF REDUCING DEFECTS IN A SEMICONDUCTOR PLUG IN A THREE-DIMENSIONAL STORAGE DEVICE
KR102476135B1 (ko) * 2018-10-19 2022-12-12 삼성전자주식회사 반도체 소자 및 그 형성 방법
CN109390349B (zh) * 2018-10-24 2020-11-13 长江存储科技有限责任公司 3d存储器件及其制造方法
US10566348B1 (en) 2018-11-05 2020-02-18 Macronix International Co., Ltd. Tilted hemi-cylindrical 3D NAND array having bottom reference conductor
CN109524416B (zh) * 2018-11-06 2021-07-06 长江存储科技有限责任公司 制造存储器件的方法及存储器件
JP7462614B2 (ja) 2018-11-22 2024-04-05 長江存儲科技有限責任公司 三次元メモリデバイスおよびその製作方法
WO2020118301A1 (en) * 2018-12-07 2020-06-11 Sunrise Memory Corporation Methods for forming multi-layer vertical nor-type memory string arrays
KR102644533B1 (ko) * 2018-12-12 2024-03-07 삼성전자주식회사 수직형 반도체 소자
US11721727B2 (en) * 2018-12-17 2023-08-08 Sandisk Technologies Llc Three-dimensional memory device including a silicon-germanium source contact layer and method of making the same
JP7270740B2 (ja) * 2018-12-20 2023-05-10 アプライド マテリアルズ インコーポレイテッド ３ｄｎａｎｄ応用のためのメモリセルの製造
US10847535B2 (en) * 2018-12-24 2020-11-24 Macronix International Co., Ltd. Three dimensional memory device and method for fabricating the same
US10916560B2 (en) * 2019-01-14 2021-02-09 Macronix International Co., Ltd. Crenellated charge storage structures for 3D NAND
JP2020155714A (ja) * 2019-03-22 2020-09-24 キオクシア株式会社 半導体記憶装置
KR20200132367A (ko) * 2019-05-17 2020-11-25 에스케이하이닉스 주식회사 반도체 장치의 제조 방법
US12456648B2 (en) 2019-07-26 2025-10-28 SK Hynix Inc. Vertical semiconductor device and method for fabricating the same
KR102875497B1 (ko) * 2019-07-26 2025-10-24 에스케이하이닉스 주식회사 수직형 반도체 장치 및 그 제조 방법
CN110600480A (zh) * 2019-08-26 2019-12-20 长江存储科技有限责任公司 存储器及其制作方法
US12120881B2 (en) 2019-09-09 2024-10-15 Samsung Electronics Co., Ltd. Three-dimensional semiconductor devices
CN110800108B (zh) 2019-09-20 2021-09-14 长江存储科技有限责任公司 具有多堆栈结构的三维存储器件及其形成方法
WO2021051383A1 (en) 2019-09-20 2021-03-25 Yangtze Memory Technologies Co., Ltd. Three-dimensional memory device having multi-deck structure and methods for forming the same
WO2021056515A1 (en) 2019-09-29 2021-04-01 Yangtze Memory Technologies Co., Ltd. Three-dimensional memory devices and methods for forming the same
WO2021056514A1 (en) * 2019-09-29 2021-04-01 Yangtze Memory Technologies Co., Ltd. Three-dimensional memory devices and forming methods
WO2021056513A1 (en) 2019-09-29 2021-04-01 Yangtze Memory Technologies Co., Ltd. Three-dimensional memory devices and methods for forming the same
KR102743238B1 (ko) * 2019-09-30 2024-12-17 에스케이하이닉스 주식회사 반도체 장치 및 그 제조 방법
KR102809748B1 (ko) * 2019-12-26 2025-05-20 삼성전자주식회사 수직형 비휘발성 메모리 소자 및 그 제조방법
JP2021118234A (ja) * 2020-01-23 2021-08-10 キオクシア株式会社 半導体記憶装置
JP2020120123A (ja) * 2020-04-16 2020-08-06 株式会社半導体エネルギー研究所 半導体装置
KR102790612B1 (ko) 2020-06-23 2025-04-08 삼성전자주식회사 반도체 장치
US11289491B1 (en) * 2020-09-29 2022-03-29 Micron Technology, Inc. Epitaxtal single crystalline silicon growth for a horizontal access device
US11488975B2 (en) * 2020-10-27 2022-11-01 Sandisk Technologies Llc Multi-tier three-dimensional memory device with nested contact via structures and methods for forming the same
KR102841900B1 (ko) * 2020-11-02 2025-08-04 삼성전자주식회사 반도체 장치 및 이를 포함하는 대용량 데이터 저장 시스템
US11476276B2 (en) * 2020-11-24 2022-10-18 Macronix International Co., Ltd. Semiconductor device and method for fabricating the same
KR20220076993A (ko) * 2020-12-01 2022-06-08 에스케이하이닉스 주식회사 반도체 장치 및 반도체 장치의 제조 방법
JP2022104020A (ja) * 2020-12-28 2022-07-08 キオクシア株式会社 半導体記憶装置
US11758724B2 (en) * 2021-02-04 2023-09-12 Macronix International Co., Ltd. Memory device with memory string comprising segmented memory portions and method for fabricating the same
