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Apparatus and method for manufacturing liquid crystal display device using unitary vacuum processing chamber

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US7369210B2
US7369210B2 US10917486 US91748604A US7369210B2 US 7369210 B2 US7369210 B2 US 7369210B2 US 10917486 US10917486 US 10917486 US 91748604 A US91748604 A US 91748604A US 7369210 B2 US7369210 B2 US 7369210B2
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substrate
vacuum
upper
stage
chamber
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US20050011609A1 (en )
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Sang Seok Lee
Sang Ho Park
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LG Display Co Ltd
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LG Display Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1341Filling or closing of the cell
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2309/00Parameters for the laminating or treatment process; Apparatus details
    • B32B2309/60In a particular environment
    • B32B2309/68Vacuum
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/20Displays, e.g. liquid crystal displays, plasma displays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/20Displays, e.g. liquid crystal displays, plasma displays
    • B32B2457/202LCD, i.e. liquid crystal displays

Abstract

An apparatus for manufacturing a liquid crystal display device includes a vacuum processing chamber having a single substrate entrance for loading and unloading first and second substrates, upper and lower stages disposed within the vacuum processing chamber for affixing the first and second substrates, and a stage moving system for providing relative movement of the upper and lower stages.

Description

This is a continuation of application Ser. No. 10/126,963, filed on Apr. 22, 2002 now U.S. Pat. No. 6,829,032.

The present invention claims the benefit of the Korean Patent Application No. P2002-06640 filed on Feb. 6, 2002, which is hereby incorporated by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a manufacturing apparatus and method, and more particularly, to an apparatus and method for manufacturing a liquid crystal display device suitable for a large-sized liquid crystal display.

2. Discussion of the Related Art

In general, recent developments in the information communication field have increased demand for various types of displays devices. In response to this demand, various flat panel type displays such as liquid crystal display (LCD), plasma display panel (PDP), electro-luminescent display (ELD), and vacuum fluorescent display (VFD) have been developed to replace conventional cathode ray tube (CRT) devices. In particular, LCD devices have been used because of their high resolution, light weight, thin profile, and low power consumption. In addition, LCD devices have been implemented in mobile devices such as monitors for notebook computers. Furthermore, LCD devices have been developed for monitors of computer and television to receive and display broadcasting signals.

Accordingly, efforts to improve image quality of LCD devices contrast with the benefits of high resolution, light weight, thin profile, and low power consumption. In order to incorporate LCD devices as a general image display, image quality such as fineness, brightness, large-sized area, for example, must be realized.

A plurality of gate lines are formed along one direction at fixed intervals on the first glass substrate (TFT array substrate), and a plurality of data lines are formed along a second direction perpendicular to one direction of the plurality of gate lines, thereby defining a plurality of pixel regions. Then, a plurality of pixel electrodes are formed in a matrix arrangement at the pixel regions, and a plurality of thin film transistors (TFT) are formed at the pixel regions. Accordingly, the plurality of thin film transistors are switched by signals transmitted along the gate lines and transfer signals transmitted along the data lines to each pixel electrode. In order to prevent light leakage, black matrix films are formed on the second glass substrate (color filter substrate) except at regions of the second glass substrate that correspond to the pixel regions of the first glass substrate.

A process for manufacturing an LCD device using a TFT substrate and a color filter substrate will be described with reference to a manufacturing apparatus according to the related art.

The process for manufacturing an LCD device according to the related art includes steps of forming a sealant pattern on one of a first and second substrate to form an injection inlet, bonding the first and second substrates to each other within a vacuum processing chamber, and injecting liquid crystal material through the injection inlet in the other vacuum chamber. In another process of manufacturing an LCD device according to the prior art, a liquid crystal dropping method, which is disclosed in Japanese Patent Application No. 11-089612 and 11-172903, includes steps of dropping liquid crystal material on a first substrate, arranging a second substrate over the first substrate, and moving the first and second substrates, thereby bonding the first and second substrates to each other. Compared to the liquid crystal injection method, the liquid crystal dropping method is advantageous in that various steps such as, formation of a liquid crystal material injection inlet, injection of the liquid crystal material, and sealing of the injection inlet are unnecessary since the liquid crystal material is predisposed on the first substrate.

FIGS. 1 and 2 show cross sectional views of a substrate bonding device using the liquid crystal dropping method according to the prior art. In FIG. 1, the substrate bonding device includes a frame 10, an upper stage 21, a lower stage 22, a sealant dispensor (not shown), a liquid crystal material dispenser 30, a processing chamber includes an upper chamber unit 31 and a lower chamber unit 32, a chamber moving system 40, and a stage moving system 50. The chamber moving system 40 includes a driving motor driven to selectively move the lower chamber unit 32 to a location at which the bonding process is carried out, or to a location at which outflow of the sealant occurs and dropping of the liquid crystal material. The stage moving system 50 includes another driving motor driven to selectively move the upper stage 21 along a vertical direction perpendicular to the upper and lower stages 21 and 22.

A process of manufacturing an LCD device using the substrate bonding apparatus according to the prior art follows. In FIG. 1 First, a second substrate 52 is placed upon the upper stage 21, and a first substrate 51 is placed upon the lower state 22. Then, the lower chamber unit 32 having the lower stage 22 is moved to a processing location (S1) by the chamber moving system 40 for sealant dispensing and liquid crystal material dispensing. In FIG. 2 Subsequently, the lower chamber unit 32 is moved to a processing location (S2) for substrate bonding by the chamber moving system 40. Thereafter, the upper and lower chamber units 31 and 32 are assembled together by the chamber moving system 40 to form a vacuum tight seal, and a pressure in the chamber is reduced by a vacuum generating system (not shown). Once a sufficient pressure is attained, the upper stage 21 is moved downwardly by the stage moving system 50 to fasten the second substrate 52 to the first substrate 51, and a continuous pressurization of the chamber completes the manufacture of the LCD device.

Unfortunately, the substrate bonding apparatus according to the prior art is disadvantageous. First, the substrate bonding apparatus according the prior art fails to dispense sealant and liquid crystal material on a substrate on which thin film transistors and a color filter are formed. Second, an overall size of the bonding apparatus fails to allow for other processing, thereby making it difficult in designing a layout for a manufacturing process of a liquid crystal display device. Third, due to performing multiple processes using a lower chamber unit, processing time is greatly increased, thereby decreasing overall productivity. According to the prior art, the amount of time to dispense the sealant on the first substrate, to dispense the liquid crystal material on the second substrate, and to bond the first and second substrates, results in significant amounts of time in which all of the manufacturing processes are sequentially performed and completed. Fourth, if a vacuum tight connection between the upper and lower chamber units is not attained, airflow will occur between the upper and lower chamber units, thereby resulting in a poor bond between the first and second substrates. Accordingly, additional components for assuring a vacuum tight seal between the upper and lower chamber units is required. Finally, alignment of the first and second substrates during bonding is difficult because of horizontal movement of the lower chamber unit, thereby increasing overall processing time.

SUMMARY OF THE INVENTION

Accordingly, the present invention is directed to an apparatus and method for bonding a liquid crystal display device, a method for using the apparatus, and a device produced by the method that substantially obviates one or more of the problems due to limitations and disadvantages of the prior art.

An object of the present invention is to provide an apparatus and method for a manufacturing a large-sized liquid crystal display device having a moving range and a direction of each stage for an alignment of the substrates.

Another object of the present invention is provide a liquid crystal display device made by the apparatus and method for manufacturing a large-sized liquid crystal display device.

Additional features and advantages of the invention will be set forth in part in the description which follows, and in part will be apparent from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.

To achieve these objects and other advantages and in accordance with the purpose of the invention, as embodied and broadly described herein, an apparatus for manufacturing a liquid crystal display device includes a unitary vacuum processing chamber having a substrate entrance, a loader part to carry and affix first and second substrates through the substrate entrance, one of the first and second substrates having a liquid crystal material disposed thereupon, upper and lower stages disposed within the vacuum processing chamber for affixing the first and second substrates, a stage moving system for providing relative movement between the upper and lower stages, and a vacuum generating system for evacuating an interior of the vacuum processing chamber.

In another aspect, a method for manufacturing a liquid crystal display device includes loading first and second substrates through a substrate entrance of a unitary vacuum processing chamber, one of the first and second substrates having a liquid crystal material disposed thereupon, providing relative movement between the upper and lower stages, evacuating an interior of the vacuum processing chamber, and bonding the first and second substrates together with the liquid crystal material disposed therebetween.

In another aspect, a liquid crystal display device manufactured by a method including loading first and second substrates through a substrate entrance of a unitary vacuum processing chamber, one of the first and second substrates having a liquid crystal material disposed thereupon, providing relative movement between the upper and lower stages, evacuating an interior of the vacuum processing chamber, and bonding the first and second substrates together with the liquid crystal material disposed therebetween.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to provide further explanation of the invention as claimed.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention. In the drawings:

FIG. 1 shows a cross sectional view of a substrate bonding device prior to sealing of upper and lower chamber units according to the prior art;

FIG. 2 shows a cross section view of the substrate bonding device during substrate bonding according to the prior art;

FIG. 3 shows an exemplary apparatus for manufacturing a liquid crystal display device during a loading process according to the present invention;

FIG. 4 shows the exemplary apparatus for manufacturing a liquid crystal display device during a vacuum process according to the present invention;

FIG. 5 shows the exemplary apparatus for manufacturing a liquid crystal display device during a location alignment process between substrates according to the present invention;

FIG. 6 shows the exemplary apparatus for manufacturing a liquid crystal display device during a bonding process of the substrates according to the present invention;

FIG. 7 shows the exemplary apparatus for manufacturing a liquid crystal display device during a further bonding process according to the present invention; and

FIG. 8 shows the exemplary apparatus for manufacturing a liquid crystal display device during an unloading process according to the present invention.

DETAILED DESCRIPTION OF THE INVENTION

Reference will now be made in detail to the preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings.

FIG. 3 shows an exemplary apparatus for manufacturing a liquid crystal display device during a loading process according to the present invention. In FIG. 3, the apparatus may include a vacuum processing chamber 110, an upper stage 121, a lower stage 122, an upper stage moving axis 131, a lower stage rotational axis 132, an upper stage driving motor 133, a lower stage driving motor 134, a vacuum generating system 200, and a loader part 300.

The vacuum processing chamber 110 may be connected to the vacuum generating system 200 by an air outlet 112 via an air outlet valve 112 a for reducing a pressure of an interior of the vacuum processing chamber 110. The vacuum processing chamber may include a vent pipe 113 for increasing the pressure of the interior of the vacuum processing chamber 110 via introduction of air or gas through a vent pipe valve 113 a. Accordingly, the vacuum processing chamber may include a vacuum processing chamber entrance 111 to allow for introduction and extraction of a first substrate 510 and a second substrate 520 by the loader part 300.

The upper and lower stages parts 121 and 122 may be provided at upper and lower portions of the vacuum processing chamber 110, respectively. The upper and lower stages 121 and 122 may include an electrostatic chuck (ESC) 121 a and 122 a provided at a opposing surfaces of the upper and lower stages 121 and 122, respectively. Accordingly, the upper electrostatic chuck 121 a electrostatically attaches the substrate 520 to the upper stage 121, and the lower electrostatic chuck 122 a electrostatically attaches the substrate 510 to the lower stage 122. In addition, the upper stage 121 may include a plurality of vacuum holes 121 b formed through the upper stage 121, thereby attaching the substrate 520 to the upper stage 121 by forming a vacuum within the plurality of vacuum holes 121 b. The upper and lower electrostatic chucks 121 a and 122 a may be provided with at least one pair of electrostatic plates having different polarities to apply serial power having different polarities. Alternatively, the upper and lower electrostatic chucks 121 a and 122 a may be provided with electrostatic plates simultaneously having two identical polarities.

The plurality of the vacuum holes 121 b may be formed in a center portion and along a circumference of the upper electrostatic chuck 121 a, and may be connected to a single or multiple pipes 121 c to transmit a vacuum force generated by a vacuum pump 123 connected to the upper stage 121. Alternatively, even though the upper electrostatic chuck 121 a and the plurality of vacuum holes 121 b may be formed to have a shape similar to the upper stage 121, it may preferable to arrange the upper electrostatic chuck 121 a and the plurality of vacuum holes 121 b based upon a geometry of the substrate 520 or upon a geometry of a region upon which liquid crystal material is disposed.

The upper stage moving axis 131 drives the upper stage 121, the lower stage rotational axis 132 drives the lower stage 122, and the upper and lower stage driving motors 133 and 134 drive the upper and lower stages 121 and 122, respectively, at inner and outer sides of the vacuum processing chamber 110. A driving system 135 may be provided driving the lower stage 122 during an alignment process for aligning the first and second substrates 510 and 520.

The vacuum generating system 200 may transmit a suction force to generate a vacuum state inside the vacuum processing chamber 110, and may include a suction pump driven to generate a general vacuum force. In addition, the vacuum generating system 200 may be interconnected to the air outlet 112 of the vacuum processing chamber 110.

The loader part 300 may be a mechanical device separate from the vacuum processing chamber 110, and may be provided at the outer side of the vacuum processing chamber 110. The loader part 300 may receive one of the first substrate 510 and the second substrate 520 upon which at least the liquid crystal material is disposed. In addition, the first substrate 510 may include both the liquid crystal material and the sealant. Moreover, the first substrate 510 may include one of a TFT array substrate and a color filter (C/F) substrate, and the second substrate 520 may include another one of the TFT array substrate and the C/F substrate. Then, the loader part 300 may selectively load both of the first and second substrates 510 and 520 into the vacuum processing chamber 110. The loader part 300 may include a first arm 310 to carry the first substrate 510 upon which at least the liquid crystal material is disposed, and a second arm 320 to carry the second substrate 520. During the loading of the first and second substrates 510 and 520, the first arm 310 may be placed over the second arm 320.

An alignment system 600 may be further included to certify an alignment state of the first and second substrates 510 and 520. The alignment system 600 may be provided to at least one of the inner and outer sides of the vacuum processing chamber 110. Since movement of the lower stage 122 may be limited, an alignment state between the first and second substrates 510 and 520 may be accurately and quickly achieved.

Hereinafter, a bonding process of the first and second substrates 510 and 520 using the apparatus for manufacturing a liquid crystal display device according to the present invention will now be explained.

In FIG. 3, the loader part 300 receives one of the first substrate 510 and the second substrate 520 upon which at least a liquid crystal material is disposed at the first arm 310, and an other of the first substrate 510 and the second substrate 520 at the second arm 320. The second arm 320 loads the substrate 520 onto a lower surface of the upper stage 121, and the first arm 310 loads the substrate 510 upon which at least the liquid crystal material is disposed onto an upper surface of the lower stage 122. The substrate 520 may be loaded onto the lower surface of the upper stage 122 before the substrate 510 upon which at least the liquid crystal material is disposed in order to prevent any particles from being deposited upon the substrate 510. During the loading process of the substrate 510, the particles can fall on the substrate 510 on which a liquid crystal material is disposed.

The second arm 320 carries the substrate 520 under the upper stage, and then a vacuum pump 123 is enabled to transmit a vacuum force to each of the plurality of vacuum holes 121 b at the upper stage 121. The first arm 310 carries the substrate 510 above the lower stage 122 to affix the substrate 520 to the upper stage 121 from the second arm 320 and a vacuum pump (not shown) is enabled to transmit a vacuum force to each of the plurality of vacuum holes (not shown) at the lower stage 122 to affix the substrate 510 to the lower stage 122 from the first arm 310.

After the loading of the substrates 510 and 520 is completed, shielding door 114 disposed at the vacuum processing chamber entrance 111 is enabled, thereby sealing the vacuum processing chamber entrance 111.