US12191210B2 (en) * 2021-05-13 2025-01-07 Tokyo Electron Limited Formation of high density 3D circuits with enhanced 3D conductivity
CN121310541A (zh) * 2021-06-30 2026-01-09 长江存储科技有限责任公司 三维存储器装置及其形成方法
US20230006068A1 (en) * 2021-07-01 2023-01-05 Tokyo Electron Limited Vertical transistor structures and methods utilizing deposited materials
US11948639B2 (en) * 2021-07-06 2024-04-02 Micron Technology, Inc. Methods including a method of forming a stack and isotropically etching material of the stack
JP7532587B2 (ja) * 2022-03-25 2024-08-13 株式会社半導体エネルギー研究所 半導体装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102122661A (zh) * 2009-12-16 2011-07-13 三星电子株式会社 半导体器件及其制造方法

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5308782A (en) * 1992-03-02 1994-05-03 Motorola Semiconductor memory device and method of formation
JP4939955B2 (ja) 2007-01-26 2012-05-30 株式会社東芝 不揮発性半導体記憶装置
US7592262B2 (en) 2007-03-21 2009-09-22 United Microelectronics Corp. Method for manufacturing MOS transistors utilizing a hybrid hard mask
JP5086851B2 (ja) 2008-03-14 2012-11-28 株式会社東芝 不揮発性半導体記憶装置
JP2009277770A (ja) * 2008-05-13 2009-11-26 Toshiba Corp 不揮発性半導体記憶装置及びその製造方法
JP5430890B2 (ja) 2008-07-25 2014-03-05 株式会社東芝 半導体記憶装置
KR101014854B1 (ko) 2008-08-25 2011-02-16 주식회사 하이닉스반도체 수직 구조의 플래시 메모리소자 제조방법
KR20100028827A (ko) 2008-09-05 2010-03-15 주식회사 하이닉스반도체 반도체 소자 제조 방법 및 이를 이용한 수직 채널형 비휘발성 메모리 소자 제조 방법
KR101082098B1 (ko) 2008-09-24 2011-11-10 주식회사 하이닉스반도체 3차원 구조의 플래시 메모리소자의 제조방법
KR101498676B1 (ko) 2008-09-30 2015-03-09 삼성전자주식회사 3차원 반도체 장치
KR101502585B1 (ko) * 2008-10-09 2015-03-24 삼성전자주식회사 수직형 반도체 장치 및 그 형성 방법
KR20100093350A (ko) 2009-02-16 2010-08-25 삼성전자주식회사 반도체 소자 및 그 형성방법
KR20100133212A (ko) 2009-06-11 2010-12-21 주식회사 하이닉스반도체 3차원 구조의 비휘발성 메모리 소자 및 그 제조 방법
JP2011066348A (ja) * 2009-09-18 2011-03-31 Toshiba Corp ３次元積層不揮発性半導体メモリ及びその製造方法
KR101113767B1 (ko) 2009-10-19 2012-02-27 주식회사 하이닉스반도체 3차원 구조의 비휘발성 메모리 소자, 그 동작 방법 및 제조 방법
JP5121869B2 (ja) 2010-03-23 2013-01-16 株式会社東芝 不揮発性半導体記憶装置の製造方法
US9536970B2 (en) * 2010-03-26 2017-01-03 Samsung Electronics Co., Ltd. Three-dimensional semiconductor memory devices and methods of fabricating the same
KR20110108770A (ko) 2010-03-29 2011-10-06 주식회사 하이닉스반도체 3차원 구조의 비휘발성 메모리 소자 및 그 제조 방법
KR20110120654A (ko) 2010-04-29 2011-11-04 주식회사 하이닉스반도체 비휘발성 메모리 장치 제조 방법
KR20110121938A (ko) 2010-05-03 2011-11-09 주식회사 하이닉스반도체 수직 채널형 비휘발성 메모리 장치 제조방법
KR101652829B1 (ko) 2010-06-03 2016-09-01 삼성전자주식회사 수직 구조의 비휘발성 메모리 소자
US8198672B2 (en) * 2010-06-30 2012-06-12 SanDisk Technologies, Inc. Ultrahigh density vertical NAND memory device
KR101778287B1 (ko) 2010-08-30 2017-09-14 삼성전자주식회사 반도체 메모리 소자 및 그 제조방법
KR101763420B1 (ko) * 2010-09-16 2017-08-01 삼성전자주식회사 3차원 반도체 기억 소자 및 그 제조 방법
KR101784695B1 (ko) 2010-10-21 2017-10-13 삼성전자주식회사 수직형 메모리 장치 및 그 제조 방법
KR101792778B1 (ko) 2010-10-26 2017-11-01 삼성전자주식회사 비휘발성 메모리 장치 및 그 형성 방법
KR101760658B1 (ko) 2010-11-16 2017-07-24 삼성전자 주식회사 비휘발성 메모리 장치
KR101855437B1 (ko) 2010-12-02 2018-05-08 삼성전자주식회사 불휘발성 메모리 장치 및 그것의 동작 방법
CN102544049B (zh) 2010-12-22 2014-04-16 中国科学院微电子研究所 三维半导体存储器件及其制备方法
KR102031182B1 (ko) * 2011-11-29 2019-10-14 삼성전자주식회사 반도체 메모리 소자 및 그 제조방법
US9076879B2 (en) * 2012-09-11 2015-07-07 Samsung Electronics Co., Ltd. Three-dimensional semiconductor memory device and method for fabricating the same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102122661A (zh) * 2009-12-16 2011-07-13 三星电子株式会社 半导体器件及其制造方法

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