FIG. 4 shows the exemplary apparatus for manufacturing a liquid crystal display device during a vacuum process according to the present invention. In FIG. 4, the vacuum generating system 200 is enabled, and the air outlet valve 112 a is opened, thereby evacuating the interior of the vacuum processing chamber 110. Once the interior of the vacuum processing chamber 110 is successfully evacuated to a desired pressure, the vacuum generating system 200 may be disabled, and the air outlet valve 112 a may be closed. Accordingly, power may be applied to the upper and lower electrostatic chucks 121 a and 122 a, thereby affixing the substrates 510 and 520 to the upper and lower stages 121 and 122 by an electrostatic force.

FIG. 5 shows the exemplary apparatus for manufacturing a liquid crystal display device during a location alignment process between substrates according to the present invention. In FIG. 5, the upper stage driving motor 133 moves the upper stage 121 toward the lower stage 122, so that the upper stage 121 is placed adjacent to the lower stage 122. Then, the alignment system 600 certifies the alignment state of the first and second substrates 510 and 520 that are attached to the upper and lower stages 121 and 122, respectively. The alignment system 600 transmits a control signal to the upper stage moving axis 131 and to the lower stage rotational axis 132, thereby aligning the first and second substrates 510 and 520.

FIG. 6 shows the exemplary apparatus for manufacturing a liquid crystal display device during a bonding process of the substrates according to the present invention. In FIG. 6, the upper stage moving axis 131 is driven in response to a drive signal received from the alignment system 600, and performs a first bonding process to bond the substrates 510 and 520. However, the first bonding process may not necessarily completely bond the substrates 510 and 520. The first bonding process loosely bonds the substrates 510 and 520 such that air is not to be introduced between the bonded substrates when the pressure of the vacuum processing chamber is increased to atmospheric pressure.

FIG. 7 shows the exemplary apparatus for manufacturing a liquid crystal display device during a further bonding process according to the present invention. In FIG. 7, the vent pipe valve 113 a is enabled, thereby allowing the pressure of the interior of the vacuum processing chamber 110 to reach atmospheric pressure. Accordingly, the bonded substrates are further compressed due to the pressure difference between the evacuated interior between the bonded substrates and the atmospheric pressure of the vacuum processing chamber 110.

According to this, more complete bonding process is performed, and if the bonding process is completed, the shielding door 114 of the vacuum processing chamber 110 is operative, so that the entrance 111 closed by the shielding door is opened.

FIG. 8 shows the exemplary apparatus for manufacturing a liquid crystal display device during an unloading process according to the present invention. In FIG. 8, unloading of the bonded substrates is performed by the second arm 320 of the loader part 300.

It will be apparent to those skilled in the art than various modifications and variations can be made in the apparatus and method for manufacturing a liquid crystal display device of the present invention. Thus, it is intended that the present invention covers the modifications and variations of this invention provided they come within the scope of the appended claims and their equivalents.

Claims (11)

1. An apparatus for manufacturing a liquid crystal display device, comprising:
a vacuum processing chamber having a single substrate entrance for loading and unloading first and second substrates;
upper and lower stages disposed within the vacuum processing chamber for affixing the first and second substrates;
a stage moving system for providing relative movement of the upper and lower stages; and
the apparatus further comprising a loader part including a first arm for loading one of the first and second substrates upon which a liquid crystal material is disposed onto the lower stage through the single substrate entrance, and a second arm for loading another of the first and second substrates onto the upper stage through the single substrate entrance;
wherein the first arm is positioned over the second arm outside the single substrate entrance.
2. The apparatus according to claim 1, wherein the vacuum processing chamber includes an air outlet and a vent pipe.
3. The apparatus according to claim 1, wherein the single substrate entrance included a shielding door.
4. The apparatus according to claim 1, further comprising first and second drive motors at an exterior of the vacuum processing chamber for providing the relative movement.
5. The apparatus according to claim 4, wherein the first drive motor moves the upper stage along axial direction and the second drive motor moves the lower stage along a rotational axis.
6. A method for manufacturing a liquid crystal display device, comprising the steps of:
loading first and second substrates through a single substrate entrance of a vacuum processing chamber;
providing a first relative movement between the upper and lower stages;
evacuating an interior of the vacuum processing chamber;
bonding the first and second substrates together;
providing a second relative movement between the upper and lower stages; and
removing the bonded first and second substrates from the lower stage through the single substrate entrance;
wherein the step of loading the first and second substrates includes loading one of the first and second substrates upon which a liquid crystal material is disposed onto the lower stage through the single substrate entrance using a first loading arm, and loading another of the first and second substrates onto the upper stage through the single substrate entrance using a second loading arm;
wherein the first arm is positioned over the second arm outside of the single substrate entrance.
7. The method according to claim 6, wherein the step of loading first and second substrates include:
carrying the second substrate and affixing the second substrate to the upper stage;
carrying the first substrate having a liquid crystal material; and
affixing the first substrate to the lower stage.
8. The method according to claim 7, wherein the step of affixing the second substrate includes one of enabling at least one electrostatic chuck of supplying a vacuum force to a plurality of vacuum holes provided on a surface of the upper stage.
9. The method according to claim 6, wherein the step of providing the first relative movement includes a first drive a motor for moving the upper stage and a second drive motor for rotating the lower stage.
10. The method according claim 9, wherein both the first and second drive motors are disposed at an exterior of the vacuum processing chamber.
11. The method to claim 6, further comprising aligning the first and second substrates before the step of bonding the first and second substrates.
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US10917486 US7369210B2 (en) 2002-02-06 2004-08-13 Apparatus and method for manufacturing liquid crystal display device using unitary vacuum processing chamber

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070006098A1 (en) * 2005-06-30 2007-01-04 Microsoft Corporation Integration of location logs, GPS signals, and spatial resources for identifying user activities, goals, and context

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3953767B2 (en) * 2001-10-01 2007-08-08 シャープ株式会社 Method and apparatus for manufacturing a liquid crystal display device
KR100469353B1 (en) * 2002-02-06 2005-02-02 엘지.필립스 엘시디 주식회사 bonding device for liquid crystal display
US6784970B2 (en) * 2002-02-27 2004-08-31 Lg.Philips Lcd Co., Ltd. Method of fabricating LCD
US7270587B2 (en) * 2002-03-05 2007-09-18 Lg.Philips Lcd Co., Ltd. Apparatus and method for manufacturing liquid crystal display devices, method for using the apparatus, and device produced by the method
US6885427B2 (en) * 2002-03-15 2005-04-26 Lg.Philips Lcd Co., Ltd. Substrate bonding apparatus for liquid crystal display device having alignment system with one end provided inside vacuum chamber
JP3693972B2 (en) * 2002-03-19 2005-09-14 富士通ヴィエルエスアイ株式会社 Bonded substrate manufacturing apparatus and a substrate laminating method pasting
US7244160B2 (en) * 2002-03-23 2007-07-17 Lg.Philips Lcd Co., Ltd. Liquid crystal display device bonding apparatus and method of using the same
KR20040012303A (en) * 2002-08-02 2004-02-11 삼성전자주식회사 a panel for a liquid crystal display, a liquid crystal display including the panel, and a methods for manufacturing the same
EP1722390A1 (en) * 2004-03-02 2006-11-15 Kabushiki Kaisha Toshiba Production method and production device for image display unit
JP4190472B2 (en) * 2004-07-28 2008-12-03 シャープ株式会社 Method and apparatus for manufacturing a liquid crystal display device
KR20060029530A (en) * 2004-10-02 2006-04-06 삼성전자주식회사 In-situ apparatus for heat-treating of a liquid crystal panel, and cooling device employed to the in-situ apparatus
KR100722639B1 (en) 2005-01-27 2007-05-28 시바우라 메카트로닉스 가부시키가이샤 Substrate assembling apparatus, substrate assembling decision method and substrate assembling method
KR101146525B1 (en) * 2005-06-30 2012-05-25 엘지디스플레이 주식회사 Jig for fixing display plate and Method thereof
KR100898793B1 (en) * 2005-12-29 2007-07-04 엘지디스플레이 주식회사 Substrates bonding device for manufacturing of liquid crystal display
KR101321238B1 (en) * 2006-05-11 2013-10-25 엘지디스플레이 주식회사 encapsulation appratus and method for fabricating electroluminescence display device
KR101213103B1 (en) 2006-06-30 2013-01-09 엘지디스플레이 주식회사 bonding device and fa brication method of Light emitting device using thereof
US8740205B2 (en) 2007-04-16 2014-06-03 Ulvac, Inc. Conveyor and deposition apparatus, and maintenance method thereof
KR100916298B1 (en) * 2007-11-16 2009-09-10 주식회사 디엠에스 apparatus for making etching area on substrate
US20090133801A1 (en) * 2007-11-23 2009-05-28 Seok Hee Shim Substrate attaching apparatus
KR100947082B1 (en) * 2009-04-24 2010-03-10 한동희 Panel adhesive apparatus
US20130037202A1 (en) * 2010-01-29 2013-02-14 Citizen Holdings Co., Ltd. Electronic eyeglass and liquid crystal lens production methods
KR101814366B1 (en) * 2012-02-02 2018-01-03 주식회사 케이씨텍 Substrate treating apparatus and method thoereof using same

Citations (96)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5165656A (en) 1974-12-04 1976-06-07 Shinshu Seiki Kk
US3978580A (en) 1973-06-28 1976-09-07 Hughes Aircraft Company Method of fabricating a liquid crystal display
US4094058A (en) 1976-07-23 1978-06-13 Omron Tateisi Electronics Co. Method of manufacture of liquid crystal displays
JPS5738414A (en) 1980-08-20 1982-03-03 Showa Denko Kk Spacer for display panel
JPS5788428A (en) 1980-11-20 1982-06-02 Ricoh Elemex Corp Manufacture of liquid crystal display body device
JPS5827126A (en) 1981-08-11 1983-02-17 Nec Corp Production of liquid crystal display panel
JPS5957221A (en) 1982-09-28 1984-04-02 Asahi Glass Co Ltd Production of display element
JPS59195222A (en) 1983-04-19 1984-11-06 Matsushita Electric Ind Co Ltd Manufacture of liquid-crystal panel
JPS60111221A (en) 1983-11-19 1985-06-17 Nippon Denso Co Ltd Method and device for charging liquid crystal
JPS60164723A (en) 1984-02-07 1985-08-27 Seiko Instr & Electronics Ltd Liquid crystal display device
JPS60217343A (en) 1984-04-13 1985-10-30 Matsushita Electric Ind Co Ltd Liquid crystal display device and its preparation
JPS617822A (en) 1984-06-22 1986-01-14 Canon Inc Production of liquid crystal element
JPS6155625A (en) 1984-08-24 1986-03-20 Nippon Denso Co Ltd Manufacture of liquid crystal element
JPS6254225A (en) 1985-07-15 1987-03-09 Semiconductor Energy Lab Co Ltd Manufacturing method for liquid crystal display
JPS6254228A (en) 1985-07-15 1987-03-09 Semiconductor Energy Lab Co Ltd Manufacturing method for liquid crystal display
JPS6254229A (en) 1985-07-15 1987-03-09 Semiconductor Energy Lab Co Ltd Manufacturing method for liquid crystal display
US4653864A (en) 1986-02-26 1987-03-31 Ovonic Imaging Systems, Inc. Liquid crystal matrix display having improved spacers and method of making same
JPS6289025A (en) 1985-10-15 1987-04-23 Matsushita Electric Ind Co Ltd Liquid crystal display panel and its production
JPS6290622A (en) 1985-10-17 1987-04-25 Seiko Epson Corp Liquid crystal display device
US4691995A (en) 1985-07-15 1987-09-08 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal filling device
JPS62205319A (en) 1986-03-06 1987-09-09 Canon Inc Ferroelectric liquid crystal element
JPS63109413A (en) 1986-10-27 1988-05-14 Fujitsu Ltd Production of liquid crystal display
JPS63110425A (en) 1986-10-29 1988-05-14 Toppan Printing Co Ltd Cell for sealing liquid crystal
JPS63128315A (en) 1986-11-19 1988-05-31 Victor Co Of Japan Ltd Liquid crystal display element
US4775225A (en) 1985-05-16 1988-10-04 Canon Kabushiki Kaisha Liquid crystal device having pillar spacers with small base periphery width in direction perpendicular to orientation treatment
JPS63311233A (en) 1987-06-12 1988-12-20 Toyota Motor Corp Liquid crystal cell
JPH039549A (en) 1989-05-16 1991-01-17 Motorola Inc Compound integrated storage device
JPH0536425A (en) 1991-02-12 1993-02-12 Tokyo Electric Power Co Inc:The Alloy separator for solid electrolytic fuel cell and manufacture of the same
JPH0536426A (en) 1991-07-31 1993-02-12 Mitsubishi Heavy Ind Ltd Solid electrolytic fuel cell
JPH0559546A (en) 1991-09-03 1993-03-09 Nec Ibaraki Ltd Sputter deposition device
JPH05107533A (en) 1991-10-16 1993-04-30 Shinetsu Eng Kk Method and device for sticking glass substrate for liquid crystal display plate
JPH05127179A (en) 1991-11-01 1993-05-25 Ricoh Co Ltd Production of liquid crystal display element
JPH05154923A (en) 1991-12-06 1993-06-22 Hitachi Ltd Substrate assembling device
US5247377A (en) 1988-07-23 1993-09-21 Rohm Gmbh Chemische Fabrik Process for producing anisotropic liquid crystal layers on a substrate
JPH05265011A (en) 1992-03-19 1993-10-15 Seiko Instr Inc Production of liquid crystal display element
JPH05281562A (en) 1992-04-01 1993-10-29 Matsushita Electric Ind Co Ltd Manufacture of liquid crystal panel
JPH05281557A (en) 1992-04-01 1993-10-29 Matsushita Electric Ind Co Ltd Manufacture of liquid crystal panel
US5263888A (en) 1992-02-20 1993-11-23 Matsushita Electric Industrial Co., Ltd. Method of manufacture of liquid crystal display panel
JPH0618829A (en) 1992-06-30 1994-01-28 Shinetsu Eng Kk Laminating device for glass substrate for liquid crystal display board
JPH0651256A (en) 1992-07-30 1994-02-25 Matsushita Electric Ind Co Ltd Device for discharging liquid crystal
JPH0664229A (en) 1992-08-24 1994-03-08 Toshiba Corp Optical printing head
JPH06148657A (en) 1992-11-06 1994-05-27 Matsushita Electric Ind Co Ltd Method and device for manufacturing cell for liquid crystal display
JPH06160871A (en) 1992-11-26 1994-06-07 Matsushita Electric Ind Co Ltd Liquid crystal display panel and its production
JPH06194637A (en) 1992-12-24 1994-07-15 Shinetsu Eng Kk Method for sticking glass substrate for liquid crystal display plate
JPH06235925A (en) 1993-02-10 1994-08-23 Matsushita Electric Ind Co Ltd Manufacture of liquid crystal display element
JPH06265915A (en) 1993-03-12 1994-09-22 Matsushita Electric Ind Co Ltd Discharge device for filling liquid crystal
JPH06313870A (en) 1993-04-28 1994-11-08 Hitachi Ltd Substrate assembly device
US5379139A (en) 1986-08-20 1995-01-03 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal device and method for manufacturing same with spacers formed by photolithography
JPH0784268A (en) 1993-09-13 1995-03-31 Hitachi Ltd Method for plotting sealing material
US5406989A (en) 1993-10-12 1995-04-18 Ayumi Industry Co., Ltd. Method and dispenser for filling liquid crystal into LCD cell
JPH07128674A (en) 1993-11-05 1995-05-19 Matsushita Electric Ind Co Ltd Production of liquid crystal display element
JPH07181507A (en) 1993-12-21 1995-07-21 Canon Inc Liquid crystal display device and information transmission device having the liquid crystal display device
JPH07275770A (en) 1994-04-06 1995-10-24 Hitachi Techno Eng Co Ltd Paste applicator
JPH07275771A (en) 1994-04-11 1995-10-24 Hitachi Techno Eng Co Ltd Coating applicator for paste
US5499128A (en) 1993-03-15 1996-03-12 Kabushiki Kaisha Toshiba Liquid crystal display device with acrylic polymer spacers and method of manufacturing the same
JPH0876133A (en) 1994-09-02 1996-03-22 Shinetsu Eng Kk Surface plate structure in laminating device for glass substrate for liquid crystal display plate
JPH0895066A (en) 1994-09-27 1996-04-12 Matsushita Electric Ind Co Ltd Manufacture of liquid crystal element and device thereof
JPH08101395A (en) 1994-09-30 1996-04-16 Matsushita Electric Ind Co Ltd Production of liquid crystal display element
US5507323A (en) 1993-10-12 1996-04-16 Fujitsu Limited Method and dispenser for filling liquid crystal into LCD cell
JPH08106101A (en) 1994-10-06 1996-04-23 Fujitsu Ltd Production of liquid crystal display panel
JPH08110504A (en) 1994-10-13 1996-04-30 Shinetsu Eng Kk Heater of glass substrate for liquid crystal display
JPH08136937A (en) 1994-11-09 1996-05-31 Shinetsu Eng Kk Method for pressurizing and heating glass substrate for liquid crystal display plate and device therefor
JPH08171094A (en) 1994-12-19 1996-07-02 Nippon Soken Inc Liquid crystal injecting method and liquid crystal injecting device to liquid crystal display device
JPH08173874A (en) 1994-12-26 1996-07-09 Hitachi Techno Eng Co Ltd Paste coater
JPH08190099A (en) 1995-01-11 1996-07-23 Fujitsu Ltd Production of liquid crystal display device and apparatus for producing liquid crystal display device
US5539545A (en) 1993-05-18 1996-07-23 Semiconductor Energy Laboratory Co., Ltd. Method of making LCD in which resin columns are cured and the liquid crystal is reoriented
US5548429A (en) 1993-06-14 1996-08-20 Canon Kabushiki Kaisha Process for producing liquid crystal device whereby curing the sealant takes place after pre-baking the substrates
JPH08240807A (en) 1995-03-06 1996-09-17 Fujitsu Ltd Method for sealing liquid crystal display panel
JPH091026A (en) 1995-06-23 1997-01-07 Hitachi Techno Eng Co Ltd Paste coating machine
JPH0961829A (en) 1995-08-21 1997-03-07 Matsushita Electric Ind Co Ltd Production of liquid crystal display element
US5642214A (en) 1991-07-19 1997-06-24 Sharp Kabushiki Kaisha Optical modulating element and electronic apparatus using it
US5742370A (en) 1996-09-12 1998-04-21 Korea Institute Of Science And Technology Fabrication method for liquid crystal alignment layer by magnetic field treatment
US5757451A (en) 1995-09-08 1998-05-26 Kabushiki Kaisha Toshiba Liquid crystal display device spacers formed from stacked color layers
US5852484A (en) 1994-09-26 1998-12-22 Matsushita Electric Industrial Co., Ltd. Liquid crystal display panel and method and device for manufacturing the same
US5861932A (en) 1997-03-31 1999-01-19 Denso Corporation Liquid crystal cell and its manufacturing method
US5875922A (en) 1997-10-10 1999-03-02 Nordson Corporation Apparatus for dispensing an adhesive
US5952676A (en) 1986-08-20 1999-09-14 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal device and method for manufacturing same with spacers formed by photolithography
US5956112A (en) 1995-10-02 1999-09-21 Sharp Kabushiki Kaisha Liquid crystal display device and method for manufacturing the same
CN1234524A (en) 1998-01-13 1999-11-10 松下电器产业株式会社 Method for producing liquid crystal display device
US6001203A (en) 1995-03-01 1999-12-14 Matsushita Electric Industrial Co., Ltd. Production process of liquid crystal display panel, seal material for liquid crystal cell and liquid crystal display
US6011609A (en) 1996-10-05 2000-01-04 Samsung Electronics Co., Ltd. Method of manufacturing LCD by dropping liquid crystals on a substrate and then pressing the substrates
US6016181A (en) 1996-11-07 2000-01-18 Sharp Kabushiki Kaisha Liquid crystal device having column spacers with portion on each of the spacers for reflecting or absorbing visible light and method for fabricating the same
US6016178A (en) 1996-09-13 2000-01-18 Sony Corporation Reflective guest-host liquid-crystal display device
US6055035A (en) 1998-05-11 2000-04-25 International Business Machines Corporation Method and apparatus for filling liquid crystal display (LCD) panels
EP1003066A1 (en) 1998-11-16 2000-05-24 Matsushita Electric Industrial Co., Ltd. Method of manufacturing liquid crystal display devices
US6163357A (en) 1996-09-26 2000-12-19 Kabushiki Kaisha Toshiba Liquid crystal display device having the driving circuit disposed in the seal area, with different spacer density in driving circuit area than display area
US6205368B1 (en) 1997-03-31 2001-03-20 Daihen Corporation Work transport control method
US6219126B1 (en) 1998-11-20 2001-04-17 International Business Machines Corporation Panel assembly for liquid crystal displays having a barrier fillet and an adhesive fillet in the periphery
US6226067B1 (en) 1997-10-03 2001-05-01 Minolta Co., Ltd. Liquid crystal device having spacers and manufacturing method thereof
US6236445B1 (en) 1996-02-22 2001-05-22 Hughes Electronics Corporation Method for making topographic projections
US20010021000A1 (en) 2000-02-02 2001-09-13 Norihiko Egami Apparatus and method for manufacturing liquid crystal display
US6304306B1 (en) 1995-02-17 2001-10-16 Sharp Kabushiki Kaisha Liquid crystal display device and method for producing the same
US6337730B1 (en) 1998-06-02 2002-01-08 Denso Corporation Non-uniformly-rigid barrier wall spacers used to correct problems caused by thermal contraction of smectic liquid crystal material
US20020008838A1 (en) 2000-07-19 2002-01-24 Nec Corporation Apparatus and method of manufacturing liquid crystal display
US6414733B1 (en) 1999-02-08 2002-07-02 Dai Nippon Printing Co., Ltd. Color liquid crystal display with a shielding member being arranged between sealing member and display zone
US6829032B2 (en) * 2002-02-06 2004-12-07 Lg. Philips Lcd Co., Ltd. Apparatus and method for manufacturing liquid crystal device using unitary vacuum processing chamber

Family Cites Families (79)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US630306A (en) * 1898-03-23 1899-08-01 Charles Rausford Murray Equalizer.
JPS5811389B2 (en) 1974-12-03 1983-03-02 Insuchitsuuto Puroburemu Materiarobedenia Akademii Nauku Ukurainsukoi Esuesuaaru
JPH01216317A (en) * 1988-02-24 1989-08-30 Nec Corp Manufacture of liquid crystal display panel
JPH095762A (en) 1995-06-20 1997-01-10 Matsushita Electric Ind Co Ltd Production of liquid crystal panel
JP3978241B2 (en) 1995-07-10 2007-09-19 シャープ株式会社 The liquid crystal display panel and manufacturing method thereof
JP3161296B2 (en) 1995-09-05 2001-04-25 松下電器産業株式会社 A method of manufacturing a liquid crystal display element
JPH0973075A (en) 1995-09-05 1997-03-18 Matsushita Electric Ind Co Ltd Production of liquid crystal display element and apparatus for producing liquid crystal display element
JP3658604B2 (en) 1995-10-27 2005-06-08 富士通ディスプレイテクノロジーズ株式会社 A method of manufacturing a liquid crystal panel
JPH09230357A (en) 1996-02-22 1997-09-05 Canon Inc Production of liquid crystal panel and liquid crystal cell used for the same
JP3790295B2 (en) 1996-04-17 2006-06-28 シャープ株式会社 A method of manufacturing a liquid crystal display panel
JP3234496B2 (en) 1996-05-21 2001-12-04 松下電器産業株式会社 A method of manufacturing a liquid crystal display device
JPH10123537A (en) 1996-10-15 1998-05-15 Matsushita Electric Ind Co Ltd Liquid crystal display element and its production
JP3088960B2 (en) 1996-10-22 2000-09-18 松下電器産業株式会社 A method of manufacturing a liquid crystal display element
JPH10142616A (en) 1996-11-14 1998-05-29 Ayumi Kogyo Kk Liquid crystal injection method and liquid dispenser
JPH10177178A (en) 1996-12-17 1998-06-30 Matsushita Electric Ind Co Ltd Production of liquid crystal display element
JP3874871B2 (en) 1997-02-10 2007-01-31 シャープ株式会社 A method of manufacturing a liquid crystal display device
US5861832A (en) * 1997-03-27 1999-01-19 Lucent Technologies Inc. Analog-to-digital converter having amplifier and comparator stages
JP3773326B2 (en) 1997-04-07 2006-05-10 アユミ工業株式会社 The liquid crystal injection method and a dispenser for use therewith
JPH10333159A (en) 1997-06-03 1998-12-18 Matsushita Electric Ind Co Ltd Liquid crystal display device
JPH10333157A (en) 1997-06-03 1998-12-18 Matsushita Electric Ind Co Ltd Manufacture of liquid crystal display device
JPH1114953A (en) 1997-06-20 1999-01-22 Matsushita Electric Ind Co Ltd Manufacture of multi-numbered liquid crystal display panel, and multi-numbered liquid crystal panel
JP3874895B2 (en) 1997-07-23 2007-01-31 シャープ株式会社 A method of manufacturing a liquid crystal display panel
JPH1164811A (en) 1997-08-21 1999-03-05 Matsushita Electric Ind Co Ltd Method and device for producing liquid crystal display element
JPH11133438A (en) 1997-10-24 1999-05-21 Matsushita Electric Ind Co Ltd Liquid crystal display element and its production
JPH11142864A (en) 1997-11-07 1999-05-28 Matsushita Electric Ind Co Ltd Manufacture of liquid crystal display device
JPH11248930A (en) 1998-03-06 1999-09-17 Matsushita Electric Ind Co Ltd Color filter substrate and manufacture thereof, and liquid crystal display element using same color filter substrate
JPH11326922A (en) 1998-05-14 1999-11-26 Matsushita Electric Ind Co Ltd Manufacture of liquid crystal display panel
JP2000137235A (en) 1998-11-02 2000-05-16 Matsushita Electric Ind Co Ltd Sticking method of liquid crystal substrate
KR20000035302A (en) 1998-11-09 2000-06-26 마츠시타 덴끼 산교 가부시키가이샤 Manufacturing method and apparatus of liquid crystal display
JP2000193988A (en) 1998-12-25 2000-07-14 Fujitsu Ltd Production of liquid crystal display panel and apparatus for production
JP2000223548A (en) * 1999-01-28 2000-08-11 Toshiba Corp Manufacture apparatus for display
JP2000241824A (en) 1999-02-18 2000-09-08 Matsushita Electric Ind Co Ltd Manufacture of liquid crystal display device
JP2000310784A (en) 1999-02-22 2000-11-07 Matsushita Electric Ind Co Ltd Liquid crystal panel, color filter and their production
JP3410983B2 (en) 1999-03-30 2003-05-26 株式会社 日立インダストリイズ The assembly method and apparatus of the substrate
JP2000292799A (en) 1999-04-09 2000-10-20 Matsushita Electric Ind Co Ltd Liquid crystal display device and its production
JP2000310759A (en) 1999-04-28 2000-11-07 Matsushita Electric Ind Co Ltd Device for manufacturing liquid crystal display element and its method
JP2001222017A (en) 1999-05-24 2001-08-17 Fujitsu Ltd Liquid crystal display device and its manufacturing method
JP2000338501A (en) 1999-05-26 2000-12-08 Matsushita Electric Ind Co Ltd Production of liquid crystal display panel
JP3535044B2 (en) 1999-06-18 2004-06-07 株式会社 日立インダストリイズ Assembling apparatus and method of the substrate, and a manufacturing method of a liquid crystal panel
JP3580767B2 (en) 1999-10-05 2004-10-27 松下電器産業株式会社 The liquid crystal display panel and manufacturing method and a driving method thereof
JP2001117105A (en) 1999-10-18 2001-04-27 Toshiba Corp Method of manufacturing for liquid crystal display device
JP2001117109A (en) 1999-10-21 2001-04-27 Matsushita Electric Ind Co Ltd Method of manufacturing for liquid crystal display device
JP3583326B2 (en) 1999-11-01 2004-11-04 協立化学産業株式会社 Lcd panel of the drip method for the sealant
JP3574865B2 (en) 1999-11-08 2004-10-06 株式会社 日立インダストリイズ Method of assembling the substrate and the device
JP2001142074A (en) 1999-11-10 2001-05-25 Hitachi Ltd Liquid crystal display device
JP2001147437A (en) 1999-11-19 2001-05-29 Nec Corp Liquid crystal display panel and method of producing the same
JP2001154211A (en) 1999-11-30 2001-06-08 Hitachi Ltd Liquid crystal panel and its manufacturing method
JP2001166310A (en) 1999-12-08 2001-06-22 Matsushita Electric Ind Co Ltd Method of producing liquid crystal display panel
JP3641709B2 (en) 1999-12-09 2005-04-27 株式会社 日立インダストリイズ Method of assembling the substrate and the device
JP4132528B2 (en) 2000-01-14 2008-08-13 シャープ株式会社 A method of manufacturing a liquid crystal display device
JP2001209052A (en) 2000-01-24 2001-08-03 Matsushita Electric Ind Co Ltd Liquid crystal display device and its manufacturing method
JP2001235758A (en) 2000-02-23 2001-08-31 Fujitsu Ltd Liquid crystal display panel and its manufacturing method
JP2001242471A (en) * 2000-02-29 2001-09-07 Ran Technical Service Kk Method and device for sticking substrate of liquid crystal panel
JP2001255542A (en) 2000-03-14 2001-09-21 Sharp Corp Method and device for laminating substrate and method and device for manufacturing liquid crystal display device
JP2001264782A (en) 2000-03-16 2001-09-26 Ayumi Kogyo Kk Method of filling gap of flat panel substrate with viscous liquid material
JP2001272640A (en) 2000-03-27 2001-10-05 Fujitsu Ltd Liquid crystal dropping device and liquid crystal dropping method
JP3678974B2 (en) 2000-03-29 2005-08-03 富士通ディスプレイテクノロジーズ株式会社 A method of manufacturing a liquid crystal display device
JP2001281675A (en) 2000-03-29 2001-10-10 Matsushita Electric Ind Co Ltd Production method for liquid crystal display device
JP3707990B2 (en) 2000-03-30 2005-10-19 株式会社 日立インダストリイズ Board assembly equipment
JP3492284B2 (en) 2000-04-19 2004-02-03 株式会社 日立インダストリイズ Substrate bonding apparatus
JP2001330840A (en) 2000-05-18 2001-11-30 Toshiba Corp Method for manufacturing liquid crystal display element
JP2001330837A (en) 2000-05-19 2001-11-30 Matsushita Electric Ind Co Ltd Hermetic structural, its manufacturing method, liquid crystal display device using the same and its manufacturing method
JP2001356354A (en) 2000-06-13 2001-12-26 Matsushita Electric Ind Co Ltd Method for manufacturing liquid crystal display device
JP2002107740A (en) 2000-09-28 2002-04-10 Sharp Corp Method and device for manufacturing liquid crystal display panel
JP2002122872A (en) 2000-10-12 2002-04-26 Hitachi Ltd Liquid crystal display device and method of manufacturing the same
JP4841031B2 (en) 2000-10-13 2011-12-21 シャープ株式会社 A method of manufacturing a liquid crystal device
JP4330785B2 (en) 2000-10-31 2009-09-16 シャープ株式会社 Manufacturing apparatus manufacturing method, and a liquid crystal display device of a liquid crystal display device
JP3281362B2 (en) 2000-12-11 2002-05-13 富士通株式会社 A method of manufacturing a liquid crystal display panel
JP2002202514A (en) 2000-12-28 2002-07-19 Matsushita Electric Ind Co Ltd Liquid crystal panel, and method and manufacturing apparatus for manufacturing the same
JP2002202512A (en) 2000-12-28 2002-07-19 Toshiba Corp Liquid crystal display device and method of manufacturing for the same
JP2002214626A (en) 2001-01-17 2002-07-31 Toshiba Corp Manufacturing method and sealing material for liquid crystal display
JP3411023B2 (en) 2001-04-24 2003-05-26 株式会社 日立インダストリイズ Assembly device for the substrate
JP5127179B2 (en) 2006-07-31 2013-01-23 古河電池株式会社 Method for producing a lithium secondary battery positive electrode active material
JP5059546B2 (en) 2007-10-23 2012-10-24 日本圧着端子製造株式会社 Plug and jack
CN102144071A (en) 2008-09-04 2011-08-03 奥迪股份公司 Motor vehicle having a mechanism for moving a panel or door
DE102009047246A1 (en) 2008-12-01 2010-06-10 Fisher & Paykel Healthcare Ltd., East Tamaki nasal cannula
JP5165656B2 (en) 2009-09-01 2013-03-21 タイヨーエレック株式会社 Game machine
JP5281557B2 (en) 2009-12-11 2013-09-04 本田技研工業株式会社 Shock-absorbing structure for a vehicle
CN103097102B (en) 2010-08-12 2015-11-25 赫斯基注塑系统有限公司 Molding apparatus

Patent Citations (101)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3978580A (en) 1973-06-28 1976-09-07 Hughes Aircraft Company Method of fabricating a liquid crystal display
JPS5165656A (en) 1974-12-04 1976-06-07 Shinshu Seiki Kk
US4094058A (en) 1976-07-23 1978-06-13 Omron Tateisi Electronics Co. Method of manufacture of liquid crystal displays
JPS5738414A (en) 1980-08-20 1982-03-03 Showa Denko Kk Spacer for display panel
JPS5788428A (en) 1980-11-20 1982-06-02 Ricoh Elemex Corp Manufacture of liquid crystal display body device
JPS5827126A (en) 1981-08-11 1983-02-17 Nec Corp Production of liquid crystal display panel
JPS5957221A (en) 1982-09-28 1984-04-02 Asahi Glass Co Ltd Production of display element
JPS59195222A (en) 1983-04-19 1984-11-06 Matsushita Electric Ind Co Ltd Manufacture of liquid-crystal panel
JPS60111221A (en) 1983-11-19 1985-06-17 Nippon Denso Co Ltd Method and device for charging liquid crystal
JPS60164723A (en) 1984-02-07 1985-08-27 Seiko Instr & Electronics Ltd Liquid crystal display device
JPS60217343A (en) 1984-04-13 1985-10-30 Matsushita Electric Ind Co Ltd Liquid crystal display device and its preparation
JPS617822A (en) 1984-06-22 1986-01-14 Canon Inc Production of liquid crystal element
JPS6155625A (en) 1984-08-24 1986-03-20 Nippon Denso Co Ltd Manufacture of liquid crystal element
US4775225A (en) 1985-05-16 1988-10-04 Canon Kabushiki Kaisha Liquid crystal device having pillar spacers with small base periphery width in direction perpendicular to orientation treatment
JPS6254225A (en) 1985-07-15 1987-03-09 Semiconductor Energy Lab Co Ltd Manufacturing method for liquid crystal display
JPS6254229A (en) 1985-07-15 1987-03-09 Semiconductor Energy Lab Co Ltd Manufacturing method for liquid crystal display
JPS6254228A (en) 1985-07-15 1987-03-09 Semiconductor Energy Lab Co Ltd Manufacturing method for liquid crystal display
US4691995A (en) 1985-07-15 1987-09-08 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal filling device
JPS6289025A (en) 1985-10-15 1987-04-23 Matsushita Electric Ind Co Ltd Liquid crystal display panel and its production
JPS6290622A (en) 1985-10-17 1987-04-25 Seiko Epson Corp Liquid crystal display device
US4653864A (en) 1986-02-26 1987-03-31 Ovonic Imaging Systems, Inc. Liquid crystal matrix display having improved spacers and method of making same
JPS62205319A (en) 1986-03-06 1987-09-09 Canon Inc Ferroelectric liquid crystal element
US5952676A (en) 1986-08-20 1999-09-14 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal device and method for manufacturing same with spacers formed by photolithography
US5379139A (en) 1986-08-20 1995-01-03 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal device and method for manufacturing same with spacers formed by photolithography
JPS63109413A (en) 1986-10-27 1988-05-14 Fujitsu Ltd Production of liquid crystal display
JPS63110425A (en) 1986-10-29 1988-05-14 Toppan Printing Co Ltd Cell for sealing liquid crystal
JPS63128315A (en) 1986-11-19 1988-05-31 Victor Co Of Japan Ltd Liquid crystal display element
JPS63311233A (en) 1987-06-12 1988-12-20 Toyota Motor Corp Liquid crystal cell
US5247377A (en) 1988-07-23 1993-09-21 Rohm Gmbh Chemische Fabrik Process for producing anisotropic liquid crystal layers on a substrate
JPH039549A (en) 1989-05-16 1991-01-17 Motorola Inc Compound integrated storage device
JPH0536425A (en) 1991-02-12 1993-02-12 Tokyo Electric Power Co Inc:The Alloy separator for solid electrolytic fuel cell and manufacture of the same
US5642214A (en) 1991-07-19 1997-06-24 Sharp Kabushiki Kaisha Optical modulating element and electronic apparatus using it
JPH0536426A (en) 1991-07-31 1993-02-12 Mitsubishi Heavy Ind Ltd Solid electrolytic fuel cell
JPH0559546A (en) 1991-09-03 1993-03-09 Nec Ibaraki Ltd Sputter deposition device
JPH05107533A (en) 1991-10-16 1993-04-30 Shinetsu Eng Kk Method and device for sticking glass substrate for liquid crystal display plate
JPH05127179A (en) 1991-11-01 1993-05-25 Ricoh Co Ltd Production of liquid crystal display element
JPH05154923A (en) 1991-12-06 1993-06-22 Hitachi Ltd Substrate assembling device
US5263888A (en) 1992-02-20 1993-11-23 Matsushita Electric Industrial Co., Ltd. Method of manufacture of liquid crystal display panel
JPH05265011A (en) 1992-03-19 1993-10-15 Seiko Instr Inc Production of liquid crystal display element
JPH05281562A (en) 1992-04-01 1993-10-29 Matsushita Electric Ind Co Ltd Manufacture of liquid crystal panel
JPH05281557A (en) 1992-04-01 1993-10-29 Matsushita Electric Ind Co Ltd Manufacture of liquid crystal panel
US5511591A (en) 1992-04-13 1996-04-30 Fujitsu Limited Method and dispenser for filling liquid crystal into LCD cell
JPH0618829A (en) 1992-06-30 1994-01-28 Shinetsu Eng Kk Laminating device for glass substrate for liquid crystal display board
JPH0651256A (en) 1992-07-30 1994-02-25 Matsushita Electric Ind Co Ltd Device for discharging liquid crystal
JPH0664229A (en) 1992-08-24 1994-03-08 Toshiba Corp Optical printing head
JPH06148657A (en) 1992-11-06 1994-05-27 Matsushita Electric Ind Co Ltd Method and device for manufacturing cell for liquid crystal display
JPH06160871A (en) 1992-11-26 1994-06-07 Matsushita Electric Ind Co Ltd Liquid crystal display panel and its production
JPH06194637A (en) 1992-12-24 1994-07-15 Shinetsu Eng Kk Method for sticking glass substrate for liquid crystal display plate
JPH06235925A (en) 1993-02-10 1994-08-23 Matsushita Electric Ind Co Ltd Manufacture of liquid crystal display element
JPH06265915A (en) 1993-03-12 1994-09-22 Matsushita Electric Ind Co Ltd Discharge device for filling liquid crystal
US5499128A (en) 1993-03-15 1996-03-12 Kabushiki Kaisha Toshiba Liquid crystal display device with acrylic polymer spacers and method of manufacturing the same
JPH06313870A (en) 1993-04-28 1994-11-08 Hitachi Ltd Substrate assembly device
US5680189A (en) 1993-05-18 1997-10-21 Semiconductor Energy Laboratory Co., Ltd. LCD columnar spacers made of a hydrophilic resin and LCD orientation film having a certain surface tension or alignment capability
US5539545A (en) 1993-05-18 1996-07-23 Semiconductor Energy Laboratory Co., Ltd. Method of making LCD in which resin columns are cured and the liquid crystal is reoriented
US5548429A (en) 1993-06-14 1996-08-20 Canon Kabushiki Kaisha Process for producing liquid crystal device whereby curing the sealant takes place after pre-baking the substrates
JPH0784268A (en) 1993-09-13 1995-03-31 Hitachi Ltd Method for plotting sealing material
US5507323A (en) 1993-10-12 1996-04-16 Fujitsu Limited Method and dispenser for filling liquid crystal into LCD cell
US5406989A (en) 1993-10-12 1995-04-18 Ayumi Industry Co., Ltd. Method and dispenser for filling liquid crystal into LCD cell
JPH07128674A (en) 1993-11-05 1995-05-19 Matsushita Electric Ind Co Ltd Production of liquid crystal display element
JPH07181507A (en) 1993-12-21 1995-07-21 Canon Inc Liquid crystal display device and information transmission device having the liquid crystal display device
JPH07275770A (en) 1994-04-06 1995-10-24 Hitachi Techno Eng Co Ltd Paste applicator
JPH07275771A (en) 1994-04-11 1995-10-24 Hitachi Techno Eng Co Ltd Coating applicator for paste
JPH0876133A (en) 1994-09-02 1996-03-22 Shinetsu Eng Kk Surface plate structure in laminating device for glass substrate for liquid crystal display plate
US5852484A (en) 1994-09-26 1998-12-22 Matsushita Electric Industrial Co., Ltd. Liquid crystal display panel and method and device for manufacturing the same
US5854664A (en) 1994-09-26 1998-12-29 Matsushita Electric Industrial Co., Ltd. Liquid crystal display panel and method and device for manufacturing the same
JPH0895066A (en) 1994-09-27 1996-04-12 Matsushita Electric Ind Co Ltd Manufacture of liquid crystal element and device thereof
JPH08101395A (en) 1994-09-30 1996-04-16 Matsushita Electric Ind Co Ltd Production of liquid crystal display element
JPH08106101A (en) 1994-10-06 1996-04-23 Fujitsu Ltd Production of liquid crystal display panel
JPH08110504A (en) 1994-10-13 1996-04-30 Shinetsu Eng Kk Heater of glass substrate for liquid crystal display
JPH08136937A (en) 1994-11-09 1996-05-31 Shinetsu Eng Kk Method for pressurizing and heating glass substrate for liquid crystal display plate and device therefor
JPH08171094A (en) 1994-12-19 1996-07-02 Nippon Soken Inc Liquid crystal injecting method and liquid crystal injecting device to liquid crystal display device
JPH08173874A (en) 1994-12-26 1996-07-09 Hitachi Techno Eng Co Ltd Paste coater
JPH08190099A (en) 1995-01-11 1996-07-23 Fujitsu Ltd Production of liquid crystal display device and apparatus for producing liquid crystal display device
US6304306B1 (en) 1995-02-17 2001-10-16 Sharp Kabushiki Kaisha Liquid crystal display device and method for producing the same
US6001203A (en) 1995-03-01 1999-12-14 Matsushita Electric Industrial Co., Ltd. Production process of liquid crystal display panel, seal material for liquid crystal cell and liquid crystal display
JPH08240807A (en) 1995-03-06 1996-09-17 Fujitsu Ltd Method for sealing liquid crystal display panel
JPH091026A (en) 1995-06-23 1997-01-07 Hitachi Techno Eng Co Ltd Paste coating machine
JPH0961829A (en) 1995-08-21 1997-03-07 Matsushita Electric Ind Co Ltd Production of liquid crystal display element
US5757451A (en) 1995-09-08 1998-05-26 Kabushiki Kaisha Toshiba Liquid crystal display device spacers formed from stacked color layers
US5956112A (en) 1995-10-02 1999-09-21 Sharp Kabushiki Kaisha Liquid crystal display device and method for manufacturing the same
US6236445B1 (en) 1996-02-22 2001-05-22 Hughes Electronics Corporation Method for making topographic projections
US5742370A (en) 1996-09-12 1998-04-21 Korea Institute Of Science And Technology Fabrication method for liquid crystal alignment layer by magnetic field treatment
US6016178A (en) 1996-09-13 2000-01-18 Sony Corporation Reflective guest-host liquid-crystal display device
US6163357A (en) 1996-09-26 2000-12-19 Kabushiki Kaisha Toshiba Liquid crystal display device having the driving circuit disposed in the seal area, with different spacer density in driving circuit area than display area
US6011609A (en) 1996-10-05 2000-01-04 Samsung Electronics Co., Ltd. Method of manufacturing LCD by dropping liquid crystals on a substrate and then pressing the substrates
US6016181A (en) 1996-11-07 2000-01-18 Sharp Kabushiki Kaisha Liquid crystal device having column spacers with portion on each of the spacers for reflecting or absorbing visible light and method for fabricating the same
US5861932A (en) 1997-03-31 1999-01-19 Denso Corporation Liquid crystal cell and its manufacturing method
US6205368B1 (en) 1997-03-31 2001-03-20 Daihen Corporation Work transport control method
US6226067B1 (en) 1997-10-03 2001-05-01 Minolta Co., Ltd. Liquid crystal device having spacers and manufacturing method thereof
US5875922A (en) 1997-10-10 1999-03-02 Nordson Corporation Apparatus for dispensing an adhesive
CN1234524A (en) 1998-01-13 1999-11-10 松下电器产业株式会社 Method for producing liquid crystal display device
US6055035A (en) 1998-05-11 2000-04-25 International Business Machines Corporation Method and apparatus for filling liquid crystal display (LCD) panels
US6337730B1 (en) 1998-06-02 2002-01-08 Denso Corporation Non-uniformly-rigid barrier wall spacers used to correct problems caused by thermal contraction of smectic liquid crystal material
EP1003066A1 (en) 1998-11-16 2000-05-24 Matsushita Electric Industrial Co., Ltd. Method of manufacturing liquid crystal display devices
US6304311B1 (en) 1998-11-16 2001-10-16 Matsushita Electric Industrial Co., Ltd. Method of manufacturing liquid crystal display device
US6219126B1 (en) 1998-11-20 2001-04-17 International Business Machines Corporation Panel assembly for liquid crystal displays having a barrier fillet and an adhesive fillet in the periphery
US6414733B1 (en) 1999-02-08 2002-07-02 Dai Nippon Printing Co., Ltd. Color liquid crystal display with a shielding member being arranged between sealing member and display zone
US20010021000A1 (en) 2000-02-02 2001-09-13 Norihiko Egami Apparatus and method for manufacturing liquid crystal display
US20020008838A1 (en) 2000-07-19 2002-01-24 Nec Corporation Apparatus and method of manufacturing liquid crystal display
US7256860B2 (en) * 2002-02-06 2007-08-14 Lg.Philips Lcd Co., Ltd. Apparatus and method for manufacturing liquid crystal display device using unitary vacuum processing chamber
US6829032B2 (en) * 2002-02-06 2004-12-07 Lg. Philips Lcd Co., Ltd. Apparatus and method for manufacturing liquid crystal device using unitary vacuum processing chamber

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Machine translation of JP 2001-264782 to Oshima et al. *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070006098A1 (en) * 2005-06-30 2007-01-04 Microsoft Corporation Integration of location logs, GPS signals, and spatial resources for identifying user activities, goals, and context

